Si-Based Transistor and Analog-Mixed- Signal Circuit ...

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Si-Based Transistor and Analog-Mixed-Si-Based Transistor and Analog-Mixed-Signal Circuit Scaling and the NaturalSignal Circuit Scaling and the Natural

Progression of Moore's Law to Si QuantumProgression of Moore's Law to Si QuantumComputing at the Atomic ScaleComputing at the Atomic Scale

Sorin VoinigescuUniversity of Toronto

Aarhus University, August 14, 2017

Growth in High Tech Sector

● Ubiquitous access

– Social media and augmented reality

– Entertainment (streaming media, VR and gaming)

● Control and coordination (Artificial Intelligence + IoT)

– Data mining

– Machine learning

– Autonomous navigation

– Ambient sensing2

What makes it possible?

● Higher data rate communications systems

– wireless and fibre-optics links

● Compute and storage capacity

● Sensors

But

– Moore's law is coming to an end...

– Ever increasing energy consumption....

3

Agenda

● State-of-the-art Si technology performanceState-of-the-art Si technology performance

● Si transistor HF performance scaling

● CMOS-based coupled quantum dot qubits

● Benchmark circuit scaling

● Conclusions

4

Applications

● mm-wave 5G @ 28 – 72 GHz => fT/f

MAX > 3f

0 = 215 GHz

● Automotive radar @ 76 – 81 GHz => fT/fMAX > 3f0 = 245 GHz

● 56-112 GBaud fiberoptic systems => fT/fMAX > 4fB = 225-450 GHz

All need thick dielectric/thick metal backend

All need very low phase noise

All need large output swing > 4Vpp differential

5

6

State of the Art Si Technology

Agenda

● State-of-the-art Si technology performance

● Si transistor HF performance scalingSi transistor HF performance scaling

● CMOS-based coupled quantum dot qubits

● Benchmark mm-wave AMS circuit scaling

● Conclusions

7

8

Higher fT,

higher fMAX

,

lower NFMIN

,

still the only efficient way to save power and improve

performance SIMULTANEOUSLY

Goldilocks Scaling

9

Atomistix Si FET Scaling Simulation

10

Interesting things

happen to bulk materials

in atomic-scale devices

11

Bandgap in thin [100] Si nanowire

Atomistix simulationsJ. Bateman, MASc Thesis 2014

12

Bandgap in Si nanowire as a function ofchannel direction

Atomistix simulationsH. Farooq, MASc Thesis 2015

Direct bandgap along [100] and [110]directions!

13

Atomistix: Short Channel Effects

• Ballistic transport (Ion

does not depend on L)

• Subthreshold Slope degradation at low L

14

Ideal DG(FinFET) Scaling

[S. Voinigescu et al, IEEE Proc. 2017]

15

gm Scaling: FDSOI vs. FiNFET

16

fT Scaling: SiGe HBT vs. FiNFET

fT/f

MAX= 500/700 GHz

[IHP IEDM 2016]

[M. Schroter et al, IEEE Proc. 2017]

[S. Voinigescu et al, IEEE Proc. 2017]

17

1nm MoS2 SWCNT FET

Desai et al., Science Oct. 2016

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On CMOS Scaling

• Atomistix shows Si MOSFET scalable to 2 nm

CMOS HF performance scaling uncertain due to

– Ballistic transport

– Bandgap increase

– Surface scattering

• BEOL kills intrinsic MOSFET performance

• HF circuit performance scaling already peaked at 28nm-40nm

Agenda

● State-of-the-art Si technology performance

● Si transistor HF performance scaling

● CMOS-based coupled quantum dot qubitsCMOS-based coupled quantum dot qubits

● Benchmark mm-wave AMS circuit scaling

● Conclusions

19

20

Coupled Quantum Dot Qubit

● 22nm, 12nm, 5nm FDSOI CMOS● Quantum dot (QD) under each top gate● Individual gate control of each QD● Potential barrier between dots● Back gate for entanglement (tunnel barrier) control

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Principle of operation

Information encoded in particle spin

Basis states

|↑> = |0>; |↓> = |1>

Superposition states

|Ψ> = a|↑> + b|↓>

a and b are complex numbers● a = cos(θ/2)● b = eiφsin(θ/2)● |a|2 + |b|2 =1● Only two real variables: φ, θ

Bloch sphere|↑>

|↓>

θ

φ

22

Qubit Gate Operations

● Spin Rotations ● Apply a μwave/mm-wave

voltage oscillation of fR for

pulse duration τS on QD gate

● Spin Swap● Apply a pulsed inter-dot

voltage (across the barrier)

Bloch sphere

|↑>

|↓>

θ

φ

H s(t )=J (t ) S⃗ L⋅S⃗ R

θ=2π f R τS

23

E-level splitting due to well coupling

Rabi frequency

[S. Voinigescu, IJE, February 1989]

f R=Δ E=1meV2πℏ

=241.47GHz

24

E-level splitting due to DC magnetic field

Zeeman effect

Em=57.87μ eV⋅m⋅B [T ]

f m=13.96GHz⋅m⋅B [T ]

m = 1,2...

25

Quantum Computing with Qubits

● N qubits = 2N complex amplitudes● Analog (microwave & mm-wave)

signals for spin manipulation andreadout

● Electron spin + electron energy● ΔE <0.1 meV => T< 0.1 K● Problems:

● Thermal noise ~kT● mm-wave frequency signals● Atomic scale fabrication

precision

Bloch sphere

|↑>

|↓>

θ

φ

26

Coupled QD Qubit Gate in 22nm FDSOI

● Multi-gate MOSFET structure = Series-stacked FDSOI cascode● Also similar to charge coupled devices● Both hole spin and electron spin qubit on same die

27

Coupled Quantum Dot Qubit

28

5 Coupled QD electron-spin Qubit

Similar to series-stacked

SOI cascode PAs and

antenna switches!

29

22nm FDSOI Qubit mm-Wave TestStructures

30

Qubit Spin Readout Circuit

IDS

= 20-40 μA, Cgd

, Cgs

= 20-80 aF, low gain, >100 GHz BW. Very difficult to measure!

31

TIA Readout Circuit

● Small size input stage needed● noise figure, gain and bandwidth are important design considerations

<WSA-2> 32

On CMOS Qubits

Quantum computing is NOT digital

Need energy deltas > 1 meV for > 10 K operation

Need sub-5nm dimensions in all directions

Need fR > 200 GHz and/or B > 10 T

Si QC needs low-noise mm-wave circuits and low-T operation

Si QC must be compatible with CMOS at 4 K or higher

Needs skilled mm-wave IC designers and measurements

Agenda

● State-of-the-art Si technology performance

● Si transistor HF performance scaling

● CMOS-based coupled quantum dot qubits

● Benchmark mm-wave AMS circuit scalingBenchmark mm-wave AMS circuit scaling

● Conclusions

33

AMS Benchmark Circuits

● Tuned

– LNA

– PA

– VCO

● Broadband

– TIA

– THA

– Linear Large-Swing Driver

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Stacked CMOS inverter: 28nmFDSOI vs. 45nm PDSOI

S.Shopov et al., IEEE JSSC, July 2016

36

140GHz CS n-MOSFET PAE, Pout

28nm FDSOI vs. 45nm PDSOI

S.P. Voinigescu et al., IEEE Proc. 2017

SiGe HBT Scaling: NFMIN

, MAG

[M. Schroeter et al. IEEE Proc. 2017]

SiGe HBT 220GHz PA in Node 5

[M. Schroeter et al. IEEE Proc. June 2017]

SiGe HBT PA & VCO Scaling

[M. Schroeter et al. IEEE Proc. June 2017]

• Pout = 7.2 dBm at 240 GHz

• PN10 MHz = -104 dBc/Hz

• PDC = 386 mW (w/o divider)

• PDC = 566 mW (w/ divider)

• DC-to-RF eff iciency is 1.3%

Funding by Robert Bosch GmbH

[S. Shopov, CSICS 2015, JSSC Oct. 2016]

240GHz Synthesizer

220-270GHz Doubler Design

Measurement Results Across Dies

43

Time-Interleaved 200GS/s Receiver

44

CMOS TIA

[S. Shopov et al., JSSC July 2016]

45

CMOS TIA: 28nm FDSOI vs. 45nm PDSOI

[S. Shopov et al., JSSC July 2016]

46

92GHz Linear TIA

[K. Vasilokopoulos et al. BCTM 2015]

Gain: 13 dB

BW3dB: 92 GHz

NF < = 6 dB to 88GHz

Group delay: 6 ±1.5 ps

Vcc: 2.3 V

Power: 48 mW

400 fJ/bit

47

S-params and Noise Figure

Record low-noise

in Si: NF <= 6dB

48

Linearity and Eye Diagrams

120Gbps output

96Gbps output

P1dB

: -9 dBm

Equivalent to 4 mApp

Up to 120 Gb/s (PRBS-31)

49

TIA Scaling

50

108-GS/s Quasi-CML THA

55-nm SiGe BiCMOS

[K. Vasilakopoulos et al., IMS 2016]

Vcc: 2.5 V & 1.8V

Power: 87 mW

BW3dB: 40 GHz

Up to 108 GS/s

THD: -49dB @ 90 GS/s

IIP3: 8dBm @ 90 GS/s

51

THA Waveform Measurements

8 GHz @ 40GS/s 12 GHz @ 60GS/s

18 GHz @ 90GS/s 12 GHz @ 108GS/s

52

THA Scaling

53

4x62GHz 25% Duty-Cycle PhaseGenerator

N.Weiss, IEEE CSICS 2017

54

4x54GHz 25% duty-cycle phase generator

160GS/s ADC Front End in 22nm FDSOI

160GS/s ADC Front End in 22nm FDSOI

57

● MOSFETs theoretically scalable to 2-3 nm gate length

● fMAX

, NFMIN

, PAE, saturate/degrade in sub 28-nm CMOS

● Unlike CMOS, HBT mm-wave performance STILL scales

● Double-gate MOSFET qubit at >10 K at 5nm and below

● THz spin manipulation and readout circuits needed

• 200Gb/s radio feasible at 240 GHz

• 250GHz bandwidth TIA with < 4dB noise figure

• 400GS/s ADCs and DACs feasible

Conclusions

58

• Graduate students:

– Stefan Shopov, James Bateman, Hassan Farooq,

James Hoffman, Kostas Vasilakopoulos, Robert Baker,

Sadegh Dadash, Naftali Weiss, Shai Bonen, Utku

Alakusu, Alireza Zandieh

• STMicroelectronics, Global Foundries, CMC

• NSERC, DARPA, Ciena, Robert Bosch GmbH, Finisar

Acknowledgments

59

Quadrature 62GHz Outputs

Linear 120GBaud 5Vpp DA

61

120Gb/s, 4.8Vpp

NRZ Eye Diagrams [R. Baker et al. IMS 2017]