1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED...
-
Upload
brice-allison -
Category
Documents
-
view
213 -
download
0
Transcript of 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED...
![Page 1: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/1.jpg)
1
Paper Survey
Fabrication of various dimensions of high fill-factormicro-lens arrays for OLED package
Sensors and Actuators A xxx (2010) xxx–xxx
a Department of Mechanical Engineering, R.O.C. Military Academy, Kaohsiung, Taiwan, ROC
b Department of Mechanical and Electro-Mechanical Engineering, Center for Nanoscience and Nanotechnology,
National Sun-Yat-Sen University, 70 Lien-hai Rd., Kaohsiung 804, Taiwan, ROC
c Department of Photonics, National Sun-Yat-Sen University, Kaohsiung 804, Taiwan, ROC
Advisee ﹕ Sung-Wen Tsai
Institute of Mechanical EngineeringDate 2010/06/18﹕
K.H. Liua, M.F. Chenb, C.T. Panb, , M.Y. Changc, W.Y. Huangc∗
![Page 2: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/2.jpg)
2
Outline
The design principle
Fabrication process of gapless hexagonal micro-lens array
Results and discussions
Conclusion
![Page 3: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/3.jpg)
The design principle
3
22
21 DDT
1.T D≧ : gap group
2.T < D : gapless
groupFig. 1. The three smaller circles (A, B and C) are the patterns of a mask; three bigger circles which are drawn in dotted line are used to describe the micro-lenses how to interwork; finally, the interworked micro-lenses become hexagonal micro-lenses.Diameter (D) is the original diameter of a pattern on a mask; vertical (V) is a distance of; period (T) is a distance of AB, and it is also a distance of centers of two circles.
22
21 DDT
(D1=D2=D)
![Page 4: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/4.jpg)
T<D(gapless)
4
A B A B
A B A B
D
T
v
![Page 5: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/5.jpg)
5
A B A
T
DB
T=D(tangential)
v
![Page 6: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/6.jpg)
T>D(Not gapless)
6
D
T
v
![Page 7: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/7.jpg)
7
No. Diameter Thickness(H)
Vertical(V)
Period(T)
Hypotensue Layout Aspect ratio
1 40 12.5 100 50 55.90 gapless 0.313
2 30 12.5 100 40 53.85 gapless 0.416
3 25 12.5 100 35 52.97 gapless 0.5
4 15 5 100 25 51.54 gapless 0.33
5 40 12.5 100 50 55.90 Not gapless 0.25
6 25 12.5 100 35 52.97 Not gapless 0.5
7 15 5 100 25 51.54 Not gapless 0.313
The design principle
Table 1 The designed variables of seven micro-lens arrays (unit: μ m)
(aspect ratio = H/D)
![Page 8: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/8.jpg)
Fabrication process of gapless hexagonal micro-lens array
8
Fig. 2. A sketch of a circle array on a mask with three parameters.
V : constant valueD : variableT : variable
![Page 9: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/9.jpg)
9
Fabrication process of gapless hexagonal micro-lens array
Fig. 3.Schematic lithography process: (a) spin coating the photoresist AZ4620; (b) a cylindrical array was obtained after development; (c) reflow the microstructures at 140 ◦C; (d) sputtering a Ni-film as a seed layer
![Page 10: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/10.jpg)
10
Fabrication process of gapless hexagonal micro-lens array
Fig. 3.(e) NiCo electroplating was used to wrap the photoresist micro-lenses to form a gapless mold; (f) a passivation treatment with thermal method was applied on the surface of NiCo alloy; (g) a secondary electroplating was performed, and CMP process was used to flat the surface; the substrate was removed.
![Page 11: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/11.jpg)
11
Fig. 4. A replication of UV-cured process: (a) spin coating the polymer on the secondary mold, and exposed to UV light; (b) after several seconds, the polymer was cured.
Fabrication process of gapless hexagonal micro-lens array
![Page 12: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/12.jpg)
12
gapless gapless
gapless gapless
![Page 13: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/13.jpg)
13Not gaplessNot gapless
Not gapless
![Page 14: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/14.jpg)
Results and discussions
14
22
222
22
cbaHypotenuse
baV
cT
Fig. 4. The definition of three measured distance of a micro-lens. The three values can be used to calculate the length of Hypotenuse as shown in Fig. 1. This figure was drawn by computer software, Solidworks.
![Page 15: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/15.jpg)
15
No. Diameter a Diameter b Diameter c Hypotenuse Error(c) Error(hypotenuse)
1 38.01 62.21 50.80 56.18 0.80 0.28
2 40.09 59.10 40.09 53.49 0.09 -0.36
3 43.20 55.64 35.25 52.47 0.25 -0.5
4 47.35 52.53 25.23 51.51 0.23 -0.03
5 26.61 57.02 50.11 48.75 0.11 -7.14
6 39.40 52.18 35.25 49.06 0.25 -3.91
7 42.51 50.11 25.23 48.00 0.23 -3.54
Error(C)=Diameter c –TError(hypotenuse)=measured value – designed value
Results and discussions
Table 2 The measured data of seven different micro-lens arrays and the error of measured and designed value. Positive errors mean the micro-lenses are bigger than designed one and negative errors mean they are smaller (unit: μ m).
![Page 16: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/16.jpg)
Results and discussions
16
Measurement instrument : SpectraScan Colorimeter PR-650
Fig. 5. Nine points of measurement of an optical film, and an OLED as light source under the optical film (a region of a gray rectangle).
![Page 17: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/17.jpg)
17
Results and discussions
![Page 18: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/18.jpg)
18
Results and discussions
![Page 19: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/19.jpg)
19
Results and discussions
![Page 20: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/20.jpg)
20
Results and discussions
![Page 21: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/21.jpg)
21
Results and discussions
![Page 22: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/22.jpg)
22
Results and discussions
![Page 23: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/23.jpg)
23
Results and discussions
![Page 24: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/24.jpg)
24
Results and discussions
![Page 25: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/25.jpg)
25
Results and discussions
![Page 26: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/26.jpg)
26
Results and discussions
Fig. 11. The luminance comparison of a base and an optic film, Sample 3, (a) the comparison of points 1, 3, 4, 6, 7 and 9 of a base and Sample 3, and the raising percentages are 120.59%, 830.90%, 313.42%, 502.86%, 512.35% and 599.82%, respec-tively
![Page 27: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/27.jpg)
27
Results and discussions
Fig. 11. (b) the comparison of points 2, 5 and 8 of a base and Sample 3, and thedecreasing percentages are 26.88%, 7.74% and 21.85%, respectively.
![Page 28: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/28.jpg)
Conclusion
1.A LIGA-like process was applied in this study, because it has good replication for microstructures.
2.The effect of an optical film with gapless and high aspect ratio micro-lens array can show more obvious results than of the other designs.
28
![Page 29: 1 Paper Survey Fabrication of various dimensions of high fill-factor micro-lens arrays for OLED package Sensors and Actuators A xxx (2010) xxx–xxx a Department.](https://reader036.fdocuments.us/reader036/viewer/2022081603/5697bfeb1a28abf838cb7ea1/html5/thumbnails/29.jpg)
29
Thanks for your attention