Applications of PiezoelectricEnergy Harvesting Aditya S Bhat, Zoltan Danilo, Ralph Langkemper, Sanketh Ramachandra Energy Harvesting Department of Microsystems Engineering - IMTEK University of Freiburg, Germany - 2 - List of Contents Piezoelectric Soft MEMS for tactile sensing and Energy harvesting Motivation Experimental setup Sputter Deposition Tactile Sensor Fabrication Cantilever Fabrication Results Tactile Sensor Flexible Cantilever Conclusion - 3 - List of Contents Energy harvesting from hearts, lungs and diaphragm Motivation Challenges for implantable energy harvesters Energy harvester (Heart/Lung) Structure Laboratory test In vivo test Conclusion Piezoelectric Soft MEMS for tactile sensing and Energy harvesting Inorganic materials are typically rigid and brittle, often damaged under large deformations. Soft piezoelectrics have been proposed for high sensitivity and conformable MEMS applications by virtue of their mechanical resistance. c-axis aligned AlN thin films deposited on soft substrates offer excellent properties as good piezoelectric coefficient, good dielectric constant and low cost reactive sputtering synthesis Operating Temperature range