ACS Customers Seminar Presentation , SPS 2013
Transcript of ACS Customers Seminar Presentation , SPS 2013
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Innovative Motion Control Solutions
SPS, Nov. 2013
November 2013
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Agenda
10:00 – 10:05 Gathering & seminar introduction (Z'eev)10:05 – 10:30 450mm wafer handling (Z'eev)10:30 – 11:15 Look-ahead algorithm, G&M-codes,
Network cable failure detection & recovery (Shura)11:15 – 11:30 Break 11:30 – 12:15 Motion enhancements new features (Boaz)12:15 – 13:00 Motion enhancements new features-cont. (Maksim)
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450mm Wafer Handlingand Inspection
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State of the Art Motion Control Solutions 450mm (& 300mm) Wafer Inspection
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> 450mm wafer inspection challenges and general motion system structure
> System/subsystem motion control requirements> ACS technologies and solutions to meet specific requirements> Complete solution summary
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Agenda
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Challenges in 450mm Wafer Production / Inspection
Extremetech.com
> Larger work envelope, higher speeds and larger masses> Equal or better level of precision and accuracy!
Wikipedia.com6
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Motion System Structure
> High precision wafer positioning stage> Gantry (XX’Y) structures preferred over basic XY> Higher performance
› stand-still jitter and better constant velocity› High resolution laser based encoders or interferometers› May require multiple feedbacks with real-time feedback switching› Control algorithms become more complex (servo, homing, etc.)
> Inspection heads> Relatively small linear/rotary motors (brushless, brush, or stepper)> Digital and Analog I/O> Synchronization with motion (camera, laser, etc.)
> Auxiliary axes and I/Os> Transport/handling, alignment, optics focus> Safety interlocks, GP digital/analog I/O
> User interface & high level machine control typically resides on PC
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> Large Gantry – 750 x 750 mm or more travel area> Typical Motion Performance Specs
> High speed >1 m/sec> High accuracy <50nm over 450mm> Fastest possible Move & Settle to ±1nm window> Smooth velocity
(±3nm following error @ 100mm/sec)
> Typical Stage Components> Air or precision mechanical bearing> Linear servomotors> High resolution optical and/or laser interferometer and
laser encoder
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Wafer Stage Motion Control Requirements
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> Dynamic Z auto-focus> Multiple low power motors and feedback types> Camera/Optic triggering based on XY or XYZ position> Focus accuracy of 100nm> Automatic, smooth switching to & from focus error sensor
and position encoder feedback> Mount driver and I/O on moving heads to simplify cabling
cables
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Inspection HeadsMotion Control Requirements
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> Multiple motor and feedback types, wide range of power levels
> Wide range of I/O types, fast response time (=sub-millisecond)
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Auxiliary Axes & I/OMotion Control Requirements
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> MC4Unt integrated multi-axis drive chassis> Includes
› Controller & EtherCAT master› Modular drives› Power supply
> Revolutionary NanoPWMTM drives offer performance better than linear drives
> MIMO gantry control> Advanced ServoBoostTM algorithm for optimal
performance and stability> Additional advanced features
› 2D/3D Error Mapping› Profile Shaping› Kinematics transformations
Wafer Stage SubsystemControl Solution
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> SPiiPlus EtherCAT Motion and Machine Controller> Up to 32 (64) synchronized axes & 1000’s I/Os> Multitasking with 64 threads / programs> Flexible programming
> Real time ACSPL+> IEC61131-3 PLC> Host libraries
> Other possible controllers> SPiiPlusSC PC based Soft Controller> SPiiPlusNTM standalone controller
MC4UNT Complete System Motion and Machine Controllers
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> Based on ACS’ proprietary PWMBoostTM technology developed over the last 5 years
> Replaces linear drives, providing:> Better performance> Sub-nano jitter> Smooth velocity (velocity
error<<1%)> Higher voltages and higher
currents
NanoPWMTM Drives Better than Linear Drives
1nm steps
±0.4nm jitter
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NanoPWMTM Drives Better than Linear Drives
> A much smaller package> Improved reliability> Better price
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> ServoBoostTM is a proprietary real time servo algorithm that:> Identifies disturbances in real time> Analyzes disturbance root cause> Compensates for it and attenuates its impact> Predicts the disturbances anticipated and prevents their negative effects
> ServoBoostTM provides:> Improved machine performance: Faster settling, better stability, lower jitter,
smoother velocity> Excellent robustness
› Large changes in load › Varying system parameters
> Automatic compensation of disturbances, resonances, axes interaction, cogging and more
Wafer Stage Control TechnologyServoBoostTM
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> UDMLC – 2 , 4-axis compact EtherCAT drive module for small motors > Designed for remote mounting (100x75x48mm3)> 12 to 48Vdc, 1.25/2.5A, 2.5/5A, 5/10A per axis (dual
axis)> Brush, brushless, stepper, voice coil motors> Incremental and absolute digital encoders> Autofocus control algorithm> Multiple GP I/Os
> IOMNT> Compact (101x65x59mm3)> Up to 32/32 I/O per module> 24Vdc, 0.5A per output
Inspection Heads SubsystemControl Solution
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> Proprietary autofocus algorithm developed for wafer inspection> On the fly switching between multiple feedback sources> Maintain focus accuracy while moving (high bandwidth)
Inspection Head Control TechnologyAutofocus
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> UDMxx – Multi-axis EtherCAT drive modules for various motor sizes> Wide power ranges (100W to 3kW peak)> Brush, brushless, stepper, voice coil motors> Incremental, absolute digital, SinCos encoders> Multiple GP I/Os
> IOMNT (if additional I/O needed)> EtherCAT modules for interfacing to
standard drives > UDIxx - +/-10V commands, encoder inputs> PDMnt - Step/Dir stepper and servo drives
> 3rd Party EtherCAT drives and I/O
Auxiliary Subsystem Axes & I/O
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4 232/32
MC4U EC Master
with NanoPWM
DrivesUDMLC IOMNT IOMNTUDMXX
Wafer Stage Inspection Heads Auxiliary Axes & I/O
Additional optional drives
and I/O
32/323-8
A Complete Control Solutionfor Wafer Inspection
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> Highest Performance> Advanced algorithms ServoBoost, MIMO Gantry, Autofocus, feedbacks switching> NanoPWM drives to handle larger loads with higher dynamics needs
> Scalability & Flexibility> Standard Industrial EtherCAT Network> 64 axes & 1000’s of I/Os> Support of 3rd party devices
> Short time to market> One common platform for many machines and system configurations > Single development environment for entire system with full simulator
> Suitable for many other demanding applications> Electronic Mfg Pick/Place, Flat Panel Display Inspection, Wide Format Inkjet
Printing, SEM, CMM
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Summary
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Look-Ahead Algorithm
G&M-Codes Programming Support
Network Cable Failure Detection & Recovery
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Look-ahead in SPiiPlusNTAgenda
> Market needs> Look-ahead advantages> SPiiPlusNT XSEG capabilities> Corner processing> Example> Further XSEG extensions
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Look-ahead in SPiiPlusNT Market Needs
> Markets:> Cutting applications (especially laser cutting)> High-speed precise machining
> Applications that challenge to perform a process more efficiently and with better quality
> Technically, it means to pass trajectory with higher velocity and smaller tracking (position) error
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Look-ahead Advantage
> Look-ahead is an ability of the motion controller to detect conditions that cause exceeding of the machine limits and correct the motion profile automatically and in advance
> Thus, with Look-ahead algorithm better performance and accuracy of the trajectory following is achieved
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Look-ahead Algorithm in SPiiPlusNT
> Look-ahead algorithm in SPiiPlusNT is implemented as part of the new segmented motion - XSEG
> Main capabilities of XSEG:• Automatic detection of corners and segments, where
required velocity exceeds axis limits (maximal acceleration, jerk)
• Automatic velocity reduction at such segments• Building-up velocity profile using multi-segment look-ahead
algorithm• Segments adding “on-the-fly” (competitive advantage)• Velocity override (competitive advantage)• Outputs synchronization (competitive advantage)
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Corner Processing
> The controller automatically detects the corner and can automatically calculate the corner velocity in order to pass it with no acceleration/jerk jumps
> As alternative option, the corner velocity can be set by the application
Path Corner
Corner angle Exact path option
Corner velocity Corner
Required velocity Velocity profile
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Corner ProcessingScope Graph
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XSEG- Further Extensions
> Different geometry processing> Smooth path with permitted deviation/curvature> Smooth path with minimal velocity
> 3D segments
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RS274 Numerical Control Language (G-code)Agenda
> Market needs> Implementation> Execution> Integration with ACSPL+
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G-code Market Needs
> Market Needs:> G&M-codes language is the de-facto standard for CNC
machines> CAD/CAM systems produce G&M-codes programs for
many other markets, such as› cutting applications › different high-speed precise machining
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G-code in SPiiPlusNT
> SPiiPlusNT implements many common G&M codes, specifically motion-related commands, tool and offset compensation commands, absolute/increment programming, digital outputs control, etc.
Main advantages:> Sophisticated look-ahead algorithm for segments
processing> Outputs synchronization with the motion> Integration of G-code program with ACSPL+> Ability to implement unknown G-codes by the user
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G-code Program Execution
> Editing, debugging and execution of G-code program is done the same way as ACSPL+ program
CAD/CAM SW
N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
G-code program as text file
SPiiPlusNT controllerSPiiPlusNT controller
N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
ACSPL+ bufferACSPL+ buffer
G-code program is downloaded to the controller either by SPiiPlus MMI or by the user program
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G-code with ACSPL+
> ACSPL+ commands and G-code commands can be mixed within the controller buffer
CAD/CAM SW
N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
G-code program as text file
SPiiPlusNT controllerSPiiPlusNT controller
N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90
N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
ACSPL+ bufferACSPL+ bufferG-code program is downloaded to the controller either by SPiiPlus MMI or by the user program
OUT0.0=1 ! ACSPL+ line
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Implementing G-code Commands by the User
> Unknown G-code commands support can be easily added by implementing G-code subroutine
CAD/CAM SW
N10 G0 X-90 Y-100N11 G54N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
G-code program as text file
SPiiPlusNT controllerSPiiPlusNT controller
N10 G0 X-90 Y-100
N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
ACSPL+ bufferACSPL+ buffer
G-code program is downloaded to the controller either by SPiiPlus MMI or by the user program
N11 G54 G54:N10 G10 X10 Y20 Z30RET
D-bufferD-buffer
N11 G54
Unknown G-code command
implementation
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Network Cable FailureDetection & RecoveryAgenda
> Demonstration movie> Advantages> Prerequisites> Functionality
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Network Cable Failure Detection & Recovery - Demonstration
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Network Cable Failure Detection & Recovery - Advantages
> In case of cable or connector failure: > the machine can be immediately recovered without a need
to repair the broken part> the location of broken cable or connector is detected by the
controller that simplifies the machine repair
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Network Cable Failure Detection & Recovery - Prerequisites
> In order to support Enhanced Network Failure and Recovery, the machine setup should provide:> Additional (2nd) EtherCAT port in the EtherCAT Master
module> Additional cable that connect the 2nd EtherCAT port to the
network> Currently, only SPiiPlusSC with two EtherCAT ports can be
used as EtherCAT Master> In the future also SPiiPlusNTM and MC4U with 2nd EtherCAT
port will be available
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Network Cable Failure Detection & Recovery - Functionality
> Detection of the location of the failure> The system reactivation in the simple and quick way, with no
need for the machine re-initialization> Ability to save the configuration after the failure, so at the
subsequent power-up, the system will be initialized correctly (even if the cable is still broken)
> Quick and simple way to reinitialize the network after the failure repair
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New Servo & Motion Features
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Agenda
> ServoBoostTM – for enhancement of servo performance> Cogging compensation – for smoother motion> Profile shaping – for reduction of vibrations > Smooth Feedback switching – for systems with multiple feedback
devices> Enhanced fast Sin-Cos – for high resolution Sin-Cos encoders, up to
6[MHz]
> MotionBoostTM – for faster motion> One parameter tuning – for simpler high performance servo tuning> BiQuad filters – for solving resonance issues> NanoPWMTM – for ultimate jitter performance
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ServoBoostTM
Better Servo Performance
> ServoBoostTM is a real time algorithm that:> Identifies disturbances in real time> Analyzes disturbance root cause> Compensates it and attenuates its impact
> ServoBoostTM provides:> Improved machine performance: Faster settling, better stability,
lower jitter, better constant velocity> Automatic adaptation to large changes in load and system
parameters> Automatic compensation of disturbances, resonances, axes
interaction, cogging and more> Applicable to all ACS high performance (HP) products
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Adaptation to Load Changes
No loadTotal moving mass is increased x 3
• System performance may deteriorate or even become unstable due to significant load changes.
• With ServoBoostTM , the performance remains consistent and stable despite of load changes and disturbances.
Position error with PID control
Position error with ServoBoostTM
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Adaptation to Increasing Load by x3
> With standard PID algorithm> The system is still stable> The bandwidth is 3 times smaller
(20Hz instead of 60Hz)> Poor performance
> With ServoBoostTM
> maintains the 60Hz bandwidth > Same performance> It also compensates the resonance
created by the elevated center of gravity
Initial system
With extra loadStandard PID
With extra loadUsing ServoBoostTM
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Crossover Error Elimination-Several Axes, One Machine Frame
> Due to reaction forces of accelerating axes the frame vibrates and deteriorates overall performance. Appears in almost all multi axes machines.
> ServoBoostTM eliminates this interaction, enhancingplacement accuracy
Position Error 5[nm/div]
Without ServoBoostTM
With ServoBoostTM
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Automatic Cogging Compensation
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Cogging and Periodic Disturbances
> Brushless motors may suffer from periodic disturbances that result from imperfections in motor structure or electrical drive.
> These disturbances create speed fluctuations, vibrations, acoustic noise, and an excitation of lightly damped resonances.
> Cogging is an example of a periodic disturbance: non-uniform force that is caused by magnetic interactions between magnets and the rotor slots in the motor.
> Motors with low cogging are usually more expensive.
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Cogging and Periodic Disturbances
> Cogging Compensation algorithm compensates cogging automatically and provides an “electronic upgrade” to inexpensive motors.
> ServoBoostTM provides automatic compensation to cogging and other periodic disturbances.
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Profile Shaping
> If a first impulse starts a vibration, a second impulse can cancel it.
> Timing and magnitude of the second impulse must be accurate.
> Additional pulses may be added to improve robustness.> Several vibration modes can be treated.
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Profile Shaping
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Switching between Multiple Feedback Devices
> In systems with more than one feedback device, it’s possible that some of the feedbacks do not cover the entire travel range
> Maximal length of glass scales/ laser interferometer mirrors is limited and insufficient for some applications
> Encoders with multiple short glass scales can be less costly than one long scale encoder
> In moving magnet applications the encoder scale may be attached to the moving magnet, that moves through multiple encoder readheads
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Multiple Encoder Scales Switching
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Multiple Encoder Scales Switching
> Fast & Smooth switching
Switching
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Fast Sin-Cos Support
> Available for UDMNT, UDIHP> Soon available for MC4U
Old support New support
Sine periods/sec 2.5x106 6x106
Suitable for high resolution feedback With restrictions Yes
Suitable for PWM drives No Yes
> Improved support has been developed for high resolution Sin-Cos feedbacks
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MotionBoostTM – Solution for Fast & Aggressive Motion
> MotionBoostTM technology implements an enhanced motion profile
> Designed to :> Improve settling time by reducing the residual vibrations> Lower peak current, acceleration and velocity values
> Mostly effective in short aggressive moves with aggressive servo
> Ideal for Pick and Place applications and wire bonders> Very short move durations are possible with SPiiPlusSC using
CTIME = 0.2[msec]
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MotionBoostTM Example10[mm] motion in 58[msec]
Regular PTP MotionBoostTM
Move and settle to 1[µm] 170[msec] 84[msec] ~50% improvementof move and settle
Position error with PTP
Position error with Motion Boost
5[µm] div
Zoom In
1[µm] div
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Simplified Tuning forHigh Performance
> One parameter tuning of position and velocity loops> The user:
› Specifies the desired bandwidth of the system> The tool:
› Identifies the characteristics of the system› Automatically calculates the servo parameters
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Easy Interface & Reliable Result
Tuning example:
Resulted FRF
• Tuning is based on a single parameter: system bandwidth
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Inertia Mismatch
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Inertia Mismatch Compensation
> Stability issues may occur when a heavy load is connected to relatively low-inertia motor Inertia motor through a compliant transmission> At low frequencies the system behaves as a rigidly coupled
motor and load> At high frequencies the load is effectively decoupled from
the motor. The gain of the plant significantly increases and reflects the motor inertia only
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High Order BiQuad Filters – for InertiaMismatch Compensation
> ACS offers fully adjustable high order BiQuads filters in the servo loops.
> Examples where BiQuads can be handy:> Inertia mismatch compensation> Frame vibration compensation> Attenuation of resonances
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BiQuad Filters– Inertia MismatchCompensation
> Example: Cardiac CT scanner> Rotation motor connected by a belt to the load > Inertia mismatch of 10,000!
Rigidly coupled motor and load
Decoupling of load raises the plant gain
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BiQuad Filters– Inertia MismatchCompensation
> Using a regular PID results in a very low bandwidth with poor stability margins.
Sub-Hertz Bandwidth
Poor Stability marginscauses high resonance
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BiQuad Filters– Inertia MismatchCompensation
> A proper selection of Biquad filters results in a high bandwidth with significantly improved stability margins
~30Hz Bandwidth
Sufficient Stability margins
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NanoPWM™ Drives
NanoPWMTM Drive Technology is a brand new state of the art proprietary PWM power stage implementation in select ACS drives, that provides:> As good or better performance than precision linear drives
> Sub-nano jitter> Smooth velocity (velocity error<<1%)
> Higher voltages and higher currents in a much smaller and cost effective package when compared with commercially available linear drives
> Improved reliability over linear drives
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NanoPWM™ - Compact Solution
> Simpler to use:> Integrated into MC4U control module
for full hardware multi-axis systemssolution
> Single bus supply vs. bipolarsupplies in most linear drives
> Digitally adjustable advancedcurrent loop vs. primitivenon-adjustable analog loopsin most linear drives
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NanoPWM™ Drives
> Ultimate solution for:> 450mm / 300mm wafer handling and inspection stages> FPD handling and inspection> Demanding applications that require high performance
> High power output & compact footprint> 100Vdc, up to 15A/30A (continuous / peak)
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NanoPWM™ Technology
> Sub-nanometer position jitter performance> Nanometer stepping:
1nm steps
±0.4nm jitter
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Significantly Lower Standstill Jittercomparing to equivalent 3rd party linear drives
3rd party linear drive
NanoPWMTM drive
NanoPWMTM
(100V, 30Apeak)3rd party linear drive
(±50V, 30Apeak )
Stand still jitter[nm] p-p 1.32 3.56
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NanoPWMTM drive
Better Results at Low Speed comparing to off-the-shelf linear drives
(*) Results taken on an ironless linear stage with cross roller bearings
3rd party linear drive
NanoPWMTM 3rd party linear drive
Position Error[nm] p-p@ 1[mm/sec] 22.3 47.8
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NanoPWM™ is Superior to Any Other Equivalent PWM Drive in the Market
NanoPWMTM drive
Regular PWM drive
NanoPWMTM
100V, 30[A]Standard PWM
100V, 30[A]
Stand still jitter[nm] p-p 1.4 35
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NanoPWM™ the Best PWM Drive One Can Get!
NanoPWMTM 3rd party linear drive
Package size Small Big
Complexity Low High
Performance Very Good Good
Reliability Very Good Problematic
Price Lower High
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Summary
> Algorithms for better system performance were discussed–ServoBoostTM, MotionBoostTM, Cogging compensation, profile shaping and BiQuad filters
> New developments were presented:> Enhanced support for fast Sin-Cos> Support for switching between multiple feedback devices> New tool for advanced and simpler tuning> NanoPWMTM drives – for ultimate jitter performance, better
than cumbersome linear drives
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THANK YOU