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An AVT-105 Lecture Series No. 235 organised by the

Applied Vehicle Technology Panel

MEMS Aerospace ApplicationsLes Applications Aerospatiales des

MEMS

Ayman El-FatatryBAE SYSTEMS

Advanced Technology Centre, UK

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Micro Opto-Electro-Mechanical Systems

MOEMS

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Lecture Outline

• Introduction to the Series

• The Presenter

• Microsystems (Definitions)

• Applications

• The BRAMMS Report

• Principals & Configurations

• COTS & Products

• Optical Systems

• Optical switching

• Displays

• Markets and Opportunities

• Trends and RoadMaps

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Aims of the Lecture Series

• Introduction to MST/MEMS• Focus on specific applications & devices

• COTS MEMS• Programmes and Initiatives

• Discussion• Support

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Acknowledgements

• BAE SYSTEMS

• MoD

• WEAG

• NEXUS

• NATO

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MEMS / MST

Definitions !

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A plethora of Acronyms !

• MST: European for Micro-System Technology (sensing + processing + actuation)

• MEMS: American for Micro-Electro-Mechanical-Systems (electrical + mechanical + IC compatible processing)

• Micromachines: Japanese for miniaturised factories / robots

• Also: MOEMS / MEMtronics / ASIMS and μSystems

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Microelectronics = planar

Microengineering = 3-d sculpting

Differences between Micro-Electronics & Micro-Engineering

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1000

Feature Sizemicrons

BOTTOM UP

0.1

0.001

Micro, Nano and MNTMicro, Nano and MNT

- - PositioningPositioning - -

10

100

1

2000 2005 2010 2015

Microsystems TechnologyMicrosystems Technology

MicroelectronicsMicroelectronics / NanoelectronicsNanoelectronicsMicroelectronicsMicroelectronics / NanoelectronicsNanoelectronics

Molecular ScienceMolecular Science &&TechnologyTechnology

Molecular ScienceMolecular Science &&TechnologyTechnology

Micro-Nano TechnologyMicro-Nano TechnologyMicro-Nano TechnologyMicro-Nano Technology

TOP DOWN

0.01NanoNano TechnologyTechnology

Courtesy RALCourtesy RAL

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Microtechnology is the fabrication of millimetre sized devices with micron and nano-sized rules by bulk deposition and patterning millions of atoms in any part.

Micro-Nano-Technologyis the use of the properties of micro and or nano-technology in micro and macro applications for further shrinking, integration and miniaturisation of sensing & actuating functions and for microsystems.

Nano-Technology (Molecular T)is the building up of structures or materials in an atom-for-atom specific way; every atom counts Theoretically anything could be built

Micro, Nano and MNTMicro, Nano and MNT

- - What is whatWhat is what - -

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Advanced fabrication techniques• Development of etching and bonding techniques• Introduction of new equipment

Facilitating the next steps in MEMS technologyto provide improved design flexibility for future devices

These proposed structures will lead to new or improved devices, eg miniature pneumaticsthrusters, fuzing elements, actuators, motors etcPresent 2 1/2 D deep etch is

limited to ‘extrusion’ in 3rd dimension

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Advanced fabrication progressSome first attempts at profile control

Isotropic etch

Sequentiallithography

Deep reactive ion etch

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Nanotechnology - (yet another) Definition“A process for manipulating smallest natural structures (atoms & molecules) where Quantum mechanics rules.”

TOP DOWN MICRO-ENGINEERING

BOTTOM UP NANO-ENGINEERING

From micro

to

Nano

lithography

Molecular self-assembly

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Smaller sizeLighterCheaperLower powerHigher reliabilityIncreased levels of integration(on board electronics, self test)Multi-functional (accel, yaw, temp and pressure)

Potential Advantages of Micro-Engineered Devices

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The BRAMMS Project

A study of MEMS and Defence Applications

Western European Union (WEU)Western European Armaments Organisation (WEAO)

Research Cell (WRC)

B.R.A.M.M.S.B.R.A.M.M.S.

BBroad RRequirements for AAdvanced MMilitary

MMicro-SSystems

A collaborative study for RTP 2.30

Partners

UK :BAE SYSTEMSSmiths Industries AerospaceCLRC - RAL

FR :Thales (Sextant Avionique)Thales (Thomson-CSF Optronique)CEA-Leti

NL :TNO-FEL

I :Alenia DifesaAlenia Radar Systems

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Military MEMS/MST ; Main Military MEMS/MST ; Main ApplicationsApplications

LAND SEA AIR SPACE

•Smart & Competent Munitions.•Gun Launched Munitions•Communication Systems•Soldier / Combatant Equipment•Surveillance Systems

•Torpedo Control•Communication Systems•Platform Stabilisation& Control Systems

•Aircraft PlatformControl Systems•Avionics & FlightControl•Equipment Monitoring& Failure Prediction•Communication Systems•Combat Systems

•Guidance &Control•CommunicationSystems

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MOEMS Applications

Principle Defence ApplicationsSwitches For aerospace comms networks

Displays Head up displays, vehicle displays

Adaptive optics Beam optimisation

Shutter arrays Protection, imagers and eyes

Tunable filters Demodulators in Health monitoring systems

Smart apertures Multifunctional vehicle apertures

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Objectives of the NEXUS Association

• To promote the uptake of microsystemstechnology, and nanotechnology “MNT” in support of European industry

• To provide opportunities for professional networking

• To generate and disseminate up-to-date marketing, technical, and emerging technology information.

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WORLDWIDE MEMBERSHIP(Who’s who and regular participants)

82 954 208

52

6

4

Today ’s total = 1306

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ACTIVITIES

• Task Forces

Priority topics within NEXUS are dealt with by the following Task Forces.

Market Analysis Aimed at establishing and predicting market size for existing and new applications. New report to be published in Mar ’02 entitled “NEXUS MST Market Analysis 2000-2005”

Roadmap Aimed at predicting technological and application trends. Updated Roadmap will be published in Q4 02

Long-term view Aimed at predicting trends in the period 2010-2020, including the enabling effects of nano-technologues. Review to be published in Apr ‘02

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The total MST market 2000-2005, compared to the results of the first market analysis

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MOEMS Applications

Principle Commercial ApplicationsSwitches For telecommunication routeing

Displays Head up displays, vehicle displays

Shutter arrays Switching

Tunable filters WDM / Broadband systems

Waveguides Biomedical / diagnostics

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Evolution of optical systems & related MST/ MEMS technologies

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Nilometer !Optical measurements