300 mm Operational Flowcharts and Scenarios, V. 10 mm Operational Flowcharts and Scenarios, V. 10...

300 mm Operational Flowcharts and Scenarios, V. 10

International SEMATECH Manufacturing Initiative Technology Transfer #04014488A-TR

© 2004 International SEMATECH Manufacturing Initiative, Inc.

International SEMATECH and the International SEMATECH logo are registered service marks of International

SEMATECH, Inc. a wholly-owned subsidiary of SEMATECH, Inc.

International SEMATECH Manufacturing Initiative and the International SEMATECH Manufacturing Initiative logo are registered service marks of International SEMATECH Manufacturing Initiative, Inc., a wholly-

owned subsidiary of SEMATECH, Inc.

Product names and company names used in this publication are for identification purposes only and may be trademarks or service marks of their respective companies.

300 mm Operational Flowcharts and Scenarios, V. 10 Technology Transfer #04014488A-TR

International SEMATECH Manufacturing Initiative April 30, 2004

Abstract: This document contains a limited number of base operational flowcharts and scenarios for moving material and processing product within an end-user factory based on the communications interface requirements specified by the I300I and J300 CIM Global Joint Guidance for 300 mm Semiconductor Factories – Release Five, April 2000. International SEMATECH (ISMT) developed these flowcharts and scenarios under the direction of its member companies. The flowcharts include initialization, material movement, queue management, and product processing under a variety of operational criteria. Version 10 updates the flowcharts and scenarios to include changes to the SEMI standards up to the 0304 cycle and to be consistent with current member company implementation guidance.

Disclaimer: The standards, flowcharts and scenarios are subject to change without notice.

International SEMATECH makes no representations or warranties, either express or implied, as to merchantability, noninfringement or the suitability of the flowcharts set forth herein for any use or particular use in connection with any particular application. The user accepts the documentation, materials, standards, flowcharts and scenarios “as-is” and agrees that determination of suitability of the standards, flowcharts and scenarios is solely the responsibility of the user.

International SEMATECH makes no representations or warranties concerning the operation or performance of the flowcharts or the accuracy or completeness of the documentation or materials provided herewith, and, to the extent permitted by law, excludes all implied warranties of merchantability or fitness for a particular use. The user agrees that in no event shall International SEMATECH be liable for lost profits, lost data, lost goodwill nor for other damages in the nature of incidental, consequential or exemplary damages, even if it has been advised of the possibility of such damages, resulting from user’s use or inability to use the software, technical or editorial errors or omissions contained herein or the furnishing, performance, operation or use of the software, documentation or materials provided herewith.

Keywords: Automated Materials Handling, Wafer Transport, Wafer Carriers, Standards, Factory Automation

Authors: Steve Fulton, Gino Crispieri, and Lorn Christal

Approvals: Steve Fulton, Project Manager Jackie Ferrell, Program Manager Randy Goodall, Associate Director Laurie Modrey, Technical Information Transfer Team Leader

iii

ISMI, Inc. Technology Transfer #04014488A-TR

Table of Contents

1 INTRODUCTION ..............................................................................................................1 1.1 Applicable Documents................................................................................................1

SEMI Documents .......................................................................................................1 Industry Documents....................................................................................................1

2 FLOWCHARTS – INITIALIZATION ................................................................................2 2.1 Initialization – Clean Initialization ..............................................................................2

Purpose.......................................................................................................................2 Criteria .......................................................................................................................2 Applicable Documents................................................................................................2 Assumptions ...............................................................................................................2 Flowchart Organization...............................................................................................2 Legend........................................................................................................................3

3 FLOWCHARTS – MATERIAL MOVEMENT .................................................................13 3.1 Material Movement – Support Services ....................................................................13

Purpose.....................................................................................................................13 Applicable Documents..............................................................................................13 Assumptions .............................................................................................................13 Flowchart Organization.............................................................................................13 Legend......................................................................................................................13

3.2 Material Movement – Move In..................................................................................19 Purpose.....................................................................................................................19 Applicable Documents..............................................................................................19 Assumptions .............................................................................................................19 Flowchart Organization.............................................................................................19 Legend......................................................................................................................20

3.3 Material Movement – Move Out ...............................................................................49 Purpose.....................................................................................................................49 Applicable Documents..............................................................................................49 Assumptions .............................................................................................................49 Flowchart Organization.............................................................................................49 Legend......................................................................................................................49

4 FLOWCHARTS – PROCESSING....................................................................................64 4.1 Processing – Queue Management..............................................................................64

Purpose.....................................................................................................................64 Criteria .....................................................................................................................64 Applicable Documents..............................................................................................64 Assumptions .............................................................................................................64 Flowchart Organization.............................................................................................64 Legend......................................................................................................................65

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Technology Transfer #04014488A-TR ISMI, Inc.

4.2 Processing – Product.................................................................................................75 Purpose.....................................................................................................................75 Criteria .....................................................................................................................75 Applicable Documents..............................................................................................75 Assumptions .............................................................................................................75 Flowchart Organization.............................................................................................76 Legend......................................................................................................................76

5 FLOWCHARTS – ROUND TRIPS...................................................................................91 5.1 Round Trips and Base Scenarios ...............................................................................91

Purpose.....................................................................................................................91 Applicable Documents..............................................................................................91 Assumptions .............................................................................................................91 Flowchart Organization.............................................................................................91 Legend......................................................................................................................91

v


Acknowledgments

We would like to acknowledge and thank the technical contributors listed below. Without their unflagging commitment and contributions, working diligently to achieve consensus on the common requirements and intended implementation strategies for the IC companies that they represent while respecting health business competition, this guidance would not exist. Most of these participants were members of the original International SEMATECH Equipment Integration and Automation Test User’s Group (EIATUG) that established the first baseline flowcharts more than 4 years ago.

Their perseverance and ongoing contributions deserve our profound recognition and respect. Thank You!

Gino Crispieri (ISMI) Peter Cross (Intel)

Karl Gartland (IBM) Blaine Crandall (TI) Les Marshall (AMD)

Ralf Georgi (Infineon) Keith Peden (CCS Technologies)

Charisse Rosier (ISMI) Lorn Christal (ISMI)

vi


Revision History

The following is the revision history (changes from R09 to R10) of this document and its flowcharts.

Section Comments

All pages Changed copyright statement to “(c) Copyright 1999-2003 International SEMATECH, Inc.”

Cover sheet Changed “Version 09” to “Version 10.”

Cover sheet Changed “December 2000” to "December 2003.”

Cover sheet Changed “SEMI Standards Cycle Baseline: 1000” to “SEMI Standards Cycle 0703.”

Cover sheet Removed the entire Modifications line. Only a single cycle is supported.

Cover sheet Changed “Exception Handling” to “Limited Exception Handling.”

Cover sheet Changed the abstract to reflect this as a basic view, rather than something every factory needs. Removed reference to CCS

Cover sheet Replace with first abstract sentence with the following: "International SEMATECH (ISMT) developed these flowcharts and scenarios under the direction of its member companies."

Cover sheet Removed CCS trademark data.

Notices Changed copyright statement to “(c)1999-2003 International SEMATECH, Inc.”

Revision History Removed versions before R10 changes.

1 Updated the Adobe version to 5.0.

1 Removed CCS contact data.

1 Replaced with first sentence with the following: “International SEMATECH (ISMT) developed these flowcharts and scenarios under the direction of its member companies.”

1.1 Reflected the current version for each standard as of cycle 0703.

1.1 Added the collaboration phase 1 document as a reference.

1.3 Remove the whole section.



2.1 Under Applicable Documents, changed “conforms to” to “is based on.”

2.1.1 Added note to reflect context of alarms not necessarily requiring manual intervention.

2.1.3 Removed the “Note: E30 equipment constants include:” box.

2.1.3 Removed the “Note: E30 collection events include:” box.

2.1.4 Reworded the first Note box to state collection events unique to E40.

2.1.4 Removed the first paragraph in the second Note box, but left E40 transition and waiting for material events.

2.1.6 In second Note box, highlighted that in E87 these are captured as alarms, but for IC maker event may be required.

2.1.6 Added the word “E87” to the action boxes.

2.1.6 Removed the “Note: E87 equipment constants include:” box.



3 In second sentence, removed "both" and "or just individual wafers.”


3.1.1 In “CMHandler PORTACTION” box, added the following to the end of the box: "ServiceStatus=1" to indicate IN SERVICE.

3.1.1 In the left column “Note: Port cannot be place in service because” box, added reasons.

3.1.1 In “Note: A queued CarrierOut”, added item for internal buffer equipment only and changed empty to empty non-reserved port.

3.1.1 The Yes from "Is CarrierOut Queued?" decision box now goes directly to the top of 3.3.4 (down its middle column).

3.1.2 In “CMHandler PORTACTION” box, added the following to the end of the box: "ServiceStatus=0"

vii


Section Comments

3.1.2 In the left column “Note: Port cannot be place out of service because” box, added reasons.

3.1.3 Changed S3F23 to S3F27, S3F24 to S3F28, and updated their related parameters.

3.1.3 Added decision block for reservation state.

3.1.3 In last center block, changed “AMHS delivery” to "AHMS action.”

3.1.4 Changed S3F23 to S3F27, S3F24 to S3F28, and updated their related parameters.

3.1.4 Added decision block for reservation state.

3.1.4 In last center block, changed “AMHS delivery” to "AHMS action.”


3.2.1.1 Removed parameters in Bind box.

3.2.1.1 In the “Note: A Bind service fails”, added the last bullet for load port out of service and transfer blocked.

3.2.1.1 Added note for asynchronous events.

3.2.1.2 Removed parameters in CarrierNotification box.

3.2.1.2 Added CAACK=6 to CM Handler box associated with the "Issue error" box.

3.2.1.3 Change Note for Reservation State Model and services to indicate they are required for all equipment.

3.2.1.3 Added load port out of service as a reason for ReserveAtPort.

3.2.1.4 Removed parameters in CancelBind box.

3.2.1.4 Changed third failure reason to "either loadport or carrier ID are not specified.”

3.2.1.5 Removed parameters in CancelCarrierNotification box.

3.2.1.5 Changed first box to "CancelCarrierNotification Issued.”

3.2.1.6 Removed parameters in CancelReservationAtPort box.

3.2.2.1 In initial decision box, removed LP association question.

3.2.2.1 Moved decision for Manual before decision for Reservation.

3.2.2.1 Exception handling now refers to end-user or supplier documentation.

3.2.2.1 Reduced this section from 3 to 2 pages. Updated the labels starting on page 3.2-8.

3.2.2.1 The "Begin/signal placing carrier on load port" box was moved.

3.2.2.1 In a note, changed E81 to E87.



3.2.3.3 Deleted CarrierOut from the title.

3.2.3.3 Added a step that states, "Wait for carrier to arrive at destination.”


3.2.3.2 Changed carrier clamp scenario to Clamp Carrier (initiated the action), Is Carrier Clamped? (did the action succeed), No-Error (exception handling), Yes-Carrier Clamped-Send event (looks good, notify host).



3.2.3.2 Removed a redundant NOT ASSOCIATED event and CancelBind service related to the load port being associated with another carrier.




3.2.3.7 1) Removed "C.2.5 is TBD.” 2) Changed “Slot map read fail error.” 3) Made last decision box a question.

3.2.3.7 Deleted the note at the top of the page that read “For slot map read fail, host should only issue a CancelCarrier since the equipment cannot provide a map which is necessary for either host or equipment based slot map verification.” There was an identical note at the bottom of the page and it was moved to the right side of the page.

3.2.4.1 Deleted the step at the bottom of the page that stated “Make wafer available for transfer from carrier.”

3.2.4.1 Changed the verbiage to read “UNOCCUPIED” from “NOT OCCUPIED.”

viii


Section Comments

3.2.4.2 Delete entire section and its contents. This is no longer supported in the document.

3.3.1 Exception handling now refers to end-user or supplier documentation.

3.3.1 Removed last note in this section that had discussed host operation.

3.3.2 Modified boundary note to include all five cases.

3.3.2 Added a YES option to the first decision block on the page. It was not present.

3.3.2 Added a note which states: Operator removes the carrier before the equipment being ready as defined in the boundary conditions above.

3.3.2 Reduced this section from 3 to 2 pages. Updated the labels starting on page 3.3-5.

3.3.2 Deleted two steps, one a decision block for CarrierOut queued, and the other a step for Process Next CarrierOut to after TRANSFER BLOCKED and the triggering of the Presence/Placement sensors.

3.3.2 Changed the Load port presence/placement sensors triggered step to be a decision block.

3.3.2 Added a step and a note for Wait for operator End/signal.

3.3.3 Modified one step to match the manual unload scenario 3.3.2. Note that the Carrier Placement logic was changed and that the Carrier Placement Error alarm was removed.

3.3.3 Deleted the RESERVATION state model logic (3 blocks) and moved the “Leave LPTSM= TRANFER BLOCKED, process next CarrierOut” state into the equipment column after CarrierOut queued decision block.

3.3.4 Moved the TRANFER BLOCKED step before the CarrierOut Ack to ensure the load port's availability. The TRANFER BLOCKED step was after the CarrierOut Ack step and the concern was that the load port had to be blocked as soon as possible. Note that state transitions for Reservation and Associateion were also combined with Transfer Blocked in R10.

3.3.4 Modified the “Begin transfer from internal buffer” step to read “Queue the CarrierOut service.”

3.3.4 Add CarrierOut.rsp note.

3.3.4 Added an alarm error message “Alarm (Carrier Presence Error) S5F1 [E87]” next to the Carrier Presence error step.

4.1 Removed the first bullet in the second paragraph under Criteria is incorrect. E40 PRMtrlOrder and E94 ProcessOrderMgmt are independent of one another.

4.1.1.3 Renamed the PRJOBQueued/Pooled State name to Queued/Pooled.

4.1.1.3 Deleted the off-page reference for Processing Flowchart 4.2 at the bottom of the page.

4.1.1.4 Renamed the PRJOBQueued/Pooled State name to Queued/Pooled.

4.1.1.4 Async PRJobEvent (PJSM SCT-19) was changed to PJSM SCT-18 as 19 did not exist in the standard.

4.1.1.4 Changed the TERMINAL block to refer back to 4.1.1.3, Wait for Host - Create next Process Job state block. Off page connector (2A/5).

4.1.2.3 Deleted the off-page reference for Processing Flowchart 4.2 at the bottom of the page.

4.1.2.3 Revised the last note on the page to read "Note: Once a Control Job is queued, it may be acted upon by CJAbort, CJStop or CJCancel or by the CJHOQ command."

4.1.2.5 Async PRJobEvent (PJSM SCT-19) was changed to PJSM SCT-18 as 19 did not exist in the standard.

4.2.2 Changed the last block to a decision block, with a NO return just before itself.

4.2.3 Deleted the event associated with Async Event, ('JobWaitingforStart'), and S6F11 [E94].

4.2.3 Deleted off-page connectors and associate arrows from ControlJobStart error to Selected State.

4.2.3 Added a note, which states, "There is no E94-0703 CJSM transition in place to handle this. It should go to either the Selected or Paused state."

4.2.4 Changed sync PRJobEvent , (PJSM SCT-3), S6F11[E40] from SCT-3 to SCT-2.

4.2.4 Deleted the arrow from Issue Process Job Setup Error [E40] to PJSM State: SETTING UP [E40].

4.2.4 Deleted the transitionAsync PRJobAlert (Setup) S6F11 [E40] to the PJ HANDLER state. These events are no longer used.

4.2.4 Deleted the transition from Async PRJobEvent (WaitingForMaterial) If required by Process Job S6F11 [E40] to the MATERIAL HANDLER state. These events are no longer used.

4.2.5 Deleted the transition Async PRJobAlert (WaitingForStart) S6F11 [E40] to PJ HANDLER. This event is no longer used.

4.2.5 Changed state transition Async PRJobEvent (PJSM SCT-5) S6F11 [E40] from SCT-5 to SCT-3.

4.2.5 Changed state transition Async PRJobEvent (PJSM SCT-5) S6F11 [E40] from SCT-6 to SCT-5.

ix


Section Comments

4.2.5 Would like to change flow chart to look like 4.2.3., specifically with a decision block for ManualStartSuccessful.

4.2.5 Removed PRJobAlerts.

4.2.7 Added a note to SCT-13 that states, “Note: Not withstanding related E90 SCT-13 requirement, ISMT member companies require SCT-13 for all equipment.”

4.2.8 Changed from SCT-7 to SCT-6, and SCT-8 to SCT-7.

4.2.8 Changed from PROCESSING COMPLETE to PROCESS COMPLETE.

4.2.8 Removed PRJobAlerts.

4.2.10 Copied the entire page from the appendix A.2-4.2.10 here since it's more representative of the current flow.

4.2.10 Changed from SCT-15 to SCT-16, and SCT-18 to SCT-17.

5 Removed reference to SELETE since section 5.2 has been removed.

5.1 Minor typo changes.

5.2 Deleted Section 5.2.

A Deleted section A.

B Deleted section B.

C Deleted section C.

D Deleted section D.

1


1 INTRODUCTION

International SEMATECH (ISMT) developed the following flowcharts and scenarios under the direction of its member companies. Flowcharts cover initialization, material move in, material move out, queue management, and product processing under a variety of operational criteria within a 300 mm semiconductor factory.

The intent of these flowcharts is to cover the various operational criteria that would be considered by ISMT’s member companies when developing their 300 mm factories. A factory may not use the entirety of each flowchart, but rather only those portions applicable to the factory’s operation.

Conversely, an equipment supplier would consider only those flowcharts, or portions thereof, that are applicable to the supplier’s equipment, but still within the criteria of multiple end-user factories.

The flowcharts are presented in a cross-functional format developed in Visio 2000.

1.1 Applicable Documents

The following documents are applicable to the flowcharts and scenarios in this document

SEMI Documents

• E5-0703 SECS-II Message Content (SECS-II)

• E30-0703 Generic Equipment Model (GEM)

• E39-0703 Object Services Standard (OSS)

• E40-0703 Processing Management (PJM)

• E84-0303 Enhanced Carrier Handoff PI/O (EPIO)

• E87-0703 Carrier Management Standard (CMS)

• E90-0703 Substrate Management Standard (STS)

• E94-0702 Control Job Management (CJM)

Industry Documents

• I300I and J300 CIM GJG for 300 mm Semiconductor Factories, Release Five (GJG)

• ISMT Technology Transfer 00053953D-XFR – SELETE/ISMT CIM Base Functionality Requirements Collaboration Phase 1

2


2 FLOWCHARTS – INITIALIZATION

The flowcharts in this section pertain to initialization situations.

2.1 Initialization – Clean Initialization

Purpose

This is a cross-functional operational flowchart that describes the equipment's communication interface behavior from the host’s and the automated material handling system’s (AMHS’) point of view during a clean initialization.

Criteria

• A clean initialization is defined as an initialization following a power-down or software reboot that occurred when the equipment was idle and contained no material and no jobs.

• Equipment initialization is based on the requirements of each standard and of each specific equipment.

Applicable Documents

This operational flowchart is based on the following industry standards and specifications:

• SEMI E30 – Generic Equipment Model

• SEMI E40 – Processing Management

• SEMI E84 – Enhanced Carrier Handoff

• SEMI E87 – Carrier Management

• SEMI E90 – Substrate Tracking

• SEMI E94 – Control Job Management

Assumptions 1. <none>

Flowchart Organization

2.1.1 Summary Equipment Initialization

2.1.2 Equipment Specific Initialization

2.1.3 E30 Generic Equipment Model (GEM) Initialization

2.1.4 E40 Processing Management (PM) Initialization

2.1.5 E84 Enhanced Parallel (/O (EPIO) Initialization

2.1.6 E87 Carrier Management System (CMS) Initialization

2.1.7 E90 Substrate Tracking System (STS) Initialization

2.1.8 E94 Control Job Management (CJM) Initialization

3


Legend

Control (and Data Message)

Data Message

Explanatory Note

Process Decision Terminator Here/ToSection

Here/FromSection

Off-page ReferenceOutgoing

Directional'Or'

AMSM Access Mode State Model [E87] LPTSM Load Port Transfer State Model [E87]COSM Carrier Object State Model [E87] SCT-# State Change Transition - <transition#>LP Load Port SLSM Substrate Location State Model [E90]LPCASM Load Port/Carrier Asso. State Model [E87] SOSM Substrate Object State Model [E90]LPRSM Load Port Reservation State Model [E87]

Incoming

4


2.1.1 Summary Equipment Initialization 2.

1.1

Su

mm

ary

Eq

uip

men

t In

itia

lizat

ion

Equipment HostComments

EquipmentPower On

E37.1 Connectand Select

Flowchart 2.1.5E84

Initialization

Flowchart 2.1.3E30

Initialization

Flowchart 2.1.2Equipment

SpecificInitialization

Flowchart 2.1.6E87

Initialization

Flowchart 2.1.4E40

Initialization

Flowchart 2.1.8E94

Initialization

Flowchart 2.1.7E90

Initialization

Equipment ready forproduct processing and

material move in.

Note: The only required order ofinitialization sequence is for E37.1 andE30. The remaining initializationblocks are sequence independent.

Note: The initialization blocks for theSECS and PIO interfaces aresequence independent.

Note: Each of these may or may notinitialize alarms. During equipmentoperation, alarms do not necessarilyreflect a requirement for manualintervention.

5


2.1.2 Equipment Specific Initialization 2.

1.2

Eq

uip

men

t S

pec

ific

Init

ializ

atio

n

HostEquipmentComments

Begin EquipmentSpecifc Init

TerminateEquipmentSpecific Init

S2,F15(ECS)

S2,F16(ECA)

S5,F4(EAA)

Enable Alarms

S2,F34 (DRA)S2,F36 (LERA)

S2,F38(EDEA)

Note: This flowchart initializesequipment constants, collection eventsand alarms that are unique to a specficequipment and are not part of anystandard.

S2,F33 (DR)S2,F35 (LER)

S2,F37(EDER)

(CEED=TRUE)

S5,F3 (EAS)(ALEDBit8=1)

Set EquipmentConstants

Set CollectionEvents

EquipmentSupervisor

6


2.1.3 E30 Generic Equipment Model (GEM) Initialization 2.

1.3

E30

Gen

eric

Equ

ipm

ent M

odel

(G

EM

) In

itial

izat

ion HostEquipmentComments

CommunicationState Model

system defaultstate set to:ENABLED

Control StateModel

system defaultstate set to:

ON-LINE

BeginE30 Init

Note: The ON-LINE substate is set toREMOTE by operator once. Theequipment is then responsible formaintaining this value in non-volatilememory. Then the next time theequipment powers-on, the ControlState should transition to ON-LINE/REMOTE once communications isestablished.

S1,F13(CR)S1,F14

(CRA)

S1,F13(CR)S1,F14

(CRA)

AND/OR

CommunicationState Model state:COMMUNICATING

Control StateModel state:

ON-LINE/REMOTE

EquipmentSupervisor

Event:ControlState

REMOTE

S2,F15(ECS)

S2,F16(ECA)

S2,F31(DTS)

S2,F32(DTA)

Note: Use a default report if notpreviously set by host.

Note: This must be the 16-byte TIMEformat. All TIME or Clock formatsmust be 16-byte.

EstablishCommunications

EquipmentSupervisor

Set CurrentDate/Time

Set EquipmentConstants

2.1.3A(to 2.1.3B)

7


2.1.3 E30 Generic Equipment Model (GEM) Initialization (continued) 2.

1.3

E30

Gen

eric

Equ

ipm

ent M

odel

(G

EM

) In

itial

izat

ion

(con

tinue

d)


TerminateE30 Init

S2,F33 (DR)S2,F35 (LER)

S2,F37(EDER)

(CEED=TRUE)


S2,F38(EDEA)

S2,F37(EDER)

(CEED=FALSEwith zero

length list)

S2,F38(EDEA)

EquipmentSupervisor

S5,F3 (EAS)(ALED Bit8=0

with ALIDzero

length item)

S5,F4(EAA)

Note: Specific alarms are enabled perother standards or equipment-specificinitialization flowcharts in this section2.1.

Disable allAlarms

Set E30Collection Events

Disable allCollection Events

2.1.3B(from 2.1.3A)

8


2.1.4 E40 Processing Management (PM) Initialization 2.

1.4

E40

Pro

cess

ing

Man

agem

ent

(PM

) In

itia

lizat

ion



S2,F38(EDEA)

S2,F33 (DR)S2,F35 (LER)

S2,F37(EDER)

(CEED=TRUE)

BeginE40 Init

TerminateE40 Init


EquipmentSupervisor

Note:

E40 collection events include:� Process Job State Model

Transition events� Waiting for Material

Note: This flowchart initializescollection events that are unique toE40.

9


2.1.5 E84 Enhanced Parallel (/O (EPIO) Initialization 2.

1.5

E84

Enh

ance

d P

aral

lel (

/O (

EP

IO)

Initi

aliz

atio

n HostEquipmentComments

Begin

All E84 PI/Ointerfacesinitialized?

Set to OFF:L_REQU_REQREADY

Set to ON:HO_AVBL

ES

Terminate

Next E84 PI/Ointerface onequipment.

Yes

No

10


2.1.6 E87 Carrier Management System (CMS) Initialization 2.

1.6

E87

Car

rier

Man

agem

ent

Sys

tem

(C

MS

) In

itia

lizat

ion


S5,F3 (EAS)(ALED

S5,F4(EAA)


S2,F38(EDEA)

BeginE87 Init

TerminateE87 Init

Note: This flowchart initializescollection events and alarms that areunique to E87.

Note: The alarms presented beloware defined in E87. IC makers mayrequire them to be defined events:• PIO Failure• Access Mode Violation• Carrier Verification failure• Slot Map Read Failed• Slot Map Verification Failed• Attempt To Use Out Of Service

Load Port• Carrier Presence Error• Carrier Placement Error• Carrier Dock/Undock Failure• Carrier Open/Close Failure• Duplicate CarrierID• Internal Buffer Carrier Move

Failure (int buffer equipment only)• Carrier Removal Error

Note: E87 collection events include:• Load Port Transport State Model

Transition events• Carrier State Model transition

events• Load Port/Carrier Association

State Model transition events• Access Mode State Model

transition events• Load Port Reservation State

Model transition events• Buffer Capacity Changed• Carrier Closed• Carrier Location Change• Carrier Opened• CarrierID Read Fail• CarrierAccessingStatus Attribute

Change• Carrier Approaching Complete

S2,F33 (DR)S2,F35 (LER)

S2,F37(EDER)

(CEED=TRUE)

S2,F15(ECS)

S2,F16(ECA)

Note: E87 equipment constantsinclude:• BypassReadID

Bit8=1)

Set E87EquipmentConstants


Enable E87Alarms

EquipmentSupervisor

11


2.1.7 E90 Substrate Tracking System (STS) Initialization 2.

1.7

E90

Sub

stra

te T

rack

ing

Sys

tem

(S

TS

) In

itial

izat

ion HostEquipmentComments


S2,F38(EDEA)

BeginE90 Init

TerminateE90 Init

Note: This flowchart initializescollection events that are unique toE90. S2,F33 (DR)

S2,F35 (LER)S2,F37(EDER)

(CEED=TRUE)Note: E90 collection events include:

• Substrate State Model transitionevents

• Substrate Location State Modeltransition events


EquipmentSupervisor

12


2.1.8 E94 Control Job Management (CJM) Initialization 2.

1.8

E94

Co

ntr

ol J

ob

Man

agem

ent

(CJM

) In

itia

lizat

ion



S2,F38(EDEA)

BeginE94 Init

TerminateE94 Init

Note: This flowchart initializesequipment constants, collection eventsand alarms that are unique to E94.

Note: E94 collection events include:• Control Job State Model transition

events

S2,F33 (DR)S2,F35 (LER)

S2,F37(EDER)

(CEED=TRUE)


EquipmentSupervisor

13


3 FLOWCHARTS – MATERIAL MOVEMENT

These flowcharts pertain to the movement of material to and from the equipment. This includes carriers with wafers.

3.1 Material Movement – Support Services

Purpose

This cross-functional operational flowchart describes the equipment’s communication interface behavior from the host’s and operator’s point of view for support services such as changing the load port access mode and placing the load port in and out of service.


This operational scenario is based on the following industry standards and specifications:

• SEMI E39 – Object Services

• SEMI E84 – Enhanced Carrier Handoff PI/O


Assumptions

1. <none>


3.1.1 Place Port In Service

3.1.2 Place Port Out of Service

3.1.3 Access Mode Change – AUTO

3.1.4 Access Mode Change – MANUAL

Legend


Data Message

Explanatory Note


Here/FromSection


Directional'Or'


Incoming

14


3.1.1 Place Port In Service 3.

1.1

Pla

ce P

ort

In S

ervi

ce

HostEquipmentOperator

ChangeServiceStatus(ServiceStatus=

IN SERVICE) [E87]

No

ChangeServiceStatusS3F26 [E87]


Operator Requests PortIN SERVICE

Issue Ack

Port PlacedIN SERVICE

Successfully?

LPTSM State:IN SERVICE

Issue Error

LPTSM State isIN SERVICE?

Yes

No

CM HandlerCAACK=0

Note: A port may not be put in servicebecause the equipment is unable tooperate the port due to hardware orcommunication problems

Place port INSERVICE

Note: ChangeServiceStatus.rsp is sentto either host or operator consoledepending on where theChangeServiceStatus.req originated.

CM HandlerPORTACTION="ChangeServiceStatus",ServiceStatus=1

CM HandlerCAACK=1,2,3,5

CM HandlerCAACK=0,4

CM Handler

Yes


ChangeServiceStatus

S3F25 [E87]

Event(LPTSM SCT-2)

S6F11 [E87]

3.1.1A(to 3.1.1B)

15


3.1.1 Place Port In Service (continued) 3.

1.1

Pla

ce P

ort

In S

ervi

ce (

con

tin

ued

) HostEquipmentOperator

CM HandlerEvent(LPTSM SCT-4)

S6F11 [E87]

LPTSM State:TRANSFERBLOCKED

Yes

Event(LPTSM SCT-4)

S6F11 [E87]

No

Event(LPTSM SCT-5)

S6F11 [E87]

LPTSM State:TRANSFER

READY

Is carrierpresent?

CM Handler

LPTSM State:READY TO LOAD

Is CarrierOutqueued?

Yes

No

Note:• This step applies only to internal

buffer equipment• A queued CarrierOut always

grabs hold of an emptynonreserved port.

Is the FOUP readyto unload?

No

Event(LPTSM SCT-5)

S6F11 [E87]

LPTSM State:READY TOUNLOAD

Yes

CM HandlerEvent

(LPTSM SCT-4)S6F11 [E87]

LPTSM State:TRANSFER

READY

3.1.1B(from 3.1.1A)

3.1.1C(to 3.3.4A)

16


3.1.2 Place Port Out of Service 3.

1.2

Pla

ce P

ort

Ou

t o

f S

ervi

ce


ChangeServiceStatus(ServiceStatus=

OUT OF SERVICE)[E87]


No

Yes


Event(LPTSM SCT-3)

S6F11 [E87]


Yes

NoChangeServiceStatus

S3F26 [E87]

Port PlacedOUT OF SERVICE

Successfully?

Issue Error

LPTSM State:OUT OF SERVICE

Issue Ack

Operator Requests PortOUT OF SERVICE

Port CurrentState is OUT OF

SERVICE?

Place port OUTOF SERVICE.

CM HandlerPORTACTION="ChangeServiceStatus",ServiceStatus=0

CM HandlerCAACK=0


CM HandlerCAACK=0,4

CM Handler

Note: A port may not be put out ofservice because the equipment isunable to operate the port due tohardware or communication problems.

Note: ChangeServiceStatus.rsp is sentto either host or operator consoledepending on where theChangeServiceStatus.req originated.

17


3.1.3 Access Mode Change – AUTO 3.

1.3

Acc

ess

Mo

de

Ch

ang

e –

AU

TO


Yes

No

Event(AMSM SCT-2)

S6F11 [E87]

ChangeAccessS3F28 [E87]


ChangeAccess(AccessMode=1)

[E87]


Yes

No ChangeAccess

S3F28 [E87]

Assert(HO_AVBL)

[E84]

AMSM State:AUTO

Carrier TransferUnderway?

Access ModeChange Error

CM Handler


CM HandlerCAACK=0,4

Operator Requests AccessMode Change to AUTO

CM HandlerACCESSMODE=1

AMSM CurrentState is AUTO?

Issue ackCM HandlerCAACK=0

Note: Transfer in progress boundariesare defined in E87, Table 8, CarrierTransfer Boundaries.

Make handoffavailable forAMHS action

LP Handler

AMHS

Yes

No ChangeAccessS3F28 [E87]

LPRSMCurrent State is

RESERVED?

Issue ErrorCM HandlerCAACK=5

Note: ChangeAccess.rsp is sentto either host or operator consoledepending on where theChangeAccess.req originated.

18


3.1.4 Access Mode Change – MANUAL 3.

1.4

Acc

ess

Mo

de

Ch

ang

e –

MA

NU

AL


Yes

No

Event(AMSM SCT-3)

S6F11 [E87]



ChangeAccessService

(AccessMode=0)[E87]


Yes

No


Drop(HO_AVBL)

[E84]

Carrier TransferUnderway?

Access ModeChange Error

AMSM State:MANUAL

CM Handler


CM HandlerCAACK=0,4

Operator Requests AccessMode Change to MANUAL

CM HandlerACCESSMODE=0

AMSMCurrent State is

MANUAL?

Issue AckCM HandlerCAACK=0

Note: Transfer in progress boundariesare defined in E87, Table 8, CarrierTransfer Boundaries.

Make handoffunavailable forAMHS action

LP Handler

AMHS

Yes

No


LPRSMCurrent State is

RESERVED?

Issue ErrorCM HandlerCAACK=5

Note: ChangeAccess.rsp is sentto either host or operator consoledepending on where theChangeAccess.req originated.

19


3.2 Material Movement – Move In

Purpose

This cross-functional operational flowchart describes the equipment’s communication interface behavior from the host’s and AMHS’ point of view and within the following criteria during carrier move in:

• Delivery method (automatic/manual)

• Verification method (host/equipment/none)

• Buffer type (fixed/internal)






• SEMI E90 – Substrate Management

Assumptions

1. <none>


3.2.1 Material Movement – Move In – Assignment

3.2.1.1 Bind 3.2.1.2 Carrier Notification

3.2.1.3 Reserve At Port

3.2.1.4 Cancel Bind

3.2.1.5 Cancel Carrier Notification

3.2.1.6 Cancel Reservation At Port

3.2.2 Material Movement – Move In – Carrier Placement 3.2.2.1 Manual Load – Single Handoff 3.2.2.2 Automated Load – Single Handoff

3.2.2.3 Internal Buffer – CarrierIn Load After CarrierOut

3.2.3 Material Movement – Move In – Verification

3.2.3.1 Carrier ID Verification – Summary 3.2.3.2 Carrier ID Verification – Detailed

3.2.3.3 Equipment Based ID Verification

3.2.3.4 Host-Based ID Verification

3.2.3.5 Carrier ID Read Failed

3.2.3.6 Carrier ID Reader Unavailable

3.2.3.7 Slot Map Verification

20


3.2.4 Material Movement – Move In – Substrates

3.2.4.1 Carrier Delivered Substrates

Legend


Data Message

Explanatory Note


Here/FromSection


Directional'Or'


Incoming

21



3.2.1.1 Bind

3.2.

1.1

Bin

d


InstantiateCarrier Object

Issue error

Carrier ObjectInstantiated

Successfully?

Issue success

Note: A Bind service fails for at leastthe following reasons:� CarrierID or PortID not specified� specified load port (PortID) does

not exist� carrier (CarrierID) previously

instantiated via:� Bind service� CarrierNotification service� carrier ID read

� LPTSM State is not READY TOLOAD

� LPRSM is RESERVED� LPCASM State is ASSOCIATED� load port out of service or transfer

blocked

No

Yes Bind AckS3F18 [E87]

Bind AckS3F18 [E87]

Bind ServiceS3F17 [E87]

COSM State:ID NOT READ

COSM State:SLOT MAP NOT

READ

Async Event(COSM SCT-2)

S6F11 [E87]

COSM State:NOT ACCESSED

Note: Only one event is sent to thehost when entering the Carrier StateModel. This event contains the entrystate for each of the three substates.Thus, this one event covers the threeCOSM transitions: 2, 12, 17.

LPCASM State:ASSOCIATED

Async Event(LPCASM SCT-2)

S6F11 [E87]

Async Event(LPRSM SCT-2)

S6F11 [E87]

LPRSM State:RESERVED

Bind Service[E87]

Operator requests Bindservice

Note: Bind.rsp is sent to eitherhost or operator consoledepending on where the Bind.reqoriginated.

CM HandlerCARRIERACTION="Bind"


CM HandlerCAACK=0,4

CM Handler

CM Handler

CM Handler

If installed, display theReservation Visible Signal

to indicate Reserved

Note: The Reservation Visible Signalis an E87 optional capability. If it isinstalled, then the visible signal shallremain present as long as the load portstate is RESERVED. The actual typeof signal is equipment specific.

Note: State model transitions areasynchronus and the order in whichthe equipment reports the events maybe alternated.

22



3.2.1.2 Carrier Notification

3.2.

1.2

Car

rier

No

tifi

cati

on


No

Yes

CarrierNotificationAck

S3F18 [E87]

CarrierNotificationS3F17 [E87]


S6F11 [E87]

InstantiateCarrier Object

Issue error

Carrier ObjectInstantiated

Successfully?Note: A CarrierNotification servicefails for at least the following reasons:� CarrierID not specified� carrier (CarrierID) previously

instantiated via:� Bind service� CarrierNotification service� carrier ID read

COSM State:ID NOT READ


READ


Note: Only one event is sent to thehost when entering the Carrier StateModel. This event contains the entrystate for each of the three substates.Thus, this one event covers the threeCOSM transitions: 2, 12, 17.

CarrierNotification[E87]

Operator requests CarrierNotification service

Note: CarrierNotification.rsp is sent toeither host or operator consoledepending on where theCarrierNotification.req originated.

CM HandlerCARRIERACTION="CarrierNotification"


CM Handler

CarrierNotificationAck

S3F18 [E87]Issue success

CM HandlerCAACK=0,4

23



3.2.1.3 Reserve At Port

3.2.

1.3

Res

erve

At

Po

rt


Operator requestsReserve At Port

service

ReserveAtPort[E87]

ReserveAtPortS3F25 [E87]

Port ReservedSuccessfully?

Issue error

LPRSM State:RESERVED

If installed,display the

ReservationVisible Signal to

indicateReserved

ReserveAtPortAck

S3F26 [E87]

ReserveAtPortAck

S3F26 [E87]

Event(LPRSM SCT-2)

S6F11 [E87]Note: The Reservation Visible Signalis an E87 optional capability. If it isinstalled, then the visible signal shallremain present as long as the load portstate is RESERVED. The actual typeof signal is equipment specific.

No

Yes

Note: A ReserveAtPort service failsfor at least the following reasons:� specified load port (PortID) does

not exist� PortID not specified� LPTSM State is not READY TO

LOAD� LPRSM is RESERVED� LPCASM State is ASSOCIATED� Load Port is OUT OF SERVICE

Note: ReserveAtPort.rsp is sent toeither host or operator consoledepending on where theReserveAtPort.req originated.

Reserve At Portissued

CM HandlerCARRIERACTION="ReserveAtPort"


CM Handler

CM HandlerCAACK=0,4

Note: Not withstanding related E87LPRSM requirements for fixed andinternal equipment, ISMT membercompanies require the Load PortReservation State Model andassociated services for all equipment.

24



3.2.1.4 Cancel Bind

3.2.

1.4

Can

cel B

ind


CancelBind[E87]

CancelBindS3F17[E87]

Operator requestsBind servicecancellation

Bind CancelledSuccessfully?

No

Yes CancelBindAck

S3F18 [E87]

CancelBindAck

S3F18 [E87]Issue success

Issue error

Note: A CancelBind service fails for atleast the following reasons:� specified load port (PortID) does

not exist� specified carrier (CarrierID) does

not exist� both load port or carrier ID are not

specified� LPTSM is not READY TO LOAD� COSM is not ID NOT READ and

not SLOT MAP NOT READ� LPCASM is NOT ASSOCIATED� After the carrier has been

delivered to the correct load port,and service is received

Async Event(COSM SCT-

21)S6F11 [E87]

Async Event(LPCASM SCT-

3)S6F11 [E87]

Async Event(LPRSM SCT-

3)S6F11 [E87]

Delete carrierobject

LPCASM State:NOT

ASSOCIATED

LPRSM State:NOT RESERVED

Note: The Reservation Visible Signalis an E87 optional capability. If it isinstalled, then the visible signal shallremain present as long as the load portstate is RESERVED. The actual typeof signal is equipment specific.

If installed,display theReservation

Visible Signal toindicate Not

Reserved

Note: CancelBind.rsp is sent to eitherhost or operator console depending onwhere the CancelBind.req originated.

Cancel Bindissued

CM HandlerCARRIERACTION="CancelBind"


CM Handler

CM Handler

CM Handler

CM HandlerCAACK=0,4

25



3.2.1.5 Cancel Carrier Notification

3.2.

1.5

Can

cel C

arri

er N

oti

fica

tio

n


CancelCarrierNotification

[E87]CancelCarrierNotification

S3F17 [E87]

No

YesCancelCarrier-

NotificationAck

S3F18 [E87]


S6F11 [E87]

Issue error

Issue success

Delete carrierobject

Operator requestsCarrier Notificationservice cancellation

CarrierNotification Cancelled

Successfully?Note: A CancelCarrierNotificationservice fails for at least the followingreasons:� specified carrier (CarrierID) does

not exist� CarrierID not specified� COSM is not ID NOT READ and

not [ID] WAITING FOR HOST� After the carrier has been

delivered to the correct load port,and service is received

Note:CancelCarrierNotification.rsp issent to either host or operatorconsole depending on where theCancelCarrierNotification.reqoriginated.

Cancel CarrierNotification

issued

CM HandlerCARRIERACTION="CancelCarrierNotification"


CancelCarrier-Notification

AckS3F18 [E87]

CM Handler

CM HandlerCAACK=0,4

26



3.2.1.6 Cancel Reservation At Port

3.2.

1.6

Can

cel R

eser

vati

on

At

Po

rt


CancelReservationAtPort[E87]

CancelReservationAtPortS3F25 [E87]

No

YesCancelReservation-

AtPort AckS3F26 [E87]


S6F11 [E87]

ReserveAtPortCancelled

Successfully?

Issue error

Issue success

Note: A CancelReservationAtPortservice fails for at least the followingreasons:� specified load port (PortID) does

not exist� PortID not specified� LPTSM is not READY TO LOAD� LPRSM is NOT RESERVED� If a carrier has already been

delivered to the load port

If installed,display the

ReservationVisible Signal to

indicate NotReserved

LPRSM State:NOT RESERVEDNote: The Reservation Visible Signal

is an E87 optional capability. If it isinstalled, then the visible signal shallremain present as long as the load portstate is RESERVED. The actual typeof signal is equipment specific.

Operator requestsReserveAtPort

service cancellation

Note: CancelReservationAtPort.rsp issent to either host or operator consoledepending on where theCancelReservationAtPort.reqoriginated.

CancelReservation At

Port issued

CM HandlerCARRIERACTION="CancelReservationAtPort"

CancelReservation-AtPort Ack

S3F26 [E87]


CM Handler

CM HandlerCAACK=0,4

27


3.2.2 Material Movement – Move In – Carrier Placement

3.2.2.1 Manual Load – Single Handoff

3.2.

2.1

Man

ual

Lo

ad –

Sin

gle

Han

do

ff


Alarm(Carrier

PresenseError)

S5F1 [E87]Yes

No

Alarm(AccessMode

Violation)S5F1 [E87]

Yes

No

No

Yes

LPTSM =READY TO

LOAD?

Invalid stateerror

Note: The timing of the begin and endboundaries may be minimal or non-existent, especially in the case wherethe operator simply places the carrieron the load port with no other inputfrom the operator, equipment or host.

Begin/signalplacing carrier on

load port

Note: This begin manual loadboundary is user defined. Examplesper E87 Table 8 are:

• Presence Sensor triggered• Bind service being received• load port door opening or closing• an input form host or operator

console

CM Handler

Note: If a carrier is placed on a loadport while in Auto, an access modeviolation is issued.

On equipmentor bay console, is load port accessmode = MANUAL?

Note: The operator portion of thisflowchart lists only onerepresentative possible set ofinstructions for the operator. EachIC maker factory will detemine itsown set of operator instructions. Inany case, the operator eventuallyplaces the carrier on the load portsuccessfully.

AMSM =AUTO?

Access modeerror

CM Handler

Load port Carrier Presencesensor triggered

Do not place carrier ontoload port. (place load port

in manual mode.

Begin

ExceptionHandling

Note: Exception handling for theseexceptions is not handled within thisdocument. Refer to either end-user orequipment supplier document.

ExceptionHandling

3.2.2.1A(to 3.2.2.1B)

28



3.2.2.1 Manual Load – Single Handoff (continued) 3.

2.2.

1 M

anu

al L

oad

– S

ing

le H

and

off

(co

nti

nu

ed) HostEquipmentOperator

Carrier has beendetected in correct

position

End/signalplacing carrier on

load port

LPRSM State:NOT RESERVED

Note: This should have only been inReserve state from a previous Bind,ReserveAtPort or CarrierOut.

LPRSM =RESERVED?

Yes

No

CM Handler

CM Handler

Note: According to E87 11.6.1, theend signal requires a software orhardware mechanism for theoperator.

No

Yes

CM Handler

Is the load portCarrier Placementsensor triggered?

CarrierPlacement error

ExceptionHandling

Note: Exception handling for thisexception is not handled within thisdocument. Refer to either end-user orequipment supplier document.

Async Event(LPTSM SCT-6)

S6F11 [E87]

CM HandlerLPTSM State:TRANSFER BLOCKED

Alarm (CarrierPlacement Error)

S5F1 [E87]

Async Event(Material Received)

S6F11 [E30]


S6F11 [E87]

3.2.2.1B(from 3.2.2.1A)

3.2.2.1C(to 3.2.3.2A)

29



3.2.2.2 Automated Load – Single Handoff

3.2.

2.2

Au

tom

ated

Lo

ad –

Sin

gle

Han

do

ff

HostEquipment (Passive)AMHS (Active)

As commandedby host

Arrival at loadport handofflocation with

carrier

BothHO_AVBL and

ES are ON?

Specify load port

Communications is valid.Set TA1 Timer.

LP HandlerAssert

(CS_[0,1])[E84]

Assert(VALID)

[E84]

Yes

NoNote: HO_AVBL=ON also implies thatthe load port AMSM state must beAUTO. In theory, an access modeviolation should not happen on theequipment if the equipment hasHO_AVBL=ON and if the AMHSrespects the signal when it is OFF.

Notify Host

AMSM =MANUAL?

Access modeerror

Yes

No

No

Yes

Alarm (PIOFailure

S5F1 [E87]

LPTSM =READY TO

LOAD?

Not ready error

Note: Any TPx (x=1-6) InterlockTimers that timeout (expire) force aE87 PIO Failure alarm to be sent to thehost. TP6 does not apply to singlehandoff.

CM Handler

CM Handler

CM Handler

Note: Exception handling for theseexceptions is not handled within thisdocument. Refer to either end-user orequipment supplier document.

ExceptionHandling

ExceptionHandling

Async Alarm (AccessMode Violation)

S5F1 [E87]

Async Alarm (PIOFailure) S5F1 [E87]

3.2.2.A(to 3.2.2.2B)

30



3.2.2.2 Automated Load – Single Handoff (continued) 3.

2.2.

2 A

uto

mat

ed L

oad

– S

ing

le H

and

off

(co

nti

nu

ed) HostEquipment (Passive)AMHS (Active)

Is the load portCarrier Placementsensor triggered?

No

Yes

Assert(BUSY)[E84]

Start transfer.Clear TA2 Timer.Set TA4 Timer.

Load port Carrier Presencesensor triggered

Clear TP2 Timer.Set TP3 Timer.

Assert(L_REQ)

[E84]


S6F11 [E87]

Assert(TR_REQ)

[E84]

Assert(READY)

[E84]

Load port is assigned for Load.Set TP1 Timer.

Request transfer.Clear TA1 Timer.Set TA2 Timer.

Load port ready fortransfer.

Clear TP1 Timer.Set TP2 TImer.

LPTSM State:TRANSFER BLOCKED CM Handler

TP3 TimedOut?

No

Yes

TA4 TImedOut?

Place carrier on load port

No

ExceptionHandling

ExceptionHandling

Yes


3.2.2.2B(from 3.2.2.2A)

3.2.2.2C(to 3.2.2.2E)

3.2.2.2D(to 3.2.2.2F)

31



3.2.2.2 Automated Load – Single Handoff (continued) 3.

2.2.

2 A

uto

mat

ed L

oad

– S

ing

le H

and

off

(co

nti

nu

ed) HostEquipment (Passive)AMHS (Active)

Drop(L_REQ)

[E84]

Assert(COMPT)

[E84]

Drop(BUSY)[E84]

Drop(TR_REQ)

[E84]

Drop(READY)

[E84]

Drop (COMPT,CS_[0,1],VALID)[E84]

Async Event(Material Received)

S6F11 [E30]

Carrier has beendetected in

correct position.Clear TP3 Timer.Set TP4 Timer.

Handoff nolonger inprogress.

Clear TA4 Timer

Handoff nolonger requested

Handoffcomplete.

Set TA3 Timer.

Handoffcomplete.

Set TP5 Timer.

Clear TP4 Timer.

Handshake isclosed

Clear TA3 Timer


[E87]

Yes

NoLPRSM State:

NOT RESERVED

Note: This should have only been inReserve state from a previous Bind orReserveAtPort.

This port is considered no longerreserved once the carrier issuccessfully placed.

LPRSM =RESERVED?

CM Handler

CM Handler

LP Handler

Clear TP5 Timer.

3.2.2.2E(from 3.2.2.2C)

3.2.2.2F(from 3.2.2.2D)

3.2.2.2G(to 3.2.3.2B)

32



3.2.2.3 Internal Buffer – CarrierIn Load After CarrierOut

3.2.

2.3

Inte

rnal

Bu

ffer

– C

arri

erIn

Lo

ad A

fter

Car

rier

Ou

t HostEquipmentOperator

CarrierInS3F17[E87]

Request carrier move fromLP to internal buffer

CarrierIn[E87]

LPTSM =Is READY TO

UNLOAD?

No

CarrierInAck

S3F18 [E87]Issue error

Begin transfer tointernal buffer

Yes

Loadport no longersensing a carrier?

CarrierIn timeoutexpired?

No

Yes

No

Yes

CarrierInAck

S3F18 [E87]

Note: CarrierIn.rsp is sent to eitherhost or operator console depending onwhere the CarrierIn.req originated.

CarrierIn issued

CM HandlerCARRIERACTION="CarrierIn"


CM HandlerCAACK=0,4

ExceptionHandling



S6F11 [E87]


CM Handler

3.2.2.3A(to 3.2.2.3B)

33



3.2.2.3 Internal Buffer – CarrierIn Load After CarrierOut (continued) 3.

2.2.

3 In

tern

al B

uff

er –

Car

rier

In L

oad

Aft

er C

arri

erO

ut

(co

nti

nu

ed) HostEquipmentOperator

Transfer tointernal buffer

complete

LPTSM State:READY TO LOAD

LPCASM State:NOT

ASSOCIATED

Async Event(BufferCapacity

Change)S6F11 [E87]


S6F11 [E87]


S6F11 [E87]

Async Event(CarrierLocationn

Change)S6F11 [E87]

CM Handler

CM Handler

CM Handler

CM Handler

Arrived

Wait forcarrier to arrive at

destination

NotArrived

AnotherCarrierOut

requestqueued?

No

Yes

Keep loadportTRANSFER

BLOCKED andinitiate carrier out

procedureSee Section 3.3

3.2.2.3B(from 3.2.23A)

34



3.2.3.1 Carrier ID Verification – Summary

3.2.

3.1

Car

rier

ID V

erif

icat

ion

– S

um

mar

y Equipment Verification3.2.3.3

Host Verification3.2.3.4

ID Read Failed3.2.3.5

Reader Unavailable3.2.3.6

Yes

No

Yes

(Bind)

ID VERIFICATIONOK

Cancelassociation

(cancel reserve)

Load portassociated

with anothercarrier B?

Carrier A stateis ID NOT

READ?

Duplicate carrierID alarm

Carrier Aassociated

with this loadport?

Carrier Aassociated

with anotherload port?

ID VERIFICATIONOK

Associate withthis load port

Cancelassociation

Delete carrier Bobject

OK(carrier

A)Yes Carrier ID

Read?Carrier A

instantiated?

Successful Placement

ID readeravailable?

(CarrierNotification)

CancelCarrier

Host request?

ID VERIFICATIONFAILED

ID VERIFICATIONOK

Instantiatecarrier

CancelCarrier

ProceedWith

Carrier

No

Host request?

Is load portassociated

with acarrier?

ID VERIFICATIONOK


Instantiate carrier

Instantiate carrier

ID VERIFICATIONFAILED


Failed

Is load portassociated

with acarrier?

Bypass-ReadID?

ID VERIFICATIONOK

(Bind)

False

Yes

No

Purpose: This flowchart isa summary overview ofthe various methods forcarrier ID verification.Service messages anddescriptive notes may befound in flowchart 3.2.3.2Carrier ID Verification -Detailed.

Note: There are threepaths that are considerednormal: a) 3.2.3.3Equipment Verification, b)3.2.3.4 Host Verification,and c) 3.2.3.6 No IDVerification (with BInd).All other paths areconsidered abnormal (i.e.require exception handlingas shown.)

ID read failedevent

Route Legend:

Normal

Abnormal

Wait forcarrier

removal

CancelCarrierAtPort

(ID) WAITINGFOR HOST

Associate CarrierA with this load

port

Carrier Bassociated

with this loadport?

Cancel assoc. ofCarrier B

(cancelbind)

Yes

(ID) WAITINGFOR HOST

3.2.3.2 Carrier ID Verification - Detailed

True

Yes

NotAvailable No

ProceedWith

CarrierNo

No

No

Yes

Yes

No

Yes

35



3.2.3.2 Carrier ID Verification – Detailed

3.2.

3.2

Car

rier

ID V

erif

icat

ion

– D

etai

led


Can ID beread at placement

location?

No

Note: Refer to flowchart 3.2.3.1 CarrierID Verification - Summary todetermine where this flowchart fits inthe ID verification process.

Note: A read-only IDreader.

Note: Either a read orread/write ID reader. Advance/dock carrier

to FIMS port

Dockingsuccessful?

Carrier docked

No

Yes

Event(CarrierLocation

Change)S6F11 [E87]

CM Handler

CanClamp occurat placement

position?

Carrier clamped

Clampsuccessful?

Yes

Yes

NoNo

Yes

ExceptionHandling


Event(Carrier

Clamped)S6F11 [E87]

CM Handler

Clamp carrier

ExceptionHandling

3.2.3.2A(from 3.2.2.1C)

3.2.3.2B(from 3.2.2.2G)

3.2.3.2D(to 3.2.3.2F)

3.2.3.2C(to 3.2.3.2E)

36



3.2.3.2 Carrier ID Verification – Detailed (continued) 3.

2.3.

2 C

arri

er ID

Ver

ific

atio

n –

Det

aile

d (

con

tin

ued

) HostEquipmentComments

Carrier ID readSuccessful?

Perform CarrierID read

Yes

Carrier objectpreviously

instantiated?

No

Flowchart: 3.2.3.6 No Carrier IDVerification. An assumption is madethat the correct carrier has beendelivered to the correct load port.

Flowchart: 3.2.3.5 Carrier ID ReadFailed. Either during equipment orhost based verification.

Flowchart: 3.2.3.3 EquipmentBased Carrier ID Verification. Thehost provided the expected carrier ID(via Bind or CarrierNotification) and thecarrier ID read was valid. Theequipment may now compare the twovalues.

Flowchart: 3.2.3.4 Host BasedCarrier ID Verification. Carrier IDread was valid, but the host did notpreviously provide the expected carrierID.

Definition: Host Based Carrier IDVerification. E87 14.1.2: "If the hostdoes not provide the expected value,using the Bind service, before theactual value is read, then theproduction equipment shall provide tothe host, the information necessary forhost based verification." In otherwords, no previous notification of thecarrier has been made by the host.The host is responsible for verifyingthat the correct carrier has beendelivered to the correct load port.

NoID readeravailable?

Yes

Definition: Equipment Based CarrierID Verification. E87 14.1.1: "If thehost provides the expected valuebefore the actual value is obtained bythe production equipment, then theproduction equipment shall perform theverification." In other words, previousnotification of the carrier has beenmade by the host. The equipment isresponsible for verifying that thecorrect carrier has been delivered tothe correct load port.

Definition: No Carrier ID Verification.The carrier ID reader is not present,not used or not in proper operation.

Yes

No

Yes

Clampsuccessful?

ExceptionHandling

Carrier clampedEvent

(CarrierClamped)S6F11 [E87]

CM Handler


Clampingavailable at this

location?

No

Clamp carrier

3.2.3.2E(from 3.2.3.2C)

3.2.3.2F(from 3.2.3.2D)

3.2.3.2G(to 3.2.3.6A)

3.2.3.2H(to 3.2.3.5B)

No

3.2.3.2I(to 3.2.3.3A)

Yes

3.2.3.2J(to 3.2.3.4C)

37



3.2.3.3 Equipment Based ID Verification

3.2.

3.3

Eq

uip

men

t B

ased

ID V

erif

icat

ion


Yes

Event(COSM SCT-6)

S6F11 [E87]

No

Yes

No

Alarm(DuplicateCarrierID)

S5F1 [E87]

YesNo

Event(LPCASM SCT-3)

S6F11 [E87]

COSM State isID NOT READ?

Duplicate carriererror

Is thepreviously

instantiated objectassociated with

anotherload port?

Note: Refer to flowcharts 3.2.3.1Carrier ID Verification - Summary and3.2.3.2 Detailed to determine wherethis flowchart fits in the ID verificationprocess.

Is the previouslyinstantiated object

associated with this loadport?

COSM State:ID VERIFICATION

OK

CM Handler

CM Handler

Note: A Bind service had beenpreviously received.

Note: This is the case where thecarrier was previously instantiated butis not in the state that a Bind orCarrierNotification would have left it in.So it must have been previously readto not be in this state.

Note: This is the case where thecarrier is instantiated and in the correctstate, but on the incorrect load port.The equipment self-corrects thesituation by un-associating the carrierfrom the incorrect load port.

LPCASM State:NOT

ASSOCIATED

CM Handler

3.2.3.3A(from 3.2.3.2E)

3.2.3.3B(to 3.2.3.7D)

3.2.3.3C(to 3.2.3.3E)

38



3.2.3.3 Equipment Based ID Verification (continued) 3.

2.3.

3 E

qu

ipm

ent

Bas

ed ID

Ver

ific

atio

n (

con

tin

ued



S6F11 [E87]


S6F11 [E87]



OK

No

Yes

Is loadport associated

with anothercarrier?

Note: A CarrierNotification servicehad been previously received.

Note: So far, the carrier is instantiated,in the correct state, and not assciatedwith another load port. But, is this loadport associated with another carrier?

Note: Definitely a problem here.However, the equipment should beable to clean it up and inform the host.

CM Handler

CM Handler

Note: The equipment has self-corrected the situation, now it needs towait for further instructions from thehost.

3.2.3.3E(from 3.2.3.3D)

3.2.3.3F(to 3.2.3.4D)

3.2.3.3G(to 3.2.3.7A)

39



3.2.3.4 Host-Based ID Verification

3.2.

3.4

Ho

st-B

ased

ID V

erif

icat

ion


Event(COSM SCT-3

or SCT-10)S6F11 [E87]

COSM State:(ID) WAITING

FOR HOST

ProceedWithCarrieror CancelCarrier

S3F17 [E87]



S6F11 [E87]

Instantiate carrierobject

Note: Refer to flowcharts Carrier IDVerification - Summary and Detailed todetermine where this flowchart fits inthe ID verification process.

Is load portassociated withanother carrier?


S6F11 [E87]

LPCASM State:NOT

ASSOCIATED

Self-initiatedCancelBind forthe other carrier


S6F11 [E87]

Note: The equipment has self-corrected the situation, now it mayassociate the new carrier.

Yes

No

Note: This is the case where a carrieris place on a load port but has notbeen previously instantiated, howeverthe load port has been previouslyassociated with another carrier.


READ


Note: Only one event is sent to thehost when entering the Carrier StateModel. This event contains the entrystate for each of the three substates.Thus, this one event covers the threeCOSM transitions: 3(10), 12, 17.

CM Handler

CM Handler

CM Handler

CM Handler

CM HandlerCARRIERACTION='ProceedWithCarrier' or'CancelCarrier'

3.2.3.4A(from 3.2.3.6C)

3.2.3.4B(from 3.2.3.5C)

3.2.3.4C(from 3.2.3.2J)

3.2.3.4D(from 3.2.3.3F)

3.2.3.4E(to 3.2.3.4F)

40



3.2.3.4 Host-Based ID Verification (continued) 3.

2.3.

4 H

ost

-Bas

ed ID

Ver

ific

atio

n (

con

tin

ued


ProceedWithCarrier

Cancel-Carrier


OK


FAILED

Host servicerequest?

(COSM SCT-8)S6F11 [E87]


S6F11 [E87]

Async Alarm(Carrier

VerificationFailed)

S5F1 [E87]

Note: The host is canceling the host-based verification.

ProceedWithCarrierAck

S3F18 [E87]

CancelCarrierAck

S3F18 [E87]

CM Handler

CM Handler

CM HandlerAsync Event

CM HandlerCAACK=0,4

CM HandlerCAACK=0,4

3.2.3.4F(from 3.2.3.4E)

3.2.3.4F(to 3.2.3.7B)

41



3.2.3.5 Carrier ID Read Failed

3.2.

3.5

Car

rier

ID R

ead

Fai

led


Carrier ID readfailed

Is LPCASMState=

ASSOCIATED?

Cancel-Carrier


OK

Event(CarrierID Read

Fail)S6F11 [E87]

Host servicerequest

received?


S6F11 [E87]

No

Instantiate carrier


S6F11 [E87]


Note: On a reader unavailable or IDread failed, the carrier has not beeninstantiated, so there is no knownobject or state at this point. Theequipment still must wait forinstructions from the host based onhaving sent the read failed alarm.

Note: The host is entering anexception handling situation here. ACancelCarrier is valid at this point if thehost wants the equipment to knowabout the carrier and report itsubsequent exception handling data orevents.

Note: A Bind had been previouslyreceived for this load port. Since theID read failed, the equipmenttransitions to the Waiting For Hoststate waiting for instructions.

ProceedWithCarrier,CancelCarrierAtPort

or CancelCarrierS3F17 [E87]

COSM State:(ID) WAITING

FOR HOST


Note: At this point the host will justwant to move the carrier off of theequipment and does not know or is notconcerned with the carrier ID untilexception handling takes place awayfrom the equipment.

CancelCarrierAtPort

ProceedWithCarrierAck

S3F18 [E87]

CM Handler

CM Handler

CM HandlerCARRIERACTION='ProceedWithCarrier' or'CancelCarrierAtPort' or'CancelCarrier'

CM Handler

CancelCarrier-AtPort Ack

S3F18 [E87]

Proceed-WithCarrier

Event(COSM SCT-3)S6F11 [E87]

CM Handler

CM HandlerCAACK=0,4

CM HandlerCAACK=0,4

3.2.3.5A(from 3.2.3.6B)

3.2.3.5B(from 3.2.3.2H)

3.2.3.5C(to 3.2.3.4B)

Yes

3.2.3.5D(to 3.2.3.5F)

3.2.3.5GMove OutCarrierOut(to 3.3.1A)

3.2.3.5E(to 3.2.3.7C)

42



3.2.3.5 Carrier ID Read Failed (continued) 3.

2.3.

5 C

arri

er ID

Rea

d F

aile

d (

con

tin

ued



FAILED


S6F11 [E87]

Instantiate carrier


S6F11 [E87]


Async Alarm(Carrier

VerificationFailed)

S5F1 [E87]

CancelCarrierAck

S3F18 [E87]

CM Handler

CM Handler

CM Handler

CM HandlerCAACK=0,4

3.2.3.5F(from 3.2.3.5D)

43



3.2.3.6 Carrier ID Reader Unavailable

3.2.

3.6

Car

rier

ID R

ead

er U

nav

aila

ble


IsLPCASMState=

ASSOCIATED?

BypassReadIDvalue?

CM HandlerCOSM State:

ID VERIFICATIONOK

Event(COSM SCT-11)

S6F11 [E87]

No

FALSE

Yes

TRUE

Note: A Bind service had beenpreviously received. There is noverification done since no ID was read.

Note: The host has indicated that itwants the equipment to ask forinstructions each time if a reader isunavailable.

Note: The host has indicated that itwants the equipment to assume thatthe ID in the Bind is the ID to use.


Note: Since no association is in place,the situation is the same as if a carierID read failed. The equipment mustwait for instruction without any knowncarrier object.

3.2.3.6A(from 3.2.3.2G)

3.2.3.6B(to 3.2.3.5A)

3.2.3.6C(to 3.2.3.4A)

3.2.3.6D(to 3.2.3.7E)

44



3.2.3.7 Slot Map Verification

3.2.

3.7

Slo

t M

ap V

erif

icat

ion



READ

Note: The carrier only needs to beadvanced if the ID reader is read-only.If the reader is read/write, the carrierwas already advanced to read the ID.

Is carrierdocked at

FIMS port?

No

Advance/dockcarrier to FIMS

port

Dockingsuccessful?

Carrier docked

Yes

No

Event(CarrierLocation

Change)S6F11 [E87]

Open carrier door

Yes

Yes

Clamp carrier

Clampsuccessful?

Note: If the load port allow forclamping in the docked position, thenclamping of the carrier may beperformed here. This assumeshowever that clamping has not beenperformed. A CarrierClamped event issent.

ExceptionHandling

No

ExceptionHandling


CM Handler

Event(Carrier

Clamped)S6F11 [E87]

Carrier clamped CM Handler

3.2.3.7B(from 3.2.3.4F)

3.2.3.7C(from 3.2.3.5E)

3.2.3.7A(from 3.2.3.3G)

3.2.3.7D(from 3.2.3.3B)

3.2.3.7E(from 3.2.3.6D)

3.2.3.7F(to 3.2.3.7G)

45



3.2.3.7 Slot Map Verification (continued) 3.

2.3.

7 S

lot

Map

Ver

ific

atio

n (

con

tin

ued


Door openedsuccessfully?

Issue error

ExceptionHandling

Door opened

Alarm(CarrierOpen

Failure)S5F1 [E87]

Event(CarrierOpened)

S6F11 [E87]

Slot map readsuccessfully?

Read slot map

Slot map read failerror

Slot map provided with Bind,CarrierNotification or

Proceed WithCarrier?

No

Yes

No

Yes

Yes

No

Alarm(SlotMapReadFailed)

S6F11 [E87]CM Handler

CM Handler

CM Handler

Note: Slot map Host basedverification.

Note: Slot map Equipment basedverification.

Note: Assume that a reasonablenumber of retries has occurred.

3.2.3.7G(from 3.2.3.7F)

3.2.3.7H(to 3.2.3.7K)

3.2.3.7J(to 3.2.3.7M)

3.2.3.7I(to 3.2.3.7L)

46




2.3.

7 S

lot

Map

Ver

ific

atio

n (

con

tin

ued


Are the two slotmaps equal?

Issue error

COSM State:SLOT MAP

VERIFICATIONOK

COSM State:(SLOT) WAITING

FOR HOST

No

Yes

ProceedWith

CarrierCancelCarrier

Host servicerequest?

Event(COSM SCT-13)

S6F11 [E87]

Event(COSM SCT-14)

S6F11 [E87]

ProceedWithCarrieror CancelCarrier

S3F18 [E87]

Alarm

(SlotMap-VerificationFailed)

S5F1 [E87]

CM Handler

CM Handler

CM HandlerCARRIERACTION='ProceedWithCarrier'or 'CancelCarrier'

Note: Slot map Host-basedverification.

Note: Slot map Equipment-basedverification.

Note: For slot map read fail, hostshould only issue a CancelCarriersince the equipment cannot provide amap which is necessary for either hostor equipment based slot mapverification.

CM HandlerContains Slot Map

3.2.3.7K(from 3.2.3.7H)

3.2.3.7L(from 3.2.3.7I)

3.2.3.7M(from 3.2.3.7J)

3.2.3.7N(to 3.2.4.1B)

3.2.3.7O(to 3.2.3.7Q)

3.2.3.7P(to 3.2.3.7R)

47




2.3.

7 S

lot

Map

Ver

ific

atio

n (

con

tin

ued



S6F11 [E87]

Event(COSM SCT-15)

S6F11 [E87]

COSM State:SLOT MAP

VERIFICATIONOK

CancelCarrierAck

S3F18 [E87]

ProceedWithCarrierAck S3F18 [E87]

CM Handler

CM Handler

COSM State:SLOT MAP

VERIFICATIONFAILED

CM HandlerCAACK=0,4

CM HandlerCAACK=0,4

3.2.3.7R(from 3.2.3.7P)

3.2.3.7Q(from 3.2.3.7O)

3.3Move Out(CancelCarrier)

3.2.3.7S(to 3.2.4.1A

48


3.2.4 Material Movement – Move In – Substrates

3.2.4.1 Carrier Delivered Substrates

3.2.

4.1

Car

rier

Del

iver

ed S

ub

stra

tes HostEquipmentComments

Instantiate Carrier SubtrateLocation (slot) object

Is carriersubstrate location(slot) occupied?

SLSM State:UNOCCUPIED

Instantiatesubstrate object

Determine andassign substrate

ID

SLSM State:OCCUPIED

SOSM State:NEEDS

PROCESSING

Moresubstrates in

carrier?

Terminate

No

Yes

No

Yes

(SOSM SCT-1)S6F11 [E90]

Note: The following are methods bywhich substrates are identified:

• via the E87 ContentMap attribute• ID read by a substrate ID reader• via the E90 Register service

Note: As implied by the off pagereference coming from Slot MapVerification OK, the Carrier SubstrateLocation object and the Substrateobject are instantiated after the SlotMap Verification OK event. They areinstantiated between this event andwhen first removed from the carrier.

Note: These two transitions arecombined into one transition collectionevent which contians variables for bothconcurrent substates.

Note: There currently is no transition,and thus no event, for:(no state) -> UNOCCUPIED.

Note: There currently is no transition,and thus no event, for:(no state) -> OCCUPIED.

Async Event(SOSM SCT-10)

S6F11 [E90]ST Handler

ST HandlerAsync EventSOSM State:

AT SOURCE

3.2.4.1A(from 3.2.3.7S)

3.2.4.1B(from 3.2.3.7N)

49


3.3 Material Movement – Move Out

Purpose

This cross-functional operational flowchart describes the equipment’s communication interface behavior from the host’s and AMHS’ point of view and within the following criteria during carrier move out:

• Delivery method (AUTOMATIC/MANUAL)

• Buffer type (FIXED/INTERNAL)


This operational flowchart conforms to the following industry standards and specifications:




Assumptions

1. <none>


3.3.1 Carrier Complete and Undock 3.3.2 Manual Unload – Single Handoff

3.3.3 Automated Unload – Single Handoff

3.3.4 Internal Buffer – CarrierOut Unload

3.3.5 Cancel Carrier

3.3.6 Cancel Carrier At Port

3.3.7 Cancel Carrier Out

3.3.8 Cancel All Carrier Out

Legend


Data Message

Explanatory Note


Here/FromSection


Directional'Or'


Incoming

50


3.3.1 Carrier Complete and Undock 3.

3.1

Car

rier

Co

mp

lete

an

d U

nd

ock


Note: Last wafer in cassette to beprocessed (across all PJs and CJs)and carrier door closed constitutesCOSM CARRIER COMPLETE.

COSM State:CARRIER

COMPLETE

Close carrierdoor

Door closedsuccessfully?

Yes

Event(COSM SCT-19)

S6F11 [E87]

Event(Door

Closed)S6F11 [E87]

Event(COSM SCT-20)

S6F11 [E87]

COSM State:CARRIERSTOPPED

Was CarrierCanceled?

Yes

No

Door closedCM Handler

CM Handler

CM Handler

Is dooropen?

Yes

No

Note: A carrier is canceled due to, atleast, the following:• CancelCarrier service• CancelCarrierAtPort service

These can be issued by either the hostor the operator (equipment console)

ExceptionHandling

No


3.3.1A(from 3.3.5A)

3.3.1B(from 4.2.8B)

3.3.1C(to 3.3.1D)

51


3.3.1 Carrier Complete and Undock (continued) 3.

3.1

Car

rier

Co

mp

lete

an

d U

nd

ock

(co

ntin

ued

)


Undock carrier

Carrier undockedsuccessfully?

Yes


S6F11 [E87]

Async Event(CarrierLocation

Change)S6F11 [E87]

Yes

No

Is this anInternal Buffer

tool?

Note: This invokes the E87 CarrierOutservice for this carrier.

Note: Once CarrierOut completes, itreturns here for undocking.

CM Handler

CM Handler

Unclamp carrier

Carrierunclamped

successfully?

Yes

No

ExceptionHandling

No

ExceptionHandling


LPTSM State:READY TOUNLOAD

3.3.1D(from 3.3.1C)

3.3.1E(to 3.3.4B)

3.3.1F(from 3.3.4E)

3.3.1F(to 3.3.1H)

52


3.3.1 Carrier Complete and Undock (continued) 3.

3.1

Car

rier

Co

mp

lete

an

d U

nd

ock

(co

ntin

ued

)


ManualUnload

AutomatedUnload

Manual orAuto Unload?

3.3.1G(from 3.3.6A)

3.3.1H(from 3.3.1F)

3.3.1I(to 3.3.2A)

3.3.1J(to 3.3.3A)

53


3.3.2 Manual Unload – Single Handoff 3.

3.2

Man

ual

Un

load

– S

ing

le H

and

off HostEquipmentOperator

No

On equipment or bay console, is load

port access mode =MANUAL?

Do not removecarrier from load

port. Correctsituation if desired.

Note: The operator portion of thisflowchart lists only onerepresentative possible set ofinstructions for the operator. EachIC maker factory will detemine itsown set of operator instructions. Inany case, the operator eventuallyremoves the carrier from the loadport successfully.

LPTSM = READYTO UNLOAD?

Exceptionhandling

Begin/signalremove carrierfrom load port

Note: The timing of the begin and endboundaries may be minimal or non-existent, especially in the case wherethe operator simply picks up the carrierwith no other input from the operator,equipment or host.

Wait for begin/signal boundary

for carrierremoval

Note: This begin manual unload boundary is user defined. Examples per E87 Table 8 are:• Presence and placement sensor no longer detecting a carrier• load port door opening• an input to the equipment through a switch at the load port• an input to the equipment through the equipment console• an input to the equipment through a service message from the host

No

Yes

Note: Operator removed the carrier priorto the equipment being ready as definedin the boundary conditions above.

YesNo Alarm

(AccessMode

Violation)S5F1 [E87]

CM Handler

AMSM =AUTO?

Access modeerror

ExceptionHandling

Yes

3.3.2A(from 3.3.1I)

3.3.2B(to 3.3.2C)

54


3.3.2 Manual Unload – Single Handoff (continued) 3.

3.2

Man

ual

Un

load

– S

ing

le H

and

off

(co

nti

nu

ed)



S6F11 [E87]

End/signalremove carrierfrom load port

LPTSM State:READY TO LOAD Async Event

(LPCASM SCT-3)S6F11 [E87]


S6F11 [E87]


Event(LPTSM SCT-7)

S6F11 [E87]CM Handler

CM Handler

CM Handler

CM Handler

No

Yes

Leave LPTSM=TRANFERBLOCKED, process next

CarrierOut.

Is aCarrierOut

queued for thisload port?

No

Load port sensing acarrier?

Yes

Wait for End/signal boundary

Note: This ends the manual unloadboundary. Examples per E87 Table 8are:• Presence and placement sensor

no longer detecting a carrier• load port door closing• an input to the equipment through

a switch at the load port• an input to the equipment through

the equipment console• an input to the equipment through

a service message from the host

Async Event(Material

Removed)S6F11 [E30]

CM Handler

3.3.2C(from 3.3.2B)

55


3.3.3 Automated Unload – Single Handoff 3.

3.3

Aut

om

ated

Unl

oad

– S

ingl

e H

and

off


Assert(CS_[0,1])

[E84]

Assert(VALID)

[E84]

Yes

No

Yes

No

Async Alarm (AccessMode Violation)

S5F1 [E87]

No

Yes

Alarm(PIO

Failure)S5F1 [E87]

Async Alarm(PIO Failure)S5F1 [E87]

As commandedby host

Arrival at loadport handoff

location

BothHO_AVBL and

ES are ON?

Specify load port

Communicationsis valid.

Set TA1 Timer.

LP Handler

LPTSM=READYTO UNLOAD?

Notify Host

Note: HO_AVBL=ON also implies that the load portAMSM state must be AUTO. In theory, an accessmode violation should not happen on the equipmentif the equipment has HO_AVBL=ON and if theAMHS respects the signal when it is OFF.

AMSM =MANUAL?

Access modeerror

ExceptionHandling

Not ready error

ExceptionHandling

Note: Any TPx (x=1-6) InterlockTimers that timeout (expire) force aE87 PIO Failure alarm to be sent to thehost. TP6 does not apply to singlehandoff.

CM Handler

CM Handler

CM Handler

3.3.3A(from 3.3.1J)

3.3.3B(to 3.3.3C)

56


3.3.3 Automated Unload – Single Handoff (continued) 3.

3.3

Aut

om

ated

Unl

oad

– S

ingl

e H

and

off

(co

ntin

ued

)


Yes

No

Assert(BUSY)[E84]

Assert(U_REQ)

[E84]


S6F11 [E87]

Assert(TR_REQ)

[E84]

Assert(READY)

[E84]

Load portsensing acarrier?

Start transfer.Clear TA2 Timer.Set TA4 Timer.


Load port CarrierPlacement sensor

triggered

Load port isassigned for

Unload.Set TP1 Timer.

Request transfer.Clear TA1 Timer.Set TA2 Timer.


CM Handler

Load port readyfor transfer.


3.3.3C(from 3.3.3B)

3.3.3D(to 3.3.3E)

57


3.3.3 Automated Unload – Single Handoff (continued) 3.

3.3

Aut

om

ated

Unl

oad

– S

ingl

e H

and

off

(co

ntin

ued

)


Drop(U_REQ)

[E84]

Assert(COMPT)

[E84]

Drop(BUSY)[E84]

Drop(TR_REQ)

[E84]

Drop(READY)

[E84]

Drop (COMPT,CS_[0,1],VALID)[E84]

Async Event(Material

Removed)S6F11 [E30]

CM HandlerCarrier removed.Clear TP3 Timer.Set TP4 Timer.

Handoff nolonger inprogress

Clear TA4 Timer.

Handoff nolonger requested

Handoff completeSet TA3 Timer.

Handoffcomplete.

Set TP5 Timer.

Clear TP4 Timer.

Handshake isclosed.

Clear TA3 Timer.


S6F11 [E87]



S6F11 [E87]

No

CM Handler

CM Handler

CM Handler

Is aCarrierOut queued

for this load port?

Leave LPTSM=TRANSFER BLOCKED,

process nextCarrierOut.

Yes

LP Handler

Clear TP5 Timer.

S6F11 [E87]LPTSM State:

READY TO LOAD

3.3.3E(from 3.3.3D

58


3.3.4 Internal Buffer – CarrierOut Unload 3.

3.4

Inte

rnal

Buf

fer

– C

arri

erO

ut U

nlo

ad


Request carriermove from internal

buffer to LP

CarrierOutS3F17[E87]

Request carriermove from internal

buffer to LP

CarrierOut[E87]

LPTSM =READY TO

LOAD?

No

CarrierOutAck

S3F18 [E87]Issue error

Begin transfer frominternal buffer

Yes

CarrierOutAck

S3F18 [E87]

LPTSM =TRANSFERBLOCKED?

Wait until current carrier isremoved from load port

and proceed with transfer.Keep LPTSM=

TRANSFER BLOCKED.

No

CarrierOutAck

S3F18 [E87]

Queue theCarrierOut

service

Yes

Event (LPTSM SCT-6)S6F11 [E87] CM Handler


LPASM State:ASSOCIATEDLPRSM State:RESERVED

Event (LPASM SCT-2)S6F11 [E87]

Event (LPRSM SCT-2)S6F11 [E87]

Note: CarrierOut.rsp is sent toeither host or operator consoledepending on where theCarrierOut.req originated.

CM HandlerCAACK=0,4

CM HandlerCAACK=4


3.3.4A(from 3.1.1C)

3.3.4B(from 3.3.1E)

3.3.4C(to 3.3.4D)

3.3.4 cont.

3.3.5

59


3.3.4 Internal Buffer – CarrierOut Unload (continued) 3.

3.4

Inte

rnal

Buf

fer

– C

arri

erO

ut U

nlo

ad (

con

tin

ued

)


Carrier Presenceerror

ExceptionHandling

Async Event(BufferCapacity

Change)S6F11 [E87]

Async Event(LPRSM - 3)

S6F11[E87]

Transfer frominternal buffer

complete

CM Handler

CM Handler

No

Yes

No

Yes

Load port sensing acarrier?

CarrierOuttimeoutexpired?

Alarm(Carrier

PresenceError)

S5F1 [E87]

CM Handler

3.3.4D(from 3.3.4C)

3.3.4E(to 3.3.1F)

60


3.3.5 Cancel Carrier 3.

3.5

Can

cel C

arri

er


No

YesCancelCarrier

AckS3F18 [E87]

CancelCarrierAck

S3F18 [E87]

CancelCarrierService

S3F17 [E87]

CancelCarrierService[E87]

Issue error

Cancel Carriersuccessful?

Note: CancelCarrier.rsp is sent toeither host or operator consoledepending on where theCancelCarrier.req originated.

Cancel Carrierissued

CM HandlerCARRIERACTION="CancelCarrier"

Note: A CancelCarrier service fails forat least the following reasons:• CarrierID and PortID not specified• if CarrierID is specified, the carrier

object does not exist• if CarrierID is null, specified load

port (PortID) does not exist• LPTSM State is not TRANSFER

BLOCKED

Operatorrequests CancelCarrier service

Issue success

Note: CarrierOut.rsp is sent toeither host or operator consoledepending on where theCarrierOut.req originated.


CM HandlerCAACK=0,4

3.3.5A(to 3.3.1A)

61


3.3.6 Cancel Carrier At Port 3.

3.6

Can

cel C

arri

er A

t P

ort


No

Yes

CancelCarrierAt Port Service S3F17

[E87]

CancelCarrierAtPort Service [E87]

Issue error

Issue success

Cancel Carrier AtPort issued

Cancel CarrierAt Port

successful?

Operatorrequests Cancel

CarrierAtPortservice


S3F18 [E87]


S3F18 [E87]

Note: A CancelCarrierAtPort servicefails for at least the following reasons:• PortID not specified• Specified load port (PortID) does

not exist• LPTSM State is not TRANSFER

BLOCKED

CM HandlerCARRIERACTION="CancelCarrierAtPort"

Note: CancelCarrierAtPort.rsp issent to either host or operatorconsole depending on where theCancelCarrier.req originated.


CM HandlerCAACK=0,4

3.3.6A(to 3.3.1G)

62


3.3.7 Cancel Carrier Out 3.

3.7

Can

cel C

arri

er O

ut


No

Yes

CancelCarrierOut Service S3F17

[E87]

CancelCarrierService[E87]

Issue error

Issue success

Cancel CarrierOut issued

Cancel CarrierOut successful?


CarrierOutservice

CancelCarrierOutAck

S3F18 [E87]

CancelCarrierOutAck

S3F18 [E87]

CM Handler

CAACK=1,2,3,5

CM Handler

CAACK=0,4

CM HandlerCARRIERACTION="CancelCarrierOut"

Note: A CancelCarrierOut service failsfor at least the following reasons:� CarrierIDnot specified� Specified carrier object does not

exist� LPTSM State is not TRANSFER

BLOCKED or READY TOUNLOAD

Note: CancelCarrierOut.rsp is sentto either host or operator consoledepending on where theCancelCarrierOut.req originated.

63


3.3.8 Cancel All Carrier Out 3.

3.8

Can

cel A

ll C

arri

er O

ut


No

Yes

CancelAllCarrierOut Service S3F19

[E87]

CancelAllCarrierOut Service [E87]

Issue error

Issue success

Cancel All CarrierOut issued

Cancel AllCarrier Out

Successful?


AllCarrierOutservice

CancelAll-CarrierOut

AckS3F20 [E87]

CancelAll-CarrierOut

Ack S3F20 [E87]

CM Handler

CAACK=1,2,3,5

CM Handler

CAACK=0,4

CM HandlerCARRIERACTION="CancelAllCarrierOut"

Note: A CancelAllCarrierOut servicefails for at least the following reasons:� LPTSM State is not TRANSFER

BLOCKED or READY TOUNLOAD

Note: CancelAllCarrierOut.rsp issent to either host or operatorconsole depending on where theCancelAllCarrierOut.req originated.

64


4 FLOWCHARTS – PROCESSING

The flowcharts in this section pertain to job queue management and product processing on production equipment.

4.1 Processing – Queue Management

Purpose

This cross-functional operational flowchart describes the equipment’s communication interface behavior from the host’s point of view for process job (E40) and control job (E94) queue management.

Criteria

In general, the queue management flowcharts in this section should apply to all equipment within an end-user factory.

• Process job queue management has the following dependencies on control job queue management:

– Aborting, Stopping or Canceling a Control Job will abort, stop or cancel its respective Process Jobs and possibly remove those Process Jobs from the Process Job Queue.

• Control job queue management has the following dependencies on process job queue management:

– If only one process job is defined within a control job (a one-to-one relationship exists), then if the process job is aborted or stopped, the equipment may also abort or stop the respective control job automatically. The equipment must document this behavior since it is an additional requirement.


This operational flowchart conforms to the following industry standards and specifications:




Assumptions

1. All Control and Process Job events use E30 style events. Process Job event messages related to S16F7 and F9 are not used.


This flowchart is divided into the following sub-processes:

4.1.1 Processing – Queue Management – Process Job

4.1.1.1 Process Job Queue Initialization

4.1.1.2 Process Job Queue Size Request

4.1.1.3 Process Job Create and Queue

4.1.1.4 Process Job De-queued

65


4.1.2 Processing – Queue Management – Control Job

4.1.2.1 Control Job Queue Initialization

4.1.2.2 Control Job

4.1.2.3 Control Job Create and Queue

4.1.2.4 Control Job HOQ

4.1.2.5 Control Job De-queued

Legend


Data Message

Explanatory Note


Here/FromSection


Directional'Or'


Incoming

66


4.1.1 Processing – Queue Management – Process Job

4.1.1.1 Process Job Queue Initialization

4.1.

1.1

Pro

cess

Jo

b Q

ueu

e In

itia

lizat

ion


EquipmentInitialization

Set Process JobPRJobSpace =

number ofavailable Process

Job Queued/pooled slots

[E40]

Perform ProcessJob Queue

Initialization

4.1.1.1A(to 4.1.1.3A)

67


4.1.1 Processing – Queue Management – Process Job (continued)

4.1.1.2 Process Job Queue Size Request

4.1.

1.2

Pro

cess

Jo

b Q

ueu

e S

ize

Req

ues

t


PRGetSpaceS16F21 [E40]


PJ Handler

PJ HandlerReport

PRJobSpace

DetermineProcess Job

Queued/PooledSpace

68



4.1.1.3 Process Job Create and Queue

4.1.

1.3

Pro

cess

Jo

b C

reat

e an

d Q

ueu

e HostEquipmentComments

Yes

No

PRJobCreate-(Enh;Duplicate;Multi) Ack [E40]

Reformat message

Wait for Host -Create nextProcess Job

Process JobCreate

Successful?

PJ Handler

Issue: ProcessJob Create Error

All ProcessJobs Created?

Note: The Process Job and ControlJob "Wait for Host" blocks operate inparallel and are always in existence onthe equipment. Either the equipmentis waiting in parallel for anotherprocess job creation, or all processjobs have been created and pooledand the equipment is waiting for thecontrol job creation. The equipmentdoes not know in advance the numberof process jobs that will be in the nextcontrol job create.

A restriction as to when process jobsand control jobs may be created iswhen another (respective) queueoperation is in progress.

Note: Process Job Create errors:• parameters improperly specified• insufficient parameters specified• unsupported option requested• busy (no queueing or queue full -

PRJobSpace=0)• object identifier in use

Decrement (-n)PRJobSpace

Yes

Note: How process jobs are definedby the host should not affect thecreation, setup or start of process jobs.

Note: PRJobCreate is NOT usedwhen E94 is being used.

Notes:

1) When using Control Jobs inconjunction with Process Jobs,Process Jobs are not Queued, ratherthey are Pooled, waiting to bescheduled by the Control Job.

2) Once a Process Job is pooled, itmay be acted upon by Abort, Stop orCancel, or by a Control Job beingcreated that controls the Process Job.

PRJobCreate-Enh - S16F11/12Dup - S16F13/14Multi - S16F15/16

[E40]

DetermineProcess Job

Queued/PooledSpace

Is thereenough spacein Process job

pool?

Yes

No

PRJobEvent(PJSM SCT-1) S6F11 [E40]

PRJobCreate-(Enh;Duplicate;

Multi) [E40]

No



PJ Handler

PJSM State:QUEUED/POOLED

[E40]

PJ HandlerPRAck=F

PJ HandlerPRAck=T

4.1.1.3A(from 4.1.1.1A)

4.1.1.3B(from 4.1.1.4B)

4.1.1.3C(to 4.1.2.3B)

4.1.1.3D(to 4.1.1.4A)

69



4.1.1.4 Process Job De-queued

4.1.

1.4

Pro

cess

Jo

b D

e-q

ueu

ed


PJ Handler

PRJobCommand(Cancel, Abort,

or Stop)S16F5 [E40]

Increment (+1)PRJobSpace

Valid JobID?

Issue ImproperParameter Error

(no jobscancelled)

No

Yes

PRJobCommandAck

S16F6 [E40]

PRJobCommandS16F6 [E40]

Delete ProcessJob from queue.

Note: Abort, Stop and Cancel are alllegal commands when in the QUEUEDstate and have the same effect - deletethe job from the queue.

Async PRJobEvent(PJSM SCT-18)

S6F11 [E40]

Note: This is not a transition intoQUEUED/POOLED state. This is hereonly to show that this is the currentstate. The transition to this state ismade in 4.1.1.3.

PJSM State:QUEUED/POOLED

[E40]

PJ HandlerPRAck=T

PJ HandlerPRAck=F

PJ HandlerErrorCode=PJcancelled,PJstopped,PJaborted

4.1.1.4A(from 4.1.1.3D)

4.1.1.4B(to 4.1.1.3B)

70


4.1.2 Processing – Queue Management – Control Job

4.1.2.1 Control Job Queue Initialization

4.1.

2.1

Co

ntro

l Job

Qu

eue

Init

ializ

atio

n


EquipmentInitialization

Set Control JobQueueAvailable-Space = number

of availableControl JobQueue slots

[E94]

Perform ControlJob Queue

Initialization

4.1.2.1A(to 4.1.2.3A)

71


4.1.2 Processing – Queue Management – Control Job (continued)

4.1.2.2 Control Job Size Request

4.1.

2.2

Co

ntro

l Job

Qu

eue

Init

ializ

atio

n


CJ Handler

CJ HandlerReportQueueAvailable-

Space

DetermineControl Job

Queue Space

QueueAvailable-Space ReqS1F3 [E94]

QueueAvailable-Space AckS1F4 [E94]

72



4.1.2.3 Control Job Create and Queue

4.1.

2.3

Co

ntro

l Job

Cre

ate

and

Qu

eue HostEquipmentComments

CreateControlJob [E94]

S14F9 [E39]

Create Control JobAck [E94]

S14F10 [E39]

No

Wait for Host -Create Control

Job

Control JobCreate

Successful?

Issue: ControlJob Create Error

Event(CJSM SCT-1)S6F11 [E94]

CJSM State:CJQUEUED [E94]

Yes

Note: Control Job Create errors:• another queue operation is being

performed (e.g. CJHOQ)• any (at least one) requested

process jobs do not exist• control job queue is full -

QueueAvailableSpace=0• object identifier in use

Decrement (-1)QueueAvailable-

Space

Note: The Process Job and ControlJob "Wait for Host" blocks operate inparallel and are always in existence onthe equipment. Either the equipmentis waiting in parallel for anotherprocess job creation, or all processjobs have been created and theequipment is waiting for the control jobcreation. The equipment does notknow in advance the number ofprocess jobs that will be in the nextcontrol job create.

A restriction as to when process jobsand control jobs may be created iswhen another (respective) queueoperation is in progress.

Note: Once a Control Job is queued, itmay be acted upon by CJAbort,CJStop or CJCancel or by the CJHOQcommand.

Note: The E94 Control Job object iscreated using the E39 Create service.

Create Control JobAck [E94]

S14F10 [E39]

CJ Handler

QueueAvailable-Space ReqS1F3 [E94]

CJ HandlerDetermine

Control JobQueue Space QueueAvailable-

Space AckS1F4 [E94]

Is thereenough spacein Control job

queue?

No

Yes

Reformatmessage

CJ HandlerObjAck=1

CJ HandlerObjAck=0

CJ HandlerObjType="ControlJob"

4.1.2.3A(from 4.1.2.1A)

4.1.2.3B(from 4.1.1.3C)

4.1.2.3C(from 4.1.2.5B)

4.1.2.3D(to 4.1.2.5A)

4.1.2.3E(to 4.1.2.4N)

73



4.1.2.4 Control Job HOQ

4.1.

2.4

Co

ntro

l Job

HO

Q


CJHOQS16F27 [E94]

No

YesCJHOQ Ack

S16F28 [E94]

Control JobQueue Manager

CJ Handler

CTRLJOBCMD='CJHOQ'

Valid JobID?

Issue UnknownJob error.

Unlock queue.

Is jobin CJQUEUED

state?

Yes

Issue HOQ notvalid command

at this time error.Unlock queue.

No

Move selectedControl Job to

head of ControlJob Queue.

Unlock queue.

'Unlock' thequeue.

Accept any otherControl Job

Queue servicecommands

'Lock' the queue.Reject any other

Control JobQueue service

commands

CJ Handler

ACKcode=F

CJHOQ AckS16F28 [E94]

CJ Handler

ACKcode=F

CJHOQ AckS16F28 [E94]

CJ Handler

ACKcode=T

4.1.2.4A(from 4.1.2.3E)

74



4.1.2.5 Control Job De-queued

4.1.

2.5

Co

ntro

l Job

De-

qu

eued


CJCancel, CJStop,CJAbort

S16F27 [E94]

No

Yes

CJ Handler

CJ Handler

Valid JobID?

Issue TBD Error(no jobs

cancelled)

Remove Control Job

Increment (+1)QueueAvailable-

Space

IsAction =

REMOVEJOBS?

YesNo(SAVEJOBS)

Remove allrespective

Queued/PooledProcess Jobs

from Process Jobqueue/pool

Increment (+n)PRJobSpace.

Note: Abort, Stop and Cancel are alllegal commands when in theCJQUEUED state and have the sameeffect - delete the job from the queue.

Process jobremains in

Process Jobqueue (it isconsidered

pooled)

PJ HandlerPRJobEvent

PJSM SCT-18S6F11 [E40]

Event(CJSM SCT-2)S6F11 [E94]

Note: Control Job parameter Action(SAVEJOBS / REMOVEJOBS) is usedas follows. The effect on process jobsis of concern since the control job isdeleted and the process job istherefore left without an owner.• SAVEJOBS - PJSM state

(QUEUED/POOLED): Theprocess job remains in the PRJOB QUEUED/POOLED state. Itcannot be run until another controljob is created that controls thatprocess job.

• REMOVEJOBS - PJSM state(QUEUED/POOLED): Theprocess job is deleted from theprocess job queue when thematerial is removed.

Note: This is not a transition intoCJQUEUED state. This is here only toshow that this is the current state. Thetransition to this state is made in4.1.2.3.

CJSM State:CJQUEUED [E94]

CJCancel, CJStop,CJAbort Ack

S16F28 [E94]

CJ Handler

ACKcode=F

CJCancel, CJStop,CJAbort AckS16F28 [E94]

CJ Handler

ACKcode=T

4.1.2.5A(from 4.1.2.3D)

4.1.2.5B(to 4.1.2.3C)

75


4.2 Processing – Product

Purpose

This cross-functional operational flowchart describes the equipment’s communication interface behavior from the host’s point of view during processing under the following criteria.

Criteria

• Wafer process method (batch/single wafer): This flowchart addresses both single-wafer and batch tools.

• Buffer method (fixed/internal): This flowchart addresses fixed buffer and internal buffer equipment.

• Start method (auto/manual): Both automatic and manual start methods for both control and process jobs are addressed.

• Control job: This flowchart describes the behavior of a single control job. This flowchart does not preclude equipment from executing more than one control job at a time, since control job objects are independent from each other from the host’s point of view.

• Process job: This describes one or more process jobs created using any of the E40 Job Create services. How process jobs are created by the host is not pertinent to how they are scheduled or executed on the equipment. This flowchart does not preclude equipment from executing more than one process job at a time, since process job objects are independent from each other from the host’s point of view.



• SEMI E30 – GEM




• SEMI E90 – Substrate Tracking


This flowchart also depends on flowchart 4.1 Processing – Queue Management.

Assumptions

1. Carrier MoveIn flowchart is complete before Begin. 2. All carrier and substrate objects are instantiated before starting this flowchart.

3. For non Process Job events, E30 events are used. Process Job events are defined in E40.

76



4.2.1 Process/Control Job Queueing

4.2.2 Control Job Select

4.2.3 Control Job Start

4.2.4 Process Job Setup

4.2.5 Process Job Start

4.2.6 Substrate Tracking – Transport

4.2.7 Substrate Tracking – Processing

4.2.8 Process Job Complete

4.2.9 Control Job Complete

4.2.10 Process Job Abnormal Termination

4.2.11 Control Job Abnormal Termination

Legend


Data Message

Explanatory Note


Here/FromSection


Directional'Or'


Incoming

77


4.2.1 Process/Control Job Queueing 4.

2.1

Pro

cess

/Co

ntr

ol J

ob Q

ueu

ein

g


No Pool ProcessJob(s) related toa Control Job.

Refer toflowchart 4.1.1.3

Process JobCreate and

Queuefor respective

details.

Process andControl Jobs

previouslycreated?

Begin

Note:See flowchart 4.1 Processing -Queue Management for a moredetailed flowchart regarding therelationship between processand control jobs creation,existence and respective queuemanagement.

Queue theControl Job

Refer toflowchart 4.1.2.3

Control JobCreate and

Queuefor respective

details.

CJSM State:CONTROLJOB

QUEUED[E94]

PJSM State:PRJOBQUEUED

[E40]

Yes

4.2.1A(to 4.2.2A)

78


4.2.2 Control Job Select 4.

2.2

Co

ntro

l Jo

b S

elec

t HostEquipmentComments

CJSM State:SELECTED

[E94]

CJ Handler

Control Job,Process Job(s)

Capacity?

Wait forprocessing

resources tobecome available

Yes

No

Yes

Async Event(CJSM CST-3)S6F11 [E94]

Note: All required materials havearrived for at least the first Process Jobof the Control Job. Or the first ProcessJob does not require materials.

Note: Processing resources areavailable and reserved for the ControlJob and its Process Job(s).

Note: Control Job queue schedulesand Process Jobs according toCJProcessOrderMgmt. See flowchart4.2.4.

Have the requiredmaterials arrived?

No

4.2.2A(from 4.2.1A)

4.2.2B(to 4.2.3A)

79


4.2.3 Control Job Start 4.

2.3

Co

ntro

l Jo

b S

tart


Yes

Control JobStarted Manually

Control JobManual StartSuccessful?

Issue Control JobStart Error

No

Yes

CJ Handler

Control JobAutomatic

StartSuccessful?

Issue Control JobStart Error

CJ Handler

Yes

No

Equipmentspecific error

(alarm orevent)

No

CJStartS16F27

[E94]

ControlJobStartMethod =

Auto?

CJSM State:WAITINGFOR

START[E94]

CJ Handler

Start Control Job[E94]

CJ Handler

Async Event(CJSM CST-6)S6F11 [E94]

Async Event(CJSM CST-5

orCJSM CST-7)S6F11 [E94]

Note: There is no E94-0703 CJSMtransition in place to handle this. Itshould go to either the Selected orPaused state.

CJStart AckS16F28

[E94]

CJ Handler

ACKcode=FAILURE

CJStart AckS16F28

[E94]

CJ Handler

ACKcode=SUCCESS

4.2.3A(from 4.2.2B

4.2.3B(jto 4.2.4B)

CJSM State:EXECUTING

[E94]

80


4.2.4 Process Job Setup 4.

2.4

Pro

cess

Jo

b S

etu

p

HostComments Equipment

No

Equipmentspecficerror

(alarm or event)

Process JobSetup

Successful?

Issue ProcessJob Setup Error

[E40]

AsyncPRJobEvent

(PJSM SCT-2)S6F11 [E40]

PJ Handler

PJSM State:SETTING UP

[E40]

Next Process JobPJSM State:

PRJOBQUEUED[E40]

Yes

Processingresources made

available.

Control Job Queueschedules next

Process Jobaccording to

CJProcessOrder-Mgmt

Note: Valid CJProcessOrderMgmtvalues are LIST, OPTIMIZE andARRIVAL.

Note: Successful Setup is indicatedby the following:

1) processing resource performsnecessary pre-conditioning asrequired by recipe

2) required materials have arrived

3) equipment otherwise prepares formaterial processing as required bythe recipe

PJ Handler

Note: See flowchart 4.2.4.

4.2.4B(from 4.2.3B)

4.2.4A(from 4.2.9A)

4.2.4C(to 4.2.5A)

81


4.2.5 Process Job Start 4.

2.5

Pro

cess

Jo

b S

tart


PJSM State:WAITINGFOR-

START[E40]

PJSM State:PROCESSING

[E40]

PR HandlerPRJobCommand="STARTPROCESS"

PRJobCommand(StartProcess)S16F5 [E40]

PJ Handler

PJ Handler

AsyncPRJobEvent


AsyncPRJobEvent

(PJSM SCT-4 orPJSM SCT-5)S6F11 [E40]

Start ProcessJob [E40]

Yes

PRProcess-Start = Auto?

No

Note: Definition of Processing Start:1) For internal buffer equipment, thetransition to PROCESSING is whenthe processing carrier, loaded with allsubstrates to be processed, is movedsuccessfully into the processingchamber.2) For fixed buffer equipment, thetransition to PROCESSING is whenthe substrate is moved successfullyinto the processing chamber.

Process JobManual StartSuccessful?

Issue ProcessJob Start Error

No

Process JobStarted Manually

No

Equipmentspecific error

(alarm orevent)

Issue ProcessJob Start Error

Process JobAutomatic

StartSuccessful?

PJ Handler

Note: There is no E40-0703 PJSMtransition in place to handle this. Itshould go to either the Selected orPaused state.

Yes

Yes PJStart AckS16F6[E40]

PJStart AckS16F6[E40]

PJ HandlerPRAck=FALSE

PJ HandlerPRAck=TRUE

4.2.5A(from 4.2.4C)

4.2.5B(to 4.2.6A)

82


4.2.6 Substrate Tracking – Transport 4.

2.6

Su

bstr

ate

Tra

ckin

g –

Tra

nsp

ort


Event(SOSM SCT-2)

S6F11 [E90]

Note: Perform substrate tracking foreach and every substrate processed.

Substrate Objects are created whenthe carrier is registered/accessed orwhen the equipment receives the E90Register Substrate service. SeeMaterial Movement flowchart, 3.2 forfurther information.

Substrates may be processed in serialor parallel.

Source CarrierSubstrateLocation


[E90]

EquipmentSubstrateLocation X

SLSM State:OCCUPIED

[E90]

EquipmentSubstrateLocation X


[E90]

Event(SLSM SCT-2)S6F11 [E90]



SOSM State:AT WORK

[E90]

SOSM State:IN PROCESS

[E90]

Note: These two transitions arecombined into one transition collectionevent which contains variables for bothconcurrent substates.

SubstrateTrackingHandler

4.2.6A(from 4.2.5B)

4.2.6B(from 4.2.6F)

4.2.6C(to 4.2.6D)

83


4.2.6 Substrate Tracking – Transport (continued) 4.

2.6

Su

bstr

ate

Tra

ckin

g –

Tra

nsp

ort

(co

ntin

ued

)


No

SOSM State:AT WORK

[E90]

All Substratesin Process Job

started?

Event(SOSM SCT-4)

S6F11 [E90]

Event(SOSM SCT-5)

S6F11 [E90]

EquipmentSubstrate

Location X+1SLSM State:OCCUPIED

[E90]

EquipmentSubstrate

Location X+1SLSM State:

UNOCCUPIED[E90]

DestinationCarrier Substrate

LocationSLSM State:OCCUPIED

[E90]

Yes

Yes No




Note: Substrate Objects are deletedwhen the carrier they are in areremoved from the equipment or whenthe equipment receives the E90Remove Substrate service. SeeMaterial Movement flowchart, 3.3 forfurther information.

AllEquipmentSubstrateLocationsvisited?

Note: "All Equipment SubstrateLocations" is defined as only thoselocations specified per the recipe, notnecessarily 'all' locations within theequipment.

SOSM State:AT DESTINATION

[E90]

SOSM State:PROCESSING

COMPLETESubstate [E90]


4.2.6D(from 4.2.5C)

4.2.6E(to 4.2.8A)

4.2.6F(to 4.2.6B)

84


4.2.7 Substrate Tracking – Processing 4.

2.7

Su

bstr

ate

Tra

ckin

g –

Pro

cess

ing


Event(SOSM SCT-10

orSOSM SCT-13)

S6F11 [E90]

SOSM State:NEEDS

PROCESSING[E90]


Notes:

1) Perform substrate tracking for eachand every substrate processed.

2) Substrate Objects are instantiatedas shown in Material Movement -Move In flowchart, 3.2 for furtherinformation.

3) Substrates may be processed inserial or parallel.

4) SOSM concurrent substate(Transport and Processing) transitionsshould be sent in the SOSM Transporttransition collection event. There arevariables for both concurrentsubstates.

Event(SOSM SCT-

11)S6F11 [E90]

SOSM State:IN PROCESS

[E90]

SOSM State:PROCESSING

COMPLETE[E90]

Event(SOSM SCT-

12)S6F11 [E90]

Note: The SubstProcState attribute isnot assigned a value of PROCESSINGCOMPLETE. For this state, it mustassigned a value per the applicablesubstate: PROCESSED, ABORTED,STOPPED or REJECTED.

No

Is moreprocessing

requested onsubstrate?

Yes

Note: Substrate Objects are deletedwhen the carrier they are in areremoved from the equipment or whenthe equipment receives the E90Remove Substrate service. SeeMaterial Movement flowchart, 3.3 forfurther information.

Note: Not withstanding related E90SCT-13 requirement, ISMT membercompanies require SCT-13 for allequipment.

85


4.2.8 Process Job Complete 4.

2.8

Pro

cess

Jo

b C

om

ple

te


AsyncPRJobEvent


PRJobAlert(PRJobComplete)

S6F11 [E40]

Terminate

PJ Handler

Job complete perat least one ofthe following:

1) Materialremoved from

equipment2) Resource

post-processingcomplete

3) Superceded byanother process

job on samematerial

PJSM State:PROCESS

COMPLETE[E40]

PJ Handler

Fixed Buffer Tool: Tools having afixed buffer always takes this path.

Internal Buffer Tool Only: An internalbuffer tool must wait for an E87CarrierOut in parallel andindependently from the E40Processing Complete activity.

This path is unlikely for a SingleWafer Tool. Single Wafer Tools withan Internal Buffer that will handlemore than one carrier per ControlJob may not exist.

Delete ProcessJob

PRJobEvent(PJSM SCT-7)S6F11 [E40]

Note: This implies that the last locationas specfied by the recipe has beenvisited by each requested substrate.

Wait for all processedsubstrates to transition to

SOSM States:AT DESTINATION

andPROCESSING

COMPLETE [E90]

4.2.8A(from 4.2.6E)

4.2.8BMove OutCarrierOut(to 3.3.1B)

86


4.2.9 Control Job Complete 4.

2.9

Co

ntro

l Jo

b C

ompl

ete HostEquipmentComments

Async Event(CJSM SCT-10)

S6F11 [E94]

No

Yes

CJSM State:EXECUTING

More ProcessJobs in Control

Job?

CJSM State:COMPLETED

Terminate

CJ Handler

Delete ControlJob

Event(CJSM SCT-13)

[E94]

Note: This is not a transition intoEXECUTING state. This is here onlyto show that this is the current state.The transition to this state is madeelsewhere in processing flowchart 4.2.

CJ Handler

4.2.9A(to 4.2.4A)

87


4.2.10 Process Job Abnormal Termination 4.

2.10

Pro

cess

Jo

b A

bn

orm

al T

erm

inat

ion


No(Abort)

PRJobCommandAck

S16F6 [E40]

Yes

PRJobCommand(Cancel, Abort,

or Stop)S16F5 [E40]

PRJobCommandAck

S16F6 [E40]

(PJSM SCT-13,SCT-14, or SCT-15)

S6F11 [E40]

PRJobCommandAck

S16F6 [E40]

No

Yes

No

Yes

PJ HandlerPRAck=F

Note: This is not a transition intoACTIVE state. This is here only toshow that this is the current state. Thetransition to this state is made in thisProcessing Flowcharts 4.2.

All terminatedprocess job

execution activityceased.

Stopcommand?

Cancelcommand?

Note: Any command is illegal inABORTING state. The previouslyissued Abort always takes precedence.

Note: Cancel is illegal in any stateother than QUEUED/POOLED.

PJSM State:STOPPING

[E40]

PJ HandlerPRJobCommand="CANCEL","ABORT", or"STOP"

PJ Handler

Issue in wrongstate error.

PJ HandlerPRAck=T

PJ Handler

Process productto next safe

location.

Is jobin PJSM

ABORTINGstate?

PJ HandlerPRAck=T

PJSM State:ACTIVE

[E40]

PRJobEvent

PRJobEvent(PJSM SCT-11

orSCT-12)

S6F11 [E40]

PJSM State:ABORTING

[E40]

4.2.10A(to 4.2.10B)

88


4.2.10 Process Job Abnormal Termination (continued) 4.

2.10

Pro

cess

Jo

b A

bn

orm

al T

erm

inat

ion

(co

ntin

ued

)


AsyncPRJobAlert

(PRJobComplete)S6F11 [E40]

AsyncPRJobEvent

(PJSM SCT-16 orPJSM SCT-17)

S6F11 [E40]

Terminate

Delete ProcessJob

Increment (+1)PRJobSpace

PJ HandlerErrorCode=PJaborted/PJstopped

PJ Handler

4.2.10B(from 4.2.10A)

89


4.2.11 Control Job Abnormal Termination 4.

2.11

Co

ntro

l Jo

b A

bn

orm

al T

erm

inat

ion


Yes

No(Abort)

Yes

No

Stopcommand?

Cancelcommand?

Issue wrongstate Error

(no jobscancelled)

Issue commandresponse

Do not start anyother process

jobs for theStopped/Aborted

control job .

Note: This is not a transition intoACTIVE state. This is here only toshow that this is the current state. Thetransition to this state is made in thisProcessing Flowchart 4.2.


(QUEUED): The process jobremains in the PR JOB QUEUED/POOLED state. It cannot be rununtil another control job is createdthat controls that process job.

• REMOVEJOBS - PJSM state(QUEUED): The process job isdeleted from the process jobqueue when the material isremoved.

CJSM State:ACTIVE

[E94]

CJCancel,CJStop,CJAbort

S16F27 [E94]

CJ Handler

CJCancelAck

S16F28 [E94]

CJ Handler

ACKcode=FAILURE

CJStop,CJAbort Ack

S16F28[E94]

CJ Handler

ACKcode=SUCCESS

4.2.11A(to 4.2.11C)

4.2.11B(to 4.2.11D)

90


4.2.11 Control Job Abnormal Termination (continued) 4.

2.11

Co

ntro

l Jo

b A

bn

orm

al T

erm

inat

ion

(co

ntin

ued

)



S6F11 [E94]

Event(CJSM SCT-13)

S6F11 [E94]


S6F11 [E94]

Terminate

Delete ControlJob


CJ Handler


(ACTIVE): The process job isterminated. It is then deletedfrom the equipment when thematerial is removed.

• REMOVEJOBS - PJSM state(ACTIVE): The process job isterminated. It is then deletedfrom the equipment when thematerial is removed.

Immediatelyterminate all

PRJOBACTIVEprocess jobs.


CJ Handler

Process allPRJOBACTIVEprocess jobs tocompletion perflowchart 4.2.8,

Process JobComplete.

CJ Handler

4.2.11C(from 4.2.11A)

4.2.11D(from 4.2.11B)

91


5 FLOWCHARTS – ROUND TRIPS

The flowcharts and scenarios in this section pertain to reference material such as one-page round trip reference flowcharts and ISMT base scenarios.

5.1 Round Trips and Base Scenarios

Purpose

This cross-functional operational flowchart presents one-page summary references of different round trip scenarios.


Refer to the individual flowcharts.

Assumptions

1. <none>


5.1.1 Round Trip Summary – Equipment Verification

5.1.2 Round Trip Summary – Host Verification

5.1.3 Round Trip Summary – No ID Verification


Data Message

Explanatory Note


Here/FromSection


Directional'Or'


Incoming

Legend

92


5.1.1 Round Trip – Equipment Verification

Comments Equipment Host 5.

1.1

Ro

und

Tri

p –

Eq

uip

men

t V

erif

icat

ion

Instantiate

Carrier, Reserve Load Port, Associate

Carrier/Load Port [3.2.2.1]

Bind Request [3.2.1.1]

Request Carrier Delivery [3.2.2.1]

Place Carrier on Load Port [3.2.2.1]

Equipment Based Carrier ID Verify [3.2.3.2 3.2.3.3]

Process Jobs Created and Queued

[4.1.1.3]

Verify Slot Map [3.2.3.7]

Control Jobs Created and Queued

[4.1.2.3]

Start Substrate [3.2.4.1]

Create Process Jobs

[4.1.1.3]

Create Control Jobs

[4.1.2.3]

Control Job Selected/Started

[4.2.2, 4.2.3]

Process Job Setup/Started [4.2.4, 4.2.5]]

Wafer Tracking [4.2.6, 4.2.7]

Process Job Complete [4.2.8]

Control Job Complete [4.2.9] Remove Carrier

from Load Port [3.3.1]

93


5.1.2 Round Trip – Host Verification


1.2

Ro

und

Tri

p –

Ho

st V

erif

icat

ion

Instantiate

Carrier, Reserve Load Port, Associate

Carrier/Load Port [3.2.2.1]

Bind Request [3.2.1.1]



Host Based Carrier ID Verify [3.2.3.2 3.2.3.4]

Process Jobs Created and Queued

[4.1.1.3]


Control Jobs Created and Queued

[4.1.2.3]


Create Process Jobs

[4.1.1.3]

Create Control Jobs

[4.1.2.3]

Control Job Selected/Started

[4.2.2, 4.2.3]

Process Job Setup/Started [4.2.4, 4.2.5]]



Control Job Complete [4.2.9] Remove Carrier

from Load Port [3.3.1]

94


5.1.3 Round Trip – No ID Verification


1.3

Ro

und

Tri

p –

No

ID V

erifi

cati

on

Instantiate

Carrier [3.2.2.1]

Carrier Notification Request [3.2.1.1]



Detect Carrier Placement

[3.2.3.2 3.2.3.6]

Control and Process Jobs Created and

Queued [4.1.1.3, 4.1.2.3]



Create Control and Process Jobs

[4.1.1.3, 4.1.2.3]

Request Control Job Start

[4.2.3]

Control Job Selected [4.2.2]


Control Job Complete [4.2.9]

Detect Carrier Removal [3.3.1]

Remove Carrier from Load Port

[3.3.1]

Control Job Started [4.2.3]

Process Job Setup/Started [4.2.4, 4.2.5]


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International SEMATECH Manufacturing Initiative Technology Transfer

2706 Montopolis Drive Austin, TX 78741

http://www.ismi.sematech.org e-mail: [email protected]

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