8-2
9
專題報導 2004.12 潔淨科技 12 產業潔淨室驗証之量測儀器探討 Study of Measuring Instruments for Validation of Certified Industrial Cleanrooms 王輔仁、李國正 國立勤益技術學院冷凍空調系 F. J. Wang and G. Z. Lee Department of Refrigeration Air-Conditioning National Chin-Yi Institute of Technology 摘要 現代化產業由於新產品展之需求而對潔淨 室技術要求日益殷切，而潔淨室在設計建造完 成後需經完整測試以確保其能達到當初設計之 規範，並且即使在正式運轉作業時也能持續達 到要求等級標準，也因此，為了確認無塵能滿 足原先設計要求之污染等級標準，測試程序及 確效作業便顯得格外重要且關鍵。然而，測試 及確效作業不僅須遵守無塵室相關法規設計標 準，且在不同階段狀態下（即完工時，機器安 裝後及正式運轉時）皆須能持續地符合無塵室 等級規格；此外，其檢驗測試項目繁多，包括 微塵粒子、濾網洩漏、壓差、氣流、溫溼度、 噪音、照度及振動等測試。更需輔以各式各樣 精密之量測儀器才能獲致最佳之量測數據資 料，因此在測試及確效作業上有相當程度之複 雜性，而為確保無塵室能依法規標準正確地操 作，針對產業潔淨室驗証之量測儀器進行探討 實乃刻不容緩之要務。 關鍵詞：產業潔淨室、確效、量測儀器 Abstract Modern manufacturing industries are increasingly turning to cleanroom technology for the development of new products. The cleanrooms have to be first designed and constructed, they then have to be tested to ensure they achieve their design specification and continue to do so even at fully operational stage. Therefore, it＇s significant and critical to validate that the cleanroom is working correctly and achieving the contamination standards that it has been designed to fulfill. However, the procedural testing and validation for certified industrial cleanrooms have to comply with the cleanroom classification set down at the design stage and ensure the cleanrooms continues to comply with the standard at different occupation states (i.e. as-built, at-rest and operational). It＇s also necessary to demonstrate numerous tests such as airborne particles and microbial concentration test, filter installation leak test, temperature, relative humidity, sound levels, lighting levels and vibration levels. Many delicate testing instruments are therefore required for the task as to produce the best results with the least expenditures of time and effort. Therefore, it＇s a challenge and quite meaningful to study the measuring instruments for validation of certified industrial cleanrooms.
Transcript of 8-2
- 1. 2004.12 12 Study of Measuring Instruments for Validation of Certified Industrial Cleanrooms F. J. Wang and G. Z. Lee Department of Refrigeration Air-Conditioning National Chin-Yi Institute of Technology Abstract Modern manufacturing industries are increasingly turning to cleanroom technology for the development of new products. The cleanrooms have to be first designed and constructed, they then have to be tested to ensure they achieve their design specification and continue to do so even at fully operational stage. Therefore, its significant and critical to validate that the cleanroom is working correctly and achieving the contamination standards that it has been designed to fulfill. However, the procedural testing and validation for certified industrial cleanrooms have to comply with the cleanroom classification set down at the design stage and ensure the cleanrooms continues to comply with the standard at different occupation states (i.e. as-built, at-rest and operational). Its also necessary to demonstrate numerous tests such as airborne particles and microbial concentration test, filter installation leak test, temperature, relative humidity, sound levels, lighting levels and vibration levels. Many delicate testing instruments are therefore required for the task as to produce the best results with the least expenditures of time and effort. Therefore, its a challenge and quite meaningful to study the measuring instruments for validation of certified industrial cleanrooms.
2. 2004.12 13 Keyword : Industrial cleanrooms, validation, measuring instruments ISO 14644-1(1999)1 FS 209E19922 National Environmental Balancing Bureau 3 NEBB IEST-006.2 4 56 3D78 910 2.1 / Thermo-anemometer (1) Velocity sensor(2) Temperature compensation sensor1 ToT1To T T1 overheat T hot-wire2 0 ~ 9999 ft/min (0 to 50m/s)1 1871 43.25 in(110cm) 90 2.2 Electronic Balometer HVAC (HEPA) 3 3. 2004.12 14 3051220mm 2 2.3 3D Ultrasonic Anemometer 4 turbulence intensity RS232 3 Tu% 2.4 Laser Particle Counter ISO 14644 0.3m Fed 2090.5 mISO 0.3m5 Met One 5 1.ON /OFF2.3. 4.5.6.7. 8. 4 0.3, 0.5, 1, 3, 5, 10m6 Channels0.3 m Class 100~100,000 2.5 digital manometer 6 0~25 mbar0.1 5 2.6 Digital Illuminance Meter 7 8 JISC 1609-1993 ClassAA 3,000 lx 2 6NEBB 2.7 Precision Sound Level Meter 9 IEC651IEC804ISO1996 1.0 1(IEC Class 1) Octave Bands 4. 2004.12 15 14dB ~ 135dB 16Hz ~ 16kHz7 10 1000Hz 94 dB 114 dB NEBB 11 2.8 Portable Vibration Meter 12 () 8 0.0~199.9( m/s 2 ) 0.0~199.9 (mm/s) 0.0~1.99 (mm)5 5 2.9 Electrostatic Fieldmeter 13 9 NO/OFFZERO HOLD 10 1 International Standard ISO 14644-1, Cleanrooms and Associated Controlled Environments - Part 1 Classification of Air Cleanliness, International Organization for StandardizationISO, New York, USA, 1999. 2 U.S. Federal Standard 209 version E, Airborne Particulate Cleanliness Classes for Cleanrooms and Clean Zones, Washington, USA, 1992. 3 NEBB, Procedural Standards for Certified Testing of Cleanrooms, 2nd Edition, National Environmental Balancing Bureau, Maryland, USA, 1996. 4 HM28 Operating instructions Digital handheld pressure gauge, Hand-Manometer, USA, 2002 5 Electronic Balometer with APM 150 Meter, ALNOR, USA, 2002 6 CompuFlow Thermo-anemometer Meter 8585, ALNOR, USA, 2002 7 Anemosonic UA6 Handheld Digital Ultrasonic Anemometer Operating Instructions, AIRFLOW, England, 2002 8 Precision Integrating Sound Level Meter Instruction Manual, Delta OHM, Italy, 2001 9 Portable Vibration Meter TYPE-3144A Operation Manual, ACO, Japan, 2000 10 Digital Illuminance Meter Instruction Manual, YOKOGAWA, Japan, 1999 5. 1 2 3 4 5 6 2004.12 16 6. 7 8 9 10 11 12 2004.12 17 7. 13 1 2004.12 18 2 3 ALNOR Model 8585 050m/s0-9999ft/min 3 0.01m/s1ft/min -106014140 0.30.5 0.10.1 095RH3RH 0.1RH 56040140 0.10.1 ALNOR APM 150 Meter 50~2000CFM85~400m3 /h 32~1220~50 ANEMOSONICTM Ultasonic Anemometer UA6 0.050m/sec1 0.01m/sec 099 0.05,000m3 /sec 0701 0.1 0.00899.99m2 099% 8. 4 2004.12 19 5 6 MetOne, DECEMBER 2002 3313 PORTABLE COUNT 100~250V 50/60Hz 0~2A 0.3, 0.5, 1, 3, 5, 10m 6 Channels 1CFM 1. Isokinetic Probe 2.Purge Fliter 3. Scanning Probe of Filter HM28 0~25mbar 0.1 YOKOGAWA 510 02 510 01Digital JISC 1609-1993ClassAA 0.0 ~ 99.9/999/9,990/99,900/999,000 lx 3,000 lx21at23 2 3 3 7 9. 2004.12 20 8 9 Delta HD 9020 1.5V4 1.0 1 14dB135dB 16Hz16kHz IEC651IEC804ISO1996 TYPE 3144A 35000Hz ACC0.0~199.9m/s2 PEAK VEL0.0~199.9mm/s PEAK DISP0.0~1.99 mm PEAK to PEAK 5 7351A 5.0pc/m/s2 (50pc/G) 10at100Hz 5 -50 ~ +150 282A-1 Digital Stat-ArcTM 3 0~19.99Kv 1 2.54 5 DC 9V 40 LWH = 2.44.20.9 6.110.72.3 0~50,85RH 10 Kv inch 0~40 4.0 2 0~60 6.5 3 0~80 8.5 4
