All-in-One Microscope for Advanced Imaging, Recording, and ... · The VHX-950F provides a...
Transcript of All-in-One Microscope for Advanced Imaging, Recording, and ... · The VHX-950F provides a...
All-in-One Microscope for Advanced Imaging,
Recording, and Measurement
Digital MicroscopeVHX-950F Series
With an intuitive interface, anyone can easily view samples, capture images, and complete measurements.
The ease-of-use of the system helps to eliminate variation in imaging and analysis from user-to-user.
The VHX-950F greatly reduces the time needed to image samples, thus increasing accuracy and efficiency.
Intuitive operation,
sharp and full-focus imaging
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Observation
P. 4
Recording
P. 6
Measurement
P. 8
All-in-One Design
P. 10
Quick Depth Composition and 3D display
P. 12
Industry Application Examples
P. 14
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BASIC CONCEPT
ObservationThe imaging ability of a digital microscope is unrivaled by that of a conventional optical microscope.
1 Large depth-of-field
2 Multi-angle observation
Fully-focused images
The VHX-950F provides a depth-of-field up to 20 times larger than optical microscopes. Because
of this, the VHX-950F can observe targets with large changes in height entirely in focus, typically
impossible for conventional optical microscopes to achieve. Furthermore, the time required for
focus adjustment and observation is reduced considerably.
View a target from any angle and never miss another detail
VHX Series digital microscopes offer easy hand-held observation for larger targets. By using the
multi-angle observation system, users can reduce the time it takes to capture images of a target
at a variety of angles and positions. Using these two methods of observation, you will never miss
another detail in your observation.
Image captured with an optical microscope
Hand-held observation Multi-angle observation system
Pins (100×)Image captured with a digital microscope
0° 15°30°
45°
60°
75°
90
°
15°
30°
45°
60°
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Without camera-shake correction With camera-shake correction
Full illuminationPartial illumination
The entire ring light is turned on.Only 1/4 of the ring light is turned on to enhance the surface texture of the object being viewed.
Metal surface (250×)
LCD color filter (500×)
Normal
Sharpening Image + Light Shift
Edge enhancement
Light Shift
Glare Removal
Monochrome
Sharpening Image
Glare Removal + Light Shift
ReliefCoin (50×)
Image Stabilization function
Light Shift function
Optimal Image function
Through advanced image processing, the
VHX-950F is able to correct misalignments in
an image at the sub-pixel level. This function
makes it possible to perform high-magnification
observation without being affected by
environmental vibration.
Using the Light Shift button on the console instantly changes the illumination mode. The lighting
will be switched from full illumination to partial illumination that enhances the projections and
depressions of the target.
By simply pushing the Optimize button, nine
different lighting scenarios are displayed.
From there, you can quickly select the image
that is ideal for observing your target. Since
the images are automatically generated,
users can consistently produce the same
image conditions.
ONEPUSH
ONEPUSH
ONEPUSH
3 Optimal Lighting Settings
Simply select the ideal image!
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Solder separation test (50×)
Video recordings up to 3 hours long
BASIC CONCEPT
RecordingData saving to report generation
1 Saving images on-site
Save and manage data
Observed images can easily be recorded on-site using an integrated high-capacity 500GB HDD.
Our high-speed filing system ensures stress-free handling of a large quantity of images. Lens,
magnification, lighting, and measurement data can be saved on the VHX-950F and recalled later.
Video record/replay of chronological changes
The VHX-950F is equipped with a video record/replay function that can accurately and completely
record chronological changes and subtle movements of the target. Data can be recorded for up to
3 hours, at up to 30 frames per second. You can fast forward, advance the frame, and capture a
still image from the video. Moreover, the video is recorded as an AVI file that can be replayed with
the VHX-950F or any computer.
Timer function for long-term observation
The VHX-950F can automatically save images based on a
timer setting. Using the LAN function, you can observe the
images being captured by having them sent directly to your
personal computer.
Applicable file format: JPEG, TIFF, and WDP (Windows Media Photo)
Bacterial growth
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Device: KEYENCE VHX-Series
OBSERVATION REPORT
File nameGrain.tif
Captured on**, **
Date**, **
Capturing conditionsMagnification: 500×Lens: VH-Z500
TitleSubtitlePrepared by
VHX-950F
Company LAN
Manufacturing/Engineering departments
Overseas offices
Quality assurance/Research/Development departments
Other factories
Network
2 Network compatible
3 PC mode for report preparation
Quick information sharing
The VHX-950F can be connected to a network via LAN. This allows quick and easy sharing of
images with other departments or remote locations. This image and data sharing ensures speedy
and accurate action in urgent situations.
Immediate report generation on-site
PC mode allows for Microsoft Word or Excel to be
installed on the VHX-950F. You can prepare reports on-
site immediately after observation or image capture.
Various antivirus software
programs supported
Various antivirus software programs can also be installed
as needed.
*Windows, Word and Excel are either registered trademarks or trademarks of Microsoft Corporation in the United States and/or other countries.
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BASIC CONCEPT
MeasurementThe digital microscope is equipped with various dimensional measurement tools with easy operation.
Real-time Measurement
TRIPLE‘R sensor automatically
recognizes lens/magnification
KEYENCE’s advanced sensor technology and
microscopy/optical expertise have been combined to
allow the VHX to recognize three types of information:
lens connection, lens type, and magnification. The system
will automatically adjust the stage movement speed and
calibration data when the magnification is changed.
Various measurement tools
Users can complete all measurements directly on the screen with just a few clicks of the mouse.
This is significantly easier and faster than systems that require a user to capture images, import
them to a PC, and then use external software to complete measurements on the sample.
With 21 measurement tools available, nearly any
feature of interest can be inspected with the VHX.
Also, with the added ability to re-position a
measurement point, it is easy to make quick changes
to measurements and confirm accuracy.
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Edge detection function
When the measurement point selected on the image
is not perfectly on the edge, this function will adjust
the measurement point to the correct edge location.
This reduces variation between operators and
ensures highly-repeatable measurements.
Print pattern (150×)
Corrects the point automatically
3D Measurement Function
Using 3D data, the VHX-950F makes it
possible to measure at any targeted
point. Data can be collected to
calculate the profile, height, and volume
for any area within the field-of-view.
3D Measurement Tools
Console (50×)
Height Measurement Roughness Measurement
Height difference and distance can be measured
simply by clicking two points on the screen. Using
the auxiliary "Max. height" and "Min. height" tools,
users can measure the height difference and
distance between the highest or lowest points on
two objects.
Roughness measurement can be performed using
typical parameters such as Ra and Rz. Through line
roughness and surface roughness measurements,
users can quantify the differences in surface
conditions.
Processed metal component (50×) Standard roughness measurement scale (1500×)
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DVD
23-inch full HD LCD
monitor
Light source
LAN
USB3.0
A l l - i n- One System
Observation, Recording, and Measurement have been
integrated into a single unit
The VHX-950F encompasses a 23-inch LCD monitor and high-capacity HDD. This unit is widely
used in various areas including research and development, quality assurance, failure analysis, and
manufacturing.
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Wide magnification range from 0.1× to 5000×
The VHX-950F enables a wide range of observation from macro-scale stereoscopic imaging to
the detailed analysis of an SEM. Many techniques are also supported including transmitted and
polarized lighting, as well as differential interference contrast.
Stereoscopic microscope
Metallurgical microscope
Measuring microscopeElectron microscope
KEYENCE Optical Lenses
Continually Evolving
KEYENCE has been a leader in the digital microscope
industry for over 25 years. We have invested many
years developing optical lenses and aim to use the best
technology in the development of our digital microscope
lenses.
Highest Resolution in the Industry - RZ Lens
The design of the lens is the greatest contributing factor
in achieving high-resolution and large depth-of-field
imaging. KEYENCE has developed zoom lenses with the
highest resolution in the industry. These lenses minimize
chromatic aberrations and distortions, while also offering
superior telecentricity. Real Zoom Lens
Achieves 0.1× to 5000×with a single unit
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Fully-focused image and 3D display.
Even when the target has an uneven surface, a fully-focused image can be obtained rapidly by
compiling images of different focus positions, impossible with conventional optical microscopes. The
3D display allows surface shape observation from various angles. When the Z-axis motorized stage is
used, this 3D image can be displayed easily by just pressing the button on the console.
Accurate D.F.D. methodWe have adopted a new algorithm that uses the fine changes in texture to estimate height data. Building on our depth-up feature, the D.F.D. method facilitates the accurate construction of a 3D model allowing for versatile observation in 3D.
D.F.D. = Depth from Defocus
The D.F.D. method is the process by which the VHX can 1) Compile a completely in-focus image
and 2) Generate data to compile a 3D model. The D.F.D. method analyzes the level of contrast,
or focus, at each level of the target. By using the degree of blurring, the D.F.D. method can
calculate height information for each pixel, thereby enabling the compilation of a 3D model and
a completely in-focus image. Even if a pixel cannot be captured in perfect focus, a calculation is
made to generate height data. The D.F.D. method exponentially increases the efficiency of a 3D
construction.
Just press the console button.
Conventional image Accurate D.F.D.
Focus position: Lowest plane
Objects with multiple planes of focus could never be observed completely in
focus at one time.
Focus position: Middle plane Focus position: Highest plane
Just press the console button.
Method in which accurately focused images are stacked
D.F.D. processed image
ADVANCED
FUNCTION
Fastest in industry Simple 2-step operation
Quick depth composition & 3D display function
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Auto Adjust function
Use the Auto Adjust function to prevent edge
displacement and construct a fully-focused
image. This method is at least five times faster
and more accurate than conventional position
correction methods and obtains accurate
information even for easily distorted, low
magnification areas.
View highly reflective objects in 3D
Once applicable only to still
images, we’ve now enabled the
glare removal function to be used
on live images and 3D display.
By removing the reflectivity, an
accurate 3D display of highly
reflective objects becomes
possible.
Conventional image Adjusted by the Auto Adjust Function
Observing the target in complete focus allows for quick and
detailed analysis of the entire object.
Detailed topographical features not visible in two dimensions
are observed.
IMAGE AFTER DEPTH COMPOSITION 3D DISPLAY
Just press the console button.
Conventional image
Solder (200×)
Image subjected to glare removal and Quick 3D display processing
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CMOS (15×) Wire bonding (300×)
Color filter (800×) ITO film (1000×)
Miniature bearing (10×) CVT gear (50×)
Metal structure (400×) Metal flow (10×)
Cross section of multilayer film (1000×) Nonwoven fabric (200×)
Insulation (50×) Fracture surface of glass (20×)
Semiconductor
Automotive/Metal
Material/Chemical
Solves Applications in Every Industry
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Electronics
Pharmaceutical/
Packaging
Other Industries
Connector terminal (70×) BGA (50×)
Cross section of solder (1000×) Ink penetration (500×)
Injection needle (100×) Tear in package (100×)
Hair (3000×) Emulsion (2000×)
Bath agent (20×) Mica (500×)
Scarab beetle (30×) Ovary (200×)
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VHX Series System Line Up
SYSTEM CONF IGURAT ION
FIBERSCOPE*6
VH-F61A
VH-F111A
BORESCOPE LENS *5
ZOOM LENS
LW LENS
RZ LENS *1
Polarization illumination adapter
OP-51649
High-resolutionzoom lens
Universal Zoom Lens
Universal Zoom Lens
Wide-range zoom lens
Ultra-small, high-performance zoom lens
High-performance low-range zoom lens
Middle-range zoom lens
Long-focal-distance,high-performance zoom lens
Dual-light High-magnificationzoom lens
VH-Z500R/Z500T
VH-Z100UR/Z100UT
VH-Z20UR/Z20UT
VH-Z100R/Z100T
VH-Z20R/Z20T
VH-Z00R/Z00T
VH-Z150
VH-B18
VH-B100
VH-B55VH-BA
VH-B40
VH-B27
VH-Z50L/Z50T
VH-Z250R/Z250T
Adjustable illumination adapter
OP-72404
Wide area illumination adapter
OP-87298*4
Super-diffuse illumination adapter
OP-42305
Contact adapter
OP-81880
Polarization observation set
OP-87821
Polarization illumination adapter
OP-72405*3
(OP-72407 is required for polarization)
Coaxial polarization adapter
OP-72406(OP-72407 is required for polarization)
Polarized illumination adapter
OP-87429
Multi-diffuse adapterOP-35469
Non-reflective illumination ring
OP-32009
Darkfield illumination adapter
OP-72402
Differential interference set
OP-86943
Adjustable illumination adapter
VH-K20
Non-contact diffusionOP-35414
Adjustable illumination adapter
VH-K150
Diffuse illumination adapter
OP-35324
Coaxial illumination adapter
OP-35416
Diffuse illumination adapter
OP-87299 DIC prism and filter set
OP-87297
Ring illumination unit for Z100/Z100U/Z20U
OP-88164
500× to 5000×
250× to 2500×
100× to 1000×
100× to 1000×
20× to 200×
20× to 200×
150× to 800×
50× to 500×
0.1× to 50×
Polarizer mount
OP-72407*2
Polarizing filter
OP-87800*2
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Bayonet-typestandard attachment
OP-51478/OP-66871 *7
Bayonet-type C-mountattachment
OP-51479
Free-angle observation system
VH-S30F/S30BFree-angle observation system
VHX-S600E (Z motorized)X-Y measurement system
VH-M100EFree-angle observationsystem (motorized Z-axis)
VHX-S90F/VH-S30B
High-precision stand(with X-Y stage andtransmitted illumination)
VH-S5
VH lens mounting stand(with XY stage)
OP-25539OP-22124
*1 TRIPLE‘R compliant lenses VH-Z00T/Z20T/Z20UT/Z50T/Z100UT/Z100T/Z250T/Z500T are fitted with Automatic Lens/Zoom Recognition units and connection recognition mount, respectively. *2 OP-72407 is required when using VH-Z100R. Use OP-87800 when using the VH-Z100T/VH-Z100UR/VH-Z100UT.*3 OP-72407 and OP-72406 are required when coaxial illumination is used.*4 Included with the VH-Z20UR/Z20UT. *5 The optional bore fiber cable (OP-87201) is required.*6 The optional light guide attachment (OP-87790) is required.*7 OP-66871 is required when the VH-Z00R or Z20R is used. *8 A C-mount adapter suitable for the microscope is required.
OPT ION
*8
Camera lens (C-mount type)
Microscope
VH-F
3D shape measurementsoftware
VHX-H4M
XY measurement software
VHX-H2M2
PC
USB memory, etc.
LAN
CD-R/RW
USB
DVI
Hard disk drive
PC PC PC
3D profile measurement unit
VHX-S15CE
Monitor
A large screen monitor can be connected
when several people need to view a target
simultaneously. Since the target image is
magnified further on the large screen, it
can be viewed more easily.
Foot switch
Analysis software(2D measurement, 3D display software)
Lens jointVHX-J00T/J20T/J20UT/J50T/J100T/J250T/J500T
VHX-6020
VHX-950F
Free-angle observation system
VH-S300 (Manual)
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BAS IC FUNCT IONS : CONTROL L ER
BAS IC FUNCT IONS : S TAGE
Model VHX-950F
Camera
Image sensor 1/1.8-inch CMOS image sensor Virtual pixels: 1600 (H) × 1200 (V)
Scanning system Progressive
Frame rate 50 fps (max.)
Image resolution Normal 1600 (H) × 1200 (V), Approx. 1000 TV lines
Gain Auto, Manual, Preset
Electronic shutter Auto, Manual, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19000
Supercharge shutter 0.02 to 4 s
White balance Push set, Auto, Manual, Preset (2700K, 3200K, 5600K, 9000K)
Back-focus adjustment Not required
LCD monitor*2
Size Color LCD (IPS) 23"
Screen size 509.184 (H) × 286.416 (V) mm 20.05"(H) × 11.28"(V)
Pixel pitch 0.2652 (H) × 0.2652 (V) mm 0.01"(H) × 0.01"(V)
Number of pixels 1920 (H) × 1080 (V) (FHD)
Display colors Approx. 16770000 colors*1
Brightness 300 cd/m2 (Center 1 Point, typical)
Contrast ratio 1000 :1 (typical)
Field of view ±89° (typ., horizontal), ±89° (typ., vertical)
CD-R/CD-RW/DVD drive unit
Unit DVD-ROM super-multi drive unit
Applicable disk CD-R/CD-RW/DVD±R/DVD±R DL/DVD±RW/DVD-RAM
Storage capacity 8.7 GB (when using DVD±R DL)
Hard disk drive unit Storage capacity500 GB (including 165 GB reserved area)
Approx. 1680000 images (when a 2-million-pixel image is compressed) to approx. 55000 images (when a 2-million-pixel image is not compressed)
Image format JPEG (with compression), TIFF (without compression)
Observable image size 1600 (H) × 1200 (V) pixels
Light sourceLamp High-brightness LED
Lamp life 40000 hours (reference)
Color temperature 5700K (typical)
Video outputOutput method DVI-I (1920 × 1080 pixels)
Scanning frequencySpecial LCD monitor 66 kHz (H), 60 Hz (V)
External monitor 66 kHz (H), 60 Hz (V)
InputMouse input USB mouse supported
Keyboard input USB keyboard supported
External remote input Pause/Recording, Non-voltage input (Contact/Noncontact)
InterfacesLAN RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
USB 2.0 Series A 6 types
USB 3.0 Series A 2 types
Power supplyPower voltage 100 to 240 VAC, 50/60 Hz
Power consumption 280 VA
Environmental resistance
Ambient temperature +5 to 40°C 41 to 104°F
Relative humidity 35 to 80% RH (No condensation)
WeightController Approx. 12.5 kg
Camera unit Approx. 1.2 kg (VHX-6020)
Console Approx. 0.5 kg
Dimensions (Excluding the projected areas) 550 (W) × 470 (H) × 200 (D) 21.65"(W) × 18.50"(H) × 7.87"(D) (when stored)
*1. Approx. 16.77 million colors can be reproduced with the FRC processing of the display controller.
*2. The LCD monitor provided with the VHX Series is based on advanced technology. Rarely, an unlit pixel (black spot) or lit pixel (bright spot) may exist on the monitor screen. However, this is not an indication
of the LCD monitor being defective.
VHX-S90F/VH-S30B VH-S30F/S30B
XYθ stage
XY stage Manual Manual
XY-motorized stage motor – –
XY-motorized stage resolution – –
XY-motorized stage movement speed – –
XY stage moving range X: ±37.5 mm ±1.48", Y: ±25 mm ±0.98" X: ±37.5 mm ±1.48", Y: ±25 mm ±0.98"
θ rotation angle 360° 360°
XYθ stage size Top surface: 180 mm × 136 mm7.09" × 5.35"
Top surface: 180 mm × 136 mm7.09" × 5.35"
Transmitted light-compatible magnification – –
Z stage
Z stage: Motorized/Manual Motorized Manual
Z-motorized stage motor 2-phase stepping motor –
Z-motorized stage resolution 1 μm (typical) –
Z stage moving range 29 mm 1.14" (electric)/33 mm 1.30" (manual) 28 mm 1.10"
RatingsPower supply voltage 12 VDC –
Power consumption 18 VA –
Environmental resistance
Ambient temperature +5 to 40°C 41 to 104°F –
Relative humidity 35 to 80% RH (No condensation) –
Weight 13.0 kg 12.0 kg
Load capacity 1 kg 1 kg
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OTHER FUNCT IONS
Model VHX-950F Console compatibility
Observation functions
Auto-focus function Available ✓
Focus amount display function Available
Lighting switch function (Uneven surface enhancement)
Available (Full, partial, lateral, darkfield, brightfield, combination lighting)
✓
Camera-shake correcting function Available ✓
Display function
Full-screen display Available ✓
Screen segmentation function Vertical, horizontal, 2 × 2 split, 3 × 3 split, linked display function ✓
Real-time digital zoom 1.0× to 10.0× ✓
Comment display function Available
Image quality improvement function
Glare removal function Available ✓
Optimize mode (9 types) (Optimal image)
Available (Automatically lists 9 image modes, allowing optimal image selection)
Fine-shot function Available ✓
3D function
Quick composition & 3D function Available ✓
High-quality depth composition Available
3D display function Available
3D shape correction function Available (Slope/Sphere/Cylinder)
3D comparison function Available (Combination/Comparison/Difference display mode)
Recording function
Report output (Excel/Word) Available
Capture setting reproduction function Available
Timer capture function Available
Video recording/playback function 30 frames/sec. max. (Image size: 1600 × 1200, 800 × 600, 640 × 480)
Measuring functions
Distance, angle, radius, area, etc. Available ✓
Automatic edge detection Available
Scale display Available ✓
Automatic count and area measurement function
Available (Enables distance/area measurement through brightness/color extraction)
Automatic lens/zoom recognition function (TRIPLE‘R) Available
Auto calibration Available (No input of values required)
CSV storage Available
3D measurement function (VHX-H4M/VHX-S15 optional function)
3D profile measurement Available
Point height measurement Available
3D volume measurement Available
Roughness measurement Available
Manual XY measurement system (VHX-H2M2 optional function)
XY stage measurement Available
Wide image display function Available
Utilities
Simple mode Available ✓
Space-saving all-in-one design Available
Foot switch compatibility Available
User-specific setting memory Available
System protection setting Available
PC mode Available
Network connection function Available (Communication software / File sharing / FTP)
Function guide Available
Video help Available
PC software(Available free of charge)
Communication software Easily transmits image data between the VHX and the PC. (LAN)
3D image playback software for the PC Reproduces 3D images saved on the VHX using the PC.
HDR playback/measurement/stitched image playback software Performs measurement using the PC.
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www.keyence.com
VHX950F-KA-C-US 1127-1 611G46 Copyright (c) 2017 KEYENCE CORPORATION. All rights reserved.
E-mail: [email protected]
E-mail: [email protected] E-mail: [email protected]