A 3D Micromixer Fabrication With Dry Film Resist Advisor : Cheng-Hsien Liu Reporter : Yu-Sheng...
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Transcript of A 3D Micromixer Fabrication With Dry Film Resist Advisor : Cheng-Hsien Liu Reporter : Yu-Sheng...
A 3D Micromixer Fabrication With Dry Film Resist
Advisor : Cheng-Hsien Liu Reporter : Yu-Sheng LinDate : 2007/04/18
A.D. Radadia1, L. Cao1, H.K. Jeong1, M.A. Shannon2, R.I. Masel1
1Department of Chemical and Biomolecular Engineering, 2Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, USA MEMS 2007 pp.361~364
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Outline
IntroductionFabricationMicro-mixer designResultsConclusions
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Introduction DFR : Dry Film Resist
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Fabrication
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Micro-mixer Design6 layers
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Compare of wet etching and RIE
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Results
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Microscopic images of (a) 4 patterned layers
(b) 6 patterned layers and a cap layer
Microscopic images during process
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Conclusions
A technique utilizing by dry film resist to build 3D microstructures with 6 layers patterned has been developed.Dry film resist is available in bio-compatible format.Future work will focus on building MEMS devices for biosensing applications.
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Thank you for your attention !
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Woodpile structure
3 layers
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Ref: M.S. Munson, P. Yager, Analytica Chimica ACTA, 2003 pp.63~71