00560 Datenblatt Focusshifter 03 - RAYLASE · tion units for 1,064 nm, 532 nm, 355 nm and 10,600 nm...

2
3-AXIS DEFLECTION UNITS FOR CHALLENGING INDUSTRIAL APPLICATIONS FOCUSSHIFTER-CS FLEXIBLE DEEP PROCESSING WITH SMALLEST SPOT DIAMETER. Variable, easy to adjust focus range in Z direction Modular and compact design for easy integration Perfect for 3D processing Digital trigger via SP-ICE-1 PCIe PRO und SP-ICE-3 control card Available input apertures: 10, 14, 15 mm YOUR BENEFITS The FOCUSSHIFTER-CS deflection unit provide tiny spot diameters with flexible focusing range in Z-direction. The modular, compact, robust, and pre-aligned design (CE) makes integration easy. Deflec - tion units for 1,064 nm, 532 nm, 355 nm and 10,600 nm lasers are designed for field sizes from 100 mm x 100 mm to 300 mm x 300 mm. The field sizes are determined by the f-theta objective type. MIRRORS AND OBJECTIVES Scan mirrors and objectives with optimized mounts are available for all typical laser types, wavelengths, power densities, focal lengths and working fields. Customer specific configurations are also pos- sible. INTERFRACES The deflection units are compatible to the XY2-100 standard. They can be digitally controlled by a control card, such as the SP-ICE-1 PCIe PRO. TYPICAL APPLICATIONS Laser direct scribing, glass drilling, deep engraving, deep cutting, in-glass marking. INNOVATION AND QUALITY Innovation and maintaining high product quality standards are our priorities at RAYLASE. All our products are developed, built and tested in our own laboratories and production facilities. Through our world-wide support network we can offer best maintenance and rapid service for our customers. www.raylase.com

Transcript of 00560 Datenblatt Focusshifter 03 - RAYLASE · tion units for 1,064 nm, 532 nm, 355 nm and 10,600 nm...

Page 1: 00560 Datenblatt Focusshifter 03 - RAYLASE · tion units for 1,064 nm, 532 nm, 355 nm and 10,600 nm lasers are designed for field sizes from 100 mm x 100 mm to 300 mm x 300 mm. The

3-AXIS DEFLECTION UNITS FOR CHALLENGING INDUSTRIAL APPLICATIONS

FOCUSSHIFTER-CS

FLEXIBLE DEEP PROCESSING WITH SMALLEST SPOT DIAMETER.

Variable, easy to adjust focus range in Z direction Modular and compact design for easy integration Perfect for 3D processing Digital trigger via SP-ICE-1 PCIe PRO und SP-ICE-3 control card Available input apertures: 10, 14, 15 mm

YOUR BENEFITSThe FOCUSSHIFTER-CS deflection unit provide tiny spot diameters with flexible focusing range in Z-direction. The modular, compact, robust, and pre-aligned design (CE) makes integration easy. Deflec-tion units for 1,064 nm, 532 nm, 355 nm and 10,600 nm lasers are designed for field sizes from 100 mm x 100 mm to 300 mm x 300 mm. The field sizes are determined by the f-theta objective type.

MIRRORS AND OBJECTIVESScan mirrors and objectives with optimized mounts are available for all typical laser types, wavelengths, power densities, focal lengths and working fields. Customer specific configurations are also pos-sible.

INTERFRACESThe deflection units are compatible to the XY2-100 standard. They can be digitally controlled by a control card, such as the SP-ICE-1 PCIe PRO.

TYPICAL APPLICATIONSLaser direct scribing, glass drilling, deep engraving, deep cutting, in-glass marking.

INNOVATION AND QUALITYInnovation and maintaining high product quality standards are our priorities at RAYLASE. All our products are developed, built and tested in our own laboratories and production facilities. Through our world-wide support network we can offer best maintenance and rapid service for our customers.

www.raylase.com

Page 2: 00560 Datenblatt Focusshifter 03 - RAYLASE · tion units for 1,064 nm, 532 nm, 355 nm and 10,600 nm lasers are designed for field sizes from 100 mm x 100 mm to 300 mm x 300 mm. The

FOCUSSHIFTER-CS

GENER AL SPECIFICATIONS

SPECIFICATIONS FOR LINEAR-TR ANSL ATOR-MODULES

F-THETA-OBJEKTIVE-SPECIFICATIONS

SPECIFICATIONS FOR ASSOCIATED DEFLECTION UNITS

1 With F-Theta-objektive f = 160 mm for Nd:YAG, Nd:YAG doubled, Nd:YAG tripled; with F-Theta-objektive f = 150 mm for CO2 2 Weight including adapter plate, without scan head

1 Drift per Axis. 2 After warming-up, variations of ambient temperature < 1K. 3 Specification for fused Silica.

1 With F-Theta-Objektive f = 160 mm, Head MS-10 for Nd:YAG, Nd:YAG doubled, Nd:YAG tripled; with F-Theta-Objektive f = 150 mm, Head MS-10 for CO2.2 Field size in center Z-position.

1 With F-Theta-Objektive f = 160 mm, Head SS-IIE-15 for Nd:YAG, Nd:YAG doubled, Nd:YAG tripled; with F-Theta-Objektive f = 150 mm, Head SS-IIE-15 for CO2.2 Field size in center Z-position.

Power supply

Voltage ± 15 V to ± 18 VCurrent 7,5 A, RMS, max. 10 A

Ripple /Noise

Max. 200 mVpp, @ 20 MHz bandwith

Laser Nd:YAG Nd:YAG doubled Nd:YAG tripled CO2

Wavelength (nm) 1,064 532 355 10,600Beam expansion factor 3 2 3 2 3 2 3 2Input aperture (mm) 5 5 7 5 5 7 5 5 7 5 5 7Scan head apertures (mm) 14/15 10 14/15 14/15 10 14/15 14/15 10 14/15 14/15 10 14/15Focus range in z-direction (mm) ¹ ± 13.5 ± 12.5 ± 12.5 ± 14.0 ± 13.0 ± 13.0 ± 14.5 ± 12.0 ± 12.0 ± 20.5 ± 10.5 ± 10.5Tracking error (µs) 850 850 850 850Acceleration time (ms) 1.5 1.5 1.5 1.5Typical process speed (mm/s) ≤ 750 ≤ 750 ≤ 750 ≤ 750Step response time 1/100 (ms) 3 3 3 3Step response time 1/10 (ms) 5 5 5 5Step response time ½ (ms) 9 9 9 9Step response time 1/1 (ms) 15 15 15 15Weight (kg) ² approx. 2.9 approx. 2.9 approx. 2.9 approx. 2.9

3 x Expansion Nd:YAG Nd:YAG doubled Nd:YAG tripled CO2

Wavelength (nm) 1,064 532 355 10,600Objective f = 160 mm f = 160 mm f = 160 mm f = 150 mmTypical field size (mm x mm) ¹ 67 x 67 74 x 74 48 x 48 88 x 88Spotdiameter 1/e², TEM00Aperture 10 / 14 / 15 mm (µm)

22 / 20 12 / 11 8 / 7 305 / 220 / 205

Working distance (mm) 222 ± Focus range 229 ± Focus range 230 ± Focus range 161 ± Focus range

2 x Expansion Nd:YAG Nd:YAG doubled Nd:YAG tripled CO2

Wavelength (nm) 1,064 532 355 10,600Objective f = 160 mm f = 160 mm f = 160 mm f = 150 mmTypical field size (mm x mm) ¹ 94 x 94 98 x 98 82 x 82 110 x 110Spotdiameter 1/e², TEM00Aperture 10 / 14 / 15 mm (µm)

31 / 22 / 20 16 / 12 / 11 11 / 8 / 7 305 / 220 / 205

Working distance (mm) 228 ± Focus range 230 ± Focus range 230 ± Focus range 163 ± Focus range

Deflection Unit MS II-10 MS II-14 SS-IIE-10 SS-IIE-15Mechanical data:Input aperture (mm) 9.0 14.0 10.0 15.0Beam displacement (mm) ³ 12.4 17.0 12.4 18.55 / 18.05Weight (without objektive) (kg) approx. 0.8 approx. 1.6 approx. 3.3 approx. 3.3Dynamic data:Typical deflection (rad) ± 0.393 ± 0.393 ± 0.393 ± 0.393Repeatability (RMS) (µrad) 2 2 2 2Max. Gaindrift ppm/K ¹ 15 15 15 15Max. Offsetdrift µrad/K ² 10 10 10 10Long-term drift (µrad) ¹, ² < 150 < 150 < 150 < 150Long-term drift with water tempering [W] [W2] (µrad) ¹, ²

- - < 100 < 100

Mirror material SI SI SI QUAcceleration time (ms) ≤ 0.23 ≤ 0.50 ≤ 0.19 ≤ 0.36

Ambient temperature +15°C to +35°CStorage temperature -10°C to +60°CHumidity ≤ 80 % non-condensingInterface signals Digital XY2-100 protocol

All trademarks are registered trademarks of their owner. All optical data refer to configuration examples and can vary substantially depending on the configuration of the FOCUSSHIFTER-CS and manufacturer of F-Theta.

Headquarters: RAYLASE AG Wessling, Germany Q +49 8153 88 98-0 [email protected]

Subsidiary USARAYLASE Laser Technology Inc. Newburyport, MA, USAQ +1 978 255-1672 [email protected]

Subsidiary ChinaRAYLASE Laser Technology (Shenzhen) Co.Shenzhen, ChinaQ +86 755 28 24-8533 [email protected]

June 2017. Information is subject to change without prior notice. v1.4

3-AXIS DEFLECTION UNITS FOR CHALLENGING INDUSTRIAL APPLICATIONS