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Safety Data Sheet KDS0012E

Revision Date: Update: 08.08.2016 06.18.2019

1: Identification of the hazardous chemical and the supplier Product identifier Product name : ULVOIL D-31

Recommended use of the chemical and restrictions on use Intended use : Fluids,Modified silicone fluids Diffusion pump oil Restrictions on use : Industeial use only

Manufacturer or supplier’s details Company : ULVAC,Inc. Address : 2500 Hagisono, Chigasaki, Kanagawa,

253-8543, JAPAN Telephone : +81-467-89-2264 Emergency telephone number : +81-467-89-2195 Telefax : +81-467-57-0737 E-mail : ulvaccmp_sds@ml.ulvac.com

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