Air Slide Table Series MXQ - SMC Pneumatics · Integration of the guide rail and the table. ......
Transcript of Air Slide Table Series MXQ - SMC Pneumatics · Integration of the guide rail and the table. ......
Functional optionAdjuster optionSymmetric type
Integration of the guide rail and the table.Uses a recirculating linear guide forhigh rigidity and high precision.Air slide table for precision assembly processes.
Body mounting taps
High precision, compact design Improved load resistanceLoad resistance against sudden and excessive external forces is nearly three times greater than Series MXS.
Symmetric type isalso standardized.Available for all option
Positioning hole
Workpiece mountingtaps
Improved strength
Dual rods
Integrating table with guide rail
Recirculating linear guide
Wide Variety of Option
Positioning hole
As Z-axis for pickingand placing
Auto switch mounting groove
Body mounting through-hole
Wide variety of adjuster option
Application Example
For positioning of pallets on a conveyor
Adjuster option and function option can be combined
Twice the output of conventional cylinders
End plate uses extra super duralumin.(Except the one with buffer)
Made of martensitic stainless steel
2. Lateral mounting (Body through-hole)
3. Vertical mounting (Body tapped)
Model
MXQ12-30MXS12-30
Repeatability Dimensions
Parallelism
0.035
0.2
Height tolerance
±0.08
±0.2
Width
46
50
Height
30
32
Overall length
86
80
Comparison of MXQ and MXS (mm)
Mounting is possible from 3 directions.
1. Lateral mounting (Body tapped)
With stroke adjuster With buffer mechanism
With end lock
Axial piping type
With shock absorber
Air Slide Table
Series MXQø6, ø8, ø12, ø16, ø20, ø25
Improved workpiece mounting repeatability Auto switches can be mounted in grooves
provided on the side of the body where they do not protrude.
Reproducibility for mounting on the body has been improved.
Wide type linear guide block body made of martensitic stainless steel
8-5-1
MX�
MTS
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D-
-X
20-
Data
1
Functional OptionAdjuster Option
With Buffer Mechanism With End Lock
Axial Piping TypeApplication Example
Buffer mechanism in operational condition
Normal condition
NG
Air gripper
Workpiece
Buffermechanism
Series Variations
Adjuster at extension end Retraction end adjuster
Auto switchNormally OFF ∗ON is buffer in operation.
Auto switch
Magnet
Magnet
( )
Normally ON∗OFF is buffer in operation.( )
Bufferstroke
Locked
� Rubber stopperStandard stroke adjuster
� Shock absorberFor use in harsh conditions.Absorbs the impact at the stroke end forsmooth stopping. Improved stopping accuracy.
� Metal stopperImproved stopping accuracy.Without cushioning function for use with light loads and low speeds.
MXQ6L
MXQ8L
MXQ12L
MXQ16L
MXQ20L
MXQ25L
MXQ6
MXQ8
MXQ12
MXQ16
MXQ20
MXQ25
Standard type Symmetric type
Model
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10 20 30 40 50 75 100 125 150
Ext
ensi
onen
dR
etra
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n en
dBo
th e
nds
Ext
ensi
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dR
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dBo
th e
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Ext
ensi
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dR
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dBo
th e
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With
buf
fer
With
end l
ock
Axi
alpi
ping
typeRubber
stopperShock
absorberMetal
stopper
Adjuster optionStandard stroke (mm)
Functional option
Auto switchBore size(mm)
Reed switch• D-A9�• D-A9�VSolid state switch• D-M9�• D-M9�V2-color indication solid state• D-F9�W• D-F9�WV
6
8
12
16
20
25
Lock pistonSpring
Unlocked
Cylinder airsupply port
Speed controller
Three different types of adjusting bolt have been standardized for front end rear and double end adjusters and cushion mechanisms.
� Protects workpieces and tools, etc., by eliminating impact at the end of the extension stroke.
� Buffer unit is auto switch capable.
� Holds the cylinder’s home position to prevent dropping of the workpiece even if the air supply is cut off.
� Centralized piping in axial direction to maintain clear space around the body.
∗ The normally ON/OFF setting is changed by changing the direction of the auto switch mounting.
In workpiece insertion processes when there is a problem such as faulty positioning, the buffer mechanism absorbs the shock from the workpiece impact to prevent damage.
8-5-3
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
3
Mounting
Series MXQSpecific Product Precautions 2Be sure to read before handling.
1. Do not use in the environment, where the product could be exposed to the liquid such as cutting oil, etc.Using in the environment where the product could be exposed to cutting oil, coolant or oil, etc. could result in looseness, increased operating resistance, or air leakage, etc.
2. Do not use in the environment, where the product could be exposed directly to the foreign matters such as powder dust, blown dust, cutting chip, spatter etc.This could result in looseness and increased operating resistance, and air leakage, etc.Please consult with SMC regarding use in this kind of environment.
3. Do not use in direct sunlight.4. When there are heat sources in
the surrounding area, block off them.When there are heat sources in the surrounding area, radiated heat may cause the product’s temperature to rise and exceed the operating temperature range. Block off the heat with a cover, etc.
5. Do not subject it to excessive vibration and/or impact.Please consult with SMC regarding use in this kind of environment, as this can cause damage and malfunction.
6. Use caution for the anti-corrosiveness of linear guide section.Martensitic stainless steel is used for the rail and guide block. But, use caution that anti-corrosiveness is inferior to the austenitic stainless steel. Especially, rust may be generated in an environment where waterdrops are likely to adhere due to condensation, etc.
Operating Environment
Caution CautionCaution
Model
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Bolt
M3 x 0.5M4 x 0.7M5 x 0.8M6 x 1M6 x 1
M8 x 1.25
Maximum tightening torque (N·m)
0.92.14.47.47.4
18.0
Maximum screw-in depth l (mm)
568
101315
1. Front Mounting
Model
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Bolt
M3 x 0.5M3 x 0.5M4 x 0.7M5 x 0.8M5 x 0.8M6 x 1
Maximum tightening torque (N·m)
1.21.22.85.75.7
10.0
Maximum screw-in depth l (mm)
44.8679.5
11.5
2. Top Mounting
1. Do not replace with the bolt other than the original adjusting bolt.This could result in looseness and damage due to impact forces, etc.
2. Follow the table for tightening torque of shock absorber lock nuts.Insufficient torque will cause a decrease in the positioning accuracy.
ModelMXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Tightening torque (N·m)3.05.0
12.525.043.069.0
Caution for Adjuster OptionStroke Adjuster
l
Guide block
l
3. When stroke adjuster is adjusted, do not hit the table with the wrench.This could result in looseness.
1. The positioning hole on the table and the positioning hole at the bottom of the body do not have the same center. Use these holes during reinstallation after the table has been removed for the maintenance of an identical product.
To prevent the workpiece holding bolts from touching the end plate, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If long bolts are used, they can touch the end plate and cause malfunction, etc.
To prevent the workpiece holding bolts from touching the guide block, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If long bolts are used, they can touch the guide block and cause malfunction, etc.
Caution
Caution
8-5-4
4
Mounting
Series MXQSpecific Product Precautions 2Be sure to read before handling.
1. Do not use in the environment, where the product could be exposed to the liquid such as cutting oil, etc.Using in the environment where the product could be exposed to cutting oil, coolant or oil, etc. could result in looseness, increased operating resistance, or air leakage, etc.
2. Do not use in the environment, where the product could be exposed directly to the foreign matters such as powder dust, blown dust, cutting chip, spatter etc.This could result in looseness and increased operating resistance, and air leakage, etc.Please consult with SMC regarding use in this kind of environment.
3. Do not use in direct sunlight.4. When there are heat sources in
the surrounding area, block off them.When there are heat sources in the surrounding area, radiated heat may cause the product’s temperature to rise and exceed the operating temperature range. Block off the heat with a cover, etc.
5. Do not subject it to excessive vibration and/or impact.Please consult with SMC regarding use in this kind of environment, as this can cause damage and malfunction.
6. Use caution for the anti-corrosiveness of linear guide section.Martensitic stainless steel is used for the rail and guide block. But, use caution that anti-corrosiveness is inferior to the austenitic stainless steel. Especially, rust may be generated in an environment where waterdrops are likely to adhere due to condensation, etc.
Operating Environment
Caution CautionCaution
Model
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Bolt
M3 x 0.5M4 x 0.7M5 x 0.8M6 x 1M6 x 1
M8 x 1.25
Maximum tightening torque (N·m)
0.92.14.47.47.4
18.0
Maximum screw-in depth l (mm)
568
101315
1. Front Mounting
Model
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Bolt
M3 x 0.5M3 x 0.5M4 x 0.7M5 x 0.8M5 x 0.8M6 x 1
Maximum tightening torque (N·m)
1.21.22.85.75.7
10.0
Maximum screw-in depth l (mm)
44.8679.5
11.5
2. Top Mounting
1. Do not replace with the bolt other than the original adjusting bolt.This could result in looseness and damage due to impact forces, etc.
2. Follow the table for tightening torque of shock absorber lock nuts.Insufficient torque will cause a decrease in the positioning accuracy.
ModelMXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Tightening torque (N·m)3.05.0
12.525.043.069.0
Caution for Adjuster OptionStroke Adjuster
l
Guide block
l
3. When stroke adjuster is adjusted, do not hit the table with the wrench.This could result in looseness.
1. The positioning hole on the table and the positioning hole at the bottom of the body do not have the same center. Use these holes during reinstallation after the table has been removed for the maintenance of an identical product.
To prevent the workpiece holding bolts from touching the end plate, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If long bolts are used, they can touch the end plate and cause malfunction, etc.
To prevent the workpiece holding bolts from touching the guide block, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If long bolts are used, they can touch the guide block and cause malfunction, etc.
Caution
Caution
8-5-5
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
5
Caution Caution
Caution
Caution
Series MXQSpecific Product Precautions 3Be sure to read before handling.
Rubber Stopper
Caution on Mounting Adjuster Option
Shock Absorber
Model
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
0.5
0.9
2.1
4.4
7.0
18.0
M2.5 x 6
M3 x 8
M4 x 12
M5 x 16
M6 x 16
M8 x 18
M2.5 x 8
M3 x 10
M4 x 12
M5 x 16
M6 x 16
M8 x 18
Stroke adjuster at extension end (AS) Stroke adjuster at retraction end (AT)Body mounting section Table mounting section
M2.5 x 6
M3 x 8
M4 x 10
M5 x 12
M5 x 14
M6 x 18
Thread size Thread size Thread sizeTightening torque (N·m)
0.5
0.9
2.1
4.4
7.0
18.0
Tightening torque (N·m)
0.5
0.9
2.1
4.4
4.4
7.0
Tightening torque (N·m)
Model
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
0.5
0.9
2.1
4.4
7.0
18.0
M2.5 x 6
M3 x 8
M4 x 12
M5 x 16
M6 x 16
M8 x 18
M2.5 x 8
M3 x 10
M4 x 12
M5 x 16
M6 x 20
M8 x 20
Stroke adjuster at extension end (CS) Stroke adjuster at retraction end (CT)Body mounting section Table mounting section
M2.5 x 6
M3 x 8
M4 x 10
M5 x 12
M5 x 14
M6 x 18
Thread size Thread size Thread sizeTightening torque (N·m)
0.5
0.9
2.1
4.4
7.0
18.0
Tightening torque (N·m)
0.5
0.9
2.1
4.4
4.4
7.0
Tightening torque (N·m)
Model
MXQ8MXQ12MXQ16MXQ20MXQ25
0.9
2.1
4.4
7.0
18.0
M3 x 12
M4 x 12
M5 x 16
M6 x 18
M8 x 18
M3 x 12
M4 x 12
M5 x 16
M6 x 20
M8 x 20
Shock absorber at extension end (BS) Shock absorber at retraction end (BT)Body mounting section Table mounting section
M3 x 8
M4 x 10
M5 x 12
M5 x 14
M6 x 18
Thread size Thread size Thread sizeTightening torque (N·m)
0.9
2.1
4.4
7.0
18.0
Tightening torque (N·m)
0.9
2.1
4.4
4.4
7.0
Tightening torque (N·m)
Metal Stopper
1. Use caution that the length of the bolts for mounting on the body and the bolts for the table is different from each other in some models. Stroke adjuster at extension end (CS) of MXQ6, 8, 20 and 25 has the different length of a hexagon socket head cap screw for mounting on the body and on the table. Use sufficient care for mounting. If assembled by making an error in length, it could cause looseness or lead to malfunction.
2. Follow the table below for tightening torque of mounting bolts.Insufficient torque will cause a decrease in the positioning accuracy and lead to malfunction.
1. Use caution that the length of the bolts for mounting on the body and the bolts for the table is different from each other in some models. Stroke adjuster at extension end (AS) of MXQ6 and 8 has the different length of a hexagon socket head cap screw for mounting on the body and on the table. Use sufficient care for mounting. If assembled by making an error in length, it could cause looseness or lead to malfunction.
2. Follow the table below for tightening torque of mounting bolts.Insufficient torque will cause a decrease in the positioning accuracy and lead to malfunction.
1. Use caution that the length of the bolts for mounting on the body and the bolts for the table is different from each other in some models. Shock absorber at extension end (BS) for MXQ20 and 25 has the different length of a hexagon socket head cap screw for mounting on the body and on the table. Use sufficient care for mounting. If assembled by making an error in length, it could cause looseness or lead to malfunction.
2. Follow the table below for tightening torque of mounting bolts.Insufficient torque will cause a decrease in the positioning accuracy and lead to malfunction.
1. Do not rotate the screw set on bottom of shock absorber.This is not an adjusting screw. Turning it could cause oil leakage.
2. Do not scratch the exposed portion of the piston rod.Durability could be degraded and lead to return defect.
With Shock Absorber
Applicable sizeMXQ8MXQ12MXQ16MXQ20MXQ25
Shock absorber modelRB0805RB0806RB1007RB1411RB1412
3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.
4. Follow the table below for tightening torque of shock absorber lock nuts.
Model
MXQ8MXQ12
Tightening torque (N·m)
1.67
3.14
10.8MXQ20MXQ25
MXQ16
Turning thebottom screw is not allowed.Piston rod
Damage is not allowed.
Caution on Adjuster Option
8-5-6
6
Series MXQSpecific Product Precautions 4Be sure to read before handling.
1. Use 2 position, 4 or 5 port solenoid valves.A malfunction may occur with a control circuit that exhausts from both ports, such as exhaust center 3 position valves.
With End Lock
Caution on Handling Functional Option
2. Be sure to use meter-out speed control valves.If it is used in meter-in speed control or without a speed controller, it may result in malfunction.
3. When releasing the end lock manually, be sure that air pressure is released.If the end lock is unlocked while the air pressure still remains, it will lead to damage a workpiece, etc. due to unexpected lurching.
How to Unlock the End Lock∗ Before proceeding, make sure that there is no
residual air pressure.
(1) Push down the lock piston pin.(2) Slide the table forward.
1. When mounting the air slide table with buffer it must be oriented as shown in the sketch below.In horizontal operation, the buffer may travel the stroke length and activate the auto switch depending on the load and the speed. Therefore, adjust the speed according to the load.
With Buffer Mechanism
2. Auto switch with buffer function: Refer to the following table for the proper mounting positions for detection at stroke end.
∗ Adjust the auto switch position according to theload and the speed.
ModelMXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
A22.5455.5
10
B
3
(mm)
Vertical use
Horizontal use
W
Caution on Handling Symmetric Type
1. Maintain a minimum spacing of at least 3 mm if standard style and symmetric style are used side by side.It malfunctions if standard style and symmetric style are used close side by side.
Normally OFFdetection
Normally ONdetection
A
B
(2)
(1)
Air slide table
Recommended pneumatic circuit Allow a space of 3 mm or more for a side by side mounting.
Caution CautionCaution
8-5-7
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
7
Air Slide Table
Series MXQø6, ø8, ø12, ø16, ø20, ø25
Special functionType Electricalentry
Grommet
Yes
Wiring (Output)
2-wire
3-wire(NPN equivalent)
Load voltage
—
ACDCAuto switch model
A96
A93V
M9NV
M9PV
M9BV
F9NWV
F9PWV
F9BWV
Lead wire length (m) ∗
0.5(Nil) 3(L)
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Relay, PLC
Applicableload
Pre-wireconnector
Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
∗ Lead wire length symbols: 0.5 m ········· Nil (Example) M9N 3 m ·········· L (Example) M9NL 5 m ·········· Z (Example) M9NZ
—
100 V
—
— 5 V
12 V
12 V
12 V
5 V, 12 V
5 V, 12 V
24 V
YesGrommet
Diagnostic indication(2-color indication)
— — —
— —
—
—
—
Ree
d sw
itch
Sol
id s
tate
sw
itch
A96
A93
M9N
M9P
M9B
F9NW
F9PW
F9BW
Perpendicular In-lineIndi
cato
r lig
ht
24 V
3-wire (NPN)
3-wire (PNP)
2-wire
3-wire (NPN)
3-wire (PNP)
2-wire
How to Order
10, 20, 30, 40, 5010, 20, 30, 40, 50, 7510, 20, 30, 40, 50, 75, 10010, 20, 30, 40, 50, 75, 100, 12510, 20, 30, 40, 50, 75, 100, 125, 15010, 20, 30, 40, 50, 75, 100, 125, 150
68
12162025
Bore size/Stroke (mm)
2 pcs.1 pc.
“n” pcs.
NilSn
Number of auto switches
MXQ 12 50 M9N S
Adjuster option
Functional option
AS FR
Extension endRetraction end
Both endsExtension endRetraction end
Both endsExtension endRetraction end
Both ends
ASATA
BS (1)
BT (1)
B (1)
CSCTC
Standard typeWith buffer
With end lockAxial piping type
With buffer and end lockWith buffer, Axial piping type
Nil
Nil
Adjusteroption
Functionaloption
Option Combinations
Auto switchNil Without auto switch
NilNote 2) W/ end lock is not available in Series MXQ6.
F R (2)
P FR (2)
FP
AS, CS
AT, CT
A, C
BS
BT
B
L
Standard typeSymmetric type
NilL
Symmetric type
Without adjuster
Rubber stopper
Shock absorber
Metal stopper
RelayPLC
—
Nil F R P FR FP
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(3)
(3)
(3) (3)
ICcircuit
ICcircuit
ICcircuit
∗ Solid state switches marked with “�” are produced upon receipt of order.
• Since there are other applicable auto switches than listed, refer to page 8-5-46 for details.• For details about auto switches with pre-wire connector, refer to page 8-30-52.
∗ For the applicable auto switch model, refer to the table below.
∗ For the applicable auto switch to buffer, refer to page 8-5-14. It requires to order separately.
Note 1) W/ shock absorber is not available in Series MXQ6.
Note 3) With the combination of buffer mechanism and extension end stroke adjuster, the buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster.
8-5-8
8
Bore size (mm)
Piping port size
Fluid
Action
Operating pressure
Proof pressure
Ambient and fluid temperature
Specifications
Air
Double acting
0.15 to 0.7 MPa
1.05 MPa
–10 to 60°C
50 to 500 mm/s(Adjuster option/Metal stopper: 50 to 200 mm/s)
Rubber bumper (Standard, Adjuster option/Rubber stopper)
Shock absorber (Adjuster option/Shock absorber)
None (Adjuster option/Metal stopper)
+1 0
Non-lube
Reed switch (2-wire, 3-wire)
Solid state switch (2-wire, 3-wire)
2-color indication solid state switch (2-wire, 3-wire)
mm
M5 x 0.8
Piston speed
MXQ6
MXQ8
MXQ12
MXQ16
MXQ20
MXQ25
Standard Stroke
Standard stroke (mm)
10, 20, 30, 40, 50
10, 20, 30, 40, 50, 75
10, 20, 30, 40, 50, 75, 100
10, 20, 30, 40, 50, 75, 100, 125
10, 20, 30, 40, 50, 75, 100, 125, 150
10, 20, 30, 40, 50, 75, 100, 125, 150
Cushion
Lubrication
Auto switch
Stroke length tolerance
6 8 12 16 20 25
Rc 1/8
Adjuster option
Option
Extension end (AS)
Retraction end (AT)
Both ends (A)
Extension end (BS)
Retraction end (BT)
Both ends (B)
Extension end (CS)
Retraction end (CT)
Both ends (C)
Rubber stopper
Shock absorber
Metal stopper
Functional option
With buffer (F)
With end lock (R)
Axial piping type (P)
Stroke adjustment
range 0 to 5 mm
W/ shock absorber is not available in Series MXQ6.
Stroke adjustment
range 0 to 5 mm
W/ end lock is not available in Series MXQ6.
Model
-X42
-X16
Anti-corrosive specifications for guide section
Metal stopper specifications
Symbol Specifications
Made to Order Specifications(For details, refer to page 8-31-1.)
For clean room specifications, refer to “Pneumatic Clean Series” catalog.
∗ For details of adjuster and functional option, refer to pages 8-5-5 to 8-5-11 in “Option Specifications”.
8-5-9
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
9
Symmetric type
Applicable bore size
Adjustment rangeNil
-X11-X12
MXQ
5 mm15 mm25 mm
68
12162025
12 X11
Adjuster option
AS
Standard
Option
6 mm 8 mm12 mm16 mm20 mm25 mm
Note 1) -X12 (adjusting range: 25 mm) is not available in Series MXQ6.Note 2) -X11 and -X12 are not available with shock absorber.Note 3) W/ Shock absorber is not available in Series MXQ6.Note 4) For dimensions, refer to pages 8-5-40 to 8-5-44.
For the symmetric type, refer to the external dimensions symmetrically.(Symmetric type is what the direction of the adjusting bolt is reversed.)
Theoretical Output
0.2
11
8
20
15
45
34
80
60
126
94
196
151
Bore size (mm)
Rod size(mm)
Piston area(mm2)
Operating direction
Operating pressure (MPa)
6
8
12
16
3
4
6
8
OUT
IN
57
42
OUT
IN
101
75
OUT
IN
226
170
OUT
IN
402
302
0.3
17
13
30
23
68
51
121
91
188
141
295
227
0.4
23
17
40
30
90
68
161
121
251
188
393
302
0.5
29
21
51
38
113
85
201
151
314
236
491
378
0.6
34
25
61
45
136
102
241
181
377
283
589
454
0.7
40
29
71
53
158
119
281
211
440
330
687
529
The dual rod ensures an output twice that of existing cylinders. (N)
Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2)
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Model
Standard stroke (mm)
(g)
20 10
25 12
OUT
IN
628
471
OUT
IN
982
756
INOUT
Additional weight of adjuster option
10
100
140
335
605
1100
1750
20
120
170
340
610
1100
1750
30
140
210
380
670
1100
1750
40
180
250
450
735
1200
1950
50
200
315
490
835
1400
2400
75
—
385
655
1000
1750
2750
100
—
—
745
1250
2350
3450
125
—
—
—
1400
2650
4300
150
—
—
—
—
2900
4700
6
10
25
45
80
130
5
10
23
40
65
110
25
35
70
105
130
200
—
40
100
160
310
560
13 + 0.2 S
26 + 0.2 S
43 + 0.2 S
55 + 0.2 S
166 + 0.5 S
240 + 0.5 S
Axial piping type(S: Stroke (mm))
With end lock
With buffer
How to Order Stroke Adjuster (Accessory)
Weight
L
Standard typeSymmetric type
NilL
Extension endRetraction endExtension endRetraction endExtension endRetraction end
ASATBSBTCSCT
Rubberstopper
Shock absorber
Metalstopper
Type
Rubber stopper
With shock absorber
Metal stopper
Stroke adjustment range
0 to 5 mm
Refer to the dimensions on page 8-5-42.
0 to 5 mm
Stroke Adjustment Range of Adjuster Option (Identical for extension and retraction ends)
∗ Optional wide adjustment range adjuster are available with rubber stopper and metal stopper.
Option Specifications
Extra for option
Rubber stopper
Extension end Retraction end
—
30
47
75
170
220
—
23
30
53
120
140
Shock absorber
Extension end Retraction end
10
23
35
60
115
180
5
10
23
40
65
110
Metal stopper
Extension end Retraction end
Series MXQ
8-5-10
10
Table Accuracy
(mm)
Model
B side parallelism to A side
B side traveling parallelism to A side
C side perpendicularity to A side
M dimension tolerance
W dimension tolerance
Radial internal clearance (µm)
MXQ6
Refer to Table (1).
Refer to Graph (1).
0.05 mm
±0.08 mm (±0.1 mm) ∗1
±0.1 mm
Shock Absorber Specifications
Model
Bore size (mm)
Piston speed
Buffer stroke (mm)
Bufferstrokeload (N)
MXQ6
Strokeat 0 (mm)Maximumstroke
6
3
6
MXQ8
8
5
8
MXQ12
12
10
13
MXQ16
16
13
17
MXQ20
20
17
25
MXQ25
25
21
29
5 10
50 to 500 mm/s (Horizontal mounting 50 to 300 mm/s)
Type model
D-M9BV
D-M9NV
D-M9PV
Solid state switch
Specifications
With light, 2-wire
With light, 3-wire, Output: NPN
With light, 3-wire, Output: PNP
Electrical entry direction
Vertical
Model
Bore size (mm)
Piston speed
Holding force (N)
MXQ8
8
25
MXQ12
12
60
MXQ16
16
110
MXQ20
20
160
MXQ25
25
250
50 to 500 mm/s
∗ The auto switch for buffer must be ordered separately.
Note) For caution on end lock, refer to page 8-5-7.
Shock absorber model
Applicable slide table
Max. energy absorption (J)
Stroke absorption (mm)
Max. collision speed (mm/s)
Max. operating frequency (cycle/min)
Max. allowable thrust (N)
Ambient temperature range (°C)
RB0805
MXQ8
0.98
5
80
245
1.96
3.83
15
RB0806
MXQ12
RB1007
MXQ16
RB1411
MXQ20
RB1412
MXQ25
Spring force (N)
Weight (g)
Extended
Retracted
2.94
6
80
245
1.96
4.22
15
5.88
7
50 to 500
70
422
–10 to 60
4.22
6.86
25
14.7
11
45
814
6.86
15.30
65
19.6
12
45
814
6.86
15.98
65
With buffer mechanism With end lock
With End Lock Specifications
Buffer Mechanism Specifications
Applicable Auto Switch to Buffer
–4 to 0
MXQ8
–4 to 0
MXQ12
–6 to 0
MXQ16
–10 to 0
MXQ20
–12 to 0
MXQ25
–14 to 0∗1) ±0.1 mm for 75 mm or longer stroke
MXQ6
MXQ8
MXQ12
MXQ16
MXQ20
MXQ25
ModelStroke (mm)
10
0.025
0.025
0.03
0.035
0.04
0.045
20
0.03
0.03
0.03
0.035
0.04
0.045
30
0.035
0.035
0.035
0.04
0.04
0.045
40
0.04
0.04
0.04
0.045
0.045
0.05
50
0.045
0.055
0.045
0.05
0.055
0.06
75
—
0.065
0.065
0.065
0.07
0.07
100
—
—
0.075
0.08
0.095
0.09
125
—
—
—
0.095
0.105
0.115
150
—
—
—
—
0.125
0.125
Table (1) B Side Parallelism to A Side
WA
BC
M
Radialclearance
0.06
0.04
0.02
0
Trav
elin
g pa
ralle
lism
(m
m)
50 100 150Stroke (mm)
Graph (1) B Side Traveling Parallelism to A Side
Traveling parallelism:The amount of deflection on a dial gauge when the table travels a full stroke with the body secured on a reference base surface.
Note 1) For caution on handling the one with buffer mechanism, refer to page 8-5-7.Note 2) The buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster.
8-5-11
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
11
Table Deflection (Reference values)
Table Displacement due toPitch Moment Load
Table Displacement due toYaw Moment Load
Table Displacement due toRoll Moment Load
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Lr = 40 mm
Lr = 70 mm
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Lr = 90 mm
0.03
0.02
0.01
10 20 30
20 40 60
0.03
0.02
0.01
20 40 60 80 100
0.01
0.02
0.03
0.04
0.03
0.02
0.01
10 20 30
0.04
0.02
20 40 60
0.04
0.06
20 40 60 80 100
0.10
0.02
0.04
0.06
0.08
0.015
0.010
40 80 120
0.005
0.010
40 80 120
0.005
0.012
0.008
120
0.016
0.004
0.020
16040 80
0
0
0
0
0
0
0
0
0
ø8
ø12
ø6
ø8
ø12
ø6
ø8
ø12
F A
Lr
F
MXQ6-10
MXQ6-20
MXQ6-30MXQ6-50
MXQ6-40
MXQ6-10
MXQ6-20
MXQ6-30MXQ6-50
MXQ6-40
MXQ6-10
MXQ6-20
MXQ6-30
MXQ6-50
MXQ6-40
MXQ6-10
MXQ6-20
MXQ6-30
MXQ6-50
MXQ6-40
MXQ6-10MXQ6-10MXQ6-20MXQ6-20MXQ6-30MXQ6-30 MXQ6-50MXQ6-50
MXQ6-40MXQ6-40MXQ6-10MXQ6-20MXQ6-30 MXQ6-50
MXQ6-40
MXQ12-10
MXQ12-30
MXQ12-20
MXQ12-50
MXQ12-40
MXQ12-75
MXQ12-100
MXQ12-10
MXQ12-30
MXQ12-20
MXQ12-50
MXQ12-40
MXQ12-75
MXQ12-100
MXQ12-75MXQ12-75
MXQ12-10MXQ12-10
MXQ12-40MXQ12-40
MXQ12-20MXQ12-20
MXQ12-30MXQ12-30MXQ12-100MXQ12-100
MXQ12-50MXQ12-50
MXQ12-75
MXQ12-10
MXQ12-40
MXQ12-20
MXQ12-30MXQ12-100
MXQ12-50
MXQ12-100MXQ12-100MXQ12-75MXQ12-75MXQ12-50MXQ12-50MXQ12-40MXQ12-40
MXQ12-30MXQ12-30MXQ12-20MXQ12-20MXQ12-10MXQ12-10
MXQ12-100MXQ12-75MXQ12-50MXQ12-40
MXQ12-30MXQ12-20MXQ12-10
MXQ8-20MXQ8-20
MXQ8-10MXQ8-10
MXQ8-30MXQ8-30MXQ8-40MXQ8-40
MXQ8-50MXQ8-50
MXQ8-75MXQ8-75
MXQ8-20
MXQ8-10
MXQ8-30MXQ8-40
MXQ8-50
MXQ8-75MXQ8-75MXQ8-75
MXQ8-10MXQ8-10MXQ8-20MXQ8-20 MXQ8-30MXQ8-30
MXQ8-50MXQ8-50MXQ8-40MXQ8-40
MXQ8-75
MXQ8-10MXQ8-20 MXQ8-30
MXQ8-50MXQ8-40
ø6
0.05
MXQ8-10MXQ8-10
MXQ8-30MXQ8-30
MXQ8-75MXQ8-75
MXQ8-20MXQ8-20MXQ8-40MXQ8-40
MXQ8-50MXQ8-50MXQ8-10
MXQ8-30
MXQ8-75
MXQ8-20MXQ8-40
MXQ8-50
Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.
Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.
Displacement at “A” when a load is applied to “F” with the slide table retracted.
Series MXQ
8-5-12
12
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Lr = 120 mm
Lr = 160 mm
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Load (N)
Tabl
e di
spla
cem
ent a
mou
nt (
mm
)
Lr = 200 mm
0.06
0.04
0.02
50 100 200
100 200 300
0.06
0.04
0.02
100 200 300 400 500
0.04
0.06
0.08
0.10
0.08
0.04
50 100 200
0.04
100 200 300
0.08
0.12
100 200 300 400 500
0.12
0.04
0.08
0.04
0.03
100 200 300
0.02
0.04
100 200 300
0.02
0.04
0.02
600
0.06
0.08
800200 400
0
0
0
0
0
0
0
0
0
ø20
ø25
ø16
ø20
ø25
ø16
ø20
ø25
ø16
0.12
F A
Lr
F
Table Displacement due toPitch Moment Load
Table Displacement due toYaw Moment Load
Table Displacement due to Roll Moment Load
MXQ16-100MXQ16-100MXQ16-125MXQ16-125
MXQ16-75MXQ16-75MXQ16-20MXQ16-20MXQ16-30MXQ16-30
MXQ16-10MXQ16-10
MXQ16-40MXQ16-40
MXQ16-50MXQ16-50
MXQ16-100MXQ16-125
MXQ16-75MXQ16-20MXQ16-30
MXQ16-10
MXQ16-40
MXQ16-50
MXQ25-100MXQ25-100MXQ25-125MXQ25-125MXQ25-150MXQ25-150
MXQ25-50MXQ25-50MXQ25-75MXQ25-75
MXQ25-10MXQ25-10MXQ25-20MXQ25-20MXQ25-30MXQ25-30MXQ25-40MXQ25-40 MXQ25-100
MXQ25-125MXQ25-150
MXQ25-50MXQ25-75
MXQ25-10MXQ25-20MXQ25-30MXQ25-40
MXQ16-30
MXQ16-50
MXQ16-20
MXQ16-10
MXQ16-40
MXQ16-75MXQ16-100MXQ16-125
MXQ16-30
MXQ16-50
MXQ16-20
MXQ16-10
MXQ16-40
MXQ16-75MXQ16-100MXQ16-125
MXQ16-10MXQ16-10
MXQ16-20MXQ16-20
MXQ16-100MXQ16-100MXQ16-30MXQ16-30
MXQ16-50MXQ16-50
MXQ16-75MXQ16-75MXQ16-40MXQ16-40
MXQ16-125MXQ16-125
MXQ16-10
MXQ16-20
MXQ16-100MXQ16-30
MXQ16-50
MXQ16-75MXQ16-40
MXQ16-125
MXQ20-10MXQ20-10
MXQ20-50MXQ20-50
MXQ20-125MXQ20-125
MXQ20-20MXQ20-20
MXQ20-75MXQ20-75MXQ20-30MXQ20-30
MXQ20-150MXQ20-150
MXQ20-40MXQ20-40
MXQ20-100MXQ20-100
MXQ20-10
MXQ20-50
MXQ20-125
MXQ20-20
MXQ20-75MXQ20-30
MXQ20-150
MXQ20-40
MXQ20-100
MXQ25-10MXQ25-10
MXQ25-30MXQ25-30MXQ25-50MXQ25-50MXQ25-125MXQ25-125
MXQ25-150MXQ25-150MXQ25-100MXQ25-100
MXQ25-75MXQ25-75
MXQ25-20MXQ25-20
MXQ25-40MXQ25-40
MXQ25-10
MXQ25-30MXQ25-50MXQ25-125
MXQ25-150MXQ25-100
MXQ25-75
MXQ25-20
MXQ25-40
MXQ25-10
MXQ20-125MXQ20-125MXQ20-150MXQ20-150
MXQ20-50MXQ20-50
MXQ20-10MXQ20-10
MXQ20-30MXQ20-30
MXQ20-20MXQ20-20
MXQ20-100MXQ20-100
MXQ20-40MXQ20-40MXQ20-75MXQ20-75
MXQ20-125MXQ20-150
MXQ20-50
MXQ20-10
MXQ20-30
MXQ20-20
MXQ20-100
MXQ20-40MXQ20-75
150 150
0.01
400
0.06
400 500 600
0.08
MXQ25-125MXQ25-125MXQ25-100MXQ25-100MXQ25-75MXQ25-75
MXQ25-150MXQ25-150
MXQ25-50MXQ25-50
MXQ25-20MXQ25-20
MXQ25-40MXQ25-40
MXQ25-30MXQ25-30MXQ25-125MXQ25-100MXQ25-75
MXQ25-150
MXQ25-50
MXQ25-20
MXQ25-40
MXQ25-30
0.02
MXQ20-100MXQ20-100MXQ20-125MXQ20-125MXQ20-150MXQ20-150
MXQ20-10MXQ20-10MXQ20-20MXQ20-20MXQ20-30MXQ20-30
MXQ20-50MXQ20-50MXQ20-75MXQ20-75
MXQ20-40MXQ20-40 MXQ20-100MXQ20-125MXQ20-150
MXQ20-10MXQ20-20MXQ20-30
MXQ20-50MXQ20-75
MXQ20-40
Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.
Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.
Displacement at “A” when a load is applied to “F” with the slide table retracted.
8-5-13
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
13
Series MXQModel Selection
Model Selection Step Formula/Data Selection Example
Operating Conditions
Cylinder: MXQ16-50Cushion: Rubber stopperWorkpiece table mountingMounting: Horizontal wall mountingAverage speed: Va = 300 [mm/s]Load weight: W = 1 [kg]L1 = 10 mm L2 = 30 mm L3 = 30 mm
Kinetic Energy
Load Factor
3-1 Load Factor of Load Weight
3-2 Load Factor of the Static Moment
3-3 Load Factor of Dynamic Moment
3-4 Sum of the Load Factors
Σαn = α1 + α2 + ·········· + αn ≤ 1
1 420 2E = —— x 1 (————) = 0.088 2 1000
V = 1.4 x 300 = 420
Ea = 1x 0.11 = 0.11
Can be used based on E = 0.088 ≤ Ea = 0.11
Wa = 1 x 1 x 4 = 4 K = 1 β = 1 Wmax = 4α1 = 1/4 = 0.25
Examine My.My = 1 x 9.8 (10 + 30)/1000 = 0.39 A3 = 30May = 1 x 1 x 18 = 18 Mymax = 18 K = 1 γ = 1
α2 = 0.39/18 = 0.022
Examine Mep. (30 + 10.5)Mep = 1/3 x 16.8 x 9.8 x ——————— = 2.2 1000 We = 4/100 x 10 x 420 = 16.8 A2 = 10.5Meap = 1 x 0.7 x 18 = 12.6 K = 1 γ = 0.7Mpmax = 18α3 = 2.2/12.6 = 0.17
Examine Mey. (30 + 24.5)Mey = 1/3 x 16.8 x 9.8 x ——————— = 3.0 1000 We=168 A4 = 24.5Meay = 12.6 (Same value as Meap)α'3 = 3.0/12.6 = 0.24
Σαn = α1 + α2 + α'2 + α3 + α'3= 0.25 + 0.022 + 0.011 + 0.17 + 0.24 = 0.693 ≤ 1
And it is possible to use.
1
2
3
• Model to be used• Type of cushion• Workpiece mounting position• Mounting orientation • Average speed Va (mm/s)• Load weight W (kg): Fig. (1)• Overhang Ln (mm) Fig. (2)
Wa = K • β • Wmax Workpiece mounting coefficient K: Fig. (3) Allowable load weight coefficient β: Graph (1) Max. allowable load weight Wmax: Table (2)α1 = W/Wa
M = W x 9.8 (Ln + An)/1000 Correction value of moment center position distance An: Table (3)
Ma = K • γ • Mmax Workpiece mounting coefficient K: Fig. (3) Allowable moment coefficient γ: Graph (2) Maximum allowable moment Mmax: Table (4)
α2 = M/Ma
(Ln + An)Me = 1/3 We x 9.8 ————— 1000 Collision equivalent to impact We = ∂ • W • V
∂: Bumper coefficient Rubber stopper without adjuster = 4/100 Shock absorber = 1/100 Metal stopper= 16/100
Correction value of moment center position distance An: Table (3)
Mea = K • γ • Mmax Workpiece mounting coefficient K: Fig. (3) Allowable moment coefficient γ: Graph (2) Max. allowable moment Mmax: Graph (4)
α3 = Me/Mea
RollingYawing
Pitching
Yawing
Examine Mr.Mr = 1 x 9.8 (30 + 10.5)/1000 = 0.39 A6 = 10.5Mar = 36 Mrmax = 36 K = 1 γ = 1
α'2 = 0.39/36 = 0.011
L2 +
A5
L3
L1
Ea = K • E max
1 V 2E = —— • W (————) 2 1000 Collision speed V = 1.4Va ——∗
Workpiece mounting coefficient K: Fig. (3)
Max. allowable kinetic energy Emax: Table (1)
Kinetic energy (E) ≤ Allowable kinetic energy (Ea)
Enumerate the operating conditions considering the mounting position and workpiece configuration.
Find the kinetic energy E (J) of the load.
Find the allowable kinetic energy Ea (J).Confirm that the kinetic energy of the load does not exceed the allowable kinetic energy.
Find the allowable load weight Wa (kg).Note) No need to consider this load
factor in the case of using perpendicularly in a vertical position. (Define α1 =0.)
Find the load factor of the load weight α1.
Find the static moment M (N·m).
Find the allowable static moment Ma (N·m).
Find the load factor α2 of the static moment.
Find the dynamic moment Me (N·m).
Find the allowable dynamic moment Mea (N·m).
Find the load factor α3 of the dynamic moment.
Use is possible if the sum of the load factors does not exceed 1.
∗) Correction factor (Reference values)
8-5-14
14
SymbolAn (n = 1 to 6)EEmaxLn (n = 1 to 3)M (Mp, My, Mr)Ma (Map, May, Mar)Me (Mep, Mey)Mea (Meap, Meay)Mmax (Mpmax, Mymax, Mrmax)V
DefinitionCorrection value of moment center position distanceKinetic energyAllowable kinetic energyOverhangStatic moment (Pitch, Yaw, Roll)Allowable static moment (Pitch, Yaw, Roll)Dynamic moment (Pitch, Yaw) Allowable dynamic moment (Pitch, Yaw) Maximum allowable moment (Pitch, Yaw, Roll)Collision speed
Unitmm
JJ
mmN·mN·mN·mN·mN·m
mm/s
SymbolVaWWaWeWmaxαβγK
DefinitionAverage speedLoad weightAllowable load weightWeight equivalent to impactMax. allowable load weightLoad factorAllowable load weight coefficientAllowable moment coefficientWorkpiece mounting coefficient
Unitmm/s
kgkgkgkg————
Symbol
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Model101.42.04.7
13 19 32
Table (4) Maximum Allowable Moment: Mmax (N·m)
Table (3) Correction Value of Moment Center Position Distance: An (mm)
Table (1) Allowable Kinetic Energy: Emax (J) Table (2)Maximum Allowable Load Weight: Wmax (kg)
Allo
wab
le lo
ad w
eigh
t coe
ffici
ent:
β 1.0
0.7
0.5
0.4
0.3
0.2
50 100 200 300 500 700Average speed Va (mm/s)
Graph (1) Allowable Load Weight Coefficient: β
Allo
wab
le m
omen
t coe
ffici
ent:
γ 1.0
0.7
0.5
0.4
0.3
0.2
50 100 200 300 500 700Average speed Va (mm/s) Collision speed V (mm/s)
Graph (2) Allowable Moment Coefficient: γ
Fig. (1) Load Weight: W (kg)
Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm)
W
W
Pitch moment Yaw moment Roll moment
Sta
tic m
omen
tA
djus
ting
bolt
Note) Static moment: Moment generated by gravityDynamic moment: Moment generated by impact when colliding with stopper
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Model
1014.516.521 27 29.535.5
Correction value of moment center position distance (Refer to Figure (2).)
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
Model
0.612469
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
ModelAllowable kinetic energy
Without adjusterRubber stopper
0.0180.0270.0550.11 0.16 0.24
Maximum allowable load weight
Fig. (3) Workpiece Mounting Coefficient: K
W
W
Table mounting
End plate mounting
K = 1
K = 0.6
W
Mp
L1 A1
W
Mp
L1 A2
Mep
A2
L3
Mey
L2A
4
W
My
L2 A3
W
My
L2 A4
W
Mr
L3 A5
W
Mr
L3 A6
0.0180.0270.0550.11 0.16 0.24
Shock absorber—
0.0540.11 0.22 0.32 0.48
Metal stopper0.0090.0130.0270.0550.0800.12
Adjuster option
A1, A3
Stroke (mm) A2 A4 A5 A6
2014.516.521 27 29.535.5
3014.518.521 27 29.535.5
4018.520.525 27 29.535.5
5018.528 25 30 33.543
75—
28.534 33 37.543
100——
34 42.553.550
125———
42.555 64
150————
56.564
6 7 9
10.514 16.5
13.516 19.524.530 37
13.516 19.524.530 37
6 7 9
10.514 16.5
Stroke (mm)201.42.04.7
13 19 32
301.42.84.7
13 19 32
402.83.77.2
13 19 32
502.87.97.2
18 27 52
75—7.9
15 23 36 52
100——15428478
125——— 42 84140
150————
84140
103.55.1
11 31 47 81
203.55.1
11 31 47 81
303.56.0
11 31 47 81
405.16.9
13 31 47 81
505.17.4
13 36 57
110
75—7.4
14 41 66
110
100—— 14 41 75130
125——— 41 75130
150———— 75130
Pitch/Yaw moment: Mpmax/MymaxStroke (mm)
Roll moment: Mrmax
Note) For A2, A4, A5 and A6, there is no difference in the corrected values due to the stroke.
Caution The maximum operating speed for metal stopper is 200 mm/s.
W
Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.
Note) Use the average speed when calculating static moment.Use the collision speed when calculating dynamic moment.
—
8-5-15
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
15
Dimensions: MXQ6
Model F2225212627
N44666
G 613—1121
H2326—2828
NN22333
I 9 9 916 9
J1727374865
K21.531.541.551.561.5
Z41.551.561.579.589.5
M4252628090
ZZ4858688696
MXQ6-10MXQ6-20MXQ6-30MXQ6-40MXQ6-50
Basic style
4-M2.5 x 0.45 thread depth 3.5
4-M2.5 x 0.45 thread depth 2.5
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjuster
ø3 depth 2.5+0.03 0
2N – 1 x F
3
d
epth
2.5
+0.
03 0
ø3H9 depth 2.5+0.025 0
3H9
dep
th 2
.5+
0.02
5 0
(mm)
GA1313293949
HA1626202828
Z
ZZ
Max. 10 (Retraction end adjuster)6IJ
10.5 5.5
6 (A
djus
ter
at e
xten
sion
end
)
3
2 6
131620
3-M3 x 0.5 thread depth 5
1
19.5 (Adjuster at extension end)
5.5
3.5
2-M2.5 x 0.45 thread depth 3
Operating port 2-M5 x 0.8
5.5
10
13.5
20
4
9
4
N-M3 x 0.5 thread depth 4
14 271.
5
31
5.5 3
1512
18.2
0.3
F
11
5 M
12.5K
6.53
3.5
20
Bottom view of MXQ6-30
10.5 5.5
ø6.
5
ø7
ø3.
2
ø3.
2
ø6.
5
ø7
NN-M4 x 0.7 thread depth 8
(NN – 1) x H G
B
H
A
4
HA GA
B´A´
12
0.5
Note)
Note) Refer to the bottom view of MXQ6-30.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P.8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-16
16
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With buffer (ø6): MXQ6-��F
3-M3 x 0.5 thread depth 5
266.
3
Operating port 2-M5 x 0.8
Axial piping type (ø6): MXQ6-��P
8
4 28
22
0.3
19.2
1630
8
5.5
12
12
12.5
8-5-17
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
17
4-M2.5 x 0.45 thread depth 3.5
4-M2.5 x 0.45 thread depth 2.56.5
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjuster
ø3 depth 2.5+0.03 0
3
d
epth
2.5
+0.
03 0
ø3H9 depth 2.5+0.025 0
3H9
dep
th 2
.5+
0.02
5 0
Z
ZZ
Max. 10(Retraction end adjuster)
6IJ
6 (A
djus
ter
at e
xten
sion
end
)
19.5 (Adjuster at extension end)
3
2 6
131620
3-M3 x 0.5 thread depth 5
15.
53.
5
2-M2.5 x 0.45 thread depth 3Operating port 2-M5 x 0.8
5.5
10 13.5
20
4
9
4
N-M3 x 0.5 thread depth 4
14 271.
5
31
5.5 3
1512
18.2
0.3
F
2N – 1 x F
11
5 M
12.5K
3 3.5
20
Bottom view of MXQ6L-30
10.5 5.5
ø3.
2
ø6.
5 ø7
10.5 5.5
ø3.
2
ø6.
5 ø7
NN-M4 x 0.7 thread depth 8
(NN – 1) x H G
B´
H
A´
4
HA GA
BA
12
Dimensions: MXQ6L/Symmetric Type
Model F2225212627
N44666
G 613—1121
H2326—2828
NN22333
I 999
169
J1727374865
K21.531.541.551.561.5
Z41.551.561.579.589.5
M4252628090
ZZ4858688696
MXQ6L-10MXQ6L-20MXQ6L-30MXQ6L-40MXQ6L-50
Basic style
(mm)
GA1313293949
HA1626202828
0.5
Note)
Note) Refer to the bottom view of MXQ6L-30.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-18
18
3-M3 x 0.5 thread depth 5
Operating port 2-M5 x 0.8
8
4
0.3
19.2
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With buffer (ø6): MXQ6L-��F
Axial piping type (ø6): MXQ6L-��P
266.
3
5.5
12
28
22
12
12.5
1630
8
8-5-19
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
19
4-M3 x 0.5 thread depth 4
NA-M3 x 0.5 thread depth 3.5
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjuster
ø3 depth 3+0.03 0
2N – 1 x F
ø3H9 depth 3+0.025 0
Z
ZZ
Max. 11 (Retraction end adjuster)8IJ
12.5 5.7
6.5
(Adj
uste
r at
ext
ensi
on e
nd)
3.5
2 7
62327
3-M4 x 0.7 thread depth 6
1
22.5 (Adjuster at extension end)
6.5
416
2-M3 x 0.5 thread depth 4
Operating port 2-M5 x 0.8
6.5
12
24
5
10
4
N-M3 x 0.5 thread depth 5
16 321
36
6.5 3.5
1715
21.2
0.3
F
12
3
d
epth
3+
0.03
0
6 M
14.6K73.8
14.6KA73.8
4
23
Bottom view of MXQ8-30
ø6.
5
ø7ø3.
2
12.5 5.7
ø6.
5
ø7ø3.
2
NN-M4 x 0.7 thread depth 8
(NN – 1) x H G
BH
A
4
HA GAB´
A´
143H
9
d
epth
3+
0.02
5 0
Dimensions: MXQ8
Model F252526324650
N446666
G 714— 8 831
H2528—312930
NN223344
I111012141312
J 17 28 40 52 78105
K23.533.543.553.563.588.5
Z 45.5 55.5 69.5 83.5108.5134.5
M 46 56 70 84109135
ZZ 53 63 77 91116142
MXQ8-10MXQ8-20MXQ8-30MXQ8-40MXQ8-50MXQ8-75
Basic style
GA131429393761
HA192827315860
NA444488
KA————
82.5112.5
0.7
Note)
Note) Refer to the bottom view of MXQ8-30.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
(mm)
Series MXQ
8-5-20
20
Extension end20
Retraction end20
Stroke Adjustable Range(mm)
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With shock absorber (ø8): MXQ8-��BS/BT/B
With buffer (ø8): MXQ8-��F
∗ Other dimensions are the same as basic style.
With end lock (ø8): MXQ8-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø8): MXQ8-��P
3-M4 x 0.7 thread depth 6
Shock absorber at extension end
Shock absorber at retraction end
316.
340
.53
Operating port 2-M5 x 0.8
Operating port 2-M5 x 0.8
10
5 28.5
25Max. 23
Maximum 328
25
22
22.5
0.3
22.2
11.5
1
2434
12
6.5
15
12
16
14.5
4
17.5
8-5-21
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
21
4-M3 x 0.5 thread depth 4
NA-M3 x 0.5 depth 3.5
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjuster
ø3 depth 3+0.03 0
3
d
epth
3+
0.03
0
ø3H9 depth 3 +0.025 0
ZZZ
Max. 11 (Retraction end adjuster)
8IJ
6.5
(Adj
uste
r at
ext
ensi
on e
nd)
22.5 (Adjuster at extension end)
3.5
2 762327
3-M4 x 0.7 thread depth 6
16.
54
2-M3 x 0.5 thread depth 4 Operating port 2-M5 x 0.8
6.5
12 16
24
5
10
4
N-M3 x 0.5 thread depth 5
16 321
366.5 3.5
1715
21.2
0.3
F
2N – 1 x F
12
6 M
14.6KA
14.6K
3.8 7
3.8 7
4
23
Bottom view of MXQ8L-30
12.5 5.7
ø3.
2
ø6.
5 ø7
12.5 5.7
ø3.
2
ø6.
5 ø7
NN-M4 x 0.7 thread depth 8
(NN – 1) x H G
B´HA´
4
HA GA
BA
143H
9
d
epth
3+
0.02
5 0
Dimensions: MXQ8L/Symmetric Type
Model F252526324650
N446666
G 714— 8 831
H2528—312930
NN223344
I111012141312
J 17 28 40 52 78105
K23.533.543.553.563.588.5
Z 45.5 55.5 69.5 83.5108.5134.5
M 46 56 70 84109135
ZZ 53 63 77 91116142
MXQ8L-10MXQ8L-20MXQ8L-30MXQ8L-40MXQ8L-50MXQ8L-75
Basic style
(mm)
GA131429393761
HA192827315860
NA444488
KA————
82.5112.5
0.7
Note)
Note) Refer to the bottom view of MXQ8L-30.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-22
22
3-M4 x 0.7 thread depth 6
Shock absorber at extension end
Shock absorber at retraction end
6.3
3140
.53
Operating port 2-M5 x 0.8
Operating port 2-M5 x 0.8
10
5 28.5
25
Max. 23
Maximum 328
25
22
22.5
0.3
22.2
11.5
1
2434
12
6.5
15
12
16
14.5
4
17.5
∗ Other dimensions are the same as basic style
∗ Other dimensions are the same as basic style.
With shock absorber (ø8): MXQ8L-��BS/BT/B
With buffer (ø8): MXQ8L-��F
∗ Other dimensions are the same as basic style.
With end lock (ø8): MXQ8L-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø8): MXQ8L-��P
Extension end20
Retraction end20
Stroke Adjustable Range(mm)
8-5-23
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
23
4-M4 x 0.7 thread depth 6
NA-M4 x 0.7 thread depth 4
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjusterø4H9 depth 4+0.030
0
ø4H9 depth 4+0.030 0
ZZZ
Max. 13 (Retraction end adjuster)10IJ
16 8
10 (
Adj
uste
r at
ext
ensi
on e
nd)
4.75
2 9.5
92939
3-M5 x 0.8 thread depth 8
1
29.5 (Adjuster at extension end)
85
2-M4 x 0.7 thread depth 6 Operating port 2-M5 x 0.8
8.5
14.5
19.5
29
5
13
5
N-M4 x 0.7 thread depth 5
20 392.
5
46
8 4.5
2220
27.2
0.3
F
2N – 1 x F16
4H9
dep
th 4
+0.
030
0
8 M
18.5K8.55
18.5KA8.55
4.8
30
Bottom view of MXQ12-40
ø8.
5
ø9ø4.
2
16 8
ø8.
5
ø9ø4.
2
NN-M5 x 0.8 thread depth 10
(NN – 1) x H G
BH
A
5
HA GA
B´A´
194H
9
d
epth
4+
0.03
0 0
Dimensions: MXQ12
Model F28283834343636
N 4 4 4 6 6 810
G181820— 92312
H323240—393636
NN2223345
I12121415131717
J 34 34 42 58 70110135
K 26.5 36.5 46.5 56.5 66.5 91.5116.5
Z 66 66 76 93103147172
M 67 67 77 94104148173
ZZ 76 76 86103113157182
MXQ12-10MXQ12-20MXQ12-30MXQ12-40MXQ12-50MXQ12-75MXQ12-100
Basic style
(mm)
GA18182038485984
HA32324039397272
NA4444488
KA—————
117.5142.5
1
Note)
Note) Refer to the bottom view of MXQ12-40.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-24
24
3-M5 x 0.8 thread depth 8
Shock absorber at extension end Shock absorber at retraction end
416.
3
513
Operating port 2-M5 x 0.8
Operating port 2-M5 x 0.8
13
5 37
29.5 Max. 18
Maximum 3010
29.5
29
0.3
29.2
10
2943
14.5
8.5
20
13
22
16.5
5
22
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With shock absorber (ø12): MXQ12-��BS/BT/B
With buffer (ø12): MXQ12-��F
∗ Other dimensions are the same as basic style.
With end lock (ø12): MXQ12-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø12): MXQ12-��P
Extension end18
Retraction end18
Stroke Adjustable Range(mm)
8-5-25
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
25
Max. 13 (Retraction end adjuster)
10IJ
4-M4 x 0.7 thread depth 6
NA-M4 x 0.7 thread depth 4
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjuster
ø4H9 depth 4+0.030 0
4H9
de
pth
4+0
.030
0
ø4H9 depth 4+0.030 0
Z
ZZ10
(A
djus
ter
at e
xten
sion
end
)
29.5 (Adjuster at extension end)
4.75
2 9.5
92939
3-M5 x 0.8 thread depth 8
18
5
2-M4 x 0.7 thread depth 6 Operating port 2-M5 x 0.8
8.5
14.5
19.5
29
5
13
5N-M4 x 0.7 thread depth 5
20 392.
5
46
8 4.5
2220
27.2
0.3
F2N – 1 x F
16
8 M
18.5KA
18.5K
5 8.5
5 8.5
4.8 30
Bottom view of MXQ12L-40
16 8
ø4.
2
ø8.
5 ø9
16 8
ø4.
2
ø8.
5 ø9
NN-M5 x 0.8 thread depth 10
(NN – 1) x H G
B´H
A´
5
HA GA
BA
194H
9
dept
h 4
+0.0
30 0
Dimensions: MXQ12L/Symmetric Type
Model F28283834343636
N 4 4 4 6 6 810
G181820— 92312
H323240—393636
NN2223345
I12121415131717
J 34 34 42 58 70110135
K 26.5 36.5 46.5 56.5 66.5 91.5116.5
Z 66 66 76 93103147172
M 67 67 77 94104148173
ZZ 76 76 86103113157182
MXQ12L-10MXQ12L-20MXQ12L-30MXQ12L-40MXQ12L-50MXQ12L-75MXQ12L-100
Basic style
(mm)
GA18182038485984
HA32324039397272
NA4444488
KA—————
117.5142.5
1
Note)
Note) Refer to the bottom view of MXQ12L-40.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-26
26
3-M5 x 0.8 thread depth 8
Shock absorber at extension endShock absorber at retraction end
6.3
4151
3
Operating port 2-M5 x 0.8
Operating port 2-M5 x 0.8
13
5 37
29.5 Max. 18
Maximum 3010
29.5
29
0.3
29.2
10
2943
14.5
8.5
20
13
22
16.5
5
22
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With shock absorber (ø12): MXQ12L-��BS/BT/B
With buffer (ø12): MXQ12L-��F
∗ Other dimensions are the same as basic style.
With end lock (ø12): MXQ12L-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø12): MXQ12L-��P
Extension end18
Retraction end18
Stroke Adjustable Range(mm)
8-5-27
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
27
4-M5 x 0.8 thread depth 7
NA-M5 x 0.8 thread depth 6.5
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjusterø5H9 depth 5+0.030
0
ø5H9 depth 5+0.030 0
ZZZ
Max. 12 (Retraction end adjuster)12IJ
21 9
12.5
(A
djus
ter
at e
xten
sion
end
)
5.5
3 11
133545
3-M6 x 1 thread depth 10
1
36.5 (Adjuster at extension end)
115.
5
2-M5 x 0.8 thread depth 8
Operating port 2-M5 x 0.8
11
14.5
24.5
29
6.5
14
6
N-M5 x 0.8 thread depth 6
24 493.
5
58
11 5.5
2824
.5
33.7
0.3
F
2N – 1 x F21
5H9
dep
th 5
+0.
030
0
10 M
21K105.5
21KA105.5
5.5
37
Bottom view of MXQ6-30
ø9.
5
ø10
.5
ø5.
1
21 9
ø9.
5
ø10
.5
ø5.
1
NN-M6 x 1 thread depth 12
(NN – 1) x H G
BH
A
6
HA GA
B´A´
245H
9
dept
h 5
+0.
030
0
Dimensions: MXQ16
Model F3838485840464444
N 4 4 4 4 6 6 810
G18181919—213617
H39394858—524444
NN22223345
I1212121220151823
J 40 40 50 60 68105145165
K 28 38 48 58 68 93118143
Z 77 77 87 97113145188213
M 78 78 88 98114146189214
ZZ 89 89 99109125157200225
MXQ16-10MXQ16-20MXQ16-30MXQ16-40MXQ16-50MXQ16-75MXQ16-100MXQ16-125
Basic style
(mm)
GA 18 18 19 19 48 73 80105
HA3939485845528888
NA44448888
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
KA————
91123166191
1
Note)
Note) Refer to the bottom view of MXQ16-50.
Note)
Series MXQ
8-5-28
28
3-M6 x 1 thread depth 10
Shock absorber at extension end
Shock absorber at retraction end
526.
3
65.5
Operating port 2-M5 x 0.8
Operating port 2-M5 x 0.8
15.5
6.5 41
36.5 Maximum 20
Maximum 3412
36.5
30
0.3
35.7
12.5
4254
21
11
26
14
25
21
6
29
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With shock absorber (ø16): MXQ16-��BS/BT/B
With buffer (ø16): MXQ16-��F
∗ Other dimensions are the same as basic style.
With end lock (ø16): MXQ16-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø16): MXQ16-��P
Extension end22
Retraction end22
Stroke Adjustable Range(mm)
8-5-29
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
29
Max. 12 (Retraction end adjuster)
12IJ
4-M5 x 0.8 thread depth 7
NA-M5 x 0.8 thread depth 6.5
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjuster
ø5H9 depth 5+0.030 0
ø5H9 depth 5+0.030 0
ZZZ
12.5
(A
djus
ter
at e
xten
sion
end
)
36.5 (Adjuster at extension end)
5.5
3 11
3-M6 x 1 thread depth 10
111
5.5
2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8
11
14.5
24.5
29
6.5
14
6
N-M5 x 0.8 thread depth 6
24 493.
5
5811 5.5
2824
.5
33.7
0.3
2N – 1 x F
21
5H9
de
pth
5+0
.030
0
10 M
21KA
21K
5.5 10
5.5 10
5.5 37
Bottom view of MXQ16L-50
21 9
ø5.
1
ø9.
5
ø10
.5
21 9
ø5.
1
ø9.
5
ø10
.5
NN-M6 x 1 thread depth 12
(NN – 1) x H G
B´HA´
6
HA GA
BA
24
5H9
de
pth
5+0
.030
0
Dimensions: MXQ16L/Symmetric Type
Model F3838485840464444
N 4 4 4 4 6 6 810
G18181919—213617
H39394858—524444
NN22223345
I1212121220151823
J 40 40 50 60 68105145165
K 28 38 48 58 68 93118143
Z 77 77 87 97113145188213
M 78 78 88 98114146189214
ZZ 89 89 99109125157200225
MXQ16L-10MXQ16L-20MXQ16L-30MXQ16L-40MXQ16L-50MXQ16L-75MXQ16L-100MXQ16L-125
Basic style
(mm)
GA 18 18 19 19 48 73 80105
HA3939485845528888
NA44448888
KA————
91123166191
F
1
133545
Note)
Note) Refer to the bottom view of MXQ16L-50.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-30
30
Maximum 3412
36.5
3-M6 x 1 thread depth 10
Shock absorber at extension end Shock absorber at retraction end
6.3
52
65.5
Operating port 2-M5 x 0.8
Operating port 2-M5 x 0.8
15.5
6.5 41
36.5 Maximum 20
30
0.3
35.7
12.5
4254
21
11
26
14
25
21
6
29
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With shock absorber (ø16): MXQ16L-��BS/BT/B
With buffer (ø16): MXQ16L-��F
∗ Other dimensions are the same as basic style.
With end lock (ø16): MXQ16L-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø16): MXQ16L-��P
Extension end22
Retraction end22
Stroke Adjustable Range(mm)
8-5-31
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
31
4-M5 x 0.8 thread depth 8
NA-M6 x 1 thread depth 6
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjuster
ø5H9 depth 5+0.030 0
ø5H9 depth 5+0.030 0
ZZZ
Max. 14 (Retraction end adjuster)13IJ
2610.5
14.5
(Adj
uste
r at e
xten
sion
end
)6.5
2.5 13
123648
3-M6 x 1 thread depth 13
1.5
45.5 (Adjuster at extension end)
13.5
6.5
2-M6 x 1 thread depth 7 Operating port 2-Rc 1/8
14
17.5
30
35
7
18
6
N-M5 x 0.8 thread depth 8
301.
5
603
70
15 6
3331
41.5
0.5
F
2N -1 x F27
5H9
de
pth
5+0
.030
0
13 M
25K126.5
25KA126.5
6.5
46
Bottom view of MXQ6-30
ø9.
5
ø11
ø5.
1
26 10.5
ø9.
5
ø11ø5.
1
NN-M6 x 1 thread depth 12
(NN-1) x H G
BH
A
6
HA GA
B´A´
29
5H9
de
pth
5+0
.030
0
Dimensions: MXQ20
Model F454048584255505562
N444466888
G22222222—17183756
H46464656—56565962
NN222233444
I161616161823251821
J 46 46 46 56 72100155190215
K 31 41 51 61 71 96121146171
Z 92.5 92.5 92.5102.5120.5153.5210.5238.5266.5
M 94 94 94104122155212240268
ZZ108108108118136169226254282
MXQ20-10MXQ20-20MXQ20-30MXQ20-40MXQ20-50MXQ20-75MXQ20-100MXQ20-125MXQ20-150
Basic style
(mm)
GA 18 18 18 22 48 73 74 96118
HA 50 50 50 56 48 56112118124
NA444448888
KA—————
126183211239
Note)
Note) Refer to the bottom view of MXQ20-50.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-32
32
3-M6 x 1 thread depth 13
Shock absorber at extension end
Shock absorber at retraction end
6511
.578
.5
Operating port 2-Rc 1/8
Operating port 2-Rc 1/8
18
7 44.5
46.50.5 0.5Max. 35
Maximum 5413
46.5
30.5
0.5
42.5
163560
17.5
20
33
26
14
32
8
34
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With shock absorber (ø20): MXS20-��BS/BT/B
With buffer (ø20): MXQ20-��F
∗ Other dimensions are the same as basic style.
With end lock (ø20): MXQ20-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø20): MXQ20-��P
Extension end35
Retraction end35
Stroke Adjustable Range(mm)
8-5-33
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
33
Max. 14 (Retraction end adjuster)
13IJ
4-M5 x 0.8 thread depth 8
NA-M6 x 1 thread depth 6
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjuster
ø5H9 depth 5+0.030 0
ø5H9 depth 5+0.030 0
Z
ZZ
14.5
(A
djus
ter
at e
xten
sion
end
)
45.5 (Adjuster at extension end)
6.5
2.5 13
123648
3-M6 x 1 thread depth 13
1.5
13.5
6.5
2-M6 x 1 thread depth 7
Operating port 2-Rc 1/8
14
17.5
35
30
7
18
6
N-M5 x 0.8 thread depth 8
301.
5
603
70
15 6
3331
41.5
0.5
F2N – 1 x F
27
5H9
dep
th 5
+0.0
30 0
13 M
25KA
25K
6.5 12
6.5 12
6.5 46
Bottom view of MXQ20L-50
26 10.5
ø5.
1
ø9.
5
ø11
26 10.5
ø5.
1
ø9.
5
ø11
NN-M6 x 1 thread depth 12
(NN – 1) x H G
B´HA´
6
HA GA
BA
29
5H9
dep
th 5
+0.0
30 0
Dimensions: MXQ20L/Symmetric Type
Model F454048584255505562
N444466888
G22222222—17183756
H46464656—56565962
NN222233444
I161616161823251821
J 46 46 46 56 72100155190215
K 31 41 51 61 71 96121146171
Z 92.5 92.5 92.5102.5120.5153.5210.5238.5266.5
M 94 94 94104122155212240268
ZZ108108108118136169226254282
MXQ20L-10MXQ20L-20MXQ20L-30MXQ20L-40MXQ20L-50MXQ20L-75MXQ20L-100MXQ20L-125MXQ20L-150
Basic style
(mm)
GA 18 18 18 22 48 73 74 96118
HA 50 50 50 56 48 56112118124
NA444448888
KA—————
126183211239
Note)
Note) Refer to the bottom view of MXQ20L-50.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-34
34
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With shock absorber (ø20): MXQ20L-��BS/BT/B
With buffer (ø20): MXQ20L-��F
∗ Other dimensions are the same as basic style.
With end lock (ø20): MXQ20L-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø20): MXQ20L-��P
3560 17.5
Maximum 5413
3-M6 x 1 thread depth 13
Shock absorber at extension end
Shock absorber at retraction end
11.5
6578
.5
Operating port 2-Rc 1/8
Operating port 2-Rc 1/8
18
7 44.5
46.50.5
46.50.5Max. 35
30.5
0.5
42.5
16
14
32
20
26
8
33
34
Extension end35
Retraction end35
Stroke Adjustable Range(mm)
8-5-35
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
35
6H9
dep
th 6
+0.0
30 0
ZZZ
4-M6 x 1 thread depth 10
NA-M8 x 1.25 thread depth 8
Section AA´ Section BB´
Adjuster at extension endRetraction end adjusterø6H9 depth 6+0.030
0
ø6H9 depth 6+0.030 0
Max. 17 (Retraction end adjuster)15IJ
32 11.5
16.5
(A
djus
ter
at e
xten
sion
end
)
8
4 16
225065
3-M8 x 1.25 thread depth 15
1.5
54.5 (Adjuster at extension end)
168
2-M8 x 1.25 thread depth 9 Operating port 2-Rc 1/8
17
22 37
44
6.5
21.5
7
N-M6 x 1 thread depth 11
361.
5
743
84
20 6.5
4038
49.5
0.5
F
2N – 1 x F
30
6H9
dep
th 6
+0.0
30 0
15 M
31K158
31KA158
855
35
Bottom view of MXQ25-75
ø11
ø12ø6.
632 11.5
ø11
ø12
NN-M8 x 1.25 thread depth 16
(NN – 1) x H G
BH
A
7
HA GA
B´A´
Dimensions: MXQ25
Model F554655657560486065
N444446888
G2323232332—443156
H5555556580—446666
NN222223444
I161616161631201818
J 56 56 56 66 90100150205230
K 35 45 55 65 75100125150175
Z105.5105.5105.5115.5139.5164.5203.5256.5281.5
M107107107117141166205258283
ZZ123123123133157182221274299
MXQ25-10MXQ25-20MXQ25-30MXQ25-40MXQ25-50MXQ25-75MXQ25-100MXQ25-125MXQ25-150
Basic style
(mm)
GA 23 23 23 23 32 72 88 97122
HA 55 55 55 65 80 65 88132132
NA444444888
KA——————
170223248
ø6.
6
Note)
Note) Refer to the bottom view of MXQ25-75.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-36
36
3-M8 x 1.25 thread depth 15
Shock absorber at extension end
Shock absorber at retraction end
7911
.5
94
Operating port 2-Rc 1/8
Operating port 2-Rc 1/8
21.5
6.5 50
35
54.5 Max. 29
Maximum 5215
54.5
0.5
49.5
16.5
4474
22
20
37
32
17
40
8
40
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With shock absorber (ø25): MXQ25-��BS/BT/B
With buffer (ø25): MXQ25-��F
∗ Other dimensions are the same as basic style.
With end lock (ø25): MXQ25-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø25): MXQ25-��P
Extension end35
Retraction end35
Stroke Adjustable Range(mm)
8-5-37
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
37
Max. 17 (Retraction end adjuster)
15IJ
4-M6 x 1 thread depth 10
NA-M8 x 1.25 thread depth 8
Section AA´ Section BB´
Adjuster at extension end
Retraction end adjusterø6H9 depth 6+0.030 0
ø6H9 depth 6+0.030 0
Z
ZZ16
.5 (A
djus
ter a
t ext
ensio
n en
d)
54.5 (Adjuster at extension end)
8
4 16
7
225065
3-M8 x 1.25 thread depth 15
1.5
168
2-M8 x 1.25 thread depth 9 Operating port 2-Rc 1/8
22
37
44
6.521.5
N-M6 x 1 thread depth 11
361.
5
743
8420 6.5
4038
49.5
0.5
F
2N – 1 x F
30
6H9
dep
th 6
+0.0
30 0
15 M
31KA
31K
8 15
8 15
8
55
Bottom view of MXQ25L-75
32 11.5
ø11 ø12
32 11.5
ø11 ø12
NN-M8 x 1.25 thread depth 16
(NN – 1) x H G
B´HA´
7
HA GA
BA
35
17
6H9
dep
th 6
+0.
030
0
Dimensions: MXQ25L/Symmetric Type
Model F554655657560486065
N444446888
G2323232332—443156
H5555556580—446666
NN222223444
I161616161631201818
J 5656566690
100150205230
K 35 45 55 65 75100125150175
Z105.5105.5105.5115.5139.5164.5203.5256.5281.5
M107107107117141166205258283
ZZ123123123133157182221274299
MXQ25L-10MXQ25L-20MXQ25L-30MXQ25L-40MXQ25L-50MXQ25L-75MXQ25L-100MXQ25L-125MXQ25L-150
Basic style
(mm)
GA 23 23 23 23 32 72 88 97122
HA55555565806588132132
NA444444888
KA——————
170223248
ø6.
6
ø6.
6
Note)
Note) Refer to the bottom view of MXQ25L-75.
Note)
∗ For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.Rubber stopper (P. 8-5-40)Metal stopper (P. 8-5-43)
Series MXQ
8-5-38
38
4474
22
Maximum 5215
54.5
3-M8 x 1.25 thread depth 15
Shock absorber at extension end
Shock absorber at retraction end
11.5
79
94
Operating port 2-Rc 1/8
Operating port 2-Rc 1/8
21.5
6.5 50
54.5 Max. 29
350.5
49.5
16.5
17
40
20
32
8
37
40
∗ Other dimensions are the same as basic style.
∗ Other dimensions are the same as basic style.
With shock absorber (ø25): MXQ25L-��BS/BT/B
With buffer (ø25): MXQ25L-��F
∗ Other dimensions are the same as basic style.
With end lock (ø25): MXQ25L-��R
∗ Other dimensions are the same as basic style.
Axial piping type (ø25): MXQ25L-��P
Extension end35
Retraction end35
Stroke Adjustable Range(mm)
8-5-39
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
39
External Dimensions of Adjuster
Extension End
Applicable size
MXQ6(L)
MXQ8(L)
MXQ12(L)
MXQ16(L)
MXQ20(L)
MXQ25(L)
Model
MXQ-AS6(L)
MXQ-AS6(L)-X11
MXQ-AS8(L)
MXQ-AS8(L)-X11
MXQ-AS8(L)-X12
MXQ-AS12(L)
MXQ-AS12(L)-X11
MXQ-AS12(L)-X12
MXQ-AS16(L)
MXQ-AS16(L)-X11
MXQ-AS16(L)-X12
MXQ-AS20(L)
MXQ-AS20(L)-X11
MXQ-AS20(L)-X12
MXQ-AS25(L)
MXQ-AS25(L)-X11
MXQ-AS25(L)-X12
5
15
5
15
25
5
15
25
5
15
25
5
15
25
5
15
25
Strokeadjustment range
(mm)
Body mounting section Table mounting section
A
6
7
9.5
11
13
16
Retraction End
Applicable size
MXQ6(L)
MXQ8(L)
MXQ12(L)
MXQ16(L)
MXQ20(L)
MXQ25(L)
Model
MXQ-AT6(L)
MXQ-AT6(L)-X11
MXQ-AT8(L)
MXQ-AT8(L)-X11
MXQ-AT8(L)-X12
MXQ-AT12(L)
MXQ-AT12(L)-X11
MXQ-AT12(L)-X12
MXQ-AT16(L)
MXQ-AT16(L)-X11
MXQ-AT16(L)-X12
MXQ-AT20(L)
MXQ-AT20(L)-X11
MXQ-AT20(L)-X12
5
15
5
15
25
5
15
25
5
15
25
5
15
25
5
15
25
Strokeadjustment range
(mm)
B C F G M
M5 x 0.8
M6 x 1
M8 x 1
M10 x 1
M12 x 1.25
M14 x 1.5
P ∗1)
M2.5 x 6
M3 x 8
M4 x 12
M5 x 16
M6 x 16
M8 x 18
H J K Q ∗1)
M2.5 x 8
M3 x 10
M4 x 12
M5 x 16
M6 x 16
M8 x 18
16.5
26.5
19.5
29.5
39.5
23.5
33.5
43.5
24.5
34.5
44.5
27.5
37.5
47.5
32.5
42.5
52.5
D
A
17.5
21
28
33.5
41
49
B C F G H J K ∗1) ED
M5 x 0.8
M6 x 1
M8 x 1
M10 x 1
M12 x 1.25
M14 x 1.5
M2.5 x 6
M3 x 8
M4 x 10
M5 x 12
M5 x 14
M6 x 18
Body mounting section
Table mounting section
E
19
22
29
36
45
54
8
9
14
17
20
22
7
7.5
11
13.5
16
18
7
8
12
14
17
19
2.5
3
4
5
6
6
12.5
14.6
18.5
21
25
31
6
7
10.5
13
16
17
8.3
9.8
12.7
15
18
20
∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.
For “How to Order”, refer to page 8-5-10. Dimensions are the same as standard type.
MXQ-AT25(L)
MXQ-AT25(L)-X11
MXQ-AT25(L)-X12
19
22
29
35.5
44.5
53.5
10.5
12.5
16
20
25
31
8
10
16
17
23
28
16.5
26.5
19.5
29.5
39.5
23.5
33.5
43.5
24.5
34.5
44.5
27.5
37.5
47.5
32.5
42.5
52.5
6
8
10
12
13
15
7
8
12
14
17
19
2.5
3
4
5
6
6
∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.
For “How to Order”, refer to page 8-5-10. Dimensions are the same as standard type.
Rubber Stopper (AS/AT)
H
J
Q
K
AB
E
P
M
G
D
F
C
E
J
F
BC
DH
G
AK
(mm)
(mm)
Series MXQ
8-5-40
40
Dimensions of Adjusting Bolt/Rubber Stopper
Applicable bore size (mm)Adjustment rangeNil
-X11-X12
MXQ
5 mm15 mm25 mm
MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25
ø6 ø8 ø12 ø16 ø20 ø25
12 X11
How to Order Adjusting Bolt/Rubber Stopper
Applicable size
MXQ6(L)
MXQ8(L)
MXQ12(L)
MXQ16(L)
MXQ20(L)
MXQ25(L)
Model
MXQ-A627
MXQ-A627-X11
MXQ-A827
MXQ-A827-X11
MXQ-A827-X12
MXQ-A1227
MXQ-A1227-X11
MXQ-A1227-X12
MXQ-A1627
MXQ-A1627-X11
MXQ-A1627-X12
MXQ-A2027
MXQ-A2027-X11
MXQ-A2027-X12
MXQ-A2527
MXQ-A2527-X11
MXQ-A2527-X12
5
15
5
15
25
5
15
25
5
15
25
5
15
25
5
15
25
Strokeadjustment range
(mm)A B
2.5
3
4
5
6
6
C
716.5
26.5
19.5
29.5
39.5
23.5
33.5
43.5
24.5
34.5
44.5
27.5
37.5
47.5
32.5
42.5
52.5
8
12
14
17
19
MD
3
3.5
4
4
5
6
M5 x 0.8
M6 x 1
M8 x 1
M10 x 1
M12 x 1.25
M14 x 1.5
A 27
B D C
A
M
∗ -X12 (adjusting range: 25 mm) is not available in Series MXQ6.∗ For dimensions, refer to the figure above. ∗ Symmetric type is also the same.
(mm)
8-5-41
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
41
Extension End
Applicable size
MXQ8(L)MXQ12(L)MXQ16(L)MXQ20(L)MXQ25(L)
Model
MXQ-BS8(L)
MXQ-BS12(L)
MXQ-BS16(L)
MXQ-BS20(L)
MXQ-BS25(L)
Strokeadjustment range
(mm)
Body mounting section Table mounting section
A
Retraction End
Applicable size
MXQ8(L)MXQ12(L)MXQ16(L)MXQ20(L)MXQ25(L)
Model
MXQ-BT8(L)
MXQ-BT12(L)
MXQ-BT16(L)
MXQ-BT20(L)
MXQ-BT25(L)
20
18
22
35
35
Strokeadjustment range
(mm)
B C F G MM8 x 1
M8 x 1
M10 x 1
M14 x 1.5
M14 x 1.5
P *1)
M3 x 12
M4 x 12
M5 x 16
M6 x 18
M8 x 18
H J K Q ∗1)
M3 x 12
M4 x 12
M5 x 16
M6 x 20
M8 x 20
D
A B C E1 G H J K ∗1) ED
M8 x 1
M8 x 1
M10 x 1
M14 x 1.5
M14 x 1.5
Body mounting section Table mounting section
E
∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.
For “How to Order”, refer to page 8-5-10.Dimensions are the same as standard type.
∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.
For “How to Order”, refer to page 8-5-10.Dimensions are the same as standard type.
With Shock Absorber (BS/BT)
23
28
33.5
43
49
24.5
29
35.5
46
53.5
12.5
16
20
26
31
14
16
17
25
28
40.8
40.8
46.7
67.3
67.3
5
6
7
11
12
F
8
10
12
13
15
12
12
14
19
19
1.4
1.4
1.4
12
12
M3 x 8
M4 x 10
M5 x 12
M5 x 14
M6 x 18
20
18
22
35
35
7
9.5
11
13
16
24.5
29
36
46
54
14
14
17
22
22
12.5
11
13.5
17.5
18
LE140.8
40.8
46.7
67.3
67.3
5
6
7
11
12
12
12
14
19
19
1.4
1.4
1.4
12
12
16.6
20.5
23
27
33
8
11
13.5
17
19
12
13
16
22
22
14.6
18.5
21
25
31
MXQ-BT20(L)MXQ-BT25(L)
H
MXQ-BT8(L)MXQ-BT12(L)MXQ-BT16(L)
MXQ-BS8(L)MXQ-BS12(L)MXQ-BS16(L)
MXQ-BS20(L)MXQ-BS25(L)
G
D
F
C
G
P
M
E E1
B
A
Q
J
H
L
K
J
EF
E1D
AK
H
BC
G
External Dimensions of Adjuster
(mm)
(mm)
Series MXQ
8-5-42
42
External Dimensions of Adjuster
Extension End
Applicable size
MXQ6(L)
MXQ8(L)
MXQ12(L)
MXQ16(L)
MXQ20(L)
MXQ25(L)
Model
MXQ-CS6(L)
MXQ-CS6(L)-X11
MXQ-CS8(L)
MXQ-CS8(L)-X11
MXQ-CS8(L)-X12
MXQ-CS12(L)
MXQ-CS12(L)-X11
MXQ-CS12(L)-X12
MXQ-CS16(L)
MXQ-CS16(L)-X11
MXQ-CS16(L)-X12
MXQ-CS20(L)
MXQ-CS20(L)-X11
MXQ-CS20(L)-X12
MXQ-CS25(L)
MXQ-CS25(L)-X11
MXQ-CS25(L)-X12
5
15
5
15
25
5
15
25
5
15
25
5
15
25
5
15
25
Strokeadjustment range
(mm)
Body mounting section Table mounting section
A
6
7
9.5
11
13
16
Retraction End
Applicable size
MXQ6(L)
MXQ8(L)
MXQ12(L)
MXQ16(L)
MXQ20(L)
MXQ25(L)
Model
MXQ-CT6(L)
MXQ-CT6(L)-X11
MXQ-CT8(L)
MXQ-CT8(L)-X11
MXQ-CT8(L)-X12
MXQ-CT12(L)
MXQ-CT12(L)-X11
MXQ-CT12(L)-X12
MXQ-CT16(L)
MXQ-CT16(L)-X11
MXQ-CT16(L)-X12
MXQ-CT20(L)
MXQ-CT20(L)-X11
MXQ-CT20(L)-X12
5
15
5
15
25
5
15
25
5
15
25
5
15
25
5
15
25
Strokeadjustment range
(mm)
B C F G M
M5 x 0.8
M6 x 1
M8 x 1
M10 x 1
M12 x 1.25
M14 x 1.5
P *1)
M2.5 x 6
M3 x 8
M4 x 12
M5 x 16
M6 x 16
M8 x 18
H J K Q ∗1)
M2.5 x 8
M3 x 10
M4 x 12
M5 x 16
M6 x 20
M8 x 20
15.5
25.5
18
28
38
22
32
42
23
33
43
27
37
47
30
40
50
D
A
17.5
21
28
33.5
41
49
B C F G H J K ∗1) ED
M5 x 0.8
M6 x 1
M8 x 1
M10 x 1
M12 x 1.25
M14 x 1.5
M2.5 x 6
M3 x 8
M4 x 10
M5 x 12
M5 x 14
M6 x 18
Body mounting section
Table mounting section
E
19
22
29
36
45
54
8
9
14
17
20
22
7
7.5
11
13.5
16
18
7
8
12
14
17
19
2.5
3
4
5
6
6
14.5
16.6
20.5
23
27
33
7
8
11
13.5
17
19
8.3
9.8
13
16
22
22
MXQ-CT25(L)
MXQ-CT25(L)-X11
MXQ-CT25(L)-X12
19
22
29
35.5
44.5
53.5
10.5
12.5
16
20
25
31
8
10
16
17
23
28
15.5
25.5
18
28
38
22
32
42
23
33
43
27
37
47
30
40
50
6
8
10
12
13
15
7
8
12
14
17
19
2.5
3
4
5
6
6
Metal Stopper (CS/CT)
L
12.5
14.6
18.5
21
25
31
AB
E
P
M
G
D
F
C
E
J
F
BC
DH
G
AK
Q
J
H
L
K
∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.
For “How to Order”, refer to page 8-5-10. Dimensions are the same as standard type.
∗1) Size of hexagon socket head cap screw∗2) It is also available in the symmetric type.
For “How to Order”, refer to page 8-5-10. Dimensions are the same as standard type.
(mm)
(mm)
8-5-43
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
43
Dimensions of Adjusting Bolt/Metal Stopper
Applicablesize
MXQ6(L)
MXQ8(L)
MXQ12(L)
MXQ16(L)
MXQ20(L)
MXQ25(L)
Model
MXQ-A638
MXQ-A638-X11
MXQ-A838
MXQ-A838-X11
MXQ-A838-X12
MXQ-A1238
MXQ-A1238-X11
MXQ-A1238-X12
MXQ-A1638
MXQ-A1638-X11
MXQ-A1638-X12
MXQ-A2038
MXQ-A2038-X11
MXQ-A2038-X12
MXQ-A2538
MXQ-A2538-X11
MXQ-A2538-X12
5
15
5
15
25
5
15
25
5
15
25
5
15
25
5
15
25
Strokeadjustment range
(mm)A B
2.5
3
4
5
6
6
C
715.5
25.5
18
28
38
22
32
42
23
33
43
27
37
47
30
40
50
8
12
14
17
19
MD
3
3.5
4
4
5
6
M5 x 0.8
M6 x 1
M8 x 1
M10 x 1
M12 x 1.25
M14 x 1.5
C
A
DMB
How to Order Adjusting Bolt/Metal Stopper
Applicable bore size (mm)Adjustment rangeNil
-X11-X12
MXQ
5 mm15 mm25 mm
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
ø6 ø8 ø12 ø16 ø20 ø25
12 X11A 38
∗ -X12 (adjusting range: 25 mm) is not available in Series MXQ6.∗ For dimensions, refer to the figure above. ∗ Symmetric type is also the same.
(mm)
Series MXQ
8-5-44
44
Construction
No.q
w
e
r
t
y
DescriptionBodyTable End plateGuide blockCoverReturn guideScraperRodPiston assembly Rod coverSeal supportHead capFloating bushingRod bumperEnd bumperSteel ballsParallel pinPiston sealRod sealO-ring
u
i
o
!0
!1
!2
!3
!4
!5
!6
!7
!8
!9
@0
Aluminum alloyStainless steelAluminum alloyStainless steelSynthetic resinSynthetic resin
Stainless steel, NBRStainless steel
Aluminum alloyBrass
Synthetic resinStainless steelPolyurethanePolyurethane
High carbon chrome bearing steel
Stainless steelNBRNBRNBR
MaterialHard anodizedHeat treated
Hard anodizedHeat treated
With magnet on one side
AnodizedElectroless nickel plated
Note
Component Parts
No.@1
@2
@3
@4
@5
DescriptionEnd plateSpring collarHead capSpringMagnet
Aluminum alloyStainless steelStainless steelStainless steel
Rare earth
Material NoteHard anodized
Component Parts: With Buffer
Replacement Parts: Seal Kit
68
12162025
Bore size (mm)
No.@6
@7
@8
@9
#0
#1
#2
#3
#4
#5
#6
DescriptionLocking bodyTable support Rod coverPiston rodBushingBlanking plug Return springPiston sealRod sealO-ringO-ring
Aluminum alloyCarbon steel
Aluminum alloyStainless steelAluminum alloy
BrassStainless steel
NBRNBRNBRNBR
MaterialHard anodized
Anti-corrosive treated
ChromatedElectroless nickel plated
Note
Component Parts: With End Lock
No.#7
#8
#39
$0
$1
$2
$3
$4
DescriptionAxial piping plate PipeBushingStudO-ringO-ringGasketO-ring
Aluminum alloyAluminum alloyAluminum alloy
BrassNBRNBR
NBR, Stainless steelNBR
MaterialHard anodizedHard anodized
ChromatedElectroless nickel plated
Note
Component Parts: Axial Piping Type
With buffer With end lock Axial piping type
Kit no.
MXQ6-PSMXQ8-PSMXQ12-PSMXQ16-PSMXQ20-PSMXQ25-PS
Contents
Set of nos. above
!8 to @0
(1 set)
Replacement Parts:Seal Kit for Axial Piping Type
68
12162025
Bore size (mm) Kit no.
MXQ6P-PSMXQ8P-PSMXQ12P-PSMXQ16P-PSMXQ20P-PSMXQ25P-PS
Contents
Set of nos. above!8 to @0, $1 to $4
Replacement Parts: Seal Kit for with End Lock
812162025
Bore size (mm) Kit no.
MXQ8R-PSMXQ12R-PSMXQ16R-PSMXQ20R-PSMXQ25R-PS
Contents
Set of nos. above
!8 to @0
#3 to #6
w
Set of nos. above!8 to @0, $1 to $4
u y
t
!6 r
!5
!3
e
!1 !9 !0 i !4 o !8 q @0
!2
@3 @1 @4 @5 @2 #0 #1 #6 #5 @6 #2
#3
#4
@8
@9
@7
!7
$4 #8 $0 $3 $2
#7
$1
#9
∗ Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size.
8-5-45
Air Slide Table Series MXQ
MX�
MTS
MY�
CY�
MG�
CX�
D-
-X
20-
Data
45
Proper Auto Switch Mounting Position (Detection at stroke end)
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
6
7.5
11.5
16.5
19
22
Reed Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V
10
5.5
8
24.5
30.5
43.5
52.5
20
5.5
8
14.5
20.5
33.5
42.5
30
5.5
12
14.5
20.5
23.5
32.5
125
—
—
—
51.5
74.5
88.5
75
—
32
40.5
33.5
39.5
46.5
100
—
—
40.5
51.5
71.5
60.5
Stroke
BStroke
E
Model A40
13.5
16
21.5
20.5
33.5
32.5
50
13.5
31
21.5
26.5
31.5
46.5
150
—
—
—
—
77.5
88.5
10 20 30 125
—
—
—
75
—
100
—
—
40 50 150
—
—
—
—
MXQ6
MXQ8
MXQ12
MXQ16
MXQ20
MXQ25
10
11.5
15.5
20.5
23
27
Solid State Switch: D-M9B, D-M9N, D-M9P, D-F9BW, D-F9NW, D-F9PW
10
9.5
12
28.5
34.5
47.5
56.5
20
9.5
12
18.5
24.5
37.5
46.5
30
9.5
16
18.5
24.5
27.5
36.5
125
—
—
—
55.5
78.5
92.5
75
—
36
44.5
37.5
43.5
50.5
100
—
—
44.5
55.5
75.5
64.5
Stroke
BStroke
E
Model A40
17.5
20
25.5
24.5
37.5
36.5
50
17.5
35
25.5
30.5
35.5
50.5
150
—
—
—
—
81.5
92.5
10 20 30 125
—
—
—
75
—
100
—
—
40 50 150
—
—
—
—
Solid State Switch: D-M9BV, D-M9NV, D-M9PV, D-F9BWV, D-F9NWV, D-F9PWV
–0.5
3.5 (1)
6 (3.5) 22.5
(20) 28.5
(26) 41.5
(39) 50.5
(48)
3.5 (1)
6 (3.5) 12.5
(10) 18.5
(16) 31.5
(29) 40.5
(38)
3.5 (1) 10 (7.5) 12.5
(10) 18.5
(16) 21.5
(19) 30.5
(28)
11.5 (9) 14
(11.5) 19.5
(17) 18.5
(16) 31.5
(29) 30.5
(28)
11.5 (9) 29
(26.5) 19.5
(17) 24.5
(22) 29.5
(27) 44.5
(42)
30 (27.5)
38.5 (36)
31.5 (29)
37.5 (35)
44.5 (42)
38.5 (36)
49.5 (47)
69.5 (67)
58.5 (56)
49.5 (47)
72.5 (70)
86.5 (84)
77.5 (75)
77.5 (75)
–0.5 –0.5 7.5 7.5
2 2 6 10 25
18.5 8.5 8.5 15.5 15.5
24.5 14.5 14.5 14.5 20.5
37.5 27.5 17.5 27.5 25.5
46.5 36.5 26.5 26.5 40.5
26
34.5 34.5
27.5 45.5 45.5
33.5 65.5 68.5 73.5
40.5 54.5 82.5 73.5
∗ ( ): Denotes D-A93.
A E
B
Caution
MXQ6MXQ8MXQ12MXQ16MXQ20MXQ25
10
11.5
15.5
20.5
23
27
10
9.5
12
28.5
34.5
47.5
56.5
20
9.5
12
18.5
24.5
37.5
46.5
30
9.5
16
18.5
24.5
27.5
36.5
125
—
—
—
55.5
78.5
92.5
75
—
36
44.5
37.5
43.5
50.5
100
—
—
44.5
55.5
75.5
64.5
Stroke
BStroke
E
Model A40
17.5
20
25.5
24.5
37.5
36.5
50
17.5
35
25.5
30.5
35.5
50.5
150
—
—
—
—
81.5
92.5
10
1.5
4
20.5
26.5
39.5
48.5
20
1.5
4
10.5
16.5
29.5
38.5
30
1.5
8
10.5
16.5
19.5
28.5
125
—
—
—
47.5
70.5
84.5
75
—
28
36.5
29.5
35.5
42.5
100
—
—
36.5
47.5
67.5
56.5
40
9.5
12
17.5
16.5
29.5
28.5
50
9.5
27
17.5
22.5
27.5
42.5
150
—
—
—
—
75.5
75.5
Mounting of Auto Switch Operating Range
Set screw (included with auto switch)
Auto switch
Watchmakers’ screwdriver
Other than the applicable auto switches listed in “How to Order”, the following auto switches can be mounted.For detailed specifications, refer to page 8-30-1.
∗ Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available. For details, refer to page 8-30-31.
Type Model Features
Without indicator light
Electrical entry(Fetching direction)
D-A90D-A90V
Grommet (In-line)Grommet (Perpendicular)
Reed switch
D-A9/A9�VD-M9�/M9�VD-F9�W/F9�WV
6
4.5
2 (2.5)
8
5
2.5 (2.5)
12
6
3 (3)
16
7
4 (3)
20
8
6 (3.5)
25
9
6 (3.5)
Applicable bore size (mm)Auto switch model
Auto Switch Mounting Tool• When tightening the auto switch mounting screw
(included with auto switch), use a watchmakers’ screwdriver with a handle about 5 to 6 mm in diameter.
Tightening Torque• Use a torque of approximately 0.05 to 0.1 N·m. As a
guide, it can be tightened about 90° past the position at which tightening can be felt.
Note) Figures in parentheses are the cases for D-M9�, D-M9�V switch types.
Series MXQ
8-5-46
46