Post on 15-Jun-2016
Vacuum News
The FSU 010 programmable freeze substitution unit from Balzers
features a newly developed method of SEM specimen preparation, in
contrast to conventional methods of dehydration and chemical
fixation.
In contrast to conventional methods of dehydration and chemical
fixation, specimens are first freeze fixed by well known fast freezing
methods. Dehydration and substitution, using acetone, methanol
etc., take place in three separate stages, starting at approximately -90°C
and progressing with each stage to -3O’C.
The temperature and duration of each freezing step (O-999 h) can
be pre-programmed, and on completion the frozen tissues are fixed
with Lowicryl. Subsequent uv polymerisation, at low and room
temperature is also possible with this unit.
Additional features include an LCD display panel for the different
process temperatures and a standard specimen holder for substitution
and uv polymerisation.
More information can be obtained from :
Alan Bussell
Balzers High Vacuum Ltd
Northbridge Road, Berkhamsted, Herts HP4 1 EN
Tel 04427 2181
Telex 82209 VACUUM G
Computerised gas analysis from Bakers advances IC quality control
An inclusion piercing system, developed by Balzers from known
computer controlled mass spectrometry techniques, represents a
significant step in fast, accurate quality control for integrated circuit
production.
Based around a Balzers QMG 511 quadrupole mass spectrometer,
the GIA707 system is designed for the failure analysis of hermetically
sealed IC packages and the identification of minute gas inclusions,
or bubbles, often found in IC packaging materials, such as minerals,
plastics and glass.
The system is an adaption of the well established method of
computer aided gas analysis of sealed electronic devices in general. As
well as the quadrupole it includes a number of other items from
Balzers’ mass spectrometry equipment range, supported by an
interactive software package, that can now apply the same principle
to identify gas inclusions in materials down to volumes of lo-” atm I
and below.
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Close up of the G/A707 system viewing chamber, with the sealed
piercing ram visible through the sight glass. The Balzers G/A707 is
designed for the failure analysis of hermetically sealed IC packages
and the identification of gas inclusions often found in IC packaging
materials.
It is currently estimated that a substantial percentage of integrated
circuit failures are related to contamination problems in the package
caused by moisture, leaks and gases held in inclusions.
It is the availability of the computer software packages used in the
new Balzers system that now offers the qualitative and quantitative gas
analysis necessary to provide rapid identification of the exact cause,
thereby enabling much tighter quality control.
The GIA707 is comprised of four basic units, namely the quadrupole
mass spectrometer, a sample chamber with a bellows-sealed piercing
device, a calibration unit (optional), and a data system with printer
and software package.
In practise, samples are introduced to a small vacuum chamber,
which is equilibrated at a predetermined temperature and then pumped
down to a suitable background pressure. When this is reached a
valve is opened to the quadrupole mass spectrometer and the
background contributions are determined. The sample is pierced in
situ and the escaping gas analysed.
To aid practical operation Balzers has arranged the system as a well
planned work station, with positions allocated for optional units, such
as a video terminal, and leaving sufficient space for calibration gas
bottles.
More information can be obtained from :
Neil Henderson
Balzers High Vacuum Ltd
Northbridge Road, Berkhamsted, Herts HP4 1 EN Tel 04427 2181
Telex 82209 VACUUM G
Fax 04427 7172 7