NEW MICROWAVE NEW MICROWAVE PLASMA SOURCE IN PLASMA SOURCE IN WATERWATER

A.M. Barkhudarov, I.A. Kossyi, M.A. Misakyan

Prokhorov General Physics Institute of RAS, Moscow, Russia

““Resonance” type plasma Resonance” type plasma sourcesource

Fig.1. Schematic of coaxial microwave plasmatron

1-magnetron; 2-outer electrode; 3-quartz tube; 4-gas-discharge near-the-surface plasma layer; 5-inner electrode – rod; 6-wall of reactor chamber

N.K.Berezhetskaya, V.A.Kop’ev, I.A.Kossyi M.A.Misakyan, I.M.Taktakishvili,S.Temchin,and Y.D.Lee Eur.Phys.J.Appl.Phys. 42,327–337(2008

1 – magnetron2 – magnetic loop3 – coaxial outer electrode4 – nozzle;5 – plasma torch6 – inner electrode 7 – working gas8 – rectangular cavity9 – copper rods (basket)

Microwave torch scheme

Influence of the outer electrode

length on the form and type

of the microwave

torch

MW Plasma sources for MW Plasma sources for several applications several applications

Scheme of the “Self-Clear up” Scheme of the “Self-Clear up” phenomenon for phenomenon for

V.Yu. Knyazev, I.A.Kossyi, N.i.Malikh, E.S.Yampolskii ZTP ( Russian) 2003, V.73, N.11

PLASMA PLASMA SOURCE SOURCE DIAGRAMDIAGRAM

1-Organic glass cylindrical tube, 2-end flanges, 3-magnetron (N=850 W, f=2.45 GHz), 4-inner electrode, 5-outer electrode, 6-quartz tube around the inner electrode, 7-liquid (water),8-gas inlet/outlet, 9-gas babbles, 10-plasma jet, 11- water inlet/outlet.

MW Plasma source working MW Plasma source working in water in water

Plasma source emission Plasma source emission spectrum spectrum

300 350 400 450 500 550 600 650 700 750 800 850

0

20000

40000

60000

Inte

nsity

(a.

u)

Wavelength (nm)

Ar

77

2,3

nm

A

r 7

63

,5 n

m

Na

58

8,9

nm

Plasma source emission Plasma source emission spectrumspectrum

400 600 8000

20000

40000

60000

Inte

nsity (

a.u

.)

Wavelength (nm)

Thank you for your Thank you for your attention.attention.