Post on 24-Feb-2016
description
Development of Ni-base Superalloys for MEMS ApplicationsKevin J. Hemker, Johns Hopkins University, DMR 0806753
MEMS micro-devices typically do not operate above 100°C because metallic MEMS materials like LIGA Ni suffer from poor thermal stability and have very poor elevated temperature properties.
Bulk Ni-base superalloys are employed in land and aero based turbines at 1,000°C because of their two-phase microstructure but cannot be shaped on the micro-scale.
This project has realized the development of MEMS Ni-base superalloys through development of three processing routes :
① LIGA based electrocodeposition of Ni with nanoscale Al powders
② Vapor phase aluminization of LIGA micro-structures
③ Direct sputtering of conventional Ni-base superalloys
② Superalloy Ni-Al specimens produced by vapor phase aluminization of LIGA Ni micro-components
③ Sputtered Inconel 718 nanocrystalline thin films
0
250
500
750
0 0.05 0.1 0.15 0.2 0.25
Ni-AlLIGA Ni
Eng
. Stre
ss (M
Pa)
Eng. Strain
18 at.% Al
0 at.% Al
JHU Personnel: Kevin Hemker (PI); Devin Burns (PhD); Alex Caffee (ug); Devin Cornish + Joshua Greenspan(HS)
KIT Personnel: Jarir Aktaa (co-PI); Klaus Bade (co-PI); Michael Teutsch (PhD)
Development of Ni-base Superalloys for MEMS ApplicationsKevin J. Hemker, Johns Hopkins University, DMR 0806753
Baltimore Polytechnic Students
Devin Cornish (2011) Joshua Greenspan (2012)
- Developed automated 3D surface tomography system with graduate student guidance
- Shown below presenting their results at Poly’s Ingenuity Mathematics & Science Symposium
Hopkins / KIT Exchange