div class=trans-pagebuttonPage 1button div class=trans-image amp-img class=trans-thumb alt=Page 1: A9R9738 - Harvard UniversityNEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G Gordon Harvard University 12 Oxford Street Cambridge MA 02138 USA ABSTRACT CVD processes src=https:reader034fdocumentsusreader034viewer20220502145f5fe36d59b5897f8d6e3e33html5thumbnails1jpg width=142 height=106 layout=responsive amp-img divdivdiv class=trans-pagebuttonPage 2button div class=trans-image amp-img class=trans-thumb alt=Page 2: A9R9738 - Harvard UniversityNEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G Gordon Harvard University 12 Oxford Street Cambridge MA 02138 USA ABSTRACT CVD processes src=https:reader034fdocumentsusreader034viewer20220502145f5fe36d59b5897f8d6e3e33html5thumbnails2jpg width=142 height=106 layout=responsive amp-img divdivdiv class=trans-pagebuttonPage 3button div class=trans-image amp-img class=trans-thumb alt=Page 3: A9R9738 - Harvard UniversityNEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G Gordon Harvard University 12 Oxford Street Cambridge MA 02138 USA ABSTRACT CVD processes src=https:reader034fdocumentsusreader034viewer20220502145f5fe36d59b5897f8d6e3e33html5thumbnails3jpg width=142 height=106 layout=responsive amp-img divdivdiv class=trans-pagebuttonPage 4button div class=trans-image amp-img class=trans-thumb alt=Page 4: A9R9738 - Harvard UniversityNEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G Gordon Harvard University 12 Oxford Street Cambridge MA 02138 USA ABSTRACT CVD processes src=https:reader034fdocumentsusreader034viewer20220502145f5fe36d59b5897f8d6e3e33html5thumbnails4jpg width=142 height=106 layout=responsive amp-img divdivdiv class=trans-pagebuttonPage 5button div class=trans-image amp-img class=trans-thumb alt=Page 5: A9R9738 - Harvard UniversityNEW LIQUID PRECURSORS FOR CVD OF METAL-CONTANING MATERIALS Roy G Gordon Harvard University 12 Oxford Street Cambridge MA 02138 USA...