Agenda

Basic inertial MEMS sensor functionsNew products, opening markets through performanceFive steps of MEMS sensor integrationTypical applications Identifying the right opportunitiesUnderstand key specifications for these opportunitiesGetting started information.

Basic Inertial MEMSSensor Functions

Analog Devices High Performance Inertial MEMSAccelerometer contribution to angle estimates Accelerometers use the earth’s gravitational force and

trigonometric functions to measure incline angles Number of axes is driven by range & system needs

22

22

22

atan2

atan2

atan

RPGP

G

GPGP

R

GRGP

P

aaK

a

aaKa

aaKa2

0709

6-00

8

ay

θx

ax

θx

HORIZON

GRAVITY = 1g

xx aa sin

x

yx a

aa tan

Single-axis Dual-axis

Triple-axis

0959

3-01

3

aZ

aY

a

Analog Devices High Performance Inertial MEMSGyroscope contribution to angle estimates Gyroscopes measure the rate of

rotation, which serves as a feedback sensing signal in platform stabilization systems.

Navigation functions, such as Attitude, Heading & Reference Systems (AHRS) integrate gyroscope outputs to measure angular displacement.

PIN 1

PIN 5 PIN 6

PIN 10

AXIS OF ROTATION

NOTES1. ARROW INDICATES THE DIRECTION OF ROTATIONTHAT PRODUCES A POSITIVE RESPONSE INTHE GYRO_OUT REGISTER. 08

246-

022

dttt

tm

2

1

am K

Analog Devices High Performance Inertial MEMSMagnetometer contribution to angle estimatesMagnetometers measure magnetic field intensity.Navigation functions, such as Attitude, Heading &

Reference Systems (AHRS) use triple-axis magnetic field measurements to determine orientation and heading angles.

θ

0.5 Gauss

22tan

tan

yx

z

x

y

mmma

mma

Five Steps of MEMS Sensor Integration

Analog Devices High Performance Inertial MEMSTypical MEMS Integration Process

MEMSElement Buffer A/D

ConverterAnalogFilter + x Digital

Filter

Correction Formulas

FunctionalProcessing Interface

Configuration

Temperature Motion

SystemSpecific

CorrectionSupply

Controller

Five Steps to MEMS integration:1. Sensor selection that supports end-system performance goals2. Interface circuit that preserves key performance metrics3. Packaging that provides mechanical stability and protection from changing stress patterns4. Calibration approach and system that optimizes key accuracy metrics5. Application-specific algorithm development

New IMU/Gyroscopes

Selection Guide – Functional/Integration Summary

3-AxisMEMSGyro

+ x Filtering

Correction Formulas

(Temp, Vdd)Alignment

3-AxisMEMSAccel

+ x Filtering

Correction Formulas

(Temp, Vdd)

gx, gy, gz

ax, ay, az

ΔΘx, ΔΘy, ΔΘz

ΔVx, ΔVy, ΔVz

Magnetometers(3x) Barometer

ADIS16334, ADIS16445

ADIS16488ADIS16448

ADIS16485

Dynamic Orientation Sensing• Extended Kalman Filter• Quaternion, Euler, Rotation

Matrix• Adaptive, and Programmable

ADIS16480

Compact 10 DoF

Tactical Grade 6 DoF

ADIS16448

Precision Roll/Pitch/Yaw Outputs Under Dynamic Conditions High Performance MEMs, Plus Industry Best Sensor Processing, Plus Adaptive Kalman Filtering

ADIS16480 Adaptive Extended Kalman Filter Automatic Covariance Computation Programmable Sensor

Disturbance/Rejection Thresholds Configurable Event-Driven Controls

on

Zn

Xn

Ynob

Zb

Xb

Yb

Local Navigation Frame(Reference for ADIS16480 Outputs)

Body Frame(IMU orientation within

user platform)

IMU

MAGN

GPS

InitialState

PredictedState

Mea

sure

men

tsPosition/Track

St

Ct

St’

Ct’

St-1

Ct-1

Other

Confidence

Confidence

ConfidenceConfidence

S: State of SystemC: Covariance

Implemented in 16480Not Implemented

Conceptual Kalman Filter

ADIS16480 Outputs Standard IMU Outputs Attitude and Heading Outputs

Quaternion Vector and Euler Angles Rotational Matrix

Reference Orientation is field programmable

FILTER

IMU Selection GuideSimplified Performance/Package Summary

Y-AXISX-AXIS

Z-AXIS

0994

6-20

6

aZ mZ

aY

mY

gY

aX

mX

gX

gZ

ADIS16334ADIS16445/8

GYROSCOPES ACCELEROMETERS MAGNETOMETER BAROMETER PACKAGE

Extended Kalman Filter (Roll/Pitch/Yaw

Outputs)

RangeNoise

DensityIn-run Bias

Stability Linear-g gxg RangeNoise

DensityIn-run bias

stability Range Range Size

(°/sec)(°/hour/

√Hz) (°/hour) (°/hour/g) (°/hour/g²) (g) (µg/√Hz) (µg) (Gauss) (Bar) (mm) n/aADIS16334 ±300 0.044 26 180 1.8 ±5 221 200 N/A N/A 24.2x32.7x10.6 n/aADIS16445 TBD 0.01 14 54 0.36 ±5 221 50 N/A N/A 24.2x37.7x10.6 n/aADIS16448 ±1000 0.01 14 54 0.36 ±18 500 150 ±1.9 ±1.2 24.2x37.7x10.6 n/aADIS16485 ±450 0.00667 6 32.4 0.36 ±5 62 32 N/A N/A 44x47x14 n/aADIS16488 ±450 0.00667 6 32.4 0.36 ±18 67 100 ±2.5 ±1.2 44x47x14 n/aADIS16480 ±450 0.00667 6 32.4 0.36 ±10 67 100 ±2.5 ±1.2 44x47x14 YES

PIN 1PIN 23

aY

mY

gY

Y-AXIS

gX

X-AXIS

aX

mX

Z-AXIS

aZ mZ

gADIS16480/5/8

Common Performance Benefits• Bias tempco = 0.0025-0.0005°/sec/°C• Sensitivity tempco = 35-50ppm/°C• Bandwidth = 330Hz• Linearity = 0.01%

Common “Ease of use” Benefits• Simple hook-up: power, ground, SPI• Fully-calibrated, off-the-shelf accuracy• Migration supported through compatible pin

assignments & packaging

* :New

**:Upcoming

*

**

**

Finding the right applications

Focus on performance-driven applications

Cost-driven1-10° accuracyStatic/simple motion

Low bandwidth & samples rates are acceptable

Constrained motion

Cross-axis, linear-g, gxg specs are often not specified

Package sensitivityNarrow temperature range

0°C to +70°CShort life cycles

Performance-driven 0.05-2° accuracyDynamic conditions

Value in wide BW & high sample rates

Complex motionRotational and linear/3-axisCross-axis, linear-g, gxg

specs are importantRobust packagingWider temperature range

-40°C to +105°CLife cycles ~15-20 years

Where to Look for OpportunitiesCustomer Problem:

1) Highly Complex Motion, requiring:More precision than available from the ‘raw’ sensor

Need Significantly more Sensor Conditioning/Calibration/TuningMerging of Multiple Sensor Types, and understanding of interactionsSophisticated back-end Sensor Processing (Kalman Filtering) to resolve

actual motion2) Implementation Obstacles of:

motion/sensor-dynamics learning curvemulti-year design effortnon-standard test equipmenthigh program risk

‘Raw’Sensor

‘Refined’Sensors

Actual Position/Motion

Information

Requires Motion Dynamics Expertise

Requires Deep Appl Knowledge

ADIS16448 and ADIS16485 Address this Gap

ADIS16480 Addresses this Gap

Application Space/Positioning for ADI High Performance IMUs, and Orientation Sensors

Application Examples Features / Benefits Complex platform stabilization and

control - Antennas - Surveillance cameras - Precision optics

- Robotics - Medical instrumentation - Mil/Aero communications / optics / flight controls

Access to up to 10 precision sensors from one interface Sensor fusion discerns complex motion data (not discernable by any one sensor alone) 330 Hz bandwidth (6x wider than competition) supports multi-axis/sensor phase matching Programmable internal filtering options Digital self test Embedded sensor condition monitoring/alarms Smallest Industry Footprint, and Interface Compatibility across family

Guidance, navigation, and tracking - Unmanned Vehicles

(UAV, etc) - Personnel/instrument tracking - Surgical navigation - Factory automation - Robotics

Tactical grade bias stability (6 o/hr) enables GPS-aided dead reckoning Gyro continuous bias estimator Magnetometer hard and soft iron calibration support Barometer supports local or remote sensing Supports direct interface with other system sensors (GPS, optics). Also has an external clock sync option.

Instrumentation - Avionics - Attitude Heading and Reference Systems - Pointing/Tracking Devices - General Motion Control

Adaptive Extended Kalman Filtering0.1o (pitch/roll), 0.3o (yaw) accuracy; staticConfigurable Event-Driven ControlsProgrammable/Tunable to Application and Environment

Example Successful iSensor Implementations

Advances in Sensor Fusion, Integrated Sensor Processing, and Precision Calibration, enabling widespread adoption in Industrial, Medical, and Military

Key specifications

Noise, Noise Density, Bandwidth

Wider bandwidth in the inertial control loop gain provides a trade-off:Speed of response Total noise

Additional advantages of wide-bandwidth:Time-domain matching

with multiple sensors/axes

Improved control of critical phase margin at unity-gain bandwidth in the control loop.rms

bandwidthNoisedensityNoise

noise

noise

noise

sec/058.050*57.10066.0

50*57.10066.0

ADIS16480/5/8Noise reduction from 0.022 to

0.0066°/sec/√Hz

Noise Density

In-run bias stability

Cross-axis Sensitivity

PIN 1PIN 23

aY

mY

gY

Y-AXIS

gX

X-AXIS

aX

mX

Z-AXIS

aZ mZ

g

Example #1 – Car-mounted antenna, camera, laser, etc.Driving over a rough road can cause angular vibration (±10°/sec) in the y-axis (pitch). High cross-axis sensitivity (GCAS) will cause angular jitter on the x-axis (roll).

PITCH = 0.09% x ±10°/sec = ±0.009 °/sec = roll axis jitter (ADIS164xx)

PITCH = 1% x ±10°/sec = ±0.2 °/sec = roll axis jitter (MEMSense)

Linear-g

PIN 1PIN 23

aY

mY

gY

Y-AXIS

gX

X-AXIS

aX

mX

Z-AXIS

aZ mZ

g

Example #1 – Car-mounted antenna, camera, laser, etc.Driving over a rough road can cause up/down vibration (±2g-rms) in the z-axisHigh Linear-g sensitivity (GL) will cause angular jitter on all three gyroscopes.

= 0.009 x ±2g-rms = 0.018 °/sec = gyroscope noise (ADIS164xx)PITCH = 0.1 x ±2g-rms = 0.2 °/sec gyroscope noise (MEMSense)

Application Example

Application Example:Microwave antenna stabilization

Microwave communications can be on aircraft, boats, ground-based vehicles, and even in ground-anchored towers.

Key application-specific relationships to start with: Maximum data rates require optimal

received signal strength Received signal strength depends on

optimal antenna alignment Vibration, wind gusts, rough roads, rapid

maneuvers are all examples of things that can impact antenna alignment.

Systems can use either electronic or mechanical beam steering approaches

Two separate feedback loops: Inertial (IMU) Receive signal strength

Application Example:Microwave antenna stabilization Once the receiver and transmitter alignment are optimized, the two loops work

together to observe and correct for physical threats to optimal alignment. Key physical parameter is angular jitter, which can reduce the overall power

received and force lower data rates in the transmission. Since the IMU generates inertial feedback, noise in their output signals will

translate, directly into angular jitter on the stabilized platform. IMU/Gyroscope parameters that directly impact jitter and will need consideration,

even if a competing device does not specify them: Noise Linear-g Cross-axis sensitivity

)sin(

222

erroralignmentorthogonalarotationaxisOffglinearVibration

bandwidthNoisedensityNoise

axiscross

vibration

noise

axiscrossvibrationnoiseJitter

Stabilization Systemsthe bottom line…platform jitter

EXAMPLE CONDITIONS  Bandwidth @ -3dB (Hz) 50Vibration (g-rms) 4Off-axis rotation (°/sec) 30

ADI Competition  Epson MemSense SSS

PERFORMANCE ADIS16448 ADIS16485 S4E5A0A0 H3-IMU DMU-02Noise density (°g/sec/√Hz) 0.0135 0.0066 0.0053 0.041 0.011Linear-g (°/sec/g) 0.015 0.009 0.05   0.1Cross-axis (%) 0.09% 0.09% 0.17% 1.0% 3.0%

       PROJECTED JITTER (°/sec) 0.14 0.07 0.21 0.47 0.98

Epson does not offer a specification for the linear-g sensitivity. The 0.05 °/sec/g number is offered as a "what-if" example, to illustrate the impact. The other competitors are inferior, even without this consideration

BOTTOM LINE Real applications require consideration of

linear and rotational motion in all 2-axes ADI IMUs offer the best performance

and most complete disclosure of performance expectation on the market.

Putting it all together, we can see how ADI IMUs stack up, when

combining all three behaviors in an example application.

222axiscrossvibrationnoiseJitter

The World Leader in High Performance Signal Processing Solutions

High Performance Focus:Low Power

Prepared by Nitzan GadishFor DFAE Training, June 2012

Barcelona, Spain

Agenda

The four focus strategies of ADI MEMS groupToday: Focus on Low PowerADXL362Competitive ComparisonWhere and How to Win: What We Do Differently

High Performance: Where all specs support the highlight metric“High-performance” means that all critical performance

criteria are complementary, understood and communicated clearly.

Current focus on 4 areas of high performance:Stability Vibration/Impact Ultra Low Power High Temp

ADI MEMS & Sensor Technologies Focus

Stability Focus: low noise, low tempco, long life

Stability Vibration/Impact Ultra Low Power High Temp

ADXRS646ADXRS203 family

Vibration / Impact Focus

Vibration Monitors for Predictive & Preventative Maintenance

Concussion and other High Impact forcesADXL377: 3-Axis High-g Analog-output MEMS Accelerometer http://www.analog.com/adxl377/

Samples: X-Grade available. Release September 2012Breakout boards available now

Stability Vibration/Impact Ultra Low Power High Temp

Stability

High Temperature Focus

Guaranteed Operation High Temperature MEMS Sensors for Geological and Energy Exploration

ADXL206: Precision, ±5g, Dual-Axis, High Temperature Analog-output MEMS Accelerometer – http://www.analog.com/adxl206/Production Status

Stability Vibration/Impact Ultra Low Power High Temp

Stability

Introducing the New, MicroPower ADXL362 3 axes, digital output (SPI), ±2/4/8g measurement range

Industry’s Lowest Power MEMS Accelerometer< 2 µA at 100 Hz in Measurement Mode (VS = 2.5V)300 nA in Wake-Up Mode

Enables Intelligent, Continuously Operational Motion-activated SwitchAwake Status Pin Autonomously Triggers System Functions, Bypassing

Processor Enhanced Activity/Inactivity Detection

Multiple Sample Threshold Minimizes False Positive Motion TriggeringInactivity Timer Up to 90 Minutes

Stability Vibration/Impact Ultra-Low Power High Temp

Target: Apps that REALLY need low power.Battery Life of Years orExpensive Truck roll to change

Sealed Environment

Financially impracticalto change batteries

Ultra Low Power

ADXL362

Large quantities to replace

Remote or Dangerous Locations

How does it compare?

0 100 200 300 4000

1020304050607080

BMA250LIS3DH Normal Mode

Output Data Rate [Hz]

Curr

ent

Cons

umpt

ion

[µA]

How does it compare?

Modeor

ODR

Current Consumption [µA]

ADXL362 LIS3DH: Low Power

LIS3DH: Normal Mode

Standby 0.01 0.5 0.5Wake Up 0.3

6 Hz2

1 Hz2

1 Hz50 Hz 1.8 6 11100 Hz 2.0 10 20200 Hz 2.6 18 38400 Hz 3.7 36 73

But wait… There’s more!ADXL362 Common

AccelerometersImportant for…

6 Hz Wake-Up Mode 1 Hz sampling may miss motions

Sensitive, low-power wake-up

10 nA Standby current 500 nA Standby current

Applications where the xl is mostly sleeping

AWAKE Status pin and Autonomous Interrupt Processing

Interrupt status only and must be serviced by host

Implementation of low-power motion switch

Enhanced Activity Detection: Multi-Sample and Referenced

Single-sample, AC Activity Detection can miss desired motions and falsely trigger

Robust yet sensitive: detects even very subtle motion, only when it should

Deeper FIFO: Up to 170 sample sets

32 sample sets FIFO Further power savings OR recording context around an event

No Aliasing Potential aliasing Environments where vibration is present

Designed for easy programming

Difficult to figure out Users without access to ST support

Feature: ALWAYS ON, ALL THE TIME

Micropower operation means the accelerometer can be the only thing that’s on, and it can be on all the time.

This is perfect for apps that are motion-enabled and XL362 is a motion switch

Also, the ADXL362 does not power cycle its sensor front end.(Many accelerometers do this to save power.)

Continuous Operation + Anti-Aliasing Filters = Excellent Signal Integrity.

Feature: µA WAKEUP MODE

Some applications can trade off continuous sampling for even lower power consumption.

The ADXL362 WAKEUP MODE takes a single acceleration sample ~6 times per second.

This sample is compared to the ACTIVITY threshold to determine whether the device has moved.

Note that in this mode, the output signal IS susceptible to aliasing.

That’s ok in some applications, like when you’re just deciding whether to wake something up.

Feature: ULTRA-LOW STANDBY CURRENT

ADXL362 consumes <2 µA when it’s on.

Its STANDBY current is 0.01 µA only.

That’s 10 nA.

By comparison, the standby current of the LIS3DH is 0.5 µA.

(It would be difficult to build an accelerometer that consumes 2 µA, if it consumes 0.5 µA when its circuits are shut off!)

Feature: PATENT-PENDING AWAKE STATUS OUTPUT

AWAKE bit indicates whether the accelerometer is in motion or at rest.

Map it to an INT pin for a status output that is high when in motion, low when at rest! (or opposite)

Now, use it to switch power…

The ADXL362 as an Autonomous Motion Switch

PRESENCE OF MOTIONSystem Power is CONNECTEDSystem Consumes Normal CurrentAccelerometer Consumes <2µA

Current Flows

Full Operational Current Flows

ABSENCE OF MOTIONSystem Power is DISCONNECTEDSystem Consumes 0 PowerAccelerometer Consumes <2µA

Current Flows

No CurrentZero

The ADXL362 as an Autonomous Motion Switch

Feature: ENHANCED ACTIVITY DETECTIONAdvantages

Multiple-sample detection instead of single threshold detect- XL345, LIS3DH, MMA845x all have single threshold detect- motion scrutiny, elimination of false positives for keeping other components off

Referenced vs. ACInactivity extra-long timer

Feature: DEEP FIFO

ADXL362FIFO is 512 samples deep,

configured as one of:

170 sample sets of {x, y, z} data,

OR128 sample sets of {x, y, z, temp} data

LIS3DH

FIFO stores 32 sample sets of {x, y, z} data.

Feature: DEEP FIFOCommon Uses

1. Save power or unburden processor Store 170 sample sets, then burst read them all (using only one

Read instruction!) Accumulating data in the FIFO allows the microcontroller to stay

in Standby for a large portion of the time. Or, if the micro is processing other things, the FIFO helps free it up.

ProcessorReading Data

ProcessorOff / Free

Feature: DEEP FIFOAdvantages

2. Record context around a trigger event Without a FIFO, capturing samples prior to an event would

require continuous sampling and processing of acceleration signals by the micro, significantly increasing battery life.

ADXL362 can record up to 15 seconds (170 sample sets at 12.5 Hz) LIS3DH : <20% of that.

Example: Earthquake monitoring is an application that greatly benefits from trigger mode.

Example: Some pacemaker applications considered our deep FIFO to be very beneficial.

LIS3DHADXL362

Feature: Ease of Programming

Designed for easy programming

• Registers in order of startup sequence

• ACT and INACT available simultaneously

• Entire FIFO contents can be read with one instruction

We tried this…• Required finding the

application note• Only one detection

function at a time (ACT or INACT)

• Reading from FIFO requires 1 instruction per sample

Background: firmware examples implementing the same function on the two devices.

Support: www.analog.com/memseval

Support: 3 Evaluation Options

Standard Breakout BoardSmall, simpleBest for integrating into existing system

Low-Power Evaluation SystemMotherboard and Satellite BoardView Real-Time data, current consumption

Development Board: Highlights Low PowerOperates on a coin cellRenesas Ultra-Low Power MicrocontrollerEInk display (“electronic paper technology”)Implements a few examples. ReprogrammableProgram, disconnect, record data, transfer data, analysis

Support:ez.analog.com/community/MEMS

Design Integration: Circuits from the Lab CN-0274: Autonomous Motion SwitchCircuits from the Lab article implements the Motion Switch on

an SDP-compatible platform.

Design Integration: Getting Started

ADXL362 product webpage at http://www.analog.com/adxl362 will provide:Schematic and Layout Files for all Evaluation BoardsRenesas toolsConfiguration ToolC header (starting point)Linux driversArduino libraryPMOD

What else would be helpful?

Well… What are you waiting for??

Part numbers for orders:

ADXL362XCCZCurrently X-grade. Final release late summer

EVAL-ADXL362Z : Breakout Board, available nowEVAL-ADXL362Z-DB : Development Board, expected JulyEVAL-ADXL362Z-MLP : Evaluation System, available now

The World Leader in High Performance Signal Processing Solutions

Analog Devices MEMS MicrophoneTechnology & Overview

MEMS Microphone Topics

ADI MEMS Microphone Market Analysis & Target markets

Application ExamplesDescribe advantages of MEMS over ECMsSpecific Advantages of ADI MEMS Mics over

competitorsWhy is SNR critical for today’s applications?MEMS Microphone portfolioDesign Support Tools

Total Available Microphone Market - TAM(Millions Units)

Source: iSuppli, ADI estimates

“Performance”

Target Industrial & Instrumentation Markets

SecurityGlass Break Detection

Building MgmtEnhanced Motion Sensor Light Switch

Public Safety / MilitaryMilitary / Pilot Helmet

Sports Performance MonitoringConcussion Analysis Athlete Health Monitoring

White GoodsWashers / Cookers

RuggedizedMachine HealthFault Detection orFlow Monitoring

Industrial Computing

Alarm Access PanelsIP Security Cameras

Fire & Safety Radios

“Pro-sumer” Consumer Electronics

ADI MEMS Microphones are a good fit for high-end audio capture applicationsADI is bridging the gap between commodity MEMS (i.e., in cell

phones / tablets) and other markets with higher acoustic performance

Conference Phones, Studio Mics, DSLR cameras, etc.Differentiated from their low-end counterparts

Enhancing the User Experience

Applications:IP Security Cameras What is the application?

Audio capture for security cameras Why ADI MEMS Mics?

High SNR Enables cameras to pick up sounds from long distances

ReliabilitySignal Chain integration

Microphones are available with analog, PDM, or I2S outputsBest-fit parts – depends on camera chipset’s audio interface

ADMP504Analog output65 dB SNR

ADMP521PDM output65 dB SNR

Applications :Teleconference Systems What is the application?

Wireless microphones for conference rooms Why ADI MEMS Mics?

High SNR Enables cameras to pick up sounds from

long distancesSignal Chain integration

I2S output allows microphone to be directly connected to digital transmitter No ADC or codec needed!

Best-fit partADMP441

I2S output61 dB SNR

Applications :Agricultural Seeding Monitor What is the application?

Monitoring seed tubes to detect blockages Why ADI MEMS Mics?

Small size Multiple microphones can be mounted close to seeding tubes

Advantages of acoustic sensing More reliable than optical sensors Fewer wires to connect to control panel

Reliability Low vibration sensitivity Stable response across temperature

Best-fit partsADMP401, ADMP404

Analog output62 dB SNR

MEMS VS. ECM

Microphone Technology Trends Towards MEMS

Performance is unaffected by Pb free solder reflow temperature Replaces high cost manual sorting & assembly w/ automated assembly Higher SNR and superior matching Higher mechanical shock resistance Wider operating temperature range Consumes less current Superior performance part-to-part, over temperature, and with vibration

ECM

JFET

MEMS

Digital Output

MEMS

Analog Output

Why use MEMS Microphones?1. Performance Density

Electret mics performance degrades dramatically in smaller packages

MEMS raises the bar to a new level of performance in the same volume as the smallest electrets!

70dB

55dB

Microphone Physical Volume (cubic millimeters)

10mm3

100 200 300 400 500 600 700

MEMS Microphones

Electret Microphones

SNR

MEMS Mics shifts the SNR-to-volume slope up

dramatically!

Why use MEMS Microphones?2. Less Sensitivity variation vs. temperature

ECM vs. ADMP441

Deviation from the original sensitivity

Why use MEMS Microphones?3. Handles Vibration better than ECMs

Lower diaphragm mass (thinner) for MEMS Mic results in lower vibration sensitivity

ADI MEMS microphones have at least 12 dB lower vibration sensitivity than ECMs

MEMS MEMS

100 1,000 10,000-15

-5

5

Frequency, Hz

dB

ADMP421(3 x 4 x 1 mm)

100 1,000 10,000-15-12

-9-6-30369

Frequency, Hz

dB

ECM 2 (Ø3 x 1.5 mm)

100 1,000 10,000-15-12

-9-6-30369

Frequency, Hz

dB

ECM 3 (Ø9.7 x 5 mm)

100 1,000 10,000-15-12

-9-6-30369

Frequency, Hz

dB

ECM 1 (Ø6 x 3.4 mm)

Why use MEMS Microphones?4. Uniform Part to Part Frequency Response

The ADI MEMS Mics respond nearly identically!

ADI MEMS MIC ADVANTAGES

Why use ADI MEMS Microphones?Full System Solution – ADI ASIC and ADI MEMS

MEMS Element

Analog or Digital ASIC

Surface Mount Packages

Common Substrate

70

Top Port versus Bottom Port: Performance ImpactBottom Port Provides Superior SNR & Frequency Response

ADI Bottom-Port MEMS Microphone Competitor Top-Port MEMS Microphone

All top-port microphones (MEMS and ECM) currently on the market have sharp peaks in their high-frequency response, making them unacceptable for wideband voice applications

All top-port microphones have low SNR (55…58 dB) There are no top-port microphones with high performance currently on the market

Signal Level

Noise Floor 39dB (55dB SNR Mic)

1” 85dB

Effective Signal to Noise Ratio 46dB

8” 69dB

30dB

16” 63dB

24dB

32” 57dB

18dB

Noise Floor 33dB (61dB SNR Mic)

Noise Floor 29dB (65dB SNR Mic)

24dB

28dB

For close talking an Omni-

directional microphone is

adequateAt distance the signal level is

low with reference to background noise - Need

directionality

Why is SNR critical for today’s electronics?

MEMS MIC PORTFOLIO

ADI MEMS Microphone PortfolioHigh Performance MEMS Microphones: All Fully Released!

ADMP441Full I2S-Output

Most integrated microphone

available!

ADMP42161dB SNR

Pulse Density Modulated (PDM)

Output

Digital Output Higher Integration

Package

3.35x2.6x0.88 mm

4.72x3.76x1 mm

4x3x1 mm

Analog Output Flexibility in Signal Acquisition

ADMP40562dB SNR

200 Hz to 15 kHz Flat Frequency Response

ADMP401100 Hz to 15 kHz Flat Frequency Response

ADMP52165dB SNR

Pulse Density Modulated (PDM)

Output

ADMP40462dB SNR

100 Hz to 15 kHz Flat Frequency Response

ADMP50465dB SNR

100 Hz to 15kHz Frequency Response

65dB SNR Family

62dB SNR Family

ADMP504: High SNR, Analog-Output Mic Industry-leading noise floor for MEMS Microphones

•High SNR of 65 dB (A-weighted) – capable of equivalent input noise of 29 dB SPL

•Dynamic Range of 91 dB•Sensitivity of -38 dBV•Analog Output

•Package size 3.35 x 2.5 x 0.88mm

•Same package as ADMP404•Extended frequency response from 100 Hz -

20 kHz•Low current consumption: 180 μA (typ)

Features Benefits•Ideal for far-field applications – would

require 2 or more 61 dB mics in an array for similar SNR!

•Captures very loud and very soft noises•Optimum sensitivity level for standard

codecs•Ideal for use with an integrated codec or

with optimization via selection of discrete amps or ADCs

•Small package for space constrained applications

•Provides easy upgrade path to higher SNR•Well-balanced, natural sound from

microphone•Long battery-life for mobile devices

Applications•Mobile Devices•Building Automation•Security Systems•Conferencing Systems•Gaming Consoles•Tablet PCs

Flex-mounted device: EVAL-ADMP504Z-FLEX

1014

0-00

7

ADAU1761OR

ADAU1361ADMP504

GND

OUTPUT LINN

LINP

MICBIAS

CM

2.2µFMINIMUM

0.1µF

VDD

New!

Surface Mount Package3.35 mm x 2.5 mm x 0.88mm

(bottom side shown)

ADMP504 example application with ADI SigmaDSP codec

ADMP521: High SNR, Digital-output MicIndustry-leading noise floor for MEMS Microphones

•High SNR of 65 dB (A-weighted) – capable of an equivalent input noise level of 29 dB

•Dynamic Range of 91 dB•Sensitivity of -26 dBFS•Pulse data modulated (PDM) output•Package size 3x4x1 mm

•Flat frequency response from 100 Hz to 20 KHz

•Current consumption: 900 μA in operation – less than 1 μA in sleep mode!

•High PSR of -80 dBFS

Features Benefits•Ideal for far-field applications – would require

2 or more 61 dB mics in an array for similar SNR!

•Captures both very loud and very soft sounds•Digital output mics provide highest sensitivity

possible•Widely-used single-bit bus for codecs•Small package for space constrained

applications – and pin-to-pin upgradeable from the ADMP421

•Ideal for HD audio capture•Supports very long battery-life for mobile

devices

•Provides flexibility in trace routing

Applications

•Security Systems•Teleconferencing

Systems•Gaming Consoles•Mobile Devices•Tablet PCs

Surface Mount Package4 mm x 3 mm x 1mm(bottom side shown)

Full Evaluation Board: EVAL-ADMP521ZFlex-mounted device: EVAL-ADMP521Z-FLEX

New!

ADMP441: I2S-output Digital MicrophoneMEMS device with integrated ASIC provides complete signal chain!

•High SNR of 61 dB (A-weighted), capable of Equivalent Input Noise (EIN) of 33 dB SPL

•Integrates full signal chain – preamp and ADC

•I2S output with high precision 24-bit data

•Flat frequency response from 60 Hz to 15 kHz

•Low current consumption –1.4 mA (typ)•High PSR of -75 dBFS

Features Benefits

•Provides excellent sound quality and is ideal for far-field applications

•Saves cost, space and design complexity•Supports direct interface with

microcontroller or DSP•Well-balanced, natural sound from

microphone•Long battery-life for mobile devices•Provides flexibility in trace routing

Applications•Security Systems•Teleconferencing

Systems•Remote Microphones•Gaming Consoles•Mobile Devices•Tablet PCs Surface Mount Package

4.72mm x 3.76mm x 1mmEvaluation Boards: EVAL-ADMP441Z-FLEX (ADMP441 on flex)EVAL-ADMP441Z (optional board for connecting flex to PC USB port)

New!

Industry’s Most Integrated MEMS MicADMP441 integrates more of the signal chain than any other MEMS Mic!

Typical Analog-output mics (like the ADMP504/404) integrate an output amp Typical “digital-output” mics (like the ADMP421) integrate an ADC and

provide a single bit output stream (known as “pulse density modulation” or PDM) – which still requires a filter and some signal processing And PDM codecs are relatively focused on mobile devices – PDM is not

widespread outside this end equipment yetADMP441 provides full I2S output – the most common digital audio interface

ADMP441ADMP421

ADMP504

Secondary Amplifier

SerializerI2S, etc. Digital Signal

Processor or Microcontroller

Integration provided only by the ADMP441!

Filter

MEMS MICROPHONE DESIGN SUPPORT

MEMS Microphone Design-In Supportwww.analog.com/mic

Application Notes AN-1112: Microphone Common Terms & Specs explained AN-1003: Recommendations for Mounting & Connecting ADI Bottom-port

Microphones AN-1068: Reflow Soldering of MEMS Microphones AN-1124: Recommendations for sealing ADI bottom-port Mics from Dust & Liquid

Ingress AN-1140: Microphone Array Beamforming

Technical Articles “Understanding Microphone Sensitivity”, Analog Dialogue, May 2012

Microphone sensitivity can be a confusing spec. This article explains what you and our customers need to know to compare mics with different sensitivities.

“Common Inter-IC Digital Interfaces for Audio Data Transfer” Differences between and applications for I2S, PDM, TDM formats

Website: FAQs Webinars and other videos

MEMS Microphone Design-In Support MEMS Microphone Evaluation Boards

All Mics available as eval boards mounted on flex Ideal for customers to just wire in mic into their current system for eval

Some mics are also available on PCBs to easily interface to other ADI eval boards Audio Codecs & Processors Blackfin SDP

Circuits from the Lab Ideal for highlighting integration and performance capabilities CN-0078: PDM digital microphone + SigmaDSP audio codec CN-0207: Analog microphone + SigmaDSP audio codec CN-0208: I2S digital microphone + SigmaDSP processor CN-0262: Analog microphone + microphone preamp CN-0266: I2S digital microphone + Blackfin DSP

New EngineerZone Audio Communityez.analog.com/community/audio

MEMS Microphones included in the Audio community on EngineerZoneLaunched in MayIncludes all audio products &

applications MEMS Microphones Audio converters, codecs DSPs Audio Amplifiers

Ask the Expert – “Designing with MEMS Microphones”Key MEMS microphone design questions

& answersArchived at: http

://ez.analog.com/community/ask_the_expert/archived/mems-microphones

Microphone Contact InformationMicrophone Product Line

MarketingPaul SchreierPaul.schreier@analog.comTelephone: +1 (781) 937-1122

Microphone Product Line ApplicationsJerad LewisJerad.lewis@analog.comTelephone: +1 (781) 937-1601

Microphone SamplesAll released products are

sample-able via the webAll products available in 1k

and 4.5k / 5k reelsFor odd quantities (100, 200

pieces, etc.), catalog distributors (Digi-Key, etc.) have these products in stock

Microphone Eval Board OrdersAvailable on ADI eStoreAll boards are in stock and

available

MEMS MICROPHONE APPENDIX