2018rotalab.com/docs/catalogs/ulvac-product-catalog.pdf•Delivered“ SYSTEM 731,” the world’s...
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TEL: +81-467-89-2033 FAX: +81-467-89-2250
0107E2018021500JBA
2500 Hagisono, Chigasaki, Kanagawa
253-8543, Japan
ULVAC, Inc.
2018
Basic Corporate Philosophy
ince its foundation in 1952, ULVAC has operated under the corporate philosophy of “aiming at contributing to the evolution of industries and
sciences by using vacuum technologies” and has been blessed with wonderful support from customers in electronics and many other industries, particularly the vacuum industry.
ULVAC wishes to continue to be an organization that constantly produces advanced technologies by making the most of its advantages as a comprehensive vacuum manufacturer and that is sought after by customers in all related industries.
We are looking forward to your continued support in the future.
History of the ULVAC Group
oday, vacuum technologies have become an
integral part of virtually all industries. ULVAC
supplies products to industries and academia as we
are the world’s only comprehensive manufacturer of
vacuum-related products.
The DNA of those young researchers who came
together with the aspiration of “contributing to
Japanese industries by using vacuum technologies”
has been passed down to this day. ULVAC has been
providing the latest technologies to the world for over
60 years.
•JAPAN VACUUM ENGINEERING CO.,LTD. was established.
•Received the first order of vacuum evaporation equipment for coating automobile parts form HAKKOSHA.
•Established the Omori Plant and started manufacturing of equipment domestically.
1952
1955
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19681972
1975
1986
1988
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1995
2001
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2005
2006
2007
20 1 1
2 01 2
20152016
19591960
•Established ULVACs first overseas local corporation in Hong Kong.
•The Chigasaki Head Office / Plant was completed.•Established the Institute for Super Materials as
ULVAC’s first full-scale research institute.•Delivered“ SYSTEM 731,” the world’s first computer
controlled, fully automatic vacuum evaporation equipment to IBM.
•The“ MCH Series,”the world’s first multi-chamber sputtering system, has been acclaimed by many semiconductor manufacturers.
•The“ SHD Series,” a sputtering system for manufacturing hard discs, became a hit globally.
•Established the Fuji Susono Plant as a dedicated plant for semiconductor production equipment.
•Launched the dedicated LCD production“ SMD Series” deposition system, which became a cornerstone of the FPD business.
•Established a production basis in China and a sales / service base in South Korea.•Established The Institute for Semiconductor and
Electronics Technologies.•The company name is changed from ULVAC JAPAN, Ltd. to ULVAC, Inc.•New buildings of Chigasaki Head office / Plant were
Completed for development prototype production of large LCD equipment.
•Listed its stock on the First Section of the Tokyo Stock Exchange.
•Established a production base for full-scale vacuum equipment in Suzhou, China.
•Established a large-scale production base for large LCD production equipment in South Korea.
•Established a production subsidiary for large LCD production equipment in Taiwan.
•Established the Chiba Tomisato Plant for the development and manufacturing of materials.
•Received an order for an integrated production line for thin-film solar cells (TFSCs).
•Established the Institute for Super Materials in South Korea.
•The company celebrated the 60th anniversary of its founding.
•Established Future Technology Research Laboratory.•ULVAC (SUZHOU) CO., LTD. began manufacturing
production equipment for large displays.
•Established the Yokohama Plant.•Developed large vacuum equipment for heavy
industries such as vacuum melting furnaces and vacuum distilling equipment.
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ULVAC Group aims to contribute to the development of industries and science by comprehensively utilizing its vacuum and peripheral technologies through the mutual cooperation and collaboration of the Group companies.
Origin of Company Name
‘ULVAC’ is a combination of ‘UL’ from ‘ultimate’ and
‘VAC’ from ‘vacuum,’ signifying that we pursue the
‘Ultimate in Vacuum Technology.’
Seeking to achieve a dramatic advance, we will further
develop the ULVAC brand by pursuing the development of
new technologies that complement vacuum technologies.
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Identity & Top Message
Setsuo IwashitaPresident and CEO
01 02ULVAC, Inc. Corporate Profile 2018
nfinite possibilities were opened up to humans when they gained access to a “microcosm” called “vacuum.”
Since its inception, ULVAC has always been pursuing the infinite possibilities of vacuum, exploring technologies to
manipulate vacuum at will, and rising up to the challenge of creating new value in response to the needs of the times.
The Vacuum Technologies that we have created over the past 60 years have been applied to a wide range of areas, including
semiconductors, electronic devices, flat-screen TVs, solar cells, automobiles, pharmaceuticals, and food products.
And they have become basic technologies essential for the evolution of a significant number of industries and scientific
disciplines.
Recent years have seen rapid technological innovations, resulting in an accelerated expansion of fields to which ULVAC products
and technologies can contribute. We are continuing to create new value in response to the needs of the times and support the
evolution and growth of industries and sciences in the future.
Business Domain
VacuumTechnologies
Continuing to contribute to the evolution of industries and sciences by using Vacuum Technologies
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Research & Development
Global Network
Innovative and advanced vacuum technologies to blaze a trail for the future
LVAC has been providing all kinds of industries with vacuum
technology-based products and materials essential for them under the
basic managerial philosophy of “aiming at contributing to the evolution of
industries and sciences by using vacuum technologies and all peripheral
technologies.” Besides supplying such materials and products, ULVAC has also
been contributing to developing technologies through analysis, evaluation,
basic research & development and other activities, by making the most of all
available resources of the group.
We are continuing to contribute to the further evolution of society by exploring
the development of innovative and advanced technologies that can meet
actual and potential needs by using vacuum technologies, as well as creating
products and technologies with high added value.
U
Solution networks to support the industrial development of the world
e have established region-specific sales and service networks
through our group companies around the world, numbering about
50 not only in Japan but also in many other countries, particularly the United
States, European and Asian countries, to operate in the way that is best suited
to each region. Vacuum technologies, which are regarded as one of today’s key
advanced technologies, are expected to increase in demand in a broad range of
industries and growth areas around the world and into the future.
Being the world’s largest comprehensive vacuum manufacturer that carries out
all processes, from research & development, to manufacturing, to sales and
customer support, and all in an integrated manner, ULVAC is continuing to
support the evolution of the world’s industries by taking advantage of vacuum
technologies.
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Customer Support
ULVAC Customer Support Solutions, bringing together the wisdom of the group
e provide a full spectrum of customer support, ranging from
introduction and operation of equipment, field support, evaluation
and analysis, supply of materials and parts, to maintenance of vacuum pumps
and other products, on a global basis as part of our e�orts to ensure customer
satisfaction after they purchase equipment. In order to make sure that we can
meet increasingly diverse and sophisticated demands in the future, we are
further exploring invaluable services by bringing together the wisdom of our
group companies, including the original technologies and service knowhow
that they have developed through their own e�orts, so as to support
customers to enable them to achieve satisfaction in their production activities.
Another aim is to create even more sophisticated vacuum technologies and
services by taking customer needs into consideration in the development of
new equipment.
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FPD and PV production equipment
Semiconductor and Electric device production equipment
Materials
Industrial equipment
Analyzers,controllers,
mask blanks,etc.
Components
04ULVAC, Inc. Corporate Profile 201803
iquid crystal display TVs, smartphones, PCs, tablet terminals and
other products using displays have become a familiar and
indispensable part of our everyday life. ULVAC is a comprehensive
manufacturer of deposition process equipment that undertakes all
aspects, from manufacture and sales of equipment to provision of
support services, in an integrated manner.
In particular, ULVAC holds the world’s top share in sputtering system
for the manufacture of liquid crystal displays, while boasting the
world’s leading technologies in the development of next-generation
displays, like organic LED production equipment and fulfill requests
of customers.
In addition, ULVAC has also been deeply involved in the development
of solar cells, which have been attracting growing attention as a
clean energy source and have been increasingly introduced across
the world to create a low carbon society, for more than 40 years
now, and has provided equipment compatible with a broad range of
solar cells, including crystalline silicon and compound solar cells.
Vacuum Equipm
ent Business
ULVAC is involved in a wide variety of FPD* 1 and PV * 2 manufacturing technologies, not only developing production equipment, but also providing solutions on a global basis through the development of materials.
FPD and PV production equipment
*1: FPD stands for at panel display. *2: PV is the acronym of PhotoVoltaic (solar cells).
FPD production equipment# Liquid crystal display production equipment# Organic LED production equipment# Roll coater
PV production equipment# Crystalline silicom solar cell production equipment# Compound solar cell production equipment
L
05 06ULVAC, Inc. Corporate Profile 2018
Vacuum Equipm
ent Business
Even higher integration and functionality and lower cost are required for next-generation semiconductors and high-function devices.ULVAC develops super miniaturization technologies for such semiconductors and electronic devices and releases one new technology or product after another to support the evolution of society.
Semiconductor and Electronic device production equipment
# Semiconductor (memory, logic, power or other devices) production equipment# Electronic device (MEMS, communication devices, etc.) production equipment# Advanced packaging (WL-CSP, FoPLP, etc.) production equipment# High brightness LED production equipment
e are at the entrance of a super smart society. The realization of
social and industrial structure that had been thought impossible is
happening through; the “Internet of Things (IoT)”, big data, and
Artificial Intelligence (AI) made possible by advanced/high-speed
information processing technology, and let’s not forget about
autonomous vehicle and EV, changing the automobile industry.
ULVAC is the global leader supporting such innovative technology
through vacuum application technology and manufacturing
equipments for semiconductors and electronic devices.
We value challenge and our passion toward developing innovative
technology for our customers meeting the global market speed in
application areas such as flash memory, 3D-IC, communication
devices, sensors, and opto-devices.W
07 08ULVAC, Inc. Corporate Profile 2018
Vacuum Equipm
ent Business
Vacuum Equipm
ent Business
One of the key areas of focus of ULVAC as a comprehensive vacuum manufacturer is the development of components. We are working to supply a wide range and variety of components, ranging from vacuum pumps, measurement instruments, and analyzers to components that form various power generators for deposition equipment and vacuum valves, while at the same time pursuing the latest vacuum technologies.
ComponentsULVAC has a long history of providing vacuum equipment for general industries; in fact, this is one of its traditional areas of business which it has been working on since the 1950s when vacuum technologies were still in their infancy. Today, ULVAC is providing a colorful spectrum of solutions to a wide range of industries and �elds, such as automobiles, pharmaceuticals and food products, by taking advantage of the basic technologies it has developed over the years.
Industrial equipment
# Vacuum pumps# Vacuum gauges# Helium leak detectors# Process gas monitor# Spectroscopic ellipsometers# EB, RF and DC power generators# Vacuum valves# Deposition controller# Vacuum transfer robot
# Vacuum heat-treating furnaces / # Vacuum brazing furnaces / # Vacuum melting furnaces / # Rare-earth magnet production equipment# Vacuum freeze-drying equipment / # High-vacuum distillation equipment /# Automatic Leak Tester
ur everyday life is
surrounded by products
using vacuum technologies,
for example, Smartphones,
LED lighting and eco-cars; these products could
not be produced without vacuum technologies.
ULVAC develops and supplies a wide range of
vacuum technology-based components, including
vacuum pumps that create vacuums, vacuum
gauges that measure vacuums (pressure), process
gas monitor that measure the type of gas in a
vacuum and helium leak detectors that detect
leakage and measure the volume of the leak.
e have always been in synchronization with the
times by supplying equipment and technologies in
a timely manner; for example, we proactively
provided the steel and metal industries with the
equipment and technologies that they required during the age of heavy
industry, followed by the automobile industry, home electric appliance
industry and other industries, thereby contributing to the growth of many
di�erent industries. At present, our rare-earth magnet production equipment
for compact ultrahigh-performance motors, vacuum freeze-drying equipment
for pharmaceuticals and health food products and other equipment are
playing important roles in industries. Particularly in the automobile-related
industry, ULVAC brand vacuum melting furnaces, vacuum sintering furnaces
and vacuum heat treatment furnaces are used in the manufacture of rare earth
magnets for drive motors indispensable for EV, and electric and electronic
parts that continue to increase due to the demand for automotive electronics,
especially for manufacturing multilayer ceramic capacitors excellent in
compactness, high temperature and advanced packaging.
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09 10ULVAC, Inc. Corporate Profile 2018
Vacuum Application Business
Vacuum Application Business
ULVAC supplies electronic materials, such as sputtering targets, to a wide variety of industries. It also provides technologies for the integrated manufacturing and precision machining of materials such as tantalum and niobium in the �eld of high-performance materials.
MaterialsULVAC provides technologies to many di�erent industries by taking advantage of related technologies derived from vacuum-based manufacturing equipment.
Analyzers, controllers, mask blanks, etc.
# Sputtering target materials# High-melting-point metal materials and production of components# Nano-metal Inks
# Surface analyzers# Controllers# Mask blanks, etc.
n the field of electronic materials,
ULVAC supplies various types of
high-quality sputtering target
materials for semiconductors, FPDs,
LEDs, and so on, and contributes to thin-film
materials, which are used in the latest devices.
In the field of high-performance materials, the
group develops high-melting-point metal
materials for electronic component, chemical
engineering, healthcare and other industries, as
well as melts, processes and manufactures
high-melting-point metal components, which are
known to be dicult to handle, according to
customer needs.
aking advantage of its vacuum-based
technologies, ULVAC provides surface
analyzers, physical property
measurement equipment and other
analyzers to research institutes. ULVAC control systems are
employed mainly by the automobile industry in industrial
mechanical drive equipment. Its technologies also play
important roles in the manufacture of mask blanks*, which are
indispensable in the production of semiconductor integrated
circuits which make up the heart of computers and electronic
products.
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* Mask blanks are the substrates that hold the master patterns in the manufacture of semiconductor integrated circuits.
11 12ULVAC, Inc. Corporate Profile 2018
ULVAC group companies
Corporate Data
Corporate Data
• ULVAC TECHNO, Ltd.
• ULVAC KYUSHU CORPORATION
• ULVAC TOHOKU, Inc.
• ULVAC KIKO, Inc.
• ULVAC EQUIPMENT SALES, Inc.
• ULVAC CRYOGENICS INCORPORATED
• ULVAC-PHI, Inc.
• TIGOLD CORPORATION
• ULVAC COATING CORPORATION
• NISSIN SEIGYO Co., LTD.
• ULVAC Human Relations, Ltd.
• SHINKU CERAMICS CO., LTD.
• FINE SURFACE TECHNOLOGY CO., LTD.
• Reliance Electric Limited
• SHOWA SHINKU CO., LTD.
As of June 30th, 2017
• ULVAC Technologies, Inc.
• Physical Electronics USA, Inc.
Taiwan
China
Japan
Korea
North America
North America
EuropeJapan
Asia
Southeast Asia
• ULVAC GmbH
•Name: ULVAC,Inc. •Head O�ce: 2500 Hagisono, Chigasaki, Kanagawa, Japan•Established: August 23, 1952 •Capital: 20,873,042,500 yen •Net sales: Non-consolidated 137.889 Billion yen Consolidated 231.831 Billion yen•Number of Employees: Non-consolidated 1,225 Consolidated 6,072•Business Areas:
Domestic group companies
Worldwide group companies
Europe
Development, manufacturing, sale, and customer support for vacuum equipment, peripheral devices, vacuum components, and materials for the display, solar cell, semiconductor, electronic, electric, metal, machinery, automobile, chemical, food product, and medical product industries, as well as universities and research labs, and import and export of various equipment. Additionally, research guidance and technical advising on vacuum technologies in general.
ULVAC, Inc. SiteDomestic group companies
Worldwide group companiesSales site and CS Center
CS Center (ULVAC TECHNO)
• ULVAC TAIWAN INC.
• ULTRA CLEAN PRECISION TECHNOLOGIES CORP.
• ULCOAT TAIWAN, Inc.
• ULVAC AUTOMATION TAIWAN Inc.
• ULVAC SOFTWARE CREATIVE TECHNOLOGY, CO., LTD.
• ULVAC Materials Taiwan, Inc.
• ULVAC (China) Holding CO., LTD.
• ULVAC NINGBO CO., LTD.
• ULVAC(SUZHOU) CO., LTD.
• ULVAC Orient (Chengdu) Co., Ltd.
• ULVAC Automation Technology (Shanghai) Corporation
• ULVAC Tianma Electric (Jingjiang) Co., Ltd.
• ULVAC (Shenyang) Co., Ltd
• ULVAC(Shanghai)Trading Co., Ltd.
• ULVAC Materials (Suzhou) Co., Ltd
• ULVAC Opto-electronics Thin Film Technology (Shenzhen) Co., Ltd.
• ULVAC CRYOGENICS (NINGBO) INCORPORATED
• ULVAC NONFERROUS METALS (NINGBO) CO., LTD.
• ULVAC Research Center SUZHOU Co., Ltd.
• Hong Kong ULVAC Co., Ltd.
• ULVAC VACUUM EQUIPMENT(SHANGHAI)CO., LTD.
• ULVAC KOREA, Ltd.
• Ulvac Korea Precision, Ltd.
• Pure Surface Technology, Ltd.
• ULVAC CRYOGENICS KOREA INCORPORATED
• ULVAC Materials Korea, Ltd.
• UF TECH, Ltd.
• ULVAC SINGAPORE PTE LTD
• ULVAC MALAYSIA SDN. BHD.
• ULVAC (THAILAND) LTD.
India
• ULVAC, Inc. India Branch
Net sales by region(Millions of yen)
Net sales by business segment(Millions of yen)
13 14ULVAC, Inc. Corporate Profile 2018
151,400 (65%)
Total
231,800
Overseas80,400 (35%)
Japan
South Korea37,800 (16%)
Taiwan21,100 (9%)
Other Asia4,800 (2%)
Europe, others12,100 (5%)
China75,700 (33%)
Vacuum Equipment Business
200,600 (87%)
Components31,800 (14%)
FPD•PV production equipment
110,900 (48%)
Industrial equipment21,500 (9%)
Material14,600 (6%)
31,200 (13%)Vacuum Application Business
Others16,700 (7%)
Semiconductor and Electronic device
production equipment36,400(16%)
Total
231,800