14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic...
Transcript of 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic...
![Page 1: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/1.jpg)
Institute of Solid State PhysicsTechnische Universität Graz
14. Optoelectronics
Jan. 23, 2019
![Page 2: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/2.jpg)
p-Si
SiO2
Implant
Deposit oxideSpin resistExposeDevelopEtch OxideStrip resistImplant subcollector n+
Antimony (Sb) has a low vapor pressure and won't evaporate during the subsequent CVD step
![Page 3: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/3.jpg)
p-Si
Remove oxideClean surfaceSilicon epitaxyCVD SiH4 + PH3
n+ subcollector
n-epi
Epi-growth
![Page 4: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/4.jpg)
p-Si
n+ subcollector
n-epi
Collector Contact
Deposit oxideSpin resistExposeDevelopEtch OxideStrip resistImplant collector contact n+AnnealStrip oxide
n+
![Page 5: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/5.jpg)
p-Si
n+ subcollector
n-epi
Guard ring
Deposit oxideSpin resistExposeDevelopEtch OxideStrip resistImplant collector contact p+AnnealStrip oxide
n+p+ p+
![Page 6: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/6.jpg)
p-Si
n+ subcollector
n-epi
p-well
Deposit oxideSpin resistExpose DevelopEtch OxideStrip resistImplant base AnnealStrip oxide
n+p+ p+p
![Page 7: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/7.jpg)
p-Si
n+ subcollector
n-epi
p+ base contact
Deposit oxideSpin resistExposeDevelopEtch OxideStrip resistImplant base Anneal
n+p+ p+p
![Page 8: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/8.jpg)
p-Si
n+ subcollector
n-epi
n+ emitter
Deposit oxideSpin resistExposeDevelopEtch OxideStrip resistImplant base Anneal
n+p+ p+p
![Page 9: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/9.jpg)
Institute of Solid State Physics
OptoelectronicsTechnische Universität Graz
light emitting diodelaser diode solar cellphoto detectors
communications, memory (DVD), displays, printing, bar-code readers, solar energy, lighting, laser surgery, measurement, guidance, spectroscopy, LiFi
![Page 10: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/10.jpg)
Photo detectors
Intrinsic semiconductor = e(nn + pp) (used in copiers)
Unbiased pn junction - like a solar cell
Reverse biased pn junction - smaller capacitance, higher speed, less noise
Phototransistor - light injects carriers into the base. This forward biases the emitter base junction. High responsivity.
Ambient light detectors.
Active Pixel sensors for automated parking and gesture control (uses time-of-flight to image in 3-D).
![Page 11: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/11.jpg)
Laser printer
semiconducting photoconductor
https://en.wikipedia.org/wiki/Laser_printing
![Page 12: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/12.jpg)
Absorption
0( ) xx e Photon flux:
Sharp absorption edge for direct bandgap materials
32*
6 -1
0
3.5 10 cmgrEm
m
direct bandgap indirect bandgap
![Page 13: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/13.jpg)
Light emitting diodes
Solid state lighting is efficient.
![Page 14: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/14.jpg)
direct bandgap:k = 0
photons can be emitted
indirect bandgap:k = 0
phonons are emitted
![Page 15: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/15.jpg)
Light emitting diodes
![Page 16: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/16.jpg)
![Page 17: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/17.jpg)
IR LED
Measurement by Jan Enenkel
![Page 18: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/18.jpg)
Confinement of light by total internal reflection
less pulse spreading for parabolically graded fiber
0.6 dB/km at 1.3 m and 0.2 dB/km at 1.55 m
n1sin n2sin2
n n
![Page 19: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/19.jpg)
Light emitting diodes
absorptionreflectiontotal internal reflection
![Page 20: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/20.jpg)
Galaxy Tab
Encapsulation technology
OLEDs
![Page 21: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/21.jpg)
Prof. Günther Leising
Electroluminescence in poly(p-phenylene)
poly(3-hexylthiophene)
In 1992, Leising et al. for the first time reported on blue electroluminescence from OLEDs containing poly(p-phenylene) (PPP).
![Page 22: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/22.jpg)
OLEDs
GlassITO anode
Aluminum cathode
Cathode is typically a low work function material Al, Ca - injects electrons
Anode is typically a high work function material ITO - injects holes
Cathode
Anode
Eg
Hole transport layer
Electron transport layerEmission layer
![Page 23: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/23.jpg)
Q-dot LEDs
Coe-Sullivan, et al. Advanced Functional Materials, 10.1002/adfm.200400468
![Page 24: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/24.jpg)
Nanoparticle OLEDs
Appl. Phys. Lett. 92, 183305 (2008)
Semiconductor nanosphere (Me-LPPP) OLEDs
![Page 25: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/25.jpg)
Efficient lighting
Very efficientMany colors possibleNo toxic chemicals
![Page 26: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/26.jpg)
Flexible, transparent, wearable displays
Folding displayTransparent AMOLED
![Page 27: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/27.jpg)
Equivalent circuit
Solar cell
![Page 28: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/28.jpg)
Solar spectrum
![Page 29: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/29.jpg)
Shockley–Queisser limit
http://en.wikipedia.org/wiki/Shockley-Queisser_limit
![Page 30: 14. Optoelectronicslamp.tu-graz.ac.at/~hadley/psd/lectures18/jan23.pdf · Photo detectors Intrinsic semiconductor = e( n n + p p) (used in copiers) Unbiased pnjunction -like a solar](https://reader034.fdocuments.us/reader034/viewer/2022042323/5f0dc9d97e708231d43c1725/html5/thumbnails/30.jpg)
Biofuel efficiency ~ 1%