7500cs ICP-MS · PDF fileDynamic Reaction Cell ICP-MS Technology to Deter-mine Ultratrace...

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7500cs ICP-MS !"#$%&' !"#$%& Junichi Takahashi Kouichi Youno Agilent Technologies 9-1 Takakura-Cho, Hachioji-Shi Tokyo, 192-0033 Japan !"#$%&'()*+,-./012345 ICP-MS !"#$%&'()*+,- 85% W/W H 3 PO 4 100 7500cs ICP-MS !"#$%&'() SEMI C36-0301 !" ! !"#$%&'()(*+,-./0123 ORS !" !"#$%&'()*+,-./ !"# !"#$%&'()*+,-./0* !"#$%$&'( Ca Fe Ti Co Ni Cu Zn !"#$%& !"#$%&'()*+,-./ !"#$%&'()*+ 7500cs !"# STS !"#$%&'()*+,-./,0 !/! !"#$%&'#( 0.06-28ppt 0.85% H 3 PO 4 50ppt!"#$%&'()*+,-. !" 7500cs ICP-MS !" SEMI !"# !"#$%&#' !"#$%&'()CD! !"#$%&'()*)+,- !" !"#!$%&'() !"#$%&' !"#$%&'()*+ !"#$%& !"#$%&'()*+,-./0123 !"#$ Si 3 N 4 !"#$% ! !"#$%&'()*+,!-./0123 IC ! 50% !"#$%&' !" 1 !"#$%& !"# !"!"#$%&'()*+ !"#$%&'()*+,-./01 ! !"#$%&' !"#!$%&'( !"#$%&'()*+,-./0123 ICP-MS !"# 1994 !"# STS ! HP4500 !"ICP-MS !"# !"#$%&'()* STS!"#$% !"#$%&'()*+,-./0 ! STS!"#$%&'()!"*+',- !"#$%&'() K ArH Ca(Ar) Fe(ArO)!"#!"#$%&

Transcript of 7500cs ICP-MS · PDF fileDynamic Reaction Cell ICP-MS Technology to Deter-mine Ultratrace...

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Junichi Takahashi

Kouichi Youno

Agilent Technologies

9-1 Takakura-Cho, Hachioji-Shi

Tokyo, 192-0033

Japan

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1. Werner Kern. Handbook of Semiconductor Wafer

Cleaning Technology. William Andrew Publishing;

1993.Chap 2, section 2.3, p.8.

2. K.Sakata,and K.Kawabata. Reduction of Fundamental

Polyatomic Ions in Inductively Coupled Plasma Mass

Spectrometry. Spectrochim. Acta. 1994; (49B):1027.

3. N. Yamada, J.Takahashi and K.Sakata. The Effects of

Cell-gas Impurities and Kinetic Energy Discrimina-

tion in an Octopole Collision Cell ICP-MS under Non-

Thermalized Conditions. JAAS 2002; 17:1213-1222.

4. K.Kawabata, Y. Kishi, and R.Thomas. The Benefits of

Dynamic Reaction Cell ICP-MS Technology to Deter-

mine Ultratrace Metal Contamination Levels in High-

Purity Phosphoric and Sulfuric Acid. Spectroscopy

2003 Jan; 18 (1):16-31.

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