Post on 01-Jul-2019
World’s first MEMS ultrasonic time-of-flight sensorsMiniature high-performance range finding, presence detection and more
Dr. David HorsleyCTO
Chirp Microsystems, Inc.A TDK Group Company
Berkeley, CA, USANovember 14, 2018
Technologies & Products Press Conference 2018
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 2
Ultrasonic sensing today
● Measure distance by time-of-flight of an ultrasonic pulse
● Use multiple sensors to find object location (left, right, center…)
● Sense range to avoid objects and prevent collisions
● Detect human proximity and presence
Automotive • Automated guided vehicles • Robotics •Communication devices • Drones • Consumer robots
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 3
Ultrasonic sensors offer the best performance for range finding applications
Power consumption
Up to 500 times lowerpower consumption
Sensitivityto lighting
Range and accuracy not affected by ambient light or sunlight
Detect dark or transparent objects
Sense any color target and windows, mirrors
Range noise Up to 100 times lower noise
Field-of-view (FoV) Up to 5 times wider
Advantages of ultrasonic ToF sensors vs. infrared ToF sensors
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 4
The new Chirp ultrasonic ToF sensorSonar on a chip
Main features● Miniature size up to 1000 times smaller
than conventional solutions● Ultra-low power consumption (<15 µW)
up to 100 times lower than conventional solutions
● Measuring range of 1 cm to 500 cm● Very low noise range measurement
of <1 mmRMS
● Wide field-of-view (FoV) up to 180°● Integrated DSP chip for ultrasonic
signal processing ● I2C Interface
Ultrasound engine
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 5
MEMS ultrasonic ToF sensor specifications
Features & benefits● Range, proximity, presence
and gesture sensor in one● Low always-on power● High accuracy● Programmable operating range● Fast response time● Wide and customizable FoV
to customer requirements● Insensitive to ambient light
or color of objects
Specification CH-101 CH-201
Dimensions 3.5 mm x 3.5 mm x 1.25 mm
Operating range ≤1.2 m ≤5 m
Voltage 1.8 V
Interface I2C
Power@ 1 sample/s and max. range
12 µA 20 µA
Power @ 30 samples/s and max. range
110 µA 330 µA
Sample rate ≤100/s @ 1 m ≤30/s @ 5 m
FoV ≤180 °
Range noise 1 mmRMS @ 30 cm 0.2 mmRMS @ 1 m
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 6
SiP with wide range of programmable functionality
CH-101 and CH-201 are systems in package (SiP) with● Piezoelectric micromachined
ultrasonic transducer (PMUT) and
● Programmable system-on-chip (SoC) for all ultrasonic signal processing
PMUT
Ultrasonic pulse
Programmable firmware for many functionalities,such as range-finding, proximity sensing and presence detection
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 7
Easy to interface to microcontrollers
Features● CH-101 and CH-201
sensors feature an I2C interface and operate from a 1.8 V supply
● Multiple sensors can sharethe same I2C bus
● CH-101 and CH-201 are pin-compatible and have the same API
SDA (Master)SCL (Master)GPIOGPIOGPIO
GND
VDDMicrocontroller
SDASCL
PROGINTRESET_N
VSS
VDD
AVDD23
145
6
78CH-201
0.1µF
SDASCL
PROGINTRESET_N
VSS
VDD
AVDD23
145
6
78
0.1µF
2k2
2k2
10k
1.8V
1.8VCH-x01
Platform-independent C driver software helps customerswith embedded software development
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 8
CH-201 ultrasonic ToF sensor performance
+
Range and FoV can be optimized with customized housings serving as apertures
45°135°
20004000
60008000
1000012000
14000
0°180°
90°
Range measurement up to 5 m Field of view (FoV) with narrow FoV housing
5000
Ran
ge (m
m)
Target distance (mm)
100 samples at each distance (noise is too small too see)
4000
3000
2000
1000
1000 2000 3000 4000 5000
Range (mm) vs. Stage Distance
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 9
CH-201 range and range noise
Noise up to 100x lower than competing IR ToF sensors at 120 cm range
Range noise @120 cm Range noise vs. target range6
Ran
ge n
oise
(mm
)
Range (m)0
5
4
3
2
1
01 2 3 4 5 6
Corner reflector target
Wall target
±0.35 mm 1σ
120.3120.2120.1120.0 120.4 120.5
Target distance (cm)
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 10
Solutions from component to system level
Echo from target Transmit burst
Time of flight
• Piezoelectric micromachinedultrasonic transducer (PMUT)
• Ultrasound SoC
• Custom package
• Programmable SoC enables customized sensing
Application-specific software enables• Fast time to market• Design of solutions with
multiple Chirp sensors
On-chip sensing algorithms Complete system solutionsUnique sensor components
Technologies & Products Press Conference 2018 MEMS ultrasonic time-of-flight sensors © Chirp Microsystems A TDK Group Company 2018CC 11/18 11
6-DoF controller reference design
Cortex-M0MCU
InvenSenseIMU
Chirp CH-101
(1 or more)
Chirp CH-101
(1 or more)
Chirp CH-101
(1 or more)
2.4 GHz RF link
Apps processor
InvenSenseIMU
2.4 GHz RF link
Head-mounted display
Chirp embedded software
Hand-held controller
Features & Benefits● Provides 6-DoF controller
tracking based on sensor fusion● Fuses ultrasonic ToF with IMU
acceleration/rotation rate for low-latency, high accuracy tracking
● Mobile-ready (no base station required)
● Near zero computation load ● Very low power consumption● Works in any lighting condition
Chirp fusion engine
software
Chirp CH-101
(1 or more)
Chirp CH-101
(1 or more)
Chirp CH-101(up to 6)
Ultrasound
www.tdk-electronics.tdk.com