Amtech Systems, Inc. · Certain statements in the following presentation relate to future results...

Solar & Semiconductor SolutionsAMTECH SYSTEMS, INC.

11

Amtech Systems, Inc.

Nasdaq: ASYS

J.S. WhangChairman & Chief Executive Officer

Brad AndersonChief Financial Officer

August 2010

Solar & Semiconductor Solutions

25th LISTING ANNIVERSARY

ASYS / NASDAQ



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Safe Harbor StatementCertain statements in the following presentation relate to future results that are forwardlooking statements as defined in the Private Securities Litigation Reform Act of 1995.Actual results may differ materially from those projected as a result of certain risks anduncertainties, including but not limited to, changes in the technologies used by Amtech’scustomers, change and volatility in the demand for diffusion, PSG and PECVD equipment,the effect of changing worldwide political and economic conditions on government-fundedsolar initiatives, capital expenditures, production levels, including those in Europe andAsia, the effect of overall market conditions, market acceptance, risks associated withdependence on suppliers, the impact of competitive products and pricing, technologicaland product development risks (including the risks inherent in launching new products)and other risk factors noted in our forms 10-K, 10-Q, and other filings with the SEC. Thispresentation includes historical and forward-looking pro forma information. The Companyassumes no responsibility to update the information contained in this presentation.

This presentation and the information contained herein is the property of Amtech Systems,Inc.


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Amtech is: A Market Leading Supplier of Solar Diffusion Processing Systems used

for Solar Cell Manufacturing

Achieving higher efficiencies through R&D partnership programs!

Horizontal Diffusion Furnace


4 Solar & Semiconductor SolutionsAMTECH SYSTEMS, INC.

Tempress

(Amtech)

39%

Centrotherm33%

Sierratherm 12%

Semco 6%

SVCS 5%

Others 5%

Diffusion, our Core Business

Diffusion Furnace Main players & Market shares Diffusion Furnace Main players & Market shares

Main playersDiffusion furnace market shares in 2008

© 2008• 150

Market study by Yole Development

The main players are Tempress,Centrotherm, Sierratherm, SEMCO,SVCS.

— “Others” category integrates playerssuch as Schmid, BTU, Koyo,Sevenstar, Tecnofimes, MRL.

4


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A long-term player: over 27 years listed on NASDAQ

Named to Fortune’s 2009 Listof America’s fastest-growingsmall public companies

Named to Deloitte’sFastest 500

2008 - 25th ListingAnniversary


66

Revenue/Order Trends (in millions)

($M)($M)

REVENUE (FY) ORDERS (FY)

* Fiscal 2010 YTD equals 9 months


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• Semi• Solar

Order Trend (solar/semi)Transitioned to Solar dominant from Semi

$55M

$40M

$107M

$35M

$138M

* Fiscal 2010 YTD equals 9 months


88

Earnings Summary$

In M

illio

ns

GAAP Net Income (Loss) EBITDA (before impairment & restructuring charges)


99

Significant SOLAR business opportunity

Large emerging solar market

Grid parity expected to be reached within 5 years

The market leader in solar DIFFUSION processing systems

Gaining market share with newly developed DIFFUSIONTECHNOLOGY for N-type cells

RECORD June Quarter:

Record revenues = $43 million (168% sequentially)

Record EPS = $0.42

37% Gross Margin; 15% operating margin

$81 million in backlog entering the September quarter

$42.7 million in cash at 6-30-10 to support growth initiatives

Investment Highlights Investment Highlights


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Solar Industry Segments

MEMC, Hemlock, Wacker, REC, Tokuyama, SUMCO

Silicon Ingots and Wafers

COMPANY DOING BUSINESS IN THAT SEGMENT

MEMC, Wacker, REC, LDK, SUMCO, Yingli,M.SETEK, ReneSola

Kyocera, DelSolar, Q-Cell, E-ton, CSI, Motech,Yingli, Sharp, Trina, BP Solar, SolarWorld,GE Energy, Evergreen Solar, SunPower

Amtech Systems (Tempress®), CentroTherm, Roth& Rau, BTU International, 48th Institute

Sharp, Q-cell, Kyocera, Suntech, Yingli, Sunpower,SolarWorld, Evergreen, ErSol, CSI

Polycrystalline

Solar Cells

Solar Modules

Solar Cell Prod. Equip.


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Amtech History (Diffusion Experts)1981 Founding of Amtech Systems, Inc., semi quartz consumable

business.

1983 Acquired Intel Corp invention: Diffusion processing tool (ATMOSCAN).

1994 Acquired Tempress® Systems: Diffusion furnace business.

1997 Acquired P.R. Hoffman®, silicon polishing consumable business.

2004 Acquired Bruce Technologies® from Hitachi Kokusai; Diffusionfurnace business.

2005 Became No. 1 semi horizontal Diffusion company in the world.

2006 Entered Solar Diffusion market using core semiconductordiffusion competency.

Acquired R2D™ Ingenierie SAS; Solar Diffusion Automation.2007

Introduced Solar PECVD.2008

Introduced Solar Dry Etch (PSG removal) product.2009


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Solar Market Opportunity &Growth Strategy


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iSuppli Corp: Global PV System Installation ForecastRevised August 2010 (Megawatts)

Data Source: PV-tech.org, August, 2010

Meg

awat

ts

7,400

14,000

20,30021,000

38,200

27,800

0

5,000

10,000

15,000

20,000

25,000

30,000

35,000

40,000

2009 2010 2011 2012 2013 2014

Installations


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China’s Domestic PV Demand Potential

Data Source: GTM Research September 2009GTM Research September 2009

(In MWs)


15

0

50

100

150

200

250

300

2006 2008 2009 2010 2011 2012 2013 2014

Po

lyS

i M

etr

ic T

on

s (

tho

us

an

ds

)

Conservative Including All New Entrants

With 4 billion US$ in announced expansions, projects reaching manufacturingcapacities of 63,000 metric tons by 2014 at its plants in Michigan andTennessee - up from its current capacity of just under 30,000 MT.

Hemlock Semiconductor VP Gary Homan:

Data Source: PV Tech – www.pv-tech.org September 2009

92 MT

185 MT

38 MT

54

93


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— Renewable Energy push by all G-8 and G-20

— Energy Security & Independence Issue

— Economic Stimulus Plan focuses on Solar industry

— Creating True New Jobs

— 30% Tax Credit, No Cap; $3 Billion in tax grants

— Solar Energy Cost achieving Grid Parity within next 5 years

— Record low interest rate around the world

— Solar Value Chains largely remain focused on future growth

Solar Fundamentals Remain Intact


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6. Printing RearSide Contacts

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Solar Cell Manufacturing Process Flow Chart

4. Etching Oxide(PSG)

5. Applying Anti-Reflective Coating

(PECVD)

7. Drying 9. Drying 10. Printing FrontSide Contacts

11. Drying andSintering

12. Testing andSorting

8. PrintingAluminum on Back

Surface Field

1. Inspecting andSplitting Wafers

2. Etching SawDamage

(Texturing)3. Diffusion


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SOLAR BUSINESS STRATEGY

I. Higher market share in core “Diffusion” business.

II. Expand high-efficiency cell “N-Type” businessbeyond Yingli.

III. Expand the size of market we serve by becomingthe front-end “Technology Turnkey” Provider.

(Texturing-Diffusion-PSG-PECVD)


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Our Products


2020

Amtech Products, Brands & ApplicationsAmtech Products, Brands & Applications

Diffusion Furnace, PSG & PECVD

Furnace Automation &Wafer Handling Systems Wafer Carriers

Silicon WafersSolar Cells & Semiconductor Chips

S-300S-300®


2121

Customer Base: Asia-Focused

Largest Customer (% of Rev)

FY09: 25%

FY08: 20%

FY07: 13%

Asia

EuropeNorth America


2222

Financial Overview


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Summary of Annual Net RevenueR

even

ue

Fiscal Year (Oct. 1 Sep. 30)

($ in Millions)

$46M$40M

$112 -$114M *

$80M

$53M

* Guidance updated 8-5-10


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Earnings Summary$

In M

illio

ns

GAAP Net Income (Loss) EBITDA (before impairment & restructuring charges)


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Balance Sheet(In Millions)

9.0

$7.28

$72.5

$0.7

$116.0

$42.7Cash and cash equivalents

Total assets

Total debt

Shareholders’ equity

Shares outstanding

Tangible BV per share

June 30, 2010


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Significant SOLAR business opportunity

Large emerging solar market

Grid parity expected to be reached within 5 years

The market leader in solar DIFFUSION processing systems

Gaining market share with newly developed DIFFUSIONTECHNOLOGY for N-type cells

Record June Quarter:

Record revenues = $43 million (168% sequentially)

Record EPS = $0.42

37% Gross Margin; 15% operating margin

$81 million in backlog entering the September quarter

$42.7 million in cash at 6-30-10 to support growth initiatives

Investment Highlights Investment Highlights


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Amtech Systems, Inc.

Nasdaq: ASYS

Thank You!

August 2010

Solar & Semiconductor Solutions


ASYS / NASDAQ


Amtech Systems, Inc. · Certain statements in the following presentation relate to future results...

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