3D TCAD Simulation of GaN-based LED - Crosslight...
Transcript of 3D TCAD Simulation of GaN-based LED - Crosslight...
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Lighting Up Semiconductor World…
© Crosslight Software, Inc., Vancouver, BC, Canada, (604)320-1704, www.crosslight.com
APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
3D TCAD Simulation of
GaN-based LED
© 2011 - Crosslight Software Inc.
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Content
Advanced physical models 3D TCAD examples Summary
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Advanced physical models for MQW
k.p based quantum mechanical solver. Self-consistent iteration between quantum well solution
and drift-diffusion solutions. Polarization charge model including piezoelectric and
spontaneous charges.
State of the art nitride material data macro incorporating latest understanding of mechanisms leading to LED efficiency droop.
Self-consistent coupling of drift-diffusion equation solver and thermal/heat-flow solver.
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Start of the art 3D TCAD tools for LED
User-friendly GUI LayerBuilder used to set up MQW layer structures.
Mask data (usually in GDS format) are used to construct
the 3D geometry. Advanced process simulator CSuprem is used to generate the 3D mesh and doping profile.
Efficient and convergent device simulator APSYS is used to simulate electrical behavior (such as IQE) and the thermal behavior.
Optionally Crosslight Optowizard may be used to model the optical extraction behavior with raytracing or FDTD.
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
MQW layer design using LayerBuilder
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Using mask data for mesa and contact design
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 1: Corner side contact LED
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 1: Corner side contact LED
3D voltage drop within
the MQW LED
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 1: Corner side contact LED
3D profile of current
magnitude within the
InGaN/AlGaN MQW LED
![Page 10: 3D TCAD Simulation of GaN-based LED - Crosslight Softwarecrosslight.com/wp-content/uploads/2013/11/crosslight_3DTCAD_LED.pdf · 3D TCAD Simulation of GaN-based LED © 2011 - Crosslight](https://reader034.fdocuments.us/reader034/viewer/2022052212/5afaed577f8b9a19548e9802/html5/thumbnails/10.jpg)
APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 1: Corner side contact LED
3D distribution of
temperature due
to self-heating
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 1: Corner side contact LED
3D distribution of z-
component of current
within the
InGaN/AlGaN MQW
LED
![Page 12: 3D TCAD Simulation of GaN-based LED - Crosslight Softwarecrosslight.com/wp-content/uploads/2013/11/crosslight_3DTCAD_LED.pdf · 3D TCAD Simulation of GaN-based LED © 2011 - Crosslight](https://reader034.fdocuments.us/reader034/viewer/2022052212/5afaed577f8b9a19548e9802/html5/thumbnails/12.jpg)
APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 1: corner side contact LED
Self-consistent solution of quantum
states at high injection condition
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 2: LED with star-shaped top contact
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 2: LED with star-shaped top contact
3D current
distribution plot
with top layers
removed and
MQW layer
exposed.
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 2: LED with star-shaped top contact
Insert: quantum states at 0.5A
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 3: LED with spiral top contact
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 3: LED with spiral top contact
3D current (z-
component) plot
with top layer
removed and MQW
layers exposed.
![Page 18: 3D TCAD Simulation of GaN-based LED - Crosslight Softwarecrosslight.com/wp-content/uploads/2013/11/crosslight_3DTCAD_LED.pdf · 3D TCAD Simulation of GaN-based LED © 2011 - Crosslight](https://reader034.fdocuments.us/reader034/viewer/2022052212/5afaed577f8b9a19548e9802/html5/thumbnails/18.jpg)
APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Example 3: LED with spiral top contact
IV
IQE
Positive
surface fix
charge
mapped
onto 3D
mesh
Negative
surface fix
charge
mapped
onto 3D
mesh
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com
Summary
Comprehensive 3D TCAD simulation provided by CSuprem and APSYS packages for MQW LED.
Results range from quantum levels, optical transition
energies, to 3D temperature and current distribution. Suitable for practical device optimization with typical
simulation time ranging from 20 minutes to several hours depending on the structural complexity.
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APSYS | CSUPREM | LASTIP | PICS3D | PROCOM | CROSSLIGHTVIEW
© 2010 Crosslight Software, Inc., Burnaby, BC, Canada www.crosslight.com