7500cs ICP-MS · PDF fileDynamic Reaction Cell ICP-MS Technology to Deter-mine Ultratrace...
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Transcript of 7500cs ICP-MS · PDF fileDynamic Reaction Cell ICP-MS Technology to Deter-mine Ultratrace...
�� 7500cs ICP-MS �� !"#$%&'
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Junichi Takahashi
Kouichi Youno
Agilent Technologies
9-1 Takakura-Cho, Hachioji-Shi
Tokyo, 192-0033
Japan
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K(39) �� 4.5 � 3.0 19 150 101*
Ca(40) �� 5.0 � 5.7 24 150 92
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V(51) �� � 4.5 0.50 0.31 � 97
Cr(52)** �� � 4.5 10** 55** 50 113
Mn(55) �� 5.0 � 0.80 3.4 50 98
Fe(56)** �� 5.0 � 22** 180** 100 95
Co(59) �� � 4.5 0.40 0.47 50 98
Ni(60) �� � 4.5 4.5 21 50 90
Cu(65) �� � 4.5 1.7 3.9 50 96
Zn(66) �� � 4.5 5.3 9.6 50 90
As(75) �� � 4.5 5.3 9.5 50 93
Sr(88) �� � � 0.07 0.13 10 100
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Ba(138) �� � � 0.20 0.45 50 102
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1. Werner Kern. Handbook of Semiconductor Wafer
Cleaning Technology. William Andrew Publishing;
1993.Chap 2, section 2.3, p.8.
2. K.Sakata,and K.Kawabata. Reduction of Fundamental
Polyatomic Ions in Inductively Coupled Plasma Mass
Spectrometry. Spectrochim. Acta. 1994; (49B):1027.
3. N. Yamada, J.Takahashi and K.Sakata. The Effects of
Cell-gas Impurities and Kinetic Energy Discrimina-
tion in an Octopole Collision Cell ICP-MS under Non-
Thermalized Conditions. JAAS 2002; 17:1213-1222.
4. K.Kawabata, Y. Kishi, and R.Thomas. The Benefits of
Dynamic Reaction Cell ICP-MS Technology to Deter-
mine Ultratrace Metal Contamination Levels in High-
Purity Phosphoric and Sulfuric Acid. Spectroscopy
2003 Jan; 18 (1):16-31.
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