Post on 05-Jan-2022
Silicon PhotoMultiplier Detection Solutions From SensL
sensL: light detection and measurement
P Hughes, DESY, 17th July ‘09
Talk Outline
• Introduction– Motivation for SPM– SensL
• Product range• Applications
• SPM Status – Technical Direction– Detector Performance (SensL)– SPM Manufacturing (Up Scaling)
• Outlook
2
3
Motivation
Vacuum Tube Diode
(Fleming)
1875 1900 1925
LightBulb(Edison)
LED (Holonyak)
CRT(Ferdinand
Braun)
Plasma tv(Bitzer/Gene Slottow)
Silicon Transistor(Texas Inst.)
ENIAC (17,468 Tubes)
CMOS chip (174,569 transistors)
PhotomultiplierTube (RCA)
1950 1975 2000
So
lid S
tate
Vac
uu
m T
ub
e
SPM
...is to provide a solid-state alternative to the vacuum tube based photomultiplier tube (PMT)...
SensL’s Mission
4
5
Core Competence
Photon Counting / Timing(DigitalAPD)
Silicon Photomultiplier(SPM)
Single Photon Counting(SPC)
Identical Core Technology
Multiple Configurations
6
Photon Counting
Single Photon Counting & Timing (Digital Mode)
PCDMini20um,100um & 1mm
Active Area
HRMTime27 Picosecond Timing Module
4 Channel
7
Silicon Photomultiplier (SPM)Solid-state Analog Detectors and Arrays
SPMMicro1mm & 3mm
Detectors
SPMArraysLarge Area
3-side & 4-side TileableSPMMiniHigh Performance
Sub-Systems
8
Linear Arrays - Timing
Cs-137Mn-54
Crystal (Unwrapped)
Detector SPM6035
- 1 x 256 Array
- 40um detector active area
- 50um pitch to give fill factor 80%
- Two 1 x 128 ROICS
• Chip on board wirebondpackaging
• FPGA interface board
- Applications in Imaging LIDAR, Microscopy and Spectroscopy
9
Nuclear Medicine
http://en.wikipedia.org/wiki/Positron_emission_tomography
198,000,000 microcells0.5m2 active area55,000 SPM Pixels
57,600 microcells1.44cm2 active area
10
Radiation Detection
• SPM combined with scintillation crystals
• Key advantages over PMT– Small form factor– Detection & Identification– Magnetic field immunity
– Cost effective– Low voltage operation (30V)– High uniformity of detectors– Ideal for portable systems
2008 IEEE Nuclear Symposium Record
11
Analytical Instruments
Ocular Vasculature of Mouse Antigen Interaction of T Cells & APCs
Human Colon Crypt Swallowtail Butterfly Interneurons
SPM provides a pathway to miniaturised high volume systems
High Energy Physics
GlueX Detector Lead GlassDetector
Superconducting Solenoid
Electron Beam from CEBAF
Coherent BremsstrahlungPhoton Beam
Tracking
TargetCerenkovCounter
Time ofFlight
BarrelCalorimeter
Note that tagger is80 m upstream ofdetector
Silicon PhotoMultiplier Detection Direction & Performance
sensL: light detection and measurement
P Hughes, DESY, 17th July ‘09
14
Technical Direction
Detector PerformanceØ Detector Core Performance Established (Continue driving forward key parameters)Ø Broadband detection response – Near UV, Vis and Near-IR
Manufacture (key)Ø Volume Manufacture – process control/uniformity Ø Large Area Arrays (Scale-up)
Environmental Conditions (Robust detection solution)Ø High Field Magnetic (10T)
Ø Radiation Hardness (DD, TID)
Better System Design Understanding Ø Readout Interface
Detector Performance
• SPS• Gain• PDE (Fill Factor)• Dark Rate/Crosstalk• SPM Timing
15
1mm2 and 9mm2 SPM20, 35, 50 & 100µm microcells
10 20 30 40 50 60 70 80 90 100 1100
200
400
600
800
1000
1200
1400
Microcell Size (um)
Num
ber
of M
icro
cells
per
mm
^2
Single Photoelectron Spectra
16
Single photoelectron peak distributions at 25◦C (unshaded) and -196◦C (shaded) at bias voltages of 31.5V and 27.5V respectively
Gain
17
q Linear Dependence of Vbr with temperature 18.3±2.5mV/◦Cq Stable linear device gain for a constant over-voltage from RT to -190◦C
PDE
18
PDE = QE * AIP * FF
10 20 30 40 50 60 70 80 90 100 11030%
40%
50%
60%
70%
80%
90%
Microcell Size (um)F
ill Fa
ctor
PDE & Crosstalk
19
PDE = ~15% @+2V
(35um microcell design)
20
Dark Rate 1mm, 20um Cell Device
SPM Timing Response
21
• Avalanche onset time is ~3ns• Recovery time set by internal RC
of SPM• Optimised output circuitry
provides ability to use picosecond timing of the photon counting detector inside the SPM
*Schaart, IEEE NSS, 2008
• Measurement of SPMArray with LYSO crystal and 22Na source
• Note this SPMArray contains 57k Single Photon Counting Detectors
SPM - Manufacture
• Leverage Heritage of Silicon Manufacturing• Improve Process Control
– Wafer to Wafer/ Lot to Lot – Uniformity
22
SPM8 – 3MM SPM A20H700 DIE PER WAFER X 8640 MICROCELLS = 6 MILLION PHOTON COUNTING DETECTORS
23
Inkless Wafer Sort
Inkless wafer map
Automatic die pick & sort
Wafer binning output
Vbr Uniformity
24
Tight distributions, across wafer, wafer to wafer, run to runBreakdown voltage independent of diode structure, size
25
Optical Uniformity
26
Scale-Up: Large Area
SPM Pixel
NxN SPM Submodule
MxM SPM Module
Example Shown:N = 5; M =3
• Scaled SPM array architecture –
e.g 0.5m2 (total area)/PET system
• Submodules equivalent to 1.5” PMT sizes
• 4 side buttable
• Electronics integration
Flex Arrays (Prototypes)
SPMArray– NxN SPM individually addressed
SPMPlus– NxN array summed output– Large Area detection
Flex Benefits• Low cost/Lightweight • Scalable • Simplified electrical
interconnections• Small Form Factor
PCT Patent
Glass Arrays for PET/MRI Ring
28
Utilises flip chip & glass substrates – 3 side tile
1 2 34
S1
S2S3
S4
50
60
70
80
90
100
110
120
Output (mVolts)
Pixel Position
0
1
2
3
4
5
6
7
8
9
10
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22
SPM Array #
% (S
TD
/ME
DIA
N)
Array Uniformity
29
Ceramic Arrays
30
NEW PRODUCT RELEASE!!!!
Outlook (SensL)
• SPM Technology is now starting to compete with PMT’s in many markets
– Performance Improvement will continue to be made– Baseline detector performance established for many application– Technology adoption is growing– New players are & will emerge
• PMT landscape has changed – new opportunities for SPM• Establish manufacturing credibility - needs greater visibility from
competition• More careful system level integration & understanding needed
as PMT legacy for system performance is often problematic
31
New Website
32THANK YOU!