MECATRANSULTRA HIGH VACUUM TUNNEL TRANSFER

Principal Features :

♦ 10-10 mbar Ultra High Vacuum tunnels for substrate transfer

♦ Sublimation & ion pumping group

♦ Train for 12 substrates

♦ Load lock chamber

♦ High transport speed(50 cm/s)

♦ 304L/316L stainless steel

♦ 2 inch or special substrate holders

♦ 200°C bakeout temperature

♦ Customizable length

♦ Magnetic coupling

♦ Low maintenance equipment

♦ Automated motion (option)

The ability to grow, control, manipulate and design materials from the atomic/nano-level via microstructure to macrostructure levels is a major driver both forfundamental research and applied technology in the Thin Films. The MECATRANSallows for the combination of deposition, analysis and post deposition treatmenttechniques, all connected under Ultra High Vacuum (UHV).

Various materials require different deposition processes in order to create multi-material devices. Therefore, as-deposited samples are easily transportable under acontrolled environment with a base pressure of 1×10-10 Torr, which protects themfrom oxidation and other structural or chemical changes related to atmosphericexposure.

By combining several growth, curing and analysis techniques, the MECATRANSpermits the exploration of a large range of more complex and hybrid systems formaterials control at the atomic scale.

The MECATRANS is a stainless steel tunnel with an internal monorail upon whichsubstrate train is moveable.

The samples are transported through the UHV pipeline on this monorail train. Bymeans of transfer rods, the samples can be exchanged between the train and theconnected chambers. The MECATRANS accommodates for a 12 two-inch sampleholder on the internal monorail .

To avoid any contamination between chambers and/or vibration conduction each UHVchamber is isolated by a UHV valve and features specific components.

VINCI TECHNOLOGIES - DIVISION MECA 2000www.vinci-technologies.com – www.meca2000.fr

Applications :

♦ Modular design tailored to full scale Thin Film manufacturing.

The train can transport up to 12 two-inch substrate holdersMolybloc type. Other type of train can be designed forspecific substrate holder . It moves on a monorail with oneexternal handle magnetically coupled with the train.The substrate holders are transferred in the chambers with amechanical transfer rod.

The load lock chamber is installed on the extremity of thetunnel and isolated with a gate valve. It is equipped with itsown pumping group and vacuum gauge. An externalmonorail allows to takeout the train for substrate holdermanipulation.

The tunnel is composed of an unlimited number of standardtubes (304 L) with 150 mm diameter and 1 meter length.

The tubes are manufactured with UHV state of the arttechnology and can withstand bakeout of up to 200°C.

More than 10 standard tubes are designed with ports for :♦ Transfer positions♦ Viewports♦ Vacuum gauges♦ Pumping group♦ Connexion with other tubes

Tubes with special specifications can be manufactured uponrequest.

10-11 mbar can be achieved with the pumping groupcombination of an ion pump and a sublimation pump. Thisis then isolated from the tunnel by a gate valve.An oven is recommended to regenerate the ion pumpelements.

VINCI TECHNOLOGIESDIVISION MECA 2000

27 B Rue du Port – 92022 NANTERRE FRANCE

Tel : +33 1.41.37.92.20Fax : +33 1.41.37.04.76

meca2000@vinci-technologies.com

www.vinci-technologies.comwww.meca2000.fr

Substrate holder train

♦ Up to 12 substrates

Load-lock chamber

Standard tubes

Pumping group

♦ Ion & sublimation pumps