4.Experiment 2.What is GEM 1.Introductioncimlab.ie.nthu.edu.tw/course/auto/text/class_4.pdf · ·...

1.Introduction2.What is GEM

-SECS Message Format and Protocol-SECS II Message Stream and Function

3.Why is GEM Important to You4.Experiment

GEM IntroductionGEM and its related industry standards are published by SemiconductorEquipment and Materials International, Inc.(SEMI)

1.1 SECS (Semiconductor Equipment Communication Standard)

In 1978, Hewlett-Packard proposed to SEMI that standards be established forcommunications among semiconductor manufacturing equipment. SEMIpublished the SECS-1 standards in 1980 and the SECS-II standards in 1982.

1.2 GEM (Generic Equipment Model)

The GEM standard evolved out of work done by the SEMI SECSImplementation Task Force (SITF), a group composed of representatives from several major semiconductor. The SITF work began in April 1987, and SEMIStandard E30 (GEM) was finally published in December 1992.

1.2 GEM’s Function in ManufacturingGEM plays a key role in the CAM hierarchy. It moves and formats data from the

equipment so that a computer in the CAM structure can receive it and easily recognize it. It also moves and formats instructions from the CAM system to the manufacturing equipment.

Without the GEM function installed in the factory, the manufacturing operation is dependent on the equipment operator to do this job.

Host computer

Read

Format

EquipmentProcessMetrologyHanding

Analyze Decision

Format

Read

Generate data Actions

GEMFUNCTON

GEM FUNCTION IN CONTROL LOOP

What Is GEM?The Driving Forces

GEM STANDARDIZES BEHAVIOREQUIPMENT WITH GEM

EQUIPMENT WITHOUT GEM

2. What Is GEM?2.1 The Standards Documents

GEM and its related industry standards are published by Semiconductor Equipment and Materi-als International, Inc. (SEMI).

1. SEMI Standard E4 (SECS-I):• Electrical standards • Mechanical standards (connector)• RS-232 Conventions• Block Transfer• Multi-Block Message• Transaction (Primary message, Reply Message)

2. SEMI Standard E5 (SECS-II):• Data Items (e.g. Format of Floating Point numbers)• Dictionary of Standard Data Items (e.g. Process Program ID)• Dictionary of Standard Messages (e.g. Alarm Message)• Conversations--rudimentary flow control• Very weak minimum requirements--S1F1 Are You There

3. SEMI Standard E30 (GEM or Generic Equipment Model):• Slightly Stronger Fundamental Requirements • Set of Additional Capabilities (e.g. Alarm Management)• Set of required SECS-II Messages• Scenarios defining Message usage• Finite State Machines defining equipment behavior

What Is GEMGEM’s Function in Manufacturing

DevelopStandard Publlahed Standard

DevelopStandard Published Standard

Develop Ship SDR Prduct

SECS UsersGroup

DevelopStandard

PubllshedStandard

Develop Ship GWGEM

DeployDevelop

DevelopStandard

1980 1982 1984 1986 1988 1990 1992

SEMI E4 (SECS-I) -- Message Transport

SEMI E5 (SECS-II) -- Message Content

GW ASSOVIATES SDR SECS DRIVER

SEMI E30 (GEM) -- Equipment Behavior

GW ASSOCIATES GWGEM

SEMATECH GEM Tester

SEMATECH EID Program

SEMI 2213 (HSMS) -- SECS on TCP/IP

SECS/GEM/HSMS HISTORY

SECS PROTOCOL LAYERS

APPLIC. User application program

Conversations

Message formats

Data item formats

Transaction

Message

Block

Physical

SECS-2

SECS-3

SECS-1 vs HSMS-SSPROTOCOL STACKS

Application Application

SECS-1SECS-1SECS-1SECS-1(SEMI E4)(SEMI E4)(SEMI E4)(SEMI E4)

HSMS-SSHSMS-SSHSMS-SSHSMS-SS(SEMI E37.1)(SEMI E37.1)(SEMI E37.1)(SEMI E37.1)

RS-232Hardware

4-WireSerial Cable

TCP/IPSoftware

ETHERNETHardware

(IEEE 802.3)

ThickCoax

OtherHardware

(e.g. Token Ring)

GEM(SEMI E30)

SECS-1(SEMI E5)

SECS-II(SEMI E5)

GEM(SEMI E30)

ThinCoax

10-Base-2

TwistedPair

10-Base-2

HSMS Can Share Network With Other TCP/IP Protocols

OSILayers

1-2

OSILayer

3

OSILayer

4

OSILayers

5-7

HSMSAPPLICATION

SECS-II

HSMS

Non-SECSTCP/IP

APPLICATION

Non-SECSUDP/IP

APPLICATION(e.g. NFS

File Transfer)

TCP UCP

IP

HARDWAREINTERFACE

(e.g. ETHERNET)

NETWORK

2.2 GEM Capabilities

GEM Compliant:

Equipment must provide 100% of the FundamentalRequirements in order to call itself -- GEM Compliant

Fully GEM Compliant:

Equipment which provide 100% of the Additional GEMCapabilities is called --Fully GEM Compliant

What Is GEM?GEM Compliance

GEM COMPLIANCE STATEMENT FUNDAMENTAL GEM REQUIREMENTS IMPLEMENTED COMPLIANT State Models � Yes � No Equipment Processing States � Yes � No S1,F13/F14 Scenario � Yes � No Event Notification � Yes � No On-line Identification � Yes � No

Error Messages � Yes � No Control (Operator Initiated) � Yes � No Documentation � Yes � No

� Yes

� No

ADDITIONAL CAPABILITIES IMPLEMENTED COMPLIANT Establish Communications � Yes � No � Yes � No Dynamic Event Report Configuration � Yes � No � Yes � No Variable Data Collection � Yes � No � Yes � No Trace Data Collection � Yes � No � Yes � No Status Data Collection � Yes � No � Yes � No Alarm Management � Yes � No � Yes � No Remote Control � Yes � No � Yes � No Equipment Constants � Yes � No � Yes � No Process Program Management � Yes � No � Yes � No Material Movement � Yes � No � Yes � No Equipment Terminal Services � Yes � No � Yes � No Clock � Yes � No � Yes � No Limits Monitoring � Yes � No � Yes � No Spooling � Yes � No � Yes � No Control (Host Initiated) � Yes � No � Yes � No

Why is GEM Important to You?Gem is an enabling technology for factory performance improvements. It does this by providing known equipment communications and functional capability on which communications between the equipment and the CAM system can be implemented via projects.

Improvement HowLot/process-program mis-processing Host download PP

Host select PPEquipment setup time and utilization Host download PP

Host select PPMetrology data capture and quality Auto upload readingsManufacturing schedule performance Save setup timeEngineering efficiency Through higher quality dataLabor Host download PP

Host select PP

Point to Point

Equip Equip EquipDaisy Chain

Tree

Equip EquipEquipEquipEquipEquipEquip Equip

Node NodeNode

Host

Network Structure

User application program

Conversations

Message formats

Data item formats

Transaction

Message

Block

Physical

SECS PROTOCOL LAYERS

APPLIC

SECS-2

SECS-1

SECS MESSAGE FORMAT

10 0-224 2

CHECKSUM

TEXT HEADERLTH

1#

OFBYTES

SPAN FORLENGTH &

CHECKSUM

LTH CHECKSUM

0A 00 01 81 01 80 01 00 00 00 00 01 04

10BYTES

HEADER

AN ACTUAL MESSAGE

SECS 1 PROTOCOLNORMAL

05

SENDER

ENQ

RECEIVER

“HELLO ANYONE THERE”

“YESGO AHEAD”

“BLAH, BLAH”

04

06

EOT

ACK

MESSAGE

“OK, GOT IT.GOODBYE”

SENDERENQ

05

RECEIVER

“HELLO ANYONE THERE”

“YES GO AHEAD”04EOT

LTH

0A 00 00 81 01 80 01 00 00 00 00 01 02

15NAK

“CAN’T UNDERSTAND YOU. GOODBYE”

CHECK SUM

01 03COMPUTED CHECK SUM

SECS 1 PROTOCOLNAK

SENDER

ENQ

RECEIVER

EOT

NAK

MESSAGE

(T1 TIMEOUT)

T1 TIMEOUT1. MAXIMUM TIME ALLOWED BETWEEN

CHARACTERS OF A MESSAGE

SECS 1T1 TIMEOUT

SENDER

ENQ

RECEIVER

BAD LTHEOT

NAK

OTHER ARACTERS

T1 Timeout

BAD BLOCK LENGTH

SENDER RECEIVER

MSGEOT

BID

BID

(NO ANSWER T2)

(NO ANSWER T2)

(NO ANSWER T2)

SEND FAILURE

T2 TIMEOUT 1. NO EOT AFTER BID (ENQ)2. NO ACK/NAK AFTER MESSAGE3. NO MESSAGE AFTER EOT

SECS 1 T2 TIMEOUT ERROR RECOVERY

ACK

EID(ENQ)

BID

ENG ENG

EOTEOTEOTEOT

ACKACKACKACK

ENQENQENQENQ

MSGMSGMSGMSG

MASTER SLAVESLAVESLAVESLAVE

OOPS!OOPS!OOPS!OOPS!ESPECTEDESPECTEDESPECTEDESPECTED

EOTEOTEOTEOT

OOPS!EXPECTED

EOT

POSTPONEPOSTPONEPOSTPONEPOSTPONEMY SENDMY SENDMY SENDMY SEND

INSIST ONINSIST ONINSIST ONINSIST ONSENDINGSENDINGSENDINGSENDING

RETRY SEND RETRY SEND RETRY SEND RETRY SEND

COLLISION

CHECKSUMTEXTHEADERLTH

10 BYTES

R DEVICE

ID

WSTR-EAM

FUN-CTON

EBLOCK

#SYSTEM BYTES

5 7 9 10841 2 3 6

WHO?WHO?WHO?WHO?(EQUIPMENT

ID)

WHAT?WHAT?WHAT?WHAT?(MESSAGEMEANING)

WHICH?WHICH?WHICH?WHICH?(BLOCK OFOFOFOFA SERIES)

BOOKKEEPINGBOOKKEEPINGBOOKKEEPINGBOOKKEEPINGINFORMATIONINFORMATIONINFORMATIONINFORMATION

SECS MESSAGE HEADER


R DEVICE ID

R-BIT DEVICE ID

01

DESTINATI-ON

SOURCE

MESSAGE DIRECTION

HOST TO EQUIPEQUIP TO HOST

7 6 5 4 3 2 1 0

15 14 13 12 11 10 9 8

7 6 5 4 3 2 1 0

15 14 13 12 11 10 9 8

BYTE 1 BYTE 2BITS IN BYTE

BITS IN FIELD

15 BITSValue: 0-32767

DEVICE ID

DEVICEID

00 , 03


R

0

DEVICEID

"3"

HOSTCOMPUTER

NODECOMPUTER

NODECOMPUTER

EQUIP#1

EQUIP#2

EQUIP#3

EQUIP#5

EQUIP#4

EQUIP#6

R-BIT = 0

DEVICE ID HOST-TO-EQUIPMENT

DEVICEID

80 , 03


1

DEVICEID

"3"

HOSTCOMPUTER

NODECOMPUTER

NODECOMPUTER

EQUIP#1

EQUIP#2

EQUIP#3

EQUIP#5

EQUIP#4

EQUIP#6

R-BIT = 1

DEVICE IDEQUIPMENT-TO-HOST

WSTREAM FUNCTION


7 6 5 6 4 3 2 1 0 7 6 5 6 4 3 2 1 0

BYTE 3 BYTE 4

BITS

STREAM1 BITYSValue: 0-127

REPLY EXPECTEDNOT

MAJORTOPIC OFMESSABE

FUNCTION8 BITS

Value: 0-255

SUB-TYPEWITHINSTREAM

STREAM & FUNCTION CODES


9 107 8

SYSTEM BYTES

SYSTEMBYTESQUERY

RESPONSE

SENDER RECEICER

SECS HEADERSYSTEM BYTES

BLOCK #

BLOCK#


BYTE 5

15 BITSValue: 1-32,767

E BLOCK#

7 6 5 4 3 2 1 0

15 14 13 12 11 10 9 8

7 6 5 4 3 2 1 0

15 14 13 12 11 10 9 8

BYTE 6

E-BIT (END BIT)

"1" LAST (OR ONLY) BLOCK

"0" NOT THE LAST(MORE BLOCKS FOLLOWS)

NOTE: FIRST (OR ONLY) BLOCKIS #1

PART 1 PART 2 PART 3

BLOCK#

00 01PART 1

00 02 PART 2

80 03 PART 3

PART 1 PART 2 PART 3

TEXT EXCEEDS 244 BYTES

LTH HEADER TEXT CHECKSUM

HEADER(FROM IST

BLOCK)

TEXT

BLOCK #SENDING LONG TEXT

ENQSENDER RECEIVER

EOT

BLOCK #1

EOT

T2

EOT

ACK

ACK ISLOST

BLOCK #1

ACK

(RETRY)IGNORE

DUPLICATE BLOCK

DUUPLICATE BLOCK DETECTION

PRIMARYMSG

SENDER RECEIVER

PRIMARYMSG

T3

NO REPLYNO REPLYNO REPLYNO REPLY

T 3 REPLY TIMEOUT

SECS II Message Stream and Function

S1Fx Equipment StatusS2Fx Equipment Control & DiagnosticsS3Fx Materials StatusS4Fx Material ControlS5Fx Exception ReportingS6Fx Data CollectionS7Fx Process Program ManagementS8Fx Control Program TransferS9Fx System ErrorsS10Fx Terminal ServicesS12Fx Wafer MappingS13Fx Unformatted Data Set Transfers

HOST

DATASTORAGE

OPERATORPANEL

WORKIN

PROGRESSPROCESS

CHAMBER

EQUIPMENT

YOUFIRST

NO,YOU

FIRST

ESTABLISH COMMUNICATIONS

RS232/Ethernet

S1F13 W<L [2]

<A ‘UTC2085’><A ‘VER200’>

>.

S1F14<L [2]

<L>

>.

Establish Communication

HOST

DATASTORAGE

OPERATORPANEL

WORKIN

PROGRESSPROCESS

CHAMBER

EQUIPMENT

SHAREDCONTROL

CONTROL STATE (ON-LINE/OFF-LINE)

On-Line

RS232/Ethernet

Control StateOn Line:

S1F17 W

Off LineS1F15 W

S1F18

S1F16

OVEN TEMPERATURE IS:

HOST

DATASTORAGE

OPERATORPANEL

WORKIN

PROGRESSPROCESS

CHAMBER

EQUIPMENT

1.SHOW ME

YOURTEMPERATURE

VARIABLES AVAILABLE:VARIABLES AVAILABLE:VARIABLES AVAILABLE:VARIABLES AVAILABLE:-PRESSURE-PRESSURE-PRESSURE-PRESSURE-TEMPERATURE-TEMPERATURE-TEMPERATURE-TEMPERATURE-OPERATOR NAME-OPERATOR NAME-OPERATOR NAME-OPERATOR NAME-DATE & TIME-DATE & TIME-DATE & TIME-DATE & TIME

106 DEGREES C

2.REPORT

TEMPERATURE

VARIABLE DATA COLLECTION

SPC Control

Item Lower Limit Upper Limit Current

Temp 100 200 150

Pressure 1600 2000 2 010

Status: Alarm Action: 1. Stop Equipment 2. Infom Engieer

Upper LimitLower Limit

S1F3 W <L [2]

<A temp><A pressure>

>

S1F4<L [2]

<U2 150><U2 2010>

>

Variable Data Collection

Remote Control

Stop Equipment

DATASTORAGE

OPERATORPANEL

WORKIN

PROGRESSPROCESS

CHAMBER

EQUIPMENT

ALARMREPORT

(WITH DATA)

FAILFAILFAILFAILTEM

PERA

TUR

E

PR

ESSU

RE

LA

MP

GA

S

ALARM PARETOALARM PARETOALARM PARETOALARM PARETO

HOST

PRESSURE ALARMDURING LOT QX749

DURATION7 MINS

START 10:05:00

CORRECTED10:12:00

ALARM MANAGEMENT

Alarm Management

Start Time : 8:00 Run Time : 4:32 Idle Time :0:10 Assistant Time : 12:10Status : Alarm Alarm Count :5

Alarm Code : 775

Happen Time : 12:52

Reason : Nonstick on

Suggestion : Manual re-bondand QA inspection MTBF: 0:54

Nonstick

Broken wireShiftOther

S5F1 W S5F2<L [3]

 <U2 775><A Nonstick on’>

>

PROCESSINGCOMPLETED

LOT-ID: QX749WAFERS: 23

HOST

DATASTORAGE

OPERATORPANEL

WORKIN

PROGRESSPROCESS

CHAMBER

EQUIPMENT

2.EQUIPMENT

REPORTS"END OF LOT",

LOT-IDWAFER-COUNT

1."END OF LOT"

EVENT OCCURS

EMENT NOTIFICATION

Lot Status

Lot Name:AO 100

Lot size:230 Complete Size:230

Status:Done

S6F11 W<L [3]

<U2 1> //DATAID<U2 200> //Lot Complete<L [1]

<L [2]

<U1 230> //Lot size<A AO100> //Lot name

>>

>>

S6F12

Event Notification

<U2 1> //RPTID<L [2]

NOW STARTINGLOT QX799

ON EQUIPMENT

HOST

DATASTORAGE

OPERATORPANEL

WORKIN

PROGRESSPROCESS

CHAMBER

EQUIPMENT

REMOTE"START"

COMMAND

EQUIPMENTEQUIPMENTEQUIPMENTEQUIPMENT"START""START""START""START"BUTTONBUTTONBUTTONBUTTON

REMOTE COMMAND

PROCESS PROGRAMMANAGER. Create. Change. Delete. Directory. Select

PROCESSPROGRAMLIBRARY

HOST COMPUTER

PROCESS PROGRAMMANAGER. Create. Change. Delete. Directory. Select

PROCESSPROGRAMLIBRARY

EQUIPMENT

PROCESS PROGRAMEXECUTION

AREA

To OtherEquipments

Of Same Type

LOCALCHANGES

UPLOADDOWNLOADDELETEDIRECTORYPPSELECT

PROCESS PROGRAM MANAGEMENT

Init

Idle

SetupAssist 1 Setup A

Setup B SetupAssist 2

Ready

CarrlerWait

In Process

Setting Pass

ReticleChange

1. Done

2. Setup22. setupStart

6. Error

21. Error25.

Dpme

24.Repeat

5. Done

4. Repeat

3. AssistRequlred

7. SetupComplete

8. Setup

26. RemoveSetup

9. Start

10. LotComplete

19. CarrlerPresent

11. PassComplete

13. Done

14.ReticleChucked

20.SetupComplete

12. ReticleSwap

15.waferPresent16.WaferStaged17.SiteReady18.WaferComplete

An actual (Partial) Equipment Process State Description

G EM is an enabling technology for factory perform ance im provem ents. It does this by provid-ing know n equipm ent com m unications and functional capability on w hich com m unications be-tw een the equipm ent and the C A M system can be im plem ented via projects.

W hy is G E M Im portant To You?

Im provem ent H owLot/process-program m is-processing H ost dow nload pp

H ost selected ppEquipm ent setup tim e and utilization H ost dow nload pp

H ost select ppM etrology data capture and quality A uto upload readingsM anufacturing schedule perform ance Save setup tim eEngineering efficiency Through higher quality dataLabor A uto upload readings

H ost dow nload pp

These im provem ents typically add up to significant operating gains although gains in one itemM ay not be large.

Exam ple: The m anufacturing line yield m ay be 90% . M is-processing m ay account for 5 pointsBetw een the 90% and 100% . Im plem enting G EM can im prove the yield by 5% .H ow eversavings also occur in setup tim e, labor and equipm ent utilization. O n a yearly basis the savingscan be very large. A 5% increase in fab yield on 5000 w afer outs per w eek is a savings of13,000 w afersPer year.

Less tangible benefits can occur in products and services. P roduct param eter distribution canim prove because of im proved m etrology data quality. P roduct yields m ay im prove because thehigher quality m etrology data allow s faster and tighter correlations of variables.

Im plem entation of G EM in a factory m ay change the operating budget. A m ortization m ay in-crease because of higher equipm ent cost. Engineering and service costs m ay increase to sup-port the com m unication and H ost system . H ow ever, G EM does enable cost effectiveim plem entations because it is highly generic. The net product cost m ay decrease because ofhigher equipm ent utilization and higher yields.

3. Why is GEM Important to You?

4.Experiment 2.What is GEM 1.Introductioncimlab.ie.nthu.edu.tw/course/auto/text/class_4.pdf · ·...

Documents

Transcript of 4.Experiment 2.What is GEM 1.Introductioncimlab.ie.nthu.edu.tw/course/auto/text/class_4.pdf · ·...