IONIX 2“UHV Magnetron Assemblies

Specifications and reference dwg

®

IONIXMAGNETRON SPUTTERING TECHNOLOGY

›› INTRODUCTION

ION`X®

09/15www. thfc.de

Rely on • quality • know-how • performance

• metallic vacuum sealing• mounts on DN 63 / 16 CF• adjustable target clamping• bakeable 200 °C• magnet array for ferromagnetic targets

PLANAR MAGNETRON SPUTTERING SOURCEION`X-2”UHV

2

®

IONIXquality · know-how · performance

2www. thfc.de 09/17

6” HIGH VACUUM MAGNETRON Magnet array multipolar NdFeB

Bakeout temperature

max. temperature < 60 °C

Magnetron dimensions

diameter < 192 mm

height < 70 mm

weight < 9 kg

Interface DN 50 KF

Proposed mounting style tube Ø1” x 300 mm

Construction materials stainless steelOFHC - type copper

PTFETypical rates

Mo, 8 Å/s, 1 kW DC, 150 mm

Cu, 24 Å/s, 1 kW DC, 150 mm

Accessories & Options

mounting option < tube Ø 3/4” x 300 mm

quick coupling <feedthrough

for tube Ø 1” and Ø 3/4”

argon injection < model no. IX6_A135-xx

power connector < 7/16-type

magnet array for <magnetic materials

on request

± 30° tilt <

fl ange mounting <

SS target clamps for <specifi ed thicknessSS target clamps for <bond targets

* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.

** RF-Version requires special connector and installation. More details on request.

5

ULTRAHIGH VACUUM MAGNETRON ITEM SIZE PART

NUMBER DESCRIPTION VACUUMINTERFACE

1.1

2” Ø IX2U_9107

2” UHV magnetron on DN 63 CF• targets 2–6 mm thick, sfliding anode• threaded target clamp • SmCo magnets, bakeable 200 °C• sputters ferromagnetic targets Ni 2 mm, Fe 1 mm• power connector 7/16-type• reference drawing IX2U_8107•

DN 63 CF

1.2

2” Ø IX2U_9201_CF16

2” UHV magnetron with DN 16 CF, internal mounting• targets 1–6 mm thick, sliding anode • SmCo magnets, bakeable 200 °C• sputters ferromagnetic targets Ni 2 mm, Fe 1 mm • reference drawing IX2U_8201•

DN 16 CF

OPTIONS2” Ø argon injection• 2” Ø chimney• 2” Ø ± 30° tilt• 2” Ø extended fl ange mounting•

›› PRODUCT OVERVIEW

www. thfc.de

Rely on • quality • know-how • performance

ION`X®

09/153

®

IONIXquality · know-how · performance

3www. thfc.de 09/17

6” HIGH VACUUM MAGNETRON Magnet array multipolar NdFeB

Bakeout temperature

max. temperature < 60 °C

Magnetron dimensions

diameter < 192 mm

height < 70 mm

weight < 9 kg

Interface DN 50 KF

Proposed mounting style tube Ø1” x 300 mm

Construction materials stainless steelOFHC - type copper

PTFETypical rates

Mo, 8 Å/s, 1 kW DC, 150 mm

Cu, 24 Å/s, 1 kW DC, 150 mm

Accessories & Options

mounting option < tube Ø 3/4” x 300 mm

quick coupling <feedthrough

for tube Ø 1” and Ø 3/4”

argon injection < model no. IX6_A135-xx

power connector < 7/16-type

magnet array for <magnetic materials

on request

± 30° tilt <

fl ange mounting <

SS target clamps for <specifi ed thicknessSS target clamps for <bond targets

* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.

** RF-Version requires special connector and installation. More details on request.

5

www. thfc.de 09/15

2” ULTRAHIGH VACUUM MAGNETRON Model No. IX2U_9107 IX2U_9201

2” UHV FLANGE MOUNTED 2” UHV INTERNAL

Target

form < circular/planar

diameter < 2” ± 0.1mm

thickness < 2 to 6 mm

cooling < indirect

Operating pressure argon

nonmagnetic targets < 3 x 10 -3 to 10 -1 mbar

best performance < 5 x 10 -3 to 5 x 10 -2 mbar

vacuum sealing < welding, brazing, CF

Electrical specifi cations

max. power, watts DC/RF < 400 W DC / 400 W RF * **

max. voltage DC < 1000 V

max. current DC < 5 A

rec. power supply < 500 W DC / 600 W RF

Power connector

DC/RF < 7/16 type custom type

Cooling water

fl ow < 1 l / (min x kW)

min. fl ow < 1 l/min

max. inlet temperature < ≤ 30 °C

max. pressure < ≤ 2 bar open drain

water tubes < Ø 6 x Ø 4 mm PTFE

» SPECIFICATIONS

2” UHV3” UHV4” UHV5”UHV6” UHV8” UHV

44www. thfc.de 09/17

6” HIGH VACUUM MAGNETRON Magnet array multipolar NdFeB

Bakeout temperature

max. temperature < 60 °C

Magnetron dimensions

diameter < 192 mm

height < 70 mm

weight < 9 kg

Interface DN 50 KF

Proposed mounting style tube Ø1” x 300 mm

Construction materials stainless steelOFHC - type copper

PTFETypical rates

Mo, 8 Å/s, 1 kW DC, 150 mm

Cu, 24 Å/s, 1 kW DC, 150 mm

Accessories & Options

mounting option < tube Ø 3/4” x 300 mm

quick coupling <feedthrough

for tube Ø 1” and Ø 3/4”

argon injection < model no. IX6_A135-xx

power connector < 7/16-type

magnet array for <magnetic materials

on request

± 30° tilt <

fl ange mounting <

SS target clamps for <specifi ed thicknessSS target clamps for <bond targets

* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.

** RF-Version requires special connector and installation. More details on request.

5

www. thfc.de 09/15

2” ULTRAHIGH VACUUM MAGNETRON Target 2” UHV FLANGE MOUNTED 2” UHV INTERNAL

Magnet array permanent SmCo

Bakeout temperature

max. temperature < 200 °C

Magnetron dimensions

diameter < 62 mm 64 mm

height < 43 mm 82 mm (+ 40 mm CF 16)

weight < 2 kg 1.5 kg

Vacuum interface DN 63 CF DN 16 CF

Proposed mounting style DN 63 CF DN 63 CF / DN 100 CF

Construction materials stainless steelOFHC - type copper

Al2O3

Typical rates

Al, 8 Å/s, 300 W DC, 100 mmCu, 15 Å/s, 300 W DC, 100 mm

Accessories & Options

target diameter < 50 mm

argon injection <

power connector < N-type, HN-type custom type

magnet array for <magnetic materials

Fe 2 - 3 mm, Ni 5 mm Fe 2 - 3 mm, Ni 5 mm

± 30° tilt < n.a.

fl ange mounting < DN 100 CF DN 63 CF / DN 100 CF

SS target clamps for <specifi ed thickness n.a. n.a.

SS target clamps for <bond targets n.a. n.a.

* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.

** RF-Version requires special connector and installation. More details on request.

55www. thfc.de 09/17

6” HIGH VACUUM MAGNETRON Magnet array multipolar NdFeB

Bakeout temperature

max. temperature < 60 °C

Magnetron dimensions

diameter < 192 mm

height < 70 mm

weight < 9 kg

Interface DN 50 KF

Proposed mounting style tube Ø1” x 300 mm

Construction materials stainless steelOFHC - type copper

PTFETypical rates

Mo, 8 Å/s, 1 kW DC, 150 mm

Cu, 24 Å/s, 1 kW DC, 150 mm

Accessories & Options

mounting option < tube Ø 3/4” x 300 mm

quick coupling <feedthrough

for tube Ø 1” and Ø 3/4”

argon injection < model no. IX6_A135-xx

power connector < 7/16-type

magnet array for <magnetic materials

on request

± 30° tilt <

fl ange mounting <

SS target clamps for <specifi ed thicknessSS target clamps for <bond targets

* This value refers to the magnetron itself. The maximum power is determined by the target material and bonding technique.

** RF-Version requires special connector and installation. More details on request.

5

www.thfc.de

PLANAR MAGNETRON SPUTTERING SOURCEION‘X-6“HV

6“ H

V

6www.thfc.de

REFERENCE VIEW IX2U_8107

REFERENCE VIEW IX2U_8201

TARGET

43 m

m

Ø 50.8 mm (2”)

Ø 62 mm

Target thickness2…6 mm

Target clamp

DN 63 CF

Target thickness2…6 mm

Target clamp

69 m

m12

.5 m

m40

mm

Ø 50.8 mm (2”)

Ø 64 mm

DN 16 CF

Flange assembly

CF seal

TARGET

www.thfc.de

REFERENCE VIEW IX2U_8107

REFERENCE VIEW IX2U_8201

TARGET

43 m

m

Ø 50.8 mm (2”)

Ø 62 mm

Target thickness2…6 mm

Target clamp

DN 63 CF

Target thickness2…6 mm

Target clamp

69 m

m12

.5 m

m40

mm

Ø 50.8 mm (2”)

Ø 64 mm

DN 16 CF

Flange assembly

CF seal

TARGET

www.thfc.de

REFERENCE VIEW IX2U_8107

REFERENCE VIEW IX2U_8201

TARGET

43 m

m

Ø 50.8 mm (2”)

Ø 62 mm

Target thickness2…6 mm

Target clamp

DN 63 CF

Target thickness2…6 mm

Target clamp

69 m

m12

.5 m

m40

mm

Ø 50.8 mm (2”)

Ø 64 mm

DN 16 CF

Flange assembly

CF seal

TARGET

www.thfc.de

PLANAR MAGNETRON SPUTTERING SOURCEION‘X-6“HV

6“ H

V

7

www.thfc.de

REFERENCE VIEW IX2U_8107

REFERENCE VIEW IX2U_8201

TARGET

43 m

m

Ø 50.8 mm (2”)

Ø 62 mm

Target thickness2…6 mm

Target clamp

DN 63 CF

Target thickness2…6 mm

Target clamp

69 m

m12

.5 m

m40

mm

Ø 50.8 mm (2”)

Ø 64 mm

DN 16 CF

Flange assembly

CF seal

TARGET

www.thfc.de

REFERENCE VIEW IX2U_8107

REFERENCE VIEW IX2U_8201

TARGET

43 m

m

Ø 50.8 mm (2”)

Ø 62 mm

Target thickness2…6 mm

Target clamp

DN 63 CF

Target thickness2…6 mm

Target clamp

69 m

m12

.5 m

m40

mm

Ø 50.8 mm (2”)

Ø 64 mm

DN 16 CF

Flange assembly

CF seal

TARGET

www.thfc.de

2“U

HV

PLANAR MAGNETRON SPUTTERING SOURCEION‘X-2“UHV

6

32

11.1.

7

7.2.7.1.

54

5

1

7.1.

4

1.1.

7.2.

6

IX2U_9201: no chimney; O.D. 64 + 8 (2x screw head M4)IX2U_9203: with chimney, gas inlet; O.D. 64 + 8IX2U_9204: with chimney, gas inlet; O.D. 64

IX2U_9250: no chimney; O.D. 64 + 8 (2x screw head M4)IX2U_9253: with chimney, gas inlet; O.D. 64 + 8IX2U_9254: with chimney, gas inlet; O.D. 64

( * ) Select magnetron model:

1) Standard targets (non-magnetic, Fe 1 mm, Ni 2 mm)

2) Magnetic targets ( Fe 2 - 3 mm, Ni 5 mm)

Parts ListTITLEPART NUMBERQTYITEM

(2-6

)

1

11

CF100_5020-xx

11

RF-DC-connecting box with 7/16-jack

Planarmagnetron 2"UHV with chimney (*)IX2U_9203 (*)

1Cardan shaft, self-adjusting lengthSH2_5021-xx1UHV rotary feedthrough, magnetic coupling Pneumatic shutter, 180° adjustableSH2U_9010-2-xx1

T003_5021-xx Gas tube

RD3_5011111

CF-seal (non-standard)IX2U_0E15

Flange CF100 with 1x CF16, 1x VCR-4 and 1x IX2U

88

245 (

or as

agre

ed)

69

5310

4

31.548.5

Ø6xØ4

© THIN FILM CONSULTING, proprietary data, company confidential. All rights reserved0

A

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B

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1 2 3 4 5 6

1 2 3 4 5 6

6

38

Ø50.8Ø54.0

100°

8

CF100_5025-xx15 1 Flange CF100 with 2x CF16 and 1x VCR-4

1Cardan shaft, self-adjusting lengthSH2_5021-xx1UHV rotary feedthrough, magnetic coupling

7 Pneumatic shutter, 180° adjustableSH2U_9010-2-xx1

7.2.7.1.

3

1

IX2U_9201: no chimney; O.D. 64 + 8 (2x screw head M4)IX2U_9203: with chimney, gas inlet; O.D. 64 + 8IX2U_9204: with chimney, gas inlet; O.D. 64

IX2U_9250: no chimney; O.D. 64 + 8 (2x screw head M4)IX2U_9253: with chimney, gas inlet; O.D. 64 + 8IX2U_9254: with chimney, gas inlet; O.D. 64

( * ) Select magnetron model:

1) Standard targets (non-magnetic, Fe 1 mm, Ni 2 mm)

2) Magnetic targets ( Fe 2 - 3 mm, Ni 5 mm)

16 T003_5021-xx Gas tube

Target

1

1 Planarmagnetron 2"UHV with chimney (*)IX2U_9203 (*)

Parts ListTITLEPART NUMBERQTYITEM

12 ±45°-tilt with CF16 rotatableIFL4_9404-xx11.1. CF-seal (non-standard)IX2U_0E15

RF-DC-connecting box with 7/16-jackRD3_501114

5

2

1

7.1.

4

1.1.

7.2.

6

6

Ø50.8Ø54.0

100°

53

245 (

or as

agre

ed)

6950

5310

4

(2-6

)

31.548.5

Ø88

38.0

Ø6xØ4

© THIN FILM CONSULTING, proprietary data, company confidential. All rights reserved0

A

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B

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0

1 2 3 4 5 6

1 2 3 4 5 6

9

_9A3

00_9

A303

_9A3

04_9

A305

_9A3

06_9

A307

_9A3

08_9

A309

_9A3

01_9

A302

_9A3

14_9

A315

_9A3

16_9

A317

_9A3

18_9

A319

10

11

_9A3

23_9

A324

_9A3

25_9

A326

_9A3

27_9

A328

_9A3

29

_9A3

31_9

A332

_9A3

34_9

A335

_9A3

36_9

A337

_9A3

38_9

A339

_9A3

20