div class=trans-pagebutton class=gotoPage data-page=1Page 1button div class=trans-imagea href=https:reader043fdocumentsusreader043viewer20220218225b198b2e7f8b9a19258cc878html5page1jpg target=_blank img data-url=document-ijrya-5-krf-r248nm-vff-talbe-1-ablation-and-deposition-conditions-dlchtmlpage=1 data-page=1 class=trans-thumb lazyload alt=Page 1: · IJrYA 5— KrF R=248nm v—ff Talbe 1 Ablation and deposition conditions DLC and CNx films 800m Torr 50—-200mTorr Jcrn2 4 Omm TorrJÈJF loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mM8Uw8AAh0BTZud3BwAAAAASUVORK5CYII= data-src=https:reader043fdocumentsusreader043viewer20220218225b198b2e7f8b9a19258cc878html5thumbnails1jpg width=140 height=200 adivdivdiv class=trans-pagebutton class=gotoPage data-page=2Page 2button div class=trans-imagea href=https:reader043fdocumentsusreader043viewer20220218225b198b2e7f8b9a19258cc878html5page2jpg target=_blank img data-url=document-ijrya-5-krf-r248nm-vff-talbe-1-ablation-and-deposition-conditions-dlchtmlpage=2 data-page=2 class=trans-thumb lazyload alt=Page 2: · IJrYA 5— KrF R=248nm v—ff Talbe 1 Ablation and deposition conditions DLC and CNx films 800m Torr 50—-200mTorr Jcrn2 4 Omm TorrJÈJF loading=lazy src=data:imagegifbase64iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAQAAAC1HAwCAAAAC0lEQVR42mM8Uw8AAh0BTZud3BwAAAAASUVORK5CYII= data-src=https:reader043fdocumentsusreader043viewer20220218225b198b2e7f8b9a19258cc878html5thumbnails2jpg width=140 height=200 adivdivdiv class=trans-pagebutton class=gotoPage data-page=3Page 3button div class=trans-imagea href=https:reader043fdocumentsusreader043viewer20220218225b198b2e7f8b9a19258cc878html5page3jpg target=_blank img data-url=document-ijrya-5-krf-r248nm-vff-talbe-1-ablation-and-deposition-conditions-dlchtmlpage=3 data-page=3 class=trans-thumb lazyload alt=Page 3: · IJrYA 5— KrF R=248nm v—ff Talbe 1 Ablation and deposition conditions DLC and CNx films 800m Torr 50—-200mTorr Jcrn2 4 Omm...