AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth

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Authors: J. García Molleja, B.J. Gómez, J. Ferrón, E. Gautron, J. Bürgi, B. Abdallah, M.-A. Djouadi, J. Feugeas, P.-Y. Jouan The European Physical Journal - Applied Physics (2013) 64: 20302 (November 15th, 2013) (Only the first page is uploaded because EDP Sciences' copyrigth policy)

Transcript of AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth

Page 1: AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth

Chapter 2: Thin Film Deposition · the technique, sputtering can again be broadly divided into DC magnetron and RF magnetron types. In magnetron sputtering, magnets are used behind

Chapter 2: Thin Film Deposition · the technique, sputtering can again be broadly divided into DC magnetron and RF magnetron types. In magnetron sputtering, magnets are used behind

A comparative study of direct current magnetron sputtering ...liu.diva-portal.org/smash/get/diva2:929591/FULLTEXT01.pdfReactive direct current magnetron sputtering (DCMS) and high

A comparative study of direct current magnetron sputtering ...liu.diva-portal.org/smash/get/diva2:929591/FULLTEXT01.pdfReactive direct current magnetron sputtering (DCMS) and high

[PPT]Home-Made DC Magnetron Sputtering System - …faculty.kfupm.edu.sa/.../research_files/magnetron.ppt · Web viewHome-Made DC Magnetron Sputtering System Chamber and Gas supply

[PPT]Home-Made DC Magnetron Sputtering System - …faculty.kfupm.edu.sa/.../research_files/magnetron.ppt · Web viewHome-Made DC Magnetron Sputtering System Chamber and Gas supply

Cylindrical Magnetron Sputtering (CMS) of Coatings for ... · Cylindrical Magnetron Sputtering (CMS) of Coatings for Wear Life Extension in Large Caliber Cannons Gregory N. Vigilante,

Cylindrical Magnetron Sputtering (CMS) of Coatings for ... · Cylindrical Magnetron Sputtering (CMS) of Coatings for Wear Life Extension in Large Caliber Cannons Gregory N. Vigilante,

Measurement setup for High Power Impulse Magnetron Sputtering

Measurement setup for High Power Impulse Magnetron Sputtering

High power impulse magnetron sputtering: Current … power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering André

High power impulse magnetron sputtering: Current … power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering André

MAGNETRON SPUTTERING OF MULTICOMPONENT …

MAGNETRON SPUTTERING OF MULTICOMPONENT …

Peculiarities of the Formation of Multicomponent AlN–TiB2 ...pulsed magnetron sputtering of the AlN–TiB 2 ... The heat treatment of samples at 900 and 1300°C leads to the depletion

Peculiarities of the Formation of Multicomponent AlN–TiB2 ...pulsed magnetron sputtering of the AlN–TiB 2 ... The heat treatment of samples at 900 and 1300°C leads to the depletion

Reactive High Power Impulse Magnetron Sputtering (HiPIMS)langmuir.raunvis.hi.is/~tumi/ps/hipims_gec65th.pdf · Reactive High Power Impulse Magnetron Sputtering (HiPIMS) Reactive High

Reactive High Power Impulse Magnetron Sputtering (HiPIMS)langmuir.raunvis.hi.is/~tumi/ps/hipims_gec65th.pdf · Reactive High Power Impulse Magnetron Sputtering (HiPIMS) Reactive High

COBALT MICROSTRUCTURE BY DC MAGNETRON SPUTTERING

COBALT MICROSTRUCTURE BY DC MAGNETRON SPUTTERING

design and optimization of magnetron sputtering

design and optimization of magnetron sputtering

Structural characteristics of AlN films deposited by pulsed ... · Structural characteristics of AlN films deposited by pulsed laser deposition and reactive magnetron sputtering:

Structural characteristics of AlN films deposited by pulsed ... · Structural characteristics of AlN films deposited by pulsed laser deposition and reactive magnetron sputtering:

Magnetron sputtering: a review of recent developments and ...staff.ustc.edu.cn/~fuzp/course/paper/Magnetron sputtering-a review... · the latest generation of carbon-based and molybdenum

Magnetron sputtering: a review of recent developments and ...staff.ustc.edu.cn/~fuzp/course/paper/Magnetron sputtering-a review... · the latest generation of carbon-based and molybdenum

Magnetron Sputtering Technology - ispc- · PDF filere-radiated heat U-factor. ... 10 / 89. Basics for magnetron sputtering. Ion-surface interaction ... Magnetron Sputtering Technology

Magnetron Sputtering Technology - ispc- · PDF filere-radiated heat U-factor. ... 10 / 89. Basics for magnetron sputtering. Ion-surface interaction ... Magnetron Sputtering Technology

Fundamentals of High Power Impulse Magnetron Sputtering - DiVA

Fundamentals of High Power Impulse Magnetron Sputtering - DiVA

ADVANCED DUAL-MAGNETRON SPUTTERING …...2018 Advanced Energy Industries, Inc. ASCENT DMS ADVANCED DUAL-MAGNETRON SPUTTERING ACCESSORIES Models 30, 40, and 60 kW units Configurable

ADVANCED DUAL-MAGNETRON SPUTTERING …...2018 Advanced Energy Industries, Inc. ASCENT DMS ADVANCED DUAL-MAGNETRON SPUTTERING ACCESSORIES Models 30, 40, and 60 kW units Configurable

High Power Impulse Magnetron Sputtering ... - ppt.fel.cvut.cz

High Power Impulse Magnetron Sputtering ... - ppt.fel.cvut.cz

High-power Impulse Magnetron Sputtering

High-power Impulse Magnetron Sputtering

Fabrics by Magnetron Sputtering—Fabrication of New Multi ...

Fabrics by Magnetron Sputtering—Fabrication of New Multi ...

High power impulse magnetron sputtering - Lawrence Berkeley

High power impulse magnetron sputtering - Lawrence Berkeley