Advances in New Diamond Science and TechnologyAdvances in New Diamond Science and Technology Fourth...

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Advances in New Diamond Science and Technology Fourth International Conference on New Diamond Science and Technology Kobe, Japan, July 18-22, 1994 Edited by S. Saito Kanagawa Academy of Science & Technology N. Fujimori Sumitomo Electric Industries, Ltd. O. Fukunaga Tokyo Institute of Technology M. Kamo National Institute for Research in Inorganic Materials K. Kobashi Kobe Steel, Ltd. M. Yoshikawa Tokyo Institute of Technology MYU Tokyo-Japan 1994

Transcript of Advances in New Diamond Science and TechnologyAdvances in New Diamond Science and Technology Fourth...

  • Advances in New DiamondScience and Technology

    Fourth International Conference onNew Diamond Science and TechnologyKobe, Japan, July 18-22, 1994

    Edited by

    S. SaitoKanagawa Academy of Science & Technology

    N. FujimoriSumitomo Electric Industries, Ltd.

    O. FukunagaTokyo Institute of Technology

    M. KamoNational Institute for Research in Inorganic Materials

    K. KobashiKobe Steel, Ltd.

    M. YoshikawaTokyo Institute of Technology

    MYUTokyo-Japan 1994

  • XI

    TABLE OF CONTENTS

    PREFACE v

    1. OPENING SESSION: DIAMOND RESEARCH IN ASIA 1

    2. SPECIAL LECTURES: CORPORATE STRATEGIES FOR DIAMONDBUSINESS AND R & D 3

    Corporate Strategies for Diamond Business and R&D in Kobe Steel, Ltd.Y. Yamaguchi (Japan) 5

    From Business to Future Dream of New DiamondT. Nakahara (Japan) 9

    Corporate and National Strategies for Diamond R&D

    R. Roy (USA) 11

    3. DEPOSITION METHODS OF DIAMOND FILMS 15

    Innovative Approaches to Diamond SynthesisR. Roy (USA) 17Diamond Film Growth Using Halomethane by DC Plasma Chemical VaporDepositionF. C.-N. Hong, J. Y. Hsu, M. Chang, G. T. Liang and J. J. Wu(Taiwan, ROC) 23

    Large Area Diamond Film Growth in a Low Pressure FlameH.-S. Shin, N. G. Glumac and D. G. Goodwin (USA) 27

    Diamond Film Deposition by a Substrate-Stabilized Flat FlameK. Uchida, A. Itoh, K. Higuchi, M. Kohzaki and S. Noda (Japan) 31

    Diamond Growth on SiO2 Particles in a Fluidized Bed ReactorH.-S. Shin and D. G. Goodwin (USA) 35

    Low Temperature Deposition of Thin Film DiamondM. J. Ulczynski, D. K. Reinhard, M. Prystajko and J. Asmussen (USA) 41

    Fabrication of Diamond Films on PolymerK. Mishuku, Y. Negishi, T. Yara, A. Hatta, T. Ito and A. Hiraki (Japan) 45

    Effects of Metals Introduced to Plasma on Diamond Synthesis byMicrowave Plasma CVDM. Nagano, T. Nagao, H. Mishima and H. Ichinose (Japan) 49

  • Xll

    Diamond Deposition from Plasmas Including C6H6 as Carbon SourceT. Kotaki, H. Isono, H. Shikano and O. Matsumoto (Japan) 53

    Extremely Mild Deposition of DLC Films by Super-Wide ECR PlasmaSource Excited by Traveling MicrowaveS. Amadatsu, A. Ishii, T. Aoyama, M. Sugiyo and T. Kobayashi (Japan) 57

    Diamond Film Synthesis by Pulse Modulated ECR DischargeA. Hatta, K. Kadota, T. Yara, T. Ito and A. Hiraki (Japan) 61

    Low-Temperature Deposition of Diamond Films Using RF Plasma CVDI. Watanabe, H. Matsumoto, R. Makara and K. Matsumoto (Japan) 65

    Synthesis of Diamond Thick Films by DC PACVDJ.-K. Lee, W.-S. Lee, Y.-J. Baik and K. Y. Eun (Korea) 69

    Formation of Diamond Films by Pulsed Discharge Plasma CVDM. Noda, H. Kusakabe and S. Maruno (Japan) 73

    Diamond Film Growth by a Hollow Cathode CVD MethodF. C.-N. Hong, J.-H. Hwang, M.-C. Yeh, G.-T. Liang and H.-C. Chien(Taiwan, ROC) ;.. 77

    Synthesis of Diamond by Plasma Jet under Medium PressureS. Sakiyama, O. Fukumasa, K. Aoki, T. Murakami and H. Arashi (Japan) 81

    Mechanistic Studies of Diamond Growth Using Chloromethane Reactantsin a Hot-Filament CVD ReactorF. C.-N. Hong, J.-J. Wu, C.-T. Su and S.-H. Yeh (Taiwan, ROC) 85

    Diagnostics of a Filament-Assisted Diamond Growth Environment byLaser SpectroscopyN. Ota and N. Fujimori (Japan) 89

    Influence of Transport and Chemical Reaction Processes on DiamondGrowth Rates, Morphology and QualityC. Kovach, L. Zeatoun, B. Roozbehani, I. Greber and J. C. Angus (USA) 93

    Problems of Mean Free Path and Electric Field on Hot Filament DiamondCVDS. Honma, H. Saitoh, T. Ishiguro and Y. Ichinose (Japan) 97

    Development of Apparatus Using Penning Ion Source for Synthesis of ThinFilmsA. Hirata, T. Tatami and M. Yoshikawa (Japan) 101

  • X11I

    On Combustion Synthesis of Diamond Films by a Modified TorchD.-Y. Wang, C.-C. Wang and S.-R. Chang (Taiwan, ROC) 105

    Laser-Induced Transfer of Ultrafine Diamond Particles for SelectiveDeposition of Diamond FilmsS. M. Pimenov, G. A. Shafeev, A. A. Smolin, V. I. Konov and B. K. Vodolaga(Russia) 109

    Formation of Diamond Nanocrystals in Laser-Irradiated AmorphousCarbon FilmsL. C. Nistor, J. van Landuyt, V. G. Ralchenko, T. V. Kononenko,E. D. Obraztsova and V. E. Strelnitsky (Belguim) 113

    Deposition of Diamond Thin Films by Filament-Assisted Excimer LaserAblation of GraphiteH. Chen, N. Maffei and R. H. Prince (Canada) 117

    4. IN-SITU ANALYSIS 121

    Microwave CVD of Diamond: Plasma Diagnostics and Deposition ReactorModelingT. A. Grotjohn, G. L. King and W.-y. Tan (USA) 123

    In Situ Detection of Methyl Radicals in Filament Assisted DiamondGrowth Environment by Resonance Ionization SpectroscopyN. Ota and N. Fujimori (Japan) 127

    Contribution to the Modelling of a Microwave PACVD DiamondDeposition Reactor: Chemical Kinetics and Diffusion TransportK. Hassouni, S. Farhat, C. D. Scott and A. Gicquel (France) 131

    In Situ Pulsed Raman Study of Growing Process of a Diamond Film in aMicrowave Plasma ReactorL. Fayette, B. Marcus, M. Mermoux, N. Rosman, L. Abello and G. Lucazeau(France) 135

    5. NUCLEATION AND GROWTH OF DIAMOND FILMS 139

    Diamond Growth Mechanisms: Influence on Growth Rates and QualityJ. C. Angus, E. A. Evans and Y. Wang (USA) 141

    Synthesis of Very Thin Diamond Film on Si Substrate Pretreated inFluidized BedT. Takarada, T. Okazaki, H. Takezawa, K. Kato and Y. Nakaike (Japan) 145

  • XIV

    Control of Twin Formation: A Prerequisite for the Growth of ThickOriented Diamond FilmsC. Wild, N. Herres, R. Locher, W. Muller-Sebert and P. Koidl (Germany) 149

    Nucleation of Diamond by Chemical Vapor Deposition in Bias-EnhancedMicrowave PlasmaH. Maeda, M. Irie, K. Kusakabe and S. Morooka (Japan) 153

    Investigation of Nucleation Density and Growth Rate of Diamond CrystalsDeposited by Glow DC Discharge Plasma CVDN. V. Samokhvalov, V. E. Strel'nitskij, V. A. Belous, E. D. Obraztsova andV. G. Ral'chenko (Ukraine) 157

    Role of the Substrate on the Nucleation and the Crystal Growth ofDiamond through CVD MethodsG. Demazeau, D. Michau, B. Tanguy, J. GriM, J. Delafond, M. Jaouen,R. Cavagnat and M. Couzi (France) 163

    Diamond Nucleation on Stressed SubstratesK. K. Hirakuri, N. Mutsukura and Y. Machi (Japan) 167

    Ultra-High Nucleation Density for Diamond Film Growth at 470 and 900°CG.-S. Yang, M. Aslam, M. Ulczynski and D. K. Reinhard (USA) 171

    Some Applications of Diamond Nucleation by the Bias-PretreatmentMethodS. Yugo, K. Semoto, K. Hoshina and T. Kimura (Japan) 175

    Formation of Diamond Films on Carbonized Si Substrate by IntermittentDischarge Plasma CVDM. Noda, H. Kusakabe and S. Maruno (Japan) 179

    Investigation of Diamond Films Deposited on Isotropic Artificial Graphiteand Its Applications to Biomedical EngineeringY.-H. Lee and L.-R. Hong (Taiwan, ROC) 183

    Diamond Synthesis on the Row-Soot Coated SubstratesY. Sakamoto and M. Takaya (Japan) 187

    Seeding with Ultrafine Diamond Particles for Diamond Synthesis by CVDH. Makita, T, Yara, K. Nishimura, A. Hatta, T. Ito and A. Hiraki (Japan) 191

    Deposition of Diamond on the Polycrystalline Nickel SubstrateX. Qiao, O. Fukunaga, T. Tsurumi, N. Ohashi, N. Shinoda and K. Yui(Japan) 1 9 5

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    Deposition of Diamond on Mo Substrate from Plasmas Prepared UsingCH4 and CO as Carbon Sources in Microwave DischargeH. Shikano, T. Kotaki and O. Matsumoto (Japan) 199

    Microstructure of Boron-Doped Diamond FilmsN. Kikuchi, Y. Ohsawa, H. Yoshikawa and M. Kitagawa (Japan) 203

    The Production of CVD Diamond-Coated Wires and Free-StandingDiamond TubesP. W. May, C. A. Rego, M. N. R. Ashfold, K. N. Rosser, N. M. Everitt,P. G. Partridge, Q. S. Chia and G. Lu (UK) 211

    Effect of Argon on the Internal Stress of CVD Diamond Film on SiliconC. T. Hwang, Y. H. Chiou, S. L. Sung, Y. S. Chang and H. C. Shih(Taiwan, ROC) 215

    Change in Nucleation Density for CVD Diamonds on Si SubstrateSubjected to Different Annealing ConditionsC. L. Fritzen, R. P. Livi, E. H. da Jornada and J. A. H. da Jornada (Brasil) 221

    Nucleation and Growth of Diamond in an Enclosed OxyacetyleneCombustion SystemA. Somashekhar, S. P. Bozeman, J. T. Glass, P. W. Morrison and J. T. Prater(USA) 225

    6. EPITAXIAL GROWTH 229

    Effect of Texture Orientation on the Growth of Highly Oriented TexturedDiamond Film on Si SubstrateY.-J. Baik and K. Y. Eun (Korea) 231

    Optimization of the Texture of Epitaxially Nucleated Diamond Films onSiliconR. Hessmer, M. Schreck, S. Geier, B. Rauschenbach and B. Stritzker(Germany) 235

    Surface Structure and Morphology of Diamond Epitaxial FilmsT. Tsuno, T. Imai, S. Shikata and N. Fujimori (Japan) 241

    Cross-Sectional TEM Observation of Homoepitaxial DiamondM. Tarutani, T. Ando, Y. Takai, M. Kamo and R. Shimizu (Japan) 247

    The Defect Microstructure of Thick Homoepitaxial Diamond FilmsD. R. Black, H. E. Burdette, L. Robins, M. A. Piano, M. D. Moyer,M. A. Moreno, L. S. Pan, D. R. Kania and W. F. Banholzer (USA) 251

  • xvi

    A Calculation of Diamond C(001)-2xl, 2x2 Surfaces by Usingthe First-Principles Molecular DynamicsK. Kobayashi (Japan) 255

    MPACVD Diamond Homoepitaxial Growth: Electron Back ScatterPattern and Pole Figure Analyses of the Grown LayersC. Findeling-Dufour, F. Silva, R. Chiron, A. Vignes and A. Gicquel (France)... 259

    Electroluminescence of Homoepitaxial Diamond Film and SyntheticInsulating DiamondA. A. Melnikov, A. V. Denisenko, A. M. Zaitsev, V. S. Varichenko,V. P. Varnin, I. G. Teremetskaja, V. A. Laptev, Ju. A. Palyanov, W. R. Fahrnerand B. Burchard (Russia) 263

    Initial Stage of Highly Oriented, Textured Diamond Particles on Si(OOl)and p-SiC(OOl)T. Suesada, K. Ohtani, N. Nakamura and H. Kawarada (Japan) 267

    Growth of Oriented Diamond Particles on 6H-Type of SiC and GraphiteFlakesT. Suzuki, M. Yagi and K. Shibuki (Japan) 271

    Methods of Characterizing the Texture of CVD Diamond FilmsS. Geier, M. Schreck, R. Hessmer, B. Rauschenbach, B. Stritzker, K. HelmingandK. Kunze (Germany) 275

    Characterization of Highly Oriented Polycrystalline Diamond FilmsGrown in a NIRIM-Type ReactorT. Tachibana, K. Hayashi and K. Kobashi (Japan) 279

    Oriented Diamond Particles on Copper SubstratesT. Ishikura, S. Yamashita, S. Ojika and H. Kawarada (Japan) 283

    Oriented Growth of Diamond on {111} and {100} of Cubic Boron NitrideUsing Combustion Flame TechniqueY. Imabayashi, H. Saitoh and R. Urao (Japan) 287

    Characteristic of Epitaxial Growth of Diamond Films on Cubic BoronNitride Surface by dc Glow Discharge Chemical Vapor DepositionG. Zou, C. Gao, Z. Jin, T. Zhang and X. Lu (P. R. China) 291

    Mosaic Growth of DiamondG. Janssen and L. J. Giling (The Netherlands) 295

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    7. CHARACTERIZATION 299

    Applications of Excitonic Emissions from DiamondsH. Kawarada, T. Tsutsumi and J. Imamura (Japan) 301

    Fourier Transform Cathodoluminescence Spectroscopy of DiamondA. T. Collins, E. C. Lightowlers, V. Higgs, L. Allers and S. J. Sharp (UK) 307

    Optical Defect Centres in Random Polycrystalline and (100) HighlyOriented Diamond FilmsD. Buhaenko, C. Beer, P. Ellis, L. Walker, B. Stoner, G. Tessmer andR. Fauber (UK) 311

    New Cathodoluminescence from Boron-Doped DiamondS. C. Lawson, H. Kanda, H. Kiyota, T. Tsutsumi and H. Kawarada (Japan) 315

    Radiative Recombination Processes in Semiconducting DiamondJ. A. Freitas, Jr., P. B. Klein and A. T. Collins (USA) 321

    Aspects of Natural Gem DiamondC. M. Welbourn (UK) 327

    The Ionized A-Centre and Other Di-Nitrogen Defects in DiamondM. E. Newton, O. D. Tucker and J. M. Baker (UK) 333

    Electronic Structure of Ni-Ion in Diamond Studied by a DV-Xa MethodN. Ohashi, O. Fukunaga, J. Tanaka, J. Isoya and S. Tanaka (Japan) 337

    Boron and Nitrogen Analysis in CVD Diamond Films Using Cold NeutronDepth ProfilingG. P. Lamaze, A. Badzian, T. Badzian, R. G. Downing and L. Pilione (USA).... 341

    Recent Developments in the Thermal Conductivity of CVD DiamondJ. E. Graebner (USA) 345

    ESR Studies of Point Defects in Synthetic Diamond CrystalsJ. Isoya, H. Kanda and Y. Morita (Japan) 351

    High Quality Semiconducting Diamond Films and DevicesJ. T. Glass, D. L. Dreifus, R. E. Fauber, B. A. Fox, M. L. Hartsell,R. B. Henard, J. S. Holmes, D. Malta, L. S. Piano, A. J. Tessmer, G. J. Tessmerand H. A. Wynands (USA) 355

  • XV111

    Diamond Films Co-Doped with Phosphorus and NitrogenL. J. Giling, Y. S. Wang, G. Z. Cao, G. J. Bauhuis and P. F. A. Alkemade(The Netherlands) 359

    Exciton Recombination Radiation from Combustion Flame DiamondT. Tsutsumi, J. Imamura, M. Suzuki, S. Takeuchi, M. Murakawa andH. Kawarada (Japan) 363

    Time Dependent Cathodoluminescence (CL) Measurement of DiamondJ. H. Won, H. Yagi, N. Eimori, H. Yagyu, A. Hatta, Y. Mori, T. Ito, T. Sasakiand A. Hiraki (Japan) 367

    Low Temperature Micro-Photoluminescence of Defect Centers in CVDDiamond FilmsT. S. McCauley and Y. K. Vohra (USA) 371

    Pulsed Raman Set up for Characterization of Diamond Film duringIts Growing Process in a DC Plasma Jet CVD ReactorN. Rosman, L. Abello, G. Lucazeau, J. P. Chabert, T. Priem and E. DaSilva(France) 375

    Optical Properties of Diamond Plates Synthesized by Arc DischargePlasma Jet Chemical Vapor DepositionA. Hirata and M. Yoshikawa (Japan) 379

    Microstructure Control and Surface Polishing of CVD Diamond Thin Filmfor Optical ApplicationS. K. Choi, S. K. Jung, Y. H. Jin, Y. S. Park, S. H. Kim and J. W. Lee (Korea).. 383

    Spectrophotometric Characterization of Rough Diamond Layers on SiliconR. Petrich and O. Stenzel (Germany) 387

    Applications of Isopure and Natural Abundance Synthetic Diamonds inHigh Pressure ResearchY. K. Vohra, T. S. MacCauley and S. S. Vagarali (USA) 391

    Spectral Hole Burning in Reactor-Treated Diamond MaterialsI. Sildos and A. Osvet (Estonia) 395

    Factors Influencing Thermal Conductivity in Diamond FilmC. Gu, Z. Jin, C. Wang, X. Lu, G. Zou, J. Zhang and R. Fang (P. R. China) 399

    Thermal Conductivity of Diamond-Based Silicon-on-Insulater StructuresC. Gu, Z. Jin, C. Wang, X. Lu, G. Zou, J. Zhang and R. Fang (P. R. China) 403

  • XIX

    Structural Imperfections in CVD Diamond FilmsY. Show, M. Iwase and T. Izumi (Japan) 407

    Quantitative Analysis of Hydrogen in Chemical Vapor Deposited DiamondH. Yagi, K. Nishimura, Y. Mori, A. Hatta, T. Ito and A. Hiraki (Japan) 411

    Theoretical Analysis of Pneumatolytic-Hydrothermal Environment asPotential Source of Diamonds in Earth's CrustA. Niedbalska, R. Safaciriski, J. Sentek and A. Szymaiiski (Poland) 415

    Incorporation of Filament Material in Diamond Films Prepared by HotFilament CVDM. Toguchi, A. Higa, A. Fukuda and A. Hiraki (Japan) 419

    8. SURFACE STRUCTURE AND MODIFICATION 423

    Surface Processes in Diamond Chemical Vapor DepositionM. P. D'Evelyn, R. E. Rawles, T. I. Hukka and T. A. Pakkanen (USA) 425

    Oxidation of Diamond Surfaces Studied by FTIR, TPD and TPRSpectroscopiesT. Ando, K. Yamamoto, M. Ishii, M. Kamo and Y. Sato (Japan) 431

    Scanning Tunnelling Microscopy Determination of Orthogonal Dimer StepGrowth of Homoepitaxial P-Type (100) DiamondH. Maguire, T. Ando, M. Kamo, W. Zimmerman-Edling and H.-G. Busmann(UK) 435

    Structure Analysis of the Diamond (100) Surface [Low-Energy ElectronDiffraction (LEED)]H. Yamazaki and T. Ogio (Japan) 439

    Optical Studies on Ion-Beam-Doped Diamond LayersJ. F. Prins (South Africa) 443

    P-Type Doping of Diamond by Boron Ion ImplantationR. Kalish, C. Uzan-Saguy and A. Samoiloff (Israel) 449

    Basic Study on Laser-Assisted Etching of DiamondH. Miyazawa, S. Miyake, T. Miyazaki, S. Watanabe and M. Murakawa(Japan) 453

    Exchange of Hydrogen on Diamond (111) Surface with Gas-PhaseDeuteriumT. Aizawa, T. Ando, M. Kamo and Y. Sato (Japan) 457

  • XX

    A Vibrational Spectroscopic Study of Hydrogenated Diamond Surfacesbylnfrared-Visible Sum-Frequency Generation (SFG)T. Ando, T. Aizawa, M. Kamo, Y. Sato, T. Anzai, H. Yamamoto, A. Wada,K. Domen and C. Hirose (Japan) 461

    A Surface Science Study on Elementary Steps in Low-Pressure DiamondSynthesisJ. Biener, A. Schenk, B. Winter, C. Lutterloh and J. Kiippers (Germany) 465

    Structure of CVD Deposited Diamond (001) 2x1 SurfaceM. Kitabatake, M. Deguchi and T. Hirao (Japan) 469

    Theoretical Study of Bond Exchange Mechanism during CVD Growth ofDiamondT. Ogitsu, T. Miyazaki, M. Fujita and M. Okazaki (Japan) 473

    Valence-Band Photoemission Study of Hydrogenated Diamond (111)SurfacesK. Yamamoto, S. Suehara, T. Ando, S. Hishita, M. Kamo and Y. Sato(Japan) 477

    Compositional Inhomogeneity of Diamond-Grown Si Substrates Evaluatedby Auger Electron SpectroscopyS. Tanaka, K. Ikoma, H. Kiyota, J. Tanaka, M. Kamo and Y. Sato (Japan) 481

    Molecular Beam Mass Spectrometric Study of the Spatial Distribution ofGas-Phase Species Involved in the Growth of HFCVD Diamond FilmsC. A. Rego, P. W. May, C. R. Henderson, M. N. R. Ashfold, K. N. Rosser andN. M. Everitt (UK) 485

    Sputtering Rate of Polycrystalline Diamond Film Using Argon Ion BeamT. Kyuno, H. Saitoh and R. Urao (Japan) 489

    Patterning of Diamond Films by Direct Laser Writing: Selective-AreaDeposition, Chemical Etching and Surface SmoothingV. G. Ralchenko, K. G. Korotoushenko, A. A. Smolin and V. I. Konov(Russia) 493

    Diamond Processing by Excimer Laser AblationK. Harano, N. Ota and N. Fujimori (Japan) 497

    Excimer Laser Processing of Diamond FilmsH. Suzuki, M. Yoshikawa and H. Tokura (Japan) 501

  • XXI

    9. HIGH-PRESSURE SYNTHESIS 505

    Classification of the Catalysts for Diamond GrowthH. Kanda (Japan) 507

    The Features of the Process of Diamond Formation from SiC under HighPressure and High TemperatureL. Gou, S. Hong and Q. Gou (P. R. China) 513

    Growth Morphology and Physical Properties of Diamond Grown inPhosphorus CatalystM. Akaishi, H. Kanda, T. Ando, J. Tanaka, M. Kamo, Y. Sato and S. Yamaoka(Japan) 517

    Crystal Growth of Diamond from Regrowth-Treated GraphiteY. Wang, R. Takanabe, H. Kagi, K. J. Takano and M. Wakatsuki (Japan) 521

    Impurities of Cobalt and Manganese in Artificial DiamondX.-P. Jia, H. Kagi, S. Hayakawa, M. Wakatsuki and Y. Gohshi (Japan) 525

    Factors Which Influence the Strength Dispersion of Synthetic DiamondsA. Manescu, M. Fecioru and O. Celea (Romania) 529

    Fabrication of Diamond-Containing Inorganic Composites by Hot IsostaticPressingS. Kume, K. Suzuki and H. Yoshida (Japan) 533

    Formation of Solid Solutions of Boron Nitride and Carbon; RecrystallizedProducts of Flash-Heating ExperimentsH. Kagi, I. Tsuchida and M. Wakatsuki (Japan) 537

    Molecular Orbital Calculation and Auger Electron Spectroscopy of CubicBoron NitridesY. Suetsugu, J. Tanaka, T. Taniguchi, S. Tanaka and K. Kobayashi (Japan) 541

    New Developments in c-BN Synthesis under High Pressure-HighTemperature ConditionsG. Demazeau, L. Vel-Boutinaud, V. Gonnet, M. Jaouen, Th. Cabioch andG. Hug (France) 545

    Synthesis of Cubic Boron Nitride by CaLiBN2 Catalyst at HT/HPH. Fujioka, N. Ohashi, T. Tsurumi, O. Fukunaga and S. Nakano (Japan) 551

    Formation of Cubic Boron Nitride from a Mixture of Fe,N and FeBW. Li, H. Kagi and M. Wakatsuki (Japan) 555

  • XX11

    Micron cBN Powder Produced by HP/HT SynthesisM. Fecioru, G. Dinca, P. Georgeoni, G. Calu, G. Baluta and M. Deju(Romania) 559

    Effects of Ammonium Halide Additions on Cubic Boron Nitride Growth inVarious Catalyst-BN SystemsG. Dinca, P. Georgeoni, G. Calu, G. Baluta and M. Deju (Romania) 563

    10. SHOCK SYNTHESIS 567

    Mechanism of Diamond Synthesis from High ExplosivesV. Anisichkin and D. Dolgushin (Russia) 569

    Process of CM Fullerene Collapse to sp3 Bond Formation under Shock

    CompressionH. Hirai, K. Kondo and N. Yoshizawa (Japan) 573

    Carbon Phases Quenched from Shock-Compressed FulleritesT. Sekine (Japan) 577

    Shock Treatment of Diamond and Carbon Containing PowdersG. Burkhard, K. Dan, Y. Tanabe, A. B. Sawaoka and K. Yamada (Japan) 581

    Predominant Parameters in the Shock-Synthesis of DiamondK. Kondo, H. Hirai and S. Kukino (Japan) 585

    Ultra-Dispersed Detonation Diamonds: Properties and ApplicationV. F. Komarov, E. A. Petrov, G. V. Sakovitch and A. V. Klimov (Russia) 589

    11. DLC AND OTHER FILMS 593

    Preparation of Cubic Boron Nitride Films by Phase Regulated RF BiasSputteringO. Tsuda, J. Fujikata, Y. Yamada and T. Yoshida (Japan) 595

    Low Temperature EPR Study of a-C:H Films Having Different PhysicalPropertiesC. De Martino, F. Demichelis, M. Fanciulli, S. Schreiter and A. Tagliaferro(Italy) 599

    Biocompatible Carbon Coatings: Evaluation of Physical PropertiesP. Ami, C. De Martino, F. Demichelis, M. Santi, A. Tagliaferro and F. Vallana(Italy) 603

  • XXU1

    New Model for the Photoluminescence Behaviour of a-C:H FilmsC. De Martino, F. Demichelis, A. Hammerschmidt, S. Schreiter andA. Tagliaferro (Italy) 607

    Structure and Mechanical Properties of a-C:H Films Containing NitrogenK.-R. Lee and K. Y. Eun (Korea) 611

    Picosecond Photoluminescence in Fluorine Implanted a-C:H FilmsS. Peng, X. Huang, Y. Tao, D. Liu, N. Ke and S. P. Wong (P. R. China) 615

    The Effect of Sub-Threshold CO2 Laser Irradiation on the IR Propertiesof Magnetron Sputtered DLC on KCL SubstrateF. X. Lu, D. G. Cheng, R. Z. Ye, Q. B. Sun, W. X. Yu, B. Song, D. Z. Gongand G. Wang (P. R. China) 619

    DLC Formation in Polyimide Surface Layer by Ion ImplantationH. Watanabe, A. Fukuda, K. Takahashi and M. Iwaki (Japan) 623

    Transport in Fluorine Implanted a-C:H Thin FilmsS. P. Wong, N. Ke and S. Peng (Hong Kong) 627

    Properties of Boron Nitride Films Synthesized by Ion Beam and VaporDepositionS. Nishiyama, A. Ebe, Y. Iwamoto and K. Ogata (Japan) 631

    12. ELECTRICAL PROPERTIES AND APPLICATIONS 635

    Surface Fermi Level Position of Diamond Treated with PlasmaT. Sugino, A. Furukawa, K. Karasutani, Y. Sakamoto and J. Shirafuji (Japan).... 637

    Fabrication of Diamond-Based FETs Using Ion ImplantationC. A. Hewett and J. R. Zeidler (USA) 641

    Thin Film Diamond MIS Structures Using Highly Polarizable GateInsulatorsS. Suzuki, Y. Otsuka, T. Ariki, S. Shikama, T. Maki and T. Kobayashi (Japan).. 653

    Various Features of Metal/Intrinsic Diamond/Semiconducting DiamondDiodesK. Miyata, Y. Yokota, K. Saito and K. Kobashi (Japan) 657

    Fabrication of a Gate-Recessed-Structure MESFET on Diamond FilmsH. Shiomi, Y. Nishibayashi, N. Toda, S. Shikata and N. Fujimori (Japan) 661

  • XXIV

    A Proposed Novel Application of Thin Overlay Diamond Films for ImprovedThermal Management Budget of Short Gate High Power DevicesS. Rotter (Israel) 665

    High Temperature Electronic Applications of DiamondI. M. Buckley-Golder, P. R. Chalker, C. Johnston, S. Romani and M. Werner(UK) 669

    Characteristic of Photoconductive Switch with Diamond Thin FilmY. Aikawa, K. Baba, N. Shohata, H. Yoneda and K. Ueda (Japan) 679

    Field Emission from Vapor Deposited P-Type Polycrystalline DiamondD. Hong and M. Aslam (USA) 683

    Diamond Detectors for Experiments at High Luminosity CollidersK. K. Gan, F. Borchelt, W. Dulinski, D. Fujino, R. Gilman, S. Han, J. Hassard,A. Howard, H. Kagan, D. Kania, R. Kass, S. K. Kim, G. Kumbartski, M. H. Lee,G. Lu, E. Nygard, R. Malchow, L. S. Pan, S. Schnetzer, R. Stone, J. Straver,R. J. Teserek, W. Trischuk, G. Thomson, P. Weilhammer, C. White,R. L. Woodin, S. Zhao, M. Zoeller and Y. Sugimoto (USA) 687

    Microelectronic Pressure Sensor with Diamond Piezoresistors on DiamondDiaphragmJ. L. Davidson, D. R. Wur, W. P. Kang, D. Kinser, D. V. Kerns, J. P. Wang andY. C. Ling (USA) 693

    2.5GHz SAW Bandpass Filter Using Polycrystalline DiamondS. Shikata, H. Nakahata, K. Higaki, S. Fujii, A. Hachigo and N. Fujimori(Japan) 697

    Growth and Characterization of CVD Diamond Films Doped withPhosphorousK. Bekku, Y. Mori, N. Eimori, H. Makita, A. Hatta, T. Ito and A. Hiraki(Japan) 701

    Electrical Characterization of Boron-Doped Polycrystalline DiamondFilms Synthesized by Hot-Filament CVDT. Sugino, K. Karasutani, H. Kataoka, K. Kobashi and J. Shirafuji (Japan) 705

    Effects of Annealing on the Electrical Properties of Boron-Doped DiamondFilmsC.-F. Chen and S. H. Chen (Taiwan, ROC) 709

    Formation of Carbide Ohmic Contacts for p-Type DiamondA. Otsuki, J. Nakanishi, G. Kawaguchi, T. Oku and M. Murakami (Japan) 713

  • XXV

    Thermally Stable Ohmic Contact to Boron Doped Diamond FilmsY. Nishibayashi, N. Toda, H. Shiomi and S. Shikata (Japan) 717

    2D-Simulation of Diamond Based Electronic DevicesB. Burchard, A. V. Denisenko, A. A. Melnikov, A. M. Zaitsev, W. R. Fahrner,F. Petermann, K. Hoppe and B. Stanski (Germany) 721

    Characteristics of Polycrystalline Diamond Film MiSFET and Its DeviceModelingK. Nishimura, H. Koyama, K. Miyata and K. Kobashi (Japan) 725

    Fabrication of MESFET Utilizing Hydrogen-Terminated HomoepitaxialDiamond FilmsN. Nakamura, M. Aoki, M. Itoh, N. Jin and H. Kawarada (Japan) 729

    Hole Injection and Optical Properties of Epitaxial Diamond P-I-P LayeredStructureT. Maki and T. Kobayashi (Japan) 733

    Optoelectronic Devices Based on DiamondW. R. Fahrner, B. Burchard, A. M. Zaitsev, A. A. Melnikov, A. V. Denisenkoand V. S. Varichenko (Germany) 737

    Electrochemical Activity of the Boron Doped CVD Diamond FilmsS. Yang, J. Zhu, Y. Yao and X. Zhang (P. R. China) 741

    13. MECHANICAL PROPERTIES AND APPLICATIONS 745

    Ultra Precision Cutting Bites of CVD DiamondN. Oyanagi, T. Obata and K. Komaki (Japan) 747

    Laminated Diamond Film Cutter ConceptJ. C. Rowley (USA) 751

    Synthesis of Diamond Diaphragm by DC Plasma Jet CVDK. Kurihara, K. Sasaki, T. Itani, M. Kawarada and A. Kodaira (Japan) 755

    Technical Cost Modeling: An Approach to Production Cost Identificationand ReductionS. M. Riester, J. V. Busch and D. G. Goodwin (USA) 759

    Adhesion of Diamond Film Deposited on Cemented Carbide SubstrateT. Tsutsumoto, A. Nakao and H. Matsubara (Japan) 763

  • XXVI

    Influence of Substrate Materials on the Adhesion of DC Plasma Jet CVDDiamond FilmsK. Sasaki, K. Kurihara, T. Itani, M. Kawarada and A. Kodaira (Japan) 767

    Effect of Crystallinity of Diamond on Cutting Property of CVD DiamondBrazed ToolY.-J. Baik, K. Y. Eun, J. S. Han and J. W. Ryu (Korea) 771

    Diamond Deposition on Hard Materials by Hot-Filament CVD MethodUsing Tantalum Carbide FilamentK. Konowa, H. Matsubara, S.-G. Shin and T. Tsutsumoto (Japan) 775

    Application of Polycrystalline CVD Diamond to Indenter Tip of ScratchTesterS. Takeuchi and M. Murakawa (Japan) 779

    Cutting Performance of CVD Diamond Polished by ThermochemicalPolishing MethodF. Okuzumi, H. Tokura and M. Yoshikawa (Japan) 783

    Analysis of Hot Filament CVD Diamond Films on Etched and UnetchedWC-Co SurfacesN. M. Everitt, R. F. Silva, J. Vieira, C. A. Rego, C. R. Henderson, P. W. Mayand M. N. R. Ashfold (UK) 787

    Diamond Deposition on Sintered TungstenC. R. Shi, Y. Avyigal, S. Dirnfeld, A. Hoffman, A. Fayer and R. Kalish(P. R. China) 791

    Effect of Laser Irradiation on Diamond Growth on WC-6wt%Co HardMetal SubstrateF. X. Lu, C. M. Li, J. J. Wang, Y. Tzeng, J. Wei, D. Z. Gong and G. Wang(P. R. China) 795

    The Influence of Coating Thickness in Solid Particle Erosion of DiamondCoatingsA. Alahelisten, P. Hollman and S. Hogmark (Sweden) 799

    AUTHOR INDEX 803