ACTUATOR 200610th International Conference on New Actuators

&4th International Exhibition on Smart Actuators

and Drive Systems

1 4 - 1 6 June 2006Bremen, Germany

Conference Proceedings

EditorHubert Borgmann

Published byHVG Hanseatische Veranstaltungs-GmbH

Division Messe Bremen T IB /UB Hannover 89Germany 128 303 921

Table of Contents No. Page

Oral Contributions

Sessions A

Piezo ActuatorsPolymer ActuatorsLow-Power Electromagnetic ActuatorsNanopositioning/NanomanipulationPiezo Actuators II: ApplicationsMicro ActuatorsERF/MRF Actuators

Sessions B

Micro FluidicsMedical ApplicationsAerospace ApplicationsActive Vibration ControlRobotics/Micro RoboticsMagnetostrictive ActuatorsPiezo MotorsShape Memory Actuators

Poster Contributions

Piezo ActuatorsPiezo Actuator ApplicationsPiezo MotorsNanopositioning/NanomanipulationMicro ActuatorsMicrofluidicsMagnetostrictive ActuatorsManufacturingLow Power Electromagnetic ActuatorsERF/MRF ActuatorsHydraulic ActuatorsPolymer ActuatorsShape Memory ActuatorsActive Vibration ControlAerospace ApplicationsBioVMedical ApplicationsTactile/Braille DevicesActuator ControlRobotics/Micro Robotics

A 1.0 - A 1.7A 2.0 - A 2.4A 3.0 - A 3.6A 4.0 - A 4.6A 5.0 - A 5.4A 6.0 - A 6.9A 7.0 - A 7.5

B 1.0 - B 1.7B2.0 - B2.4B3.0 - B3.6B4.0 - B4.3B 5.0 - B 5.3B6.0 - B6.4B7.0 - B7.9B8.0 - B8.5

P1 - P6, P8-P16P18 - P19, P21-P24, P169P 25 - P 42, P 45 - P 46P 47 - P 56, P 58P60 - P78P 79 - P 80, P 82 - P 84, P 86P89 - P98P98P99 - P105P106 - P 110, P 114- P 115P 116P 117 - P125P126- P133P134- P135P136, P 138-P 145P147 - P150P151 - P153P154- P157P159- P168

89

1011121315

1617181920212224

25272831333637383839404042444445464646

Oral ContributionsA1 Piezo Actuators ITechnical Papers and Authors No. Page

Expansion from IT/Robotics to Ecological/Energy A1.0 48ApplicationsK. UchinoPennsylvania State University, University Park, PA, USA

Piezoelectric Ultrasonic Motors for Lens Positioning of A 1.1 58Cellular Phone Camera ModulesB. Koc, J. Ryu, D. Lee, B. Kang, B. H. KangSamsung Electro-Mechanics Co., Ltd., Suwon, Rep. of Korea

Extremely Robust Piezoelectric Actuator Patches - A 1.2 62Properties and ApplicationsR. Petricevic, M. GurkaNeue Materialien Wurzburg GmbH, Germany

Monolithic 2-D Crystalline Piezo Actuators and A 1.3 66Laser Beam ScannerV. Hinkov, K. KruseFraunhofer-IPM, Freiburg, Germany

Aerosol Deposition and Its Application to Micro Actuators A 1.4 70J. Akedo, J. Park, M. LebedevNational Institute of Advanced Industrial Science & Technology,Tsukuba, Japan

Introduction of Novel Single Layer Piezoelectric A 1.5 74Micro Actuator with Giant DeflectionA. Wolff, K. Lubitz, C Schuh, T. Steinkopff, D. JozinovicSiemens AG, Munchen, Germany

Application of Metal Core Piezoelectric Complex Fiber A 1.6 78H. Sato, K. Takagi, Y. ShimojoNational Institute of Advanced Industrial Science and Technology,Tsukuba, JapanM. Nagamine, Nagamine Manufacturing Co., Ltd., Tsukuba, Japan

A New Drive Concept for Very High-Speed Positioning of A 1.7 82Piezoelectric ActuatorsK. Kuhnen, D. Thull, A. Kugi, H. JanochaUniversitat des Saarlandes, Saarbrucken, Germany

Oral ContributionsA2 Polymer Actuators ITechnical Papers and Authors No. Page

Overview and Recent Advances in Polymer Actuators A 2.0 86P. Sommer-Larsen, Ris0 National Laboratory, Roskilde, DenmarkR. Kornbluh, SRI International, Menlo Park, CA, USA

Biomimetic Low-Power Soft Pumps A 2.1 975. Ramirez-Garcia, D. DiamondDublin City University, Ireland

A New Contractile Linear Actuator Made of Dielectric A 2.2 101Elastomers with Folded StructureF. Carpi, D. De RossiUniversity of Pisa, Italy

Integrated Sensor-Actuator-System Based on Dielectric A 2.3 104Polymer Actuators for Peristaltic PumpsP. Lotz, V. Bischof, M. Matysek, H. F. SchlaakTechnische Universitat Darmstadt, Germany

Ferroelectrets as Piezoelectric-Polymer Actuators at A 2.4 108Audible and Ultrasonic FrequenciesM. Wegener, A. Mellinger, W. Wirges, G. Kofod, R. Gerhard-MulthauptUniversitat Potsdam, Germany

Oral ContributionsA3 Low-Power Electromagnetic ActuatorsTechnical Papers and Authors No. Page

Advanced Design of Electromagnetic Actuators A 3.0 109W. Amrhein, S. Silber, W. GruberJohannes Kepler Universitat Linz, Austria

Miniaturisation of Magnetic Actuators for Small A 3.1 116Powerful Industrial Small Size ApplicationM. Kallenbach, Technische Universitat llmenau, GermanyF. Bussinger, E. Kallenbach, R. HermannSteinbeis-TZ Mechatronik, llmenau, Germany

Vibrotactile Using Micromachined Electromagnetic A 3.2 120Actuators ArrayA. Talbi, O. Ducloux, N. Tiercelin, Y. Deblock, P. Pernod, V. PreobrazhenskyIEMN - LEMAC, Villeneuve d'Ascq, France

Low Power Electro-Magnetic Actuators with Large A 3.3 124Traveling Range5. Schonhardt, J. G. Korvink, U. WallrabeUniversitat Freiburg, Germany

Intelligent Servo Actuators for Multi-Degrees-of-Freedom A 3.4 128MechatronicsK. Suzumori, T. Kanda, K. Kosaka, K. Tsujino, K. Kure, H. Ogawa,A. KuwadaOkayama University, Japan

Force Controlled Solenoid Actuator Based on A 3.5 132Computational Hysteresis CompensationV. Zoppig, Steinbeis-TZ Mechatronik llmenau, GermanyI. Bauerschmidt, Kern Technik Schleusingen GmbH & Co. KG, GermanyO. Radler, M. Beyer, T. Strohla, R. VolkertTechnische Universitat llmenau, Germany

Control of Magnetic Actuator in Electric Contactors A 3.6 136by Current ShapingP. Pruvost, C. Bataille, C. Blondel, C. Cartier-MillionSchneider Electric Industries SAS, Meylan, FranceF. Claeyssen, CEDRAT Technologies, Meylan, FranceM. Jufer, Ecole Politechnique Federate de Lausanne, Switzerland

Oral ContributionsA4 Nanopositioning/NanomanipulationTechnical Papers and Authors

No. Page

AFM and Laser-Based Nanomanipulation in A 4.0 140Nanobiological ApplicationsS. Thalhammer, W. M. HecklLudwig-Maximilians-Universitat Munchen, Germany

Magnetically Driven Microactuator for On-Chip A 4.1 145Manipulation of MicroparticlesH. Maruyama, Nagoya University, Aichi, JapanF. Aral, Tohoku University, Sendai, JapanT. Fukuda, Nagoya University, Aichi, Japan

Piezo-Based Long-Travel Actuators for Special A 4.2 149Environmental ConditionsK.-D. Muller, H. Marth, R. GI6BPhysik Instrumente GmbH & Co. KG, Karlsruhe, GermanyP. Pertsch, PI Ceramic GmbH, Lederhose, GermanyX. Zhao, Physik Instrumente GmbH & Co. KG, Karlsruhe, Germany

Mechatronic Handling Device Based on the Piezo Ceramic A 4.3 154Structures for Micro and Nano ApplicationsR. Kasper, M. Abed Al-Wahab, W. HeinemannOtto-von-Guericke Universitat Magdeburg, GermanyK. Kostadinov, D. ChakarovBulgarian Academy of Sciences, Sofia, Bulgaria

Controlling a Piezoelectric Actuated Positioning A 4.4 159Unit Using a State Space Controller and an ObserverP. A. Stadler, T. Fankhauser, H. G. WildUniversity of Applied Sciences Berne, SwitzerlandS. J. Dodds, University of East London, Great Britain

Microcantilver with Integrated Actuator for A 4.5 163Nanoscale AnalysisT. Ono, Y. Kawai, M. EsashiTohoku University, Aramaki, Aoba-ku, Japan

On the Nonlinear Modeling, System Identification A 4.6 167and Control of Piezoelectrically-Driven NanostagersS. Bashash, N. JaliliClemson University, SC, USA

Oral ContributionsA5 Piezo Actuators II: ApplicationsTechnical Papers and Authors No. Page

Piezo Actuators: a Technology prevails with A 5.0 171injection valves for Combustion EnginesF. Boecking, B. SuggRobert Bosch GmbH, Stuttgart, Germany

Piezoelectric Actuator with High Reliability for A 5.1 177Diesel-Injection ValveA. Fujii, T. ToyaoDenso Corporation, Inabe-shi, Mie-ken, Japan

Piezoelectric Pneumatic Valves A 5.2 181M. Weinmann, A. J. Schmid, M. FussFesto AG & Co. KG, Esslingen, Germany

Piezoelectric Thrust Bearing for Severe Environments A 5.3 185L. Garbuio, J.-F. RouchonLEEI/CNRS - UMR 5828, Toulouse, France

A New Method of Impedance Adaptation for Piezoelectric A 5.4 189Energy Harvesting Using a Cymbal TransducerH. W. Kim, Pennsylvania State University, University Park, PA, USAS. Priya, University of Texas, Arlington, TX, USAK. Uchino, Pennsylvania State University, University Park, PA, USA

Oral ContributionsA6 Micro ActuatorsTechnical Papers and Authors No. Page

MEMS Based Micro Scanners: Components, Technologies A 6.0 193and ApplicationsT. GeBner, J. Bonitz, C. Kaufmann, S. Kurth, H. SpechtTechnische Universitat Chemnitz and Fraunhofer-IZM, Chemnitz, Germany

Novel Variable Reluctance Micro Motors with Integrated A 6.1 199High Aspect Ratio Micro CoilsM. Feldmann, V. Seidemann, S. ButtgenbachTechnische Universitat Braunschweig, Germany

A Self-Adjusting Optical Switch Driven by A 6.2 203Electrostatic ForcesE. Just, M. Herding, P. WoiasUniversitat Freiburg, Germany

Advances in the Development of a Linear Hybrid A 6.3 207Micro ActuatorH. H. Gatzen, M. Hahn, M. BedenbeckerUniversitat Hannover, Garbsen, GermanyB. Ponick, R. Gehrking, S. DemmingUniversitat Hannover, Hannover, Germany

Micro-Machined Actuators for Friction Driven A 6.4 211Micro-MotorsB. Legrand, L Buchaillot, D. CollardIEMN - CNRS, Villeneuve d'Ascq, France

Paraff in-PDMS Composite Thermo Microactuator with A 6.5 215Large Vertical Displacement CapabilityP. Dubois, University of Neuchatel, SwitzerlandE. Vela, Ecole Polytechnique Federate de Lausanne, Switzerland5. Koster, University of Groningen, The NetherlandsD. Briand, University of Neuchatel, SwitzerlandH. Shea, Ecole Polytechnique Federate de Lausanne, SwitzerlandN.-F. de Rooij, University of Neuchatel, Switzerland

Development of an Active Flexible Cable Driven by A 6.6 219Ciliary Vibration MechanismK. Isaki, Tohoku University, Sendai, JapanA. Niitsuma, Kobe University, JapanM. Konyo, Tohoku University, Sendai, JapanF. Takemura, International Rescue System Institute, Kawasaki, JapanS. Tadokoro, Tohoku University, Sendai, Japan

Technical Papers and Authors No. Page

A Tactile-Haptic Display System Using Micro-Actuator A 6.7 223ArraysM. Ohka, T. Fujiwara, S. MatsukawaNagoya University, JapanK. Kato, Sony Corporation, Tokyo, JapanY. Mitustuya, Nagoya University, Japan

Silicon Micromachined Membrane Actuator A 6.8 227for Ultrasound GenerationC. Jia, Technische Universitat Chemnitz, GermanyM. Wiemer, Fraunhofer-IZM, Chemnitz, GermanyJ. Froemel, Technische Universitat Chemnitz, GermanyT. Otto, Fraunhofer-IZM, Chemnitz, GermanyT. GeBner, Technische Universitat Chemnitz and Fraunhofer-IZM,Chemnitz, Germany

Temperature Scanner Based on MEMS-Technology A 6.9 231T. Otto, Technische Universitat Chemnitz, GermanyR. Saupe, Fraunhofer-IZM, Chemnitz, GermanyV. Stock, Colour Control Farbmesstechnik GmbH, Chemnitz, GermanyT. GeBner, Fraunhofer-IZM und Technische Universitat Chemnitz, Germany

Oral ContributionsA7 ERF / MRF ActuatorsTechnical Papers and Authors No. Page

Magnetorheological and Electrorheological A 7.0 235Fluid Highlights - 2006J. D. Carlson, Lord Corporation, Cary, NC, USAP. Sheng, W. WenHong Kong University of Science and Technology, Kowloon,Hong Kong, PR of China

Design and Characterization of a Low-Prof ile Controllable A 7.1 241Magnetorheological Fluid Based Actuator forVibration MitigationR. C. V. Loureiro, W. S. HarwinUniversity of Reading, Great Britain

A Haptic Knob with Different Magnetorheological Fluids A 7.2 245H. Bose, A. Trendler, A. Kramlich, J. EhrlichFraunhofer-ISC, Wurzburg, Germany

Electrorheologically Controlled Active Chaotic Mixing A 7.3 249in Micro ChannelsX. Niu, L Liu, W. Wen, P. ShengHong Kong University of Science and Technology, Kowloon,Hong Kong, PR of China

The Influence of Particle Concentration on the Response A 7.4 253of Electrorheological Fluids in Dynamic Squeeze FlowA. K. El Wahed, University of Dundee, Great Britain

ERF and MRF Actuators: a Scaling Analysis A 7.5 257J. L Pons, CSIC, Madrid, Spain

Oral ContributionsB1 Micro FluidicsTechnical Papers and Authors No. Page

Microfabricated Devices for Controlled Biochemical B 1.0 263ReleaseM. Hu, R. ZengerleUniversitat Freiburg, Germany

Finite Elements Simulation of an AC B 1.1 272Magnetohydrodynamic (MHD) MicropumpA. Affanni, G. ChiorboliUniversity of Parma, Italy

Fabrication of Multi-Layer Piezo-Actuators and Reliable B 1.2 276Assembling Strategy for High Performance MicropumpsM. Wischke, A. Doll, A. Geipel, H-J. Schrag, F. Goldschmidtboeing,P.WoiasUniversitat Freiburg, Germany

Micro Flow Injection Analysis in PCB Technology B 1.3 281S. Gassmann, L. PagelUniversitat Rostock, Germany

A Microdispenser Based on the Piezo-Polymer-Composite B 1.4 285TechnologyP. Bingger, E. Just, P. WoiasUniversitat Freiburg, Germany

Miniaturized Electromagnet Ferrofluid Actuator B 1.5 289F. Schneider, D. Hohlfeld, U. WallrabeUniversitat Freiburg, Germany

3D-PCB-Packaging Technology for High Power B 1.6 293Applications with Water CoolingF. Schindler-Saefkow, D. May, B. Wunderle, R. Schacht, B. MichelMicro Materials Center Berlin, Fraunhofer-IZM, Berlin, Germany

Micro Rotary Reactor Causing Striped / Spiral Laminar B 1.7 297Flow Interfaces for Mixing LiquidsH. Furusawa, K. Suzumori, T. KandaOkayama University, JapanY. Yamada, Industrial Promotion Foundation of Okayama Prefecture, JapanY. Sakata, A. MutoOkayama University, Japan

Oral ContributionsB2 Medical ApplicationsTechnical Papers and Authors No. Page

Future Actuating Technologies for Upper Extremity B 2.0 301Prosthetic DevicesG. Puchhammer, Otto Bock Healthcare Products GmbH, Vienna, Austria

What Can Emerging Actuator Technologies Offer in B 2.1 308the Field of Rehabilitation?J. L. Pons, E. RoconCSIC, Madrid, Spain

Study of Fluidic Actuators in Prosthetic Hands B 2.2 312C. Pylatiuk, A. Kargov, S. SchulzForschungszentrum Karlsruhe GmbH, Germany

Dielectric Elastomer Actuators Driven by Human B 2.3 316Electrophysiological SignalsF. Carpi, S. Raspopovic, D. De RossiUniversity of Pisa, Italy

Application and Design of a Piezoelectric B 2.4 320Ultrasonic ActuatorS. Klages, T. Kern, T. Meiss, B. Schemmer, R. WerthschutzkyTechnische Universitat Darmstadt, Germany

Oral ContributionsB3 Aerospace ApplicationsTechnical Papers and Authors No. Page

New Actuators for Aircraft and Space Applications B 3.0 324P. Janker, EADS Deutschland GmbH, Munchen, GermanyF. Claeyssen, CEDRAT Technologies S.A., Meylan, France

Development of an Integrated Electromechanical B 3.1 331Actuator for Single Flap Drive ConceptsC Giebeler, M. RecksiekAirbus Deutschland GmbH, Bremen, GermanyM. Christmann, P. JankerEADS Deutschland GmbH, Munchen, Germany

Flight Testing of Piezoelectrically Driven Helicopter B 3.2 337Rotor FlapsV. Kloeppel, Eurocopter Deutschland GmbH, Munchen, GermanyP. Janker, EADS Deutschland GmbH, Munchen, GermanyB. Enenkl, D. RothEurocopter Deutschland GmbH, Munchen, Germany

Optimization, Characterization by Finite Element Method B 3.3 338of an Electro-Mechanical Actuator for More ElectricAircraft ApplicationsM. Torabzadeh-Tari, Royal Institute of Technology, Stockholm, SwedenL. Austrin, Saab AB, Linkoping, Sweden,M. Larsen, Saab AB, Jonkoping, Sweden,G. Engdahl, Royal Institute of Technology, Stockholm, Sweden

Optimisation of a Magnetostrictive Auxiliary B 3.4 344Mass DamperC May, H. Janocha, P. PagliaruloUniversitat des Saarlandes, Saarbrucken, Germany

High-Precision Mechanisms Based on the Magnetic B 3.5 349Bearing TechnologyN. Loix, J. Ph. VerschuerenMicromega Dynamics sa, Angleur, Belgium

Rotating Step by Step Piezomotor for Nanopositioning B 3.6 353and Space ApplicationsM.-F. Six, R. Le LettyCEDRAT Technologies SA, Meylan, FranceP. Coste, European Space Agency, Noordwijk, The NetherlandsF. Claeyssen, CEDRAT Technologies SA, Meylan, France

Oral ContributionsB4 Active Vibration ControlTechnical Papers and Authors No. Page

Mechatronic Systems for Automotive Engine and B 4.0 357Chassis MountsH.-J. Karkosch, G. Eberhard, M. Hoist, P. M. MarienfeldContiTech Vibration Control GmbH, Hannover, Germany

An Approach to Reduce Cost and Size of Active Mounts B 4.1 363for Automobile ApplicationsM. Thomaier, D. Mayer, T. Melz, S. Herold, H. Atzrodt, C. KleinFraunhofer-LBF, Darmstadt, Germany

The ,,Acoustic Curtain" - A new Approach for Global Active B 4.2 367Noise ReductionS. Bohme, D. Sachau, T. KletschkowskiHelmut-Schmidt-Universitat, Hamburg, GermanyH. Breitbach, Airbus Germany GmbH, Hamburg, Germany

Stiff Active Damping Interface B 4.3 370N. Loix, F. BossensMicromega Dynamics sa, Angleur, BelgiumA. Deraemaeker, B. De MarneffeUniversite Libre de Bruxelles, BelgiumF. Cugnon, Samtech sa, Liege, Belgium

Oral ContributionsB5 Robotics / Micro RoboticsTechnical Papers and Authors No. Page

A Review on Actuation Principles for Few Cubic B 5.0 374Millimeters Sized Mobile Micro-RobotsJ.-M. Breguet, Ecole Polytechnique Federate de Lausanne, SwitzerlandS. Johansson, Uppsala University, SwedenW. Driesen, Ecole Polytechnique Federate de Lausanne, SwitzerlandU. Simu, Uppsala University, Sweden

Microrobot-Based Testing of Nanostructures Inside B 5.1 382anSEMT. Wich, S. Kray, S. FatikowUniversitat Oldenburg, Germany

Novel Locomotion Principle for Mobile Micro Robots B 5.2 386W. Driesen, J.-M. Breguet, R. ClavelEcole Polytechnique Federate de Lausanne, Switzerland

Multilayered P(VDF-TrFE) Actuators for B 5.3 390Swarming RobotsN. Snis, E. Edqvist, U. Simu, S. JohanssonUppsala University, Sweden

Oral ContributionsB6 Magnetostrictive ActuatorsTechnical Papers and Authors No. Page

Recent Advances and Challenges in Magnetic Shape B 6.0 394Memory Materialsf. Pagounis, Helsinki University of Technology, FinlandE. Quandt, Caesar, Bonn, Germany

Modification of Microstructure and Shape of Solid B 6.1 401Materials by External Magnetic FieldsS. Fahler, IFW Dresden, Germany

Deformation Properties of Magnetic Shape Memory B 6.2 402Materials used in Actuators/. Aaltio, S.-P. HannulaHelsinki University of Technology, Espoo, FinlandJ. Tellinen, K. UllakoAdaptaMat Ltd., Helsinki, Finland

Characterization of Magnetic Shape Memory (MSM) B 6.3 406Material and its Application in a Hybrid Micro ActuatorH. H. Gatzen, M. HahnUniversitat Hannover, GermanyK. Ullakko, Adaptamat Ltd., Helsinki, Finland

Micro Magnetostrictive Vibrator Using Iron-Gallium Alloy B 6.4 410T. Ueno, T. HiguchiUniversity of Tokyo, Bunkyo-ku, JapanE. Summers, Etrema Products Inc., Ames, Iowa, USA

Oral ContributionsB7 Piezo MotorsTechnical Papers and Authors No. Page

Survey of the Various Operating Principles of B 7.0 414Ultrasonic PiezomotorsK. Spanner, Physik Instrumente GmbH & Co. KG, Karlsruhe, Germany

A History of Piezoelectricity for Ultrasonic Motors B 7.1 422A. Kumada, Piezotech Inc., Kokubunji, Japan

Requirements for Camera Phone Actuators B 7.2 428J. Rouvinen, P. KauhanenNokia Research Center, Helsinki, Finland

Low Temperature Co-Fired Ceramic (LTCC) Compatible B 7.3 432Ultrasonic MotorsS.-H. Park, Y.-D. Kim J. Harris, S. Tuncdemir, R. Eitel, A. Baker, C. Randall,K. UchinoPennsylvania State University, University Park, PA, USA

Development of Piezoelectric Linear Ultrasonic Motors B 7.4 436H.-P. Ko, Korea Institute of Science and Technology, Seoul, andKorea University, Seoul, Rep. of KoreaC.-Y. Kang, S.-J. YoonKorea Institute of Science and Technology, Seoul, Rep. of Korea

New Linear Ultrasonic Micromotor for Precision B 7.5 439Mechatronic SystemsK. Spanner, O. Vyshnevskyy, W. WischnewskiyPhysik Instrumente GmbH & Co. KG, Karlsruhe, Germany

Friction Drive Modeling of SAW Motor Using Classical B 7.6 444Theory of Contact MechanicsT. Shigematsu, M. K. KurosawaTokyo Institute of Technology, Midori-ku, Yokohama, Japan

Segment-Structured Diamond-Like-Carbon Films B 7.7 449Application to Friction Drive of Surface AcousticWave Linear MotorM. Takasaki, H. KotaniSaitama University, Sakura-ku, JapanY. Aoki, N. OhtakeTokyo Institute of Technology, Meguro-ku, JapanT. Mizuno, Saitama University, Sakura-ku, Japan

Technical Papers and Authors No. Page

Trial of an Ultrasonic Motor Using a LiNbO3 Rectangular B 7.8 453Plate Vibrating in the 1st Longitudinal and the 2ndFlexural Vibration ModesT. Takano, Tohuku Institute of Technology, Sendai, Miyagi, JapanH. Tamura, Y. TomikawaYamagata University, Yonezawa, Yamagata, JapanM. Aoyagi, Muroran Institute of Technology, Hokkaido, Japan

PAD - Piezoelectric Actuator Drive B 7.9 457A. Kappel, B. Gottlieb, T. Schwebel, C. WallenhauerSiemens AG, Munchen, GermanyH. Liess, Technische Universitat Munchen, Germany

Oral ContributionsB8 Shape Memory ActuatorsTechnical Papers and Authors

No. Page

Fatigue in Nitinol Actuators B 8.0 461M. Mertmann, Memory Metalle GmbH, Weil am Rhein, Germany

Precise Positioning of a Shape Memory Alloy Actuator B 8.1 467Using Iterative ControlS. C. Ashley, G. Tchoupo, R. M. Mohr, K. K. LeangVirginia Commonwealth University, Richmond, VA, USA

Positioning Rotary Micro-Actuator Based on B 8.2 471Shape Memory WiresT. Luchetti, Centro Richerche Fiat, Orbassano, ItalyN. Baldanzini, Universita di Firenze, ItalyM. Biasiotto, Centro Richerche Fiat, Orbassano, ItalyP. Citti, Universita di Firenze, ItalyA. Perosino, Centro Richerche Fiat, Orbassano, Italy

Fabrication of Superelastic Thin Film Based B 8.3 475Net-Like StructuresH. Rumpf, V. Wipperfurth, C. Zamponi, E. QuandtCaesar, Bonn, Germany

Modular Shape Memory Actuator System B 8.4 479J. Breidert, E. G. Welp, S. LangbeinRuhr-Universitat Bochum, Germany

Characterisation of Pneumatic and SMA Micro-Actuators B 8.5 483with Short Response Times and Large Exerted Forcesand DeflectionsS. Butefisch, U. BrandPhysikalisch-Technische Bundesanstalt, Braunschweig, GermanyM. Leester-Schadel, B. Hoxhold, S. ButtgenbachTechnische Universitat Braunschweig, Germany

Poster ContributionsPiezo ActuatorsTechnical Papers and Authors No. Page

Equivalent Circuit Representation of a Clamped Free P 1 487Piezoelectric Multilayer Beam Bending Actuator withRespect to Rayleigh's Dissipation FunctionR. G. Ballas, H. F. Schlaak, R. WerthschutzkyTechnische Universitat Darmstadt, Germany

Dynamic Admittance Matrix of Piezoelectric P 2 491Multilayer Beam Bending Actuators in Closed Form AnalysisR. G. Ballas, P. F. Greiner, H. F. SchlaakTechnische Universitat Darmstadt, Germany

Thermo-Electro-Mechanical Performance of Piezoelectric P 3 495Multi-Layer Actuators Used in Fuel InjectorsF. X. Li, R. K. N. D. RajapakseThe University of British Columbia, Vancouver, BC, CanadaD. Mumford, Westport Innovation lnc.,Vancouver, BC, CanadaM. Gadala, The University of British Columbia, Vancouver, BC, Canada

High Performance Multilayer Piezoelectric Actuator Using P 4 499Bimorph Type Piezoelectric ElementK. Motoo, N. Toda, F. Arai, T. FukudaNagoya University, Aichi, Japan

A Two-Axis Bimorph Piezoelectric Actuator Controlled by P 5 503a Multi-Layered Neural NetworkM. Ohka, Y. Sawamoto, S. MatsukawaNagoya University, Aichi, JapanT. Miyaoka, Shizuoka Institute of Science and Technology, Fukuroi, JapanY. Mitustuya, Nagoya University, Aichi, Japan

Piezoelectric Smart Actuator: Model Validation and P 6 507Charge vs Voltage Method for Displacement SensingJ. Brufau-Penella, M. Puig-VidalUniversity of Barcelona, Spain

A Sensorless Drive System for Controlling Piezoelectric P8 515Actuator HysteresisP. M. Weaver, F. GraserServocell Ltd., Harlow, Great Britain

Finite Element Analysis of Piezoelectric Constant of P9 519Piezoelectric Thick FilmH. Sato, J. AkedoNational Institute of Advanced Industrial Science and Technology,Tsukuba, Japan

Technical Papers and Authors No. Page

Design and Characterisation of 1-3 Ultrasonic Composites P 10 523with randomly spaced PTZ fibers using Ultra FastLaser and Hydrophone MeasurementsT. Rodig, A. SchoneckerFraunhofer-IKTS, Dresden, GermanyA.-C. Hladky, ISEN-IEMN, Lille, FranceB. S. Lamek, University of Technology, Wroclaw, Poland

Reliability of Piezoelectric Multilayer Actuators P 11 527P. Pertsch, S. Richter, D. Kopsch, N. Kramer, J. Pogodzik, E. HennigPI Ceramic GmbH, Lederhose, Germany

Piezoelectric Actuator Modeling in an Integrated P 12 531Simulation EnvironmentS. Paquay, P. De Vincenzo, I. KlapkaOpen Engineering S.A., Angleur, Belgium

Design and Characterisation of a Controlled Linear P 13 535Piezoelectric ActuatorSunyoto, Y. Bernard, A. RazekLaboratoire de Genie Electrique de Paris, Gif-sur-Yvette, France

Performance Enhancement of the Piezo-Composite P 14 539Actuator LIPCA and Its ApplicationsK. J. Yoon, Konkuk University, Seoul, Rep. of Korea

Measuring Static and Slowly Changing Loads Using P 15 540Piezoelectric SensorsJ. Wauer, C. Rudolf, J. Fleischer, C MunzingerUniversitat Karlsruhe, Germany

Development of New High Temperature P16 544Piezoelectric MaterialsT. P. Comyn, A. J. BellUniversity of Leeds, Great BritainN. Rawlinson, Goodrich Engine Control Systems, Birmingham, Great Britain

Poster ContributionsPiezo Actuator ApplicationsTechnical Papers and Authors No. Page

Circular Piezoelectric Plate with Proof Mass for Energy P 18 545Harvesting£ Minazara-Erambert, D. Vasic, F. CostaEcole Normale Superieure de Cachan, France

Actuator for Miniature Optical Image Stabilizer P 19 549P. Kauhanen, J. RouvinenNokia Research Center, Helsinki, Finland

The Design of a High-Voltage Charge-Feedback P21 553PiezoamplifierM. A. Noras, J. KieresTrek, Inc., Medina, NY, USAK. M. Mossi, K. K. LeangVirginia Commonwealth University, Richmond, VA, USA

High Power Piezoelectric Transformers with Cofired P 23 556Copper ElectrodesS. Ural, S.-H. ParkPennsylvania State University, University Park, PA, USAS. Priya, University of Texas, Arlington, TX, USAK. Uchino, Pennsylvania State University, University Park, PA, USA

Novel Methods for Driving Full Range Loudspeakers P 24 559Using Piezoelectric Actuators£ Bianchini, Vibration-X, S.a.s., San Vito al Tagliamento, Italy

Poster ContributionsPiezo MotorsTechnical Papers and Authors No. Page

Designing Method of a MuIti-Degree-of-Freedom P 25 563Ultrasonic Motor Using Multi-Objective Genetic AlgorithmA. Tazo, T. MaenoKeio University, Yokohama, Kanagawa, Japan

Piezoelectric Motors with Pushers, Operation, Design and P 26 567ApplicationsD. Vyshnevskyi, K. Brady, G. HambergerThe Brady Group Inc., Whitby, Ontario, Canada

The Resonance Frequency Automatic Adjustment Drive P 27 572IC for Piezo Ultrasonic MotorC W. Ha, B. W. Min, Y. J. JangSamsung Electro & Mechanics Inc., Suwon, Gyeonggi-Do, Rep. of Korea

Disk-Type Gyro-Moment Motor P 28 576Y. Tomikawa, C. KusakabeYamagata University, Yonezawa, Yamagata, JapanT. Takano, Tohuko Institute of Technology, Sendai, Miyagi, JapanM. Aoyagi, Muroran Institute of Technology, Hokkaido, JapanH. Tamura, Yamagata University, Yonezawa, Yamagata, Japan

Phase Shift of Raleigh Wave Beneath Slider with P 29 580Preload by FEM SimulationY. Miyazaki, T. Shigematsu, M. K. KurosawaTokyo Institute of Technology, Midori-ku, Yokohama, Japan

Control of an Energy Circulation Type SAW Motor P 30 584Considering Dead-ZoneM. Okano, T. Shigematsu, M. K. KurosowaTokyo Institute of Technology, Midori-ku, Yokohama, Japan

Development of a Mult i-Degree-of-Freedom P31 588Ultrasonic Motor with Multiple RotorsH. Kanasugi, T. MaenoKeio University, Yokohama, Kanagawa, Japan

Cylindrical Piezoelectric Vibrators for Micro P 32 592Ultrasonic MotorsT. Kanda, Y. Oomori, A. Kobayashi, K. SuzumoriOkayama University, Japan

The Elliptecmotor - Precise Low-Cost Applications P 33 596M. Schluter, Elliptec Resonant Actuator AG, Dortmund, Germany

Technical Papers and Authors No. Page

A Force Feedback Device Actuated by Piezo-Electric P 34 600Travelling Wave Ultrasonic MotorsF. Giraud, B. Lemaire-Semail, F. MartinotUniversity of Lille, Villeneuve d'Ascq, France

Modeling of a Plate Type Ultrasonic Motor with P 35 604Controllable Axial PreloadS.-W. Hsiao W.-S. Yao, M.-C. TsaiNational Cheng Kung University, Taiwan, Rep. of China

Optimization of a Two-Contact Linear Ultrasonic Motor P 36 608Using FEM Analysis£ Rothenhofer, M. Gilijum, W. SchinkotheUniversitat Stuttgart, GermanyO. Vyshnevskyy, W. WischnewskijPhysik Instrumente GmbH & Co. KG, Karlsruhe, Germany

Design of a Slip-Free Linear Ultrasonic Motor for P 37 611Efficiency ImprovementM. Toeda, T. MaenoKeio University, Yokohama, Japan

Test Stand for Analyzing New Types of High-Performance P 38 615Ultrasonic Piezomotor DrivesW. Wischnevskiy, B. PhilipsPhysik Instrumente GmbH & Co. KG, Karlsruhe, Germany

Shear Mode Rotary Type Piezoelectric Micromotor with P 39 6171mm Diameter5. Tuncdemir, M. T. Strauss, K. UchinoPennsylvania State University, University Park, PA, USA

Multi-Degree-of-Freedom Piezoelectric Motors for P40 621Low Cost Devices and ToysR. Bansevicius, V. BlechertasKaunas University of Technology, Lithuania

Design and Characteristic Analysis of a Rotary Ultra-Sonic P 41 624Motor for a Robot ArmJ. -S. Rho, K.-l. Oh, H.-S. Kim, H.-K. JungSeoul National University, Rep. of Korea

Technical Papers and Authors No. Page

Optimal Design of an Ultrasonic Motor Using the P 42 628Evolution Strategy and Two-Dimensional FiniteElement MethodJ. -S. Rho, Seoul National University, Rep. of KoreaM.-H. Choi, Dong - II Technology, Ltd., Kyonggi-Do, Rep. of KoreaH.-K. Jung, Seoul National University, Rep. of Korea

Design and Characteristic Analysis of L1B4 Ultrasonic P45 632Motor Considering Contact MechanismH.-S. Kim,J.-S. Rho, H.-W. Joo, H.-K. JungSeoul National University, Rep. of Korea

Applicability of a Piezo Actuator Drive as a Sensorless P 46 636High Precision DriveJ. Rucha, H. Liess, J. Heinzl, T. LuthTechnische Universitat Munchen, Garching, GermanyA. Kappel, T. Schwebel, B. Gottlieb, C. WallenhauerSiemens AG, Munchen, Germany

Poster ContributionsNanopositioning / NanomanipulationTechnical Papers and Authors No. Page

Basic Characteristics of a Spherical Motor Type P 47 640Laser Tracker for the Portable 3D PositionMeasurement SystemT. Yano, T. Takatuji, S. Osawa, O. SatoInstitute of Advanced Industrial Science and Technology, Tsukuba, JapanY. Motomura, T. Itabe, T. SuzukiYasukawa Electric Co., Ltd., Japan

Piezo-Powered Micro-Dissection Tool with Ultrasonic P 48 644Vibration for Cancer GenomicsL Chen, L Sun, Y. Liu, H. WangHarbin Institute of Technology, Heilongjiang, PR of China

Improvement of Positioning Resolution and Velocity of P 49 648AZARASHI (SEAL) MechanismK. Furutani, N. OhtaToyota Technological Institute, Nagoya, JapanK. lida, Nano Control Ltd., Nagoya, Japan

Multilayered Lithium Niobate Actuator for Ultra High P 50 652Precise Positioning SystemA. Kawamata, H. Hosaka, T. MoritaUniversity of Tokyo, Bunkyo-ku, Japan

Design of a 3 DOF Displacement Stage Based P 51 656on FerrofluidsG. Millet, Laboratoire d'Automatique de Besancon and Laboratoirede Robotique de Paris, FranceA. Hubert, Laboratoire d'Automatique de Besancon, France

A Novel Piezoelectric Drive Module for Application in a P 52 660Multi-DOF Positioning SystemW. Van de Vijver, D. Reynaerts, H. Van BrusselKatholieke Universiteit Leuven, Heverlee, Belgium

Two Dimensional Electromagnetic Mini-Device for P 53 664MicropositioningN. Bencheikh, A. Khiat, C. Prelle, F. LamarqueUniversite de Technologie de Compiegne, France

Nanometer Precise Hybrid Actuator in Positioning P 54 668Mechanism with Long Travel RangeR. GI6B, Physik Instrumente GmbH & Co. KG, Karlsruhe, Germany

Technical Papers and Authors No. Page

Design and Analysis of a Nano Positioning Actuator P 55 672Using Three-Dimensional Finite Element MethodJ.-S. Rho, C.-H. Lee, H.-K. JungSeoul National University, Rep. of Korea

Design, Construction and Model Based Control of a P 56 676Linear Direct Driven Strut Variable in Length for a HighDynamic HexapodB. Denkena, C. Holz, B. Heimann, H. AbdellatifUniversitat Hannover, Germany

Towards Advanced Control Algorithms for a Piezoelectric P 58 680Nano-Positioning Stage: Experiments and ModelingA. York, S. SeeleckeNorth Carolina State University, Raleigh, NC, USA

Poster ContributionsMicro ActuatorsTechnical Papers and Authors No. Page

Resonant Behaviour of Electrothermally Excited P 60 684MicroactuatorsM. Shamshirsaz, Amirkabir University of Technology, Tehran, Islamic Rep. of IranM. Mehravaran, Sharif University of Technology, Tehran, Islamic Rep. of Iran

Fabrication of High Aspect Ratio Micro Coil for P 61 688Microactuators Using Three-Dimensional X-RayLithography TechniqueD. Noda, H. Mochizuki, Y. MatsumotoUniversity of Hyogo, JapanS. Kusumi, Susumu Co., Ltd., Kyoto, JapanN. Sato, M. ShimizuJuken Kogyo Co., Ltd., Toyohashi, Aichi, JapanM. Yamashita, Hyogo Prefectural Institute of Technology, Kobe, JapanO. Shimada, Susumu Co., Ltd., Kyoto, JapanT. Hattori, University of Hyogo, Japan

Effect of Nonuniform Residual Stress Distribution P 62 692on Pull-In Phenomena for Nonlinear ElectromechanicalCoupled SystemG. Rezazadeh, H. Sadeghian, I. HosainzadehUrmia University, Islamic Rep. of Iran

A Ferrofluid Seal Technology for Hydraulic Microactuators P 63 693M. De Voider, P. Goethals, S. Eeckhoudt, J. Peirs, D. ReynaertsKatholieke Universiteit Leuven, Heverlee, Belgium

An Electrostatic Impact Drive Actuator Operated by P 64 697DC High VoltageA. Yamamoto, H. Katsurai, T. HiguchiUniversity of Tokyo, Bunkyo-ku, Japan

Fabrication of Cylindrical Microcoil Line through Surface P 65 701Modification for Microactuators5. Yamashita, University of Hyogo, Himeji, JapanS. Kusumi, O. Shimada, Susumu Co., Ltd., Kyoto, JapanK. Okuda, University of Hyogo, Himeji, JapanD. Noda, University of Hyogo, Hyogo, JapanT. Hattori, University of Hyogo, Himeji, Japan and University of Hyogo,Hyogo, Japan

Development of a Safe Electro-Thermal Igniter on Silicon P 66 705P. Pennarun, C. Rossi, D. Esteve, V. ConederaLAAS - CNRS, Toulouse, France

Technical Papers and Authors No. Page

Novel Versatile Electro Magnetic Micro Actuators with P 67 709Integrated Polymer Magnets: Concept, Fabrication and TestM. Feldmann, S. ButtgenbachTechnische Universitat Braunschweig, Germany

Structuring and Integration of Ferromagnetic Foil P 68 713Components for Applications in ElectromagneticActuatorsA. Waldschik, M. Feldmann, S. ButtgenbachTechnische Universitat Braunschweig, Germany

Design of Compliant Rotational Mirror with a Structural P 69 716Topology Optimization MethodZ. Liu, J. G. Korvink, U. Wallrabe, C. MullerUniversitat Freiburg, Germany

A Paraffin Driven Linear Microactuator for High Force and P 70 720Large Displacement ApplicationsR. Boden, M. Lehto, J.-A. SchweitzUppsala University, Sweden

Design and Production of two Planar Micro-Actuators P 71 724M. Verlinden, D. ReynaertsKatholieke Universiteit Leuven, Heverlee, Belgium

Measurements of Friction Characteristics by Using an P 72 728Inertia Drive System and an Optimum Design ofPiezoelectric Impact Drive MechanismN. Shibano, Y. Konishi, H. Ishigaki, T. HattoriUniversity of Hyogo, Himeji-shi, Japan

Micro Mirror Array as Novel Encoding Mask in a P 73 732Hadamard Transform SpectrometerM. Hanf, A. Schaporin, R. Hahn, W. Dotzel, T. GeBnerTechnische Universitat Chemnitz, Germany

Design of a Magnetically Guided Microactuator P 74 736B. Denkena, J. LiUniversitat Hannover, Germany

Novel Characterisation Tool for Micro-Actuators and other P 75 740Compliant Microstructures5. Butefisch, T. Weimann, U. BrandPhysikalisch-Technische Bundesanstalt, Braunschweig, GermanyM. Feldmann, A. Waldschik, S. ButtgenbachTechnische Universitat Braunschweig, Germany

Technical Papers and Authors No. Page

Bistable Micro Actuator for Energy Saving P 76 744P. Meneroud, G. Magnac, G. Patient, F. ClaeyssenCEDRAT Technologies, Meylan, France

Ultra-Precision Machining of 30 Micron PZT-on-Silicon P 77 748Laminates for Piezoelectric MEMSS.A. Wilson, R. Jourdain, R.W. Whatmore, P. Morantz, J. CorbettCranfield University, Bedfordshire, Great BritainMJ. Hucker, C. WarsopBAE Systems Advanced Technology Centre, Bristol, Great Britain

Development of Micro Ciliary Actuators in Group P 78 752N. Iwatsuki, K. Morita, K. MorikawaTokyo Institute of Technology, Meguro-ku, Tokyo, Japan

Poster ContributionsMicrofluidicsTechnical Papers and Authors No. Page

Development of a Perestaltic Micro-Pump based on PZT P 79 756Bending ActuatorsM. Gall, B. ThielickeFraunhofer-IWM, Freiburg, Germany

Micro Linear Pump with Built-in Electromagnetic Actuator P 80 760Realizing Big Flow Volume and Small Pump VolumeH. Furusawa, K. Suzumori, T. KandaOkayama University, JapanY. Yamada, Industrial Promotion Foundation of Okayama Prefecture, Japan

Functionalisation of Microf luidic Components by P 82 764Applying the Paste Printing TechnologyN. Salk, G. VeltlFraunhofer-IFAM, Bremen, GermanyM. Hoffmann, Universitat Bremen, Germany

Development of a Miniaturized Flow Controller for P 83 765Two-Way Hydraulic MicroactautorsA. J. M. Moers, M. De Voider, D. ReynaertsKatholieke Universiteit Leuven, Heverlee, Belgium

Magnetically Actuated Microvalves for Active P 84 769Flow ControlO. Ducloux, Y. Deblock, K. Talbi, L. Gimeno, N. Tiercelin, P. Pernod,V. Preobrazhensky, A. MerlenIEMN - LEMAC, Villeneuve d'Ascq, France

Characteristics of Novel Piezoelectric Micropump P 86 773C.-Y. Kang, Korea Institute of Science and Technology, Seoul, Rep. of KoreaS.-J. Kim, Korea Institute of Science and Technology, Seoul, Rep. of Korea andKorea University, Seoul, Rep. of KoreaM.-Y. Sung, Korea University, Seoul, Rep. of KoreaS.-J. Yoon, Korea Institute of Science and Technology, Seoul, Rep. of Korea

Poster ContributionsMagnetostrictive ActuatorsTechnical Papers and Authors No. Page

Key Numbers in Design of Magnetostrictive Actuators P 89 774and GeneratorsM. Oscarsson, G. EngdahlRoyal Institute of Technology, Stockholm, Sweden

Ferromagnetic Shape Memory Microscanner System P 90 778M. Kohl, Forschungszentrum Karlsruhe GmbH, GermanyD. Brugger, D. AuernhammerRobert Bosch GmbH, Buhl, GermanyA. Kapp, C. Stiller, Universitat Karlsruhe, Germany

Investigation of High Force and Zero Power P 91 783Characteristics of Magnetic Actuator Using Compositeof Magnetostrictive and Piezoelectric MaterialsT. Ueno, T. HiguchiUniversity of Tokyo, Bunkyo-ku, Japan

Multistable Actuator Based on Magnetic Shape P 92 787Memory AlloyJ. Y. Gauthier, A. Hubert, J. AbadieLaboratoire d'Automatique de Besancon, FranceC. Lexcellent, Institut FEMTO-ST, Besancon, FranceN. Chaillet, Laboratoire d'Automatique de Besancon, France

Fe-Pd Films for Magnetic Shape Memory Applications P 93 791J. Buschbeck, S. Fahler, L. SchulzIFW Dresden, Germany

Design of Giant Magnetostrictive Thin Films P 94 792M. Takeuchi, Y. Matsumura, H. UchidaTokai University, Hiratsuka, Japan

Magnetic Properties of Sm-Fe and Sm-Fe-N Thin Film P 95 796Prepared by D.C. Magnetron Sputtering ProcessT. Tanakamaru, N. Matsuoka, Y. MatsumuraTokai University, Hiratsuka, Japan

Fe-AI Magnetostrictive Films Prepared by Ion P 96 799Plating ProcessM. Morita, K. Muramatsu, M. Takeuchi, Y. MatsumuraTokai University, Hiratsuka, Japan

TbFe2 Giant Magnetostrictive Alloy Preparated under P 97 801Microgravity ConditionH. Nishi, S. Kano, Y. Matsumura, H. UchidaTokai University, Hiratsuka, Japan

Poster ContributionsManufacturingTechnical Papers and Authors No. Page

Mechatronic Chuck with Integrated P 98 804Precision-Positioning-SystemB. Denkena, J. Immel, T. GotzUniversitat Hannover, Germany

Low-Power Electromagnetic Actuators

Low-Cost PCB Based Electromagnetic Actuators for P 99 808Tactile FeedbackM. Benali-Khoudja, S. Rodriguez, M. HafezCEA LIST, Fontenay-aux-Roses, France

A Full Sensor Architecture for Intelligent Electro- P 100 812Mechanical ActuatorsG. Krishnamoorthy, D. TesarThe University of Texas, Austin, TX, USA

Bistable Electromagnetic Actuators for Tactile Displays P 101 816A. Bowles, A. Rahman, T. Jarman, P. Morris, J. GoreQinetiQ, Farnborough, Great Britain

Domain-Spanning Modeling of a Magnetic Levitated P 102 820Multi Coordinate DriveJ. Zentner, R. Volkert, V. Kireev, M. SchneiderTechnische Universitat llmenau, Germany

Electromagnetic Dual-Position Actuator for P103 824Measurement ApplicationsH. Gerdes, D. Dinulovic, H. H. GatzenUniversitat Hannover, Germany

Linear Voice Coil Actuator as a Bi-Directional P 104 828Electromagnetic SpringM. Godkin, BEI Kimco Magnetics Division, Vista, CA, USA

Development of an Electromechanical Coded Lock P 105 832Y. Qing, Y. Zhanping, Q. Jianfei, H. ZhaoquanChina Academy of Engineering Physics, Mianyang, PR of China

Poster ContributionsERF / MRF ActuatorsTechnical Papers and Authors No. Page

MR Fluid Brake Prototypes for Portable Haptic Interfaces P 106 836M. Avraam, P. Letter, M. Horodinca, A. PreumontUniversite Libre de Bruxelles, Belgium

Electrorheological Liquid Crystal: A New Active Fluid for P 107 840MicrosystemsM. De Voider, Katholieke Universiteit Leuven, Heverlee, BelgiumK. Yoshida, S. YokotaTokyo Institute of Technology, Midori-ku, Yokohama, JapanD. Reynaerts, Katholieke Universiteit Leuven, Heverlee, Belgium

Digitally Controlled Micro Damping System Based on P 108 844Electrorheological ValvesL Liu, X. Niu, W. Wen, P. ShengThe Hong Kong University of Science and Technology, Kowloon,Hong Kong, PR of China

Development of a New Magnetorheological Damper P 109 845Based upon Open Porous Metallic FoamsJ. M. Guldbakke, J. HesselbachTechnische Universitat Braunschweig, Germany

MR-Fluid-Based Haptic Interface P110 848J. Lozada, CEA LIST, Fontenay-aux-Roses and Ecole Polytechnique,Palaiseau, FranceM. Hafez, CEA LIST, Fontenay-aux-Roses, FranceX. Boutillon, Ecole Polytechnique, Palaiseau, France

Fabrication of Flexible Electro-Rheological (ER) Microvalve P 114 852Based on Flexible SU-8 Cantilever StructuresK. Yoshida, J.-W. Kim, K. Kohda, S. YokotaTokyo Institute of Technology, Midori-ku, Yokohama, Japan

Magnetomechanical Characterization of P 115 856Magnetorheological Fluids (MRF) for Actuators ApplicationsG. Magnac, P. Meneroud, M. F. Six, G. Patient, R. Leletty, F. ClaeyssenCEDRAT Technologies, Meylan, France

Poster ContributionsHydraulic ActuatorsTechnical Papers and Authors No. Page

Fault Management for a Smart Hydraulic Servo Axis P 116 860M. Munchhof, Technische Universitat Darmstadt, Germany

Poster ContributionsPolymer ActuatorsSystematic Selection and Design of a Ring-Actuator P 117 864for the Deformation of an Elastic LensM. Bergemann, T. Martin, G. BretthauerForschungszentrum Karlsruhe GmbH, Germany

Liquid Crystal Elastomers as Soft Actuators with P 118 868Electrooptical EffectsD.-U. Cho, Y. Yusuf, S. HashimotoKyushu University, Fukuoka, JapanP. E. Cladis, Advanced Liquid Crystal Technologies, Summit, NJ, USAH. R. Brand, Universitat Bayreuth, GermanyH. Finkelmann, Universitat Freiburg, GermanyS. Kai, Kyushu University, Fukuoka, Japan

Bubble-Like Dielectric Elastomer Actuator with P 119 872Integrated Sensor: Device and ApplicationsF. Carpi, G. Fantoni, D. De Rossi, University of Pisa, Italy

On the Driving Circuits of Electro-Sensitive Elastomers P 120 876R. Vertechy, V. Parenti-CastelliUniversity of Bologna, ItalyK. J. Waldron, Stanford University, CA, USA

Concept and Realization of a Novel Carbon P 121 880Nanotube ActuatorT. Koker, U. Gengenbach, G. BretthauerForschungszentrum Karlsruhe GmbH, Germany

Electroresponsive Elastomers: Applification of P122 884Actuation via Fine-Tuning of Pre-Stretchingand Electrode WrinklingT. Leitao, E. Mendes, S. J. PickenDelft University of Technology, The Netherlands

Technical Papers and Authors No. Page

High Strain Materials for Electro-Elastomer Actuators P123 885G. Kofod, M. Wegener, W. Wirges, R. Gerhard-MulthauptUniversitat Potsdam, Germany

The Facts on the Commercialization of Electroactive P 124 889Polymer Artificial Muscle (EPAM)C Duncheon, Artificial Muscle, Inc., Menlo Park, CA, USA

S-Shape Ionic Polymer Metal Composite Actuator P 125 893A. Punning, M. Kruusmaa, A. AablooTartu University, Estonia

Poster ContributionsShape Memory ActuatorsTechnical Papers and Authors No. Page

Martensitic Transformation of TiAu High Temperature P 126 896Shape Memory AlloysH. Hosoda, Tokyo Institute of Technology, Midori-ku, Yokohama, JapanR. Tachi, Toyota Motor Ltd., Tokyo, JapanT. Inamura, K. WakashimaTokyo Institute of Technology, Midori-ku, Yokohama, JapanS. Miyazaki, University of Tsukuba, Ibaraki, Japan

High Temperature Shape Memory Alloy Actuators for P 127 900Down-Hole Flow Control Valves for Oil WellsJ. Gore, A. Bowles, M. Maylin, L. ChandrasekaranQinetiq, Farnborough, Great BritainJ. Walker, Andrew Ltd., Wokingham, Great BritainD. Forsyth, M. BuyersOmega Completion Technology Ltd., Aberdeen, Great Britain

Shape Memory Properties of Textured P 128 904Ti-Nb-AI Biomedical b-Titanium AlloyT. Inamura, Tokyo Institute of Technology, Midori-ku, Yokohama, JapanJ. I. Kim, H. Y. KimUniversity of Tsukuba, Ibaraki, JapanH. Hosoda, K. WakashimaTokyo Institute of Technology, Midori-ku, Yokohama, JapanS. Miyazaki, University of Tsukuba, Ibaraki, Japan

Shape Memory Effects of Ti-Nb Containing 3D P 129 908Transition Metal ElementsV̂ Horiuchi, Tokyo Institute of Technology, Midori-ku, Yokohama, JapanK. Nakayama, Hosokawa Micron Corporation, Osaka, JapanT. Inamura, K. WakashimaTokyo Institute of Technology, Midori-ku, Yokohama, JapanH. Y. Kim, S. MiyazakiUniversity of Tsukuba, Ibaraki, JapanH. Hosoda, Tokyo Institute of Technology, Midori-ku, Yokohama, Japan

Modeling and Control of Shape Memory Alloy P 130 912Actuators by using Preisach Model, Genetic Algorithmand Fuzzy LogicK. K. Ahn, N. B. KhaUlsan University, Nam-gu, Ulsan, Rep. of Korea

Thin Film SMA - Polymer Composites for Microswitches P 131 916F. Khelfaoui, R. Vitushinsky, S. Schmitz, B. WinzekCaesar, Bonn, Germany

Technical Papers and Authors No. Page

Long-Time Stability of Quick Changing Shape P 132 920Memory ActuatorsS. Glaser, ETO MAGNETIC KG, Stockach, GermanyP. Gumpel, J. StrittmatterFachhochschule Konstanz, Germany and Fachhochschule Konstanz,Tagerwilen, Switzerland

The Design Diagram for Optimal Shape Memory P 133 924Alloys (SMA) Linear ActuatorsD. Coutu, V. Brailovski, V. Demers, P. TerriaultUniversite du Quebec, Montreal, QC, Canada

Poster ContributionsActive Vibration ControlTechnical Papers and Authors No. Page

Micromachined Force Coupled Sensor-Actuator System for P 134 928Frequency Selective Vibration MonitoringR. Forke, Technische Universitat Chemnitz, GermanyJ. Mehner, Fraunhofer-IZM, Chemnitz, GermanyD. Scheibner, Siemens AG, Nurnberg, GermanyW. Dotzel, T. GeBner, Technische Universitat Chemnitz, Germany

Active Damping of Vibrations Applied on Ski Structures P 135 932O. Sosnicki, F. Barillot,CEDRAT Technologies, Meylan, FranceM. Leger, Skis Rossignol, Voiron, FranceF. Claeyssen, CEDRAT Technologies, Meylan, France

Aerospace Applications

MESEMA (Magnetoelastic Energy System for Even More P 136 936Electric Aircraft): Objectives and First ResultsL. Lecce, E. Monaco, F. FrancoUniversita di Napoli "Federico II", Italy

High Temperature, Piezoelectric Positioning System for P 138 940Space EnginesA. Bowles, J. Gore, F. Lowrie, T. Jarman, P. JamesonQinetiQ, Farnborough, Great Britain

Piezoelectric Synthetic Jets as Virtual Surfaces P 139 944J. Maddox, K. Mossi, P. ManeVirginia Commonwealth University, Richmond, VA, USAR. Bryant, NASA Langley Research Center, Hampton, VA, USA

Smart Materials Based System Operated at 2K Used as a P 140 948Superconducting Cavity Tuner for VUV-FEL PurposeP. Sekalski, A. NapieralskiTechnical University of Lodz, PolandS. Simrock, C. Albrecht, L. LiljeDESY, Hamburg, GermanyP. Bosland, CEA, Sacley, FranceM. Fouaidy, IPN, Orsay, FranceA. Bosotti, INFN, Milan, Italy

Combining Piezoelectric and Electromagnetic Effects for a P 141 952New Concept of Linear Actuator for Aircraft Flight ControlA. Delehelle, B. NogaredeLEEI/CNRS - UMR 5828, Toulouse, FranceDesign andRealisation of a Rotating

Technical Papers and Authors No. Page

Design and Realisation of a Rotating-Mode Piezoelectric P 142 956Motor for Aeronautic ApplicationsI/I/. Slabowicz, J.-F. Rouchon, B. NogaredeLEEI/CNRS - UMR 5828, Toulouse, France

Power Supply and Control Scheme for an Airborne P 143 960Piezoelectric Brake ActuatorR. Li, N. Frohleke, H. Wetzel, J. BockerUniversitat Paderborn, GermanyS. Ouchouche, E. Agostini, J.-T. AudrenSAGEM DS, Paris, France

Magnetostrictive Pump with Piezo Active Valves for P 144 964More Electrical AircraftN. Lhermet, O. Delas, F. ClaeyssenCEDRAT Technologies, Meylan, France

Vibration Energy Harvesting in Aircraft Using P 145 968Piezoelectric ActuatorsO. Sosnicki, N. Lhermet, F. ClaeyssenCEDRAT Technologies, Meylan, France

Bio-/Medical Applications

Impedance Measurements for the Fine Positioning of a P 147 972Cochlear ElectrodeH. Bousack, Y. Zhang, R. Otto, A. OffenhausserForschungszentrum Julich GmbH, Germany

A Novel Concept of Electroactive Pump for Medical P 148 976Circulatory SupportN. Martinez, LEEI/CNRS - UMR 5828, Toulouse, FranceP. Leprince, Institut de Cardiologie, Paris, FranceB. Nogarede, LEEI/CNRS - UMR 5828, Toulouse, France

Hydraulic Actuation for the Navigation of a Cochlear P149 980ImplantL Zentner, J. Keskeny, Technische Universitat llmenau, GermanyM. Westhofen, Universitatsklinikum Aachen, GermanyA. Huba, Budapest University of Technology and Economics, Hungary

Piezoelectric Actuators in Inhalation Therapy - Challenges P 150 985of Medical Device DevelopmentJ. Lass, PARI GmbH, Munchen, Germany

Tactile / Braille Devices

Technical Papers and Authors No. Page

New Tactile Devices Using Piezoelectric Actuators P 151 989M. Biet, F. Giraud, B. Lemaire-SemailUniversity of Lille, Villeneuve d'Ascq, France

Computer Based Platform for Tactile Actuator Analysis P 152 993T. Heckner, C. Kessler, S. Egersdorfer, G. MonkmanFachhochschule Regensburg, Germany

Braille Display with Dielectric Polymer Actuator P 153 997M. Matysek, P. Lotz, H. F. SchlaakTechnische Universitat Darmstadt, Germany

Actuator Control

Assessment of Strategies for Control of High P 154 1001Redundancy ActuatorsX. Du, R. Dixon, R. M. Goodall, A. C. ZolotasLoughborough University, Great Britain

Augmented Control Strategies and Controller P155 1005Optimisation for Compact ActuatorsM. Herrmann, H. UlbrichTechnische Universitat Munchen, Germany

New Approaches for the Direct Power Supply for P 156 1009Actuators with High Input Currents£ Kallenbach, R. Otto, U. KuceraSteinbeis TZ Mechatronik llmenau, GermanyD. Lippik, D. TelschowHochschule fur Technik, Wirtschaft und Kultur Leipzig, Germany

FPGA-Based Compensator of Hysteretic Actuator P 157 1013Nonlinearities for Highly Dynamic ApplicationsH. Janocha, D. Pesotski, K. KuhnenUniversitat des Saarlandes, Saarbrucken, Germany

Robotics / Micro Robotics

MACCEPA, the Mechanically Adjustable Compliance and P 159 1017Controllable Equilibrium Position Actuator/?. Van Ham, M. Van Damme, B. Vanderborght, B. Verrelst, D. LefeberVrije Universiteit Brussel, Belgium

Technical Papers and Authors No. Page

Electromechanical Actuation for Gripper Integrated P 160 1021Angle AdjustmentA. Schubert, B. SchulzFraunhofer-IWU, Chemnitz, Germany

A Study of Learning Vibration Control in the Multi-Motor P 161 1025Drive SystemA. Umemura, T. Haneyoshi, Y. SaitoTokyo Denki University, Hiki-gun, Saitama, Japan

Ultrasonic Monolithic Piezoelectric Multi DOF Actuators P 162 1029for Mobile MicrorobotsT. Cimprich, F. Kaegi, W. DriesenEcole Polytechnique Federate de Lausanne, SwitzerlandA. Ferreira, Ecole Nationale Superieure d'lngenieurs de Bourges, FranceJ.-M. Breguet, Ecole Polytechnique Federate de Lausanne, Switzerland

New Compliant Fluidic Rotary Actuators for Soft P 163 1033Service and Assistance RoboticsO. Ivtev, M. Mihajlov, E. Wendland, A. GraserUniversitat Bremen, Germany

Smart Gripper with Piezoelectric Pneumatic Valves and a P 164 1037Control Sensing SystemA. J. Schmid, M. Weinmann, T. Mall, A. RisleFesto AG & Co. KG, Esslingen, Germany

Robot Actuator Operating as Self-Exciting Systems P 165 1041on Air FilmsK. Ragulskis, E. Kibirkstis, D. PauliukaitisKaunas University of Technology, Lithuania

Simple Ceramic Motors...Inspiring Smaller Products P 166 1045D. Henderson, New Scale Technologies, Inc., Victor, NY, USA

The International Patent Landscape for Actuator P 167 1046Technologies and DevelopmentsW. N. Hulsey III, University of Texas, Austin, TX, USA

Design, Measurement Experiments and Application of a P 168 1048Macroscopic Shape Memory Alloy Actuator SystemR. Kratz, M. Stelzer, O. von StrykTechnische Universitat Darmstadt, Germany

Manufacturing Technilogy for the Serial Production of P 169 1052Flexible Piezo-Electric ConvertersS. Linke, Invent GmbH, Braunschweig, Germany